DE2937431A1 - Einrichtung zur messwerterfassung an prueflingen - Google Patents

Einrichtung zur messwerterfassung an prueflingen

Info

Publication number
DE2937431A1
DE2937431A1 DE19792937431 DE2937431A DE2937431A1 DE 2937431 A1 DE2937431 A1 DE 2937431A1 DE 19792937431 DE19792937431 DE 19792937431 DE 2937431 A DE2937431 A DE 2937431A DE 2937431 A1 DE2937431 A1 DE 2937431A1
Authority
DE
Germany
Prior art keywords
vibration
acceleration sensor
signal
button
stage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE19792937431
Other languages
German (de)
English (en)
Other versions
DE2937431C2 (de
Inventor
Rainer Dr. 6333 Braunfels Fritsche
Hans-Dieter 6331 Werdorf Jacoby
Erich 6331 Hüttenberg Schuster
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leica Microsystems Holdings GmbH
Original Assignee
Ernst Leitz Wetzlar GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ernst Leitz Wetzlar GmbH filed Critical Ernst Leitz Wetzlar GmbH
Priority to DE2937431A priority Critical patent/DE2937431C2/de
Priority to EP80104013A priority patent/EP0025485B1/de
Priority to JP12703480A priority patent/JPS56103326A/ja
Publication of DE2937431A1 publication Critical patent/DE2937431A1/de
Priority to US06/418,048 priority patent/US4455755A/en
Application granted granted Critical
Publication of DE2937431C2 publication Critical patent/DE2937431C2/de
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/004—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points
    • G01B7/008—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points using coordinate measuring machines
    • G01B7/012—Contact-making feeler heads therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
    • G01B21/045—Correction of measurements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B3/00—Measuring instruments characterised by the use of mechanical techniques
    • G01B3/002—Details
    • G01B3/008—Arrangements for controlling the measuring force
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/093—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by photoelectric pick-up

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)
DE2937431A 1979-09-15 1979-09-15 Einrichtung zur Meßwerterfassung an Prüflingen Expired DE2937431C2 (de)

Priority Applications (4)

Application Number Priority Date Filing Date Title
DE2937431A DE2937431C2 (de) 1979-09-15 1979-09-15 Einrichtung zur Meßwerterfassung an Prüflingen
EP80104013A EP0025485B1 (de) 1979-09-15 1980-07-11 Einrichtung zur Messwerterfassung an Prüflingen
JP12703480A JPS56103326A (en) 1979-09-15 1980-09-12 Measured value catching device for object to be tested
US06/418,048 US4455755A (en) 1979-09-15 1982-09-14 Apparatus for sensing test values at test samples

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2937431A DE2937431C2 (de) 1979-09-15 1979-09-15 Einrichtung zur Meßwerterfassung an Prüflingen

Publications (2)

Publication Number Publication Date
DE2937431A1 true DE2937431A1 (de) 1981-04-02
DE2937431C2 DE2937431C2 (de) 1987-02-05

Family

ID=6081008

Family Applications (1)

Application Number Title Priority Date Filing Date
DE2937431A Expired DE2937431C2 (de) 1979-09-15 1979-09-15 Einrichtung zur Meßwerterfassung an Prüflingen

Country Status (4)

Country Link
US (1) US4455755A (US20020193084A1-20021219-M00002.png)
EP (1) EP0025485B1 (US20020193084A1-20021219-M00002.png)
JP (1) JPS56103326A (US20020193084A1-20021219-M00002.png)
DE (1) DE2937431C2 (US20020193084A1-20021219-M00002.png)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2947394A1 (de) * 1979-11-24 1981-05-27 Ernst Leitz Wetzlar Gmbh, 6330 Wetzlar Einrichtung zur messwerterfassung an prueflingen
DE3342403A1 (de) * 1983-11-24 1985-07-18 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., 8000 München Sensoranordnung zum erfassen der lage von gegenstaenden, insbesondere der drehlage von um eine achse drehbaren teilen
DE102015209193A1 (de) * 2015-05-20 2016-11-24 Carl Zeiss Industrielle Messtechnik Gmbh Verfahren zur Erfassung dynamischer Schwingungen eines Rauheitssensors, Verfahren zur Vermessung der Rauheit einer Werkstückoberfläche, Computerprogrammprodukt sowie Messgerät eingerichtet zur Durchführung der Verfahren.
US9982987B2 (en) 2015-02-25 2018-05-29 Carl Zeiss Industrielle Messtechnik Gmbh Method for determining measurement conditions of a roughness sensor, method for measuring a roughness of a workpiece surface, computer program product, and measuring device designed to perform the methods

