DE2933394A1 - Gasempfindliche vorrichtung und verfahren zu deren herstellung - Google Patents

Gasempfindliche vorrichtung und verfahren zu deren herstellung

Info

Publication number
DE2933394A1
DE2933394A1 DE2933394A DE2933394A DE2933394A1 DE 2933394 A1 DE2933394 A1 DE 2933394A1 DE 2933394 A DE2933394 A DE 2933394A DE 2933394 A DE2933394 A DE 2933394A DE 2933394 A1 DE2933394 A1 DE 2933394A1
Authority
DE
Germany
Prior art keywords
gas
production
sensitive device
sensitive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE2933394A
Other languages
English (en)
Other versions
DE2933394C2 (de
Inventor
Atsushi Abe
Hisahito Ogawa
Masahiro Nishikawa
Satoshi Sekido
Shigeru Hayakawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP53101100A external-priority patent/JPS5942826B2/ja
Priority claimed from JP53101101A external-priority patent/JPS5840694B2/ja
Priority claimed from JP10302678A external-priority patent/JPS5529758A/ja
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Publication of DE2933394A1 publication Critical patent/DE2933394A1/de
Application granted granted Critical
Publication of DE2933394C2 publication Critical patent/DE2933394C2/de
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
DE2933394A 1978-08-18 1979-08-17 Gasdetektor und Verfahren zu seiner Herstellung Expired DE2933394C2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP53101100A JPS5942826B2 (ja) 1978-08-18 1978-08-18 ガス検知装置
JP53101101A JPS5840694B2 (ja) 1978-08-18 1978-08-18 ガス・湿度センサの製造方法
JP10302678A JPS5529758A (en) 1978-08-23 1978-08-23 Detector employing extremely-fine corpuscule resist film

Publications (2)

Publication Number Publication Date
DE2933394A1 true DE2933394A1 (de) 1980-03-06
DE2933394C2 DE2933394C2 (de) 1982-05-13

Family

ID=27309389

Family Applications (2)

Application Number Title Priority Date Filing Date
DE2933394A Expired DE2933394C2 (de) 1978-08-18 1979-08-17 Gasdetektor und Verfahren zu seiner Herstellung
DE2953771A Expired DE2953771C1 (de) 1978-08-18 1979-08-17 Gasdetektor

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE2953771A Expired DE2953771C1 (de) 1978-08-18 1979-08-17 Gasdetektor

Country Status (4)

Country Link
US (2) US4313338A (de)
CA (1) CA1123052A (de)
DE (2) DE2933394C2 (de)
GB (1) GB2029583B (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3634132A1 (de) * 1985-10-08 1987-04-16 Sharp Kk Sensoreinrichtung

Families Citing this family (63)

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EP0038078B1 (de) * 1980-04-16 1985-03-13 Kabushiki Kaisha Kirk Gas Detektor
DE3032476A1 (de) * 1980-08-28 1982-04-01 Siemens AG, 1000 Berlin und 8000 München Selektiver duennschicht-gassensor hoher empfindlichkeit und stabilitaet zum nachweis und zur messung von gasfoermigen kohlenwasserstoff-verunreinigungen in der luft auf der basis von wolframoxid (wo(pfeil abwaerts)x(pfeil abwaerts))-halbleitern, sowie ein verfahren zu seiner herstellung
EP0076935B1 (de) * 1981-10-09 1989-07-19 Honeywell Inc. Integrierte Halbleitervorrichtung und Verfahren zu ihrer Herstellung
JPS5991350A (ja) * 1982-11-17 1984-05-26 Toyota Central Res & Dev Lab Inc 薄膜酸素センサ
JPS59120944A (ja) * 1982-12-28 1984-07-12 Shinkosumosu Denki Kk 飽和炭化水素ガス検知素子
CA1216330A (en) * 1983-02-07 1987-01-06 Junji Manaka Low power gas detector
US4509034A (en) * 1983-03-22 1985-04-02 New Cosmos Electric Col, Ltd. Gas sensor
GB2142147A (en) * 1983-06-24 1985-01-09 Standard Telephones Cables Ltd Gas sensor
CH666965A5 (de) * 1983-08-30 1988-08-31 Cerberus Ag Verfahren zur herstellung von materialien fuer gassensoren.
US4677078A (en) * 1984-05-07 1987-06-30 Gould Inc. Oxygen monitoring device and method
US4637987A (en) * 1984-05-07 1987-01-20 Gould Inc. Gas monitoring device and method
JPS6170449A (ja) * 1984-09-13 1986-04-11 Toshiba Corp ガス検知素子
DE3529335A1 (de) * 1985-08-16 1987-02-26 Draegerwerk Ag Festkoerperkette zur aktivitaetsmessung mit festem ionenleiter
US4631952A (en) * 1985-08-30 1986-12-30 Chevron Research Company Resistive hydrocarbon leak detector
US4674320A (en) * 1985-09-30 1987-06-23 The United States Of America As Represented By The United States Department Of Energy Chemoresistive gas sensor
US5140393A (en) * 1985-10-08 1992-08-18 Sharp Kabushiki Kaisha Sensor device
US4706493A (en) * 1985-12-13 1987-11-17 General Motors Corporation Semiconductor gas sensor having thermally isolated site
GB8606045D0 (en) * 1986-03-12 1986-04-16 Emi Plc Thorn