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2045437B (en) * 1979-03-30 1984-02-08 Renishaw Electrical Ltd Coordinate measuring machine
DE3340311C2 (de) * 1983-11-08 1985-12-12 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Tast- und/oder Meßeinrichtung
US4643622A (en) * 1984-04-26 1987-02-17 Moore Special Tool Co., Inc. Automatic C-axis feedrate control for machine tools
JPS6133845A (ja) * 1984-07-27 1986-02-17 Fanuc Ltd 任意方向倣い制御装置
GB8431746D0 (en) * 1984-12-17 1985-01-30 Renishaw Plc Contact-sensing probe
JPS61131608U (US20020193084A1-20021219-M00002.png) * 1985-02-06 1986-08-16
DE3527063C1 (de) * 1985-07-27 1986-01-30 Fa. Carl Zeiss, 7920 Heidenheim Verfahren und Vorrichtung zum Schutz eines beweglichen,langgestreckten Maschinenteils
GB8605324D0 (en) * 1986-03-04 1986-04-09 Rank Taylor Hobson Ltd Metrological apparatus
DE3788360T2 (de) * 1986-09-03 1994-03-17 Renishaw Plc Signalverarbeitung für Berührungstastkopf.
GB8713715D0 (en) * 1987-06-11 1987-07-15 Renishaw Plc Workpiece inspection method
DE3725207A1 (de) * 1987-07-30 1989-02-09 Zeiss Carl Fa Tastkopf fuer koordinatenmessgeraete
DE3725205A1 (de) * 1987-07-30 1989-02-09 Zeiss Carl Fa Tastkopf fuer koordinatenmessgeraete
DE3801893A1 (de) * 1988-01-23 1989-02-16 Daimler Benz Ag Programmsteuerbares selbsttaetig messendes geraet
WO1989008817A1 (en) * 1988-03-10 1989-09-21 Nawsir Inc. Contact sensing system
US4924715A (en) * 1988-03-10 1990-05-15 Nawsir Inc. Contact sensing system
DE3920716C1 (US20020193084A1-20021219-M00002.png) * 1989-06-24 1990-11-29 Wild Leitz Gmbh, 6330 Wetzlar, De
DE4204602A1 (de) * 1992-02-15 1993-08-19 Zeiss Carl Fa Verfahren zur koordinatenmessung an werkstuecken
DE69323289T3 (de) * 1992-12-24 2003-04-24 Renishaw Plc, Wotton-Under-Edge Tastsonde und Signalverarbeitungsschaltung dafür
GB9305687D0 (en) * 1993-03-19 1993-05-05 Renishaw Metrology Ltd A signal processing for trigger probe
GB9415338D0 (en) * 1994-07-29 1994-09-21 Renishaw Plc Trigger probe circuit
DE19525592A1 (de) * 1995-07-13 1997-01-16 Zeiss Carl Fa Verfahren zur Koordinatenmessung an Werkstücken
US5832416A (en) * 1995-09-01 1998-11-03 Brown & Sharpe Manufacturing Company Calibration system for coordinate measuring machine
GB0308149D0 (en) * 2003-04-09 2003-05-14 Renishaw Plc Probe for sensing the position of an object
DE102018209136A1 (de) * 2018-06-08 2019-12-12 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung und Verfahren zum Betreiben einer Positionsmesseinrichtung
JP6788207B2 (ja) * 2019-04-16 2020-11-25 株式会社東京精密 変位検出器、表面性状測定機、及び真円度測定機

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2820813A1 (de) * 1978-05-12 1979-11-15 Leitz Ernst Gmbh Verfahren und einrichtung zur messwerterfassung an prueflingen
DE2841548A1 (de) * 1978-09-23 1980-04-03 Leitz Ernst Gmbh Verfahren und einrichtung zur messwerterfassung an prueflingen

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3164909A (en) * 1959-01-14 1965-01-12 Gen Electric Automatic gauging system
CH516789A (fr) * 1969-12-09 1971-12-15 D Assortiments Reunies Succurs Dispositif de transmission du mouvement d'un palpeur à un organe de lecture
GB1551218A (en) * 1975-05-13 1979-08-22 Rolls Royce Probe for use in displacement measuring apparatus
GB1551217A (en) * 1975-05-13 1979-08-22 Renishaw Electrical Ltd Displacement measuring apparatus
FR2317631A1 (fr) * 1975-07-09 1977-02-04 Bendix Corp Procede et instrument pour determiner la distance entre deux points d'un objet
CH599534A5 (en) * 1975-10-23 1978-05-31 Tesa Sa Electrical feeler probe system
US4136458A (en) * 1976-10-01 1979-01-30 The Bendix Corporation Bi-axial probe
DE2712181C3 (de) * 1977-03-19 1981-01-22 Fa. Carl Zeiss, 7920 Heidenheim Tastsystem
CH628137A5 (fr) * 1977-09-27 1982-02-15 Meseltron Sa Procede de mesure a l'aide d'une tete de mesure d'une machine a mesurer et tete de mesure pour la mise en oeuvre de ce procede.
GB2006435B (en) * 1977-10-22 1982-09-22 Renishaw Electrical Ltd Contact-sensing probe
FR2408813A1 (fr) * 1977-11-10 1979-06-08 Sagem Perfectionnements aux procedes et dispositifs de palpage a contact, notamment pour machines a mesurer

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2820813A1 (de) * 1978-05-12 1979-11-15 Leitz Ernst Gmbh Verfahren und einrichtung zur messwerterfassung an prueflingen
DE2841548A1 (de) * 1978-09-23 1980-04-03 Leitz Ernst Gmbh Verfahren und einrichtung zur messwerterfassung an prueflingen

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2947394A1 (de) * 1979-11-24 1981-05-27 Ernst Leitz Wetzlar Gmbh, 6330 Wetzlar Einrichtung zur messwerterfassung an prueflingen
DE3342403A1 (de) * 1983-11-24 1985-07-18 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., 8000 München Sensoranordnung zum erfassen der lage von gegenstaenden, insbesondere der drehlage von um eine achse drehbaren teilen
US9982987B2 (en) 2015-02-25 2018-05-29 Carl Zeiss Industrielle Messtechnik Gmbh Method for determining measurement conditions of a roughness sensor, method for measuring a roughness of a workpiece surface, computer program product, and measuring device designed to perform the methods
DE102015209193A1 (de) * 2015-05-20 2016-11-24 Carl Zeiss Industrielle Messtechnik Gmbh Verfahren zur Erfassung dynamischer Schwingungen eines Rauheitssensors, Verfahren zur Vermessung der Rauheit einer Werkstückoberfläche, Computerprogrammprodukt sowie Messgerät eingerichtet zur Durchführung der Verfahren.
US10837752B2 (en) 2015-05-20 2020-11-17 Carl Zeiss Industrielle Messtechnik Gmbh Method for capturing dynamic vibrations of a roughness sensor, method for measuring a roughness of a workpiece surface, computer program product and measuring device configured to carry out the methods

Also Published As

Publication number Publication date
US4455755A (en) 1984-06-26
EP0025485B1 (de) 1983-09-07
JPH0152682B2 (US20020193084A1-20021219-M00002.png) 1989-11-09
DE2937431C2 (de) 1987-02-05
JPS56103326A (en) 1981-08-18
EP0025485A1 (de) 1981-03-25

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Legal Events

Date Code Title Description
8162 Independent application
8110 Request for examination paragraph 44
8125 Change of the main classification

Ipc: G01B 21/04

D2 Grant after examination
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: WILD LEITZ GMBH, 6330 WETZLAR, DE

8327 Change in the person/name/address of the patent owner

Owner name: LEICA INDUSTRIEVERWALTUNG GMBH, 6330 WETZLAR, DE

8339 Ceased/non-payment of the annual fee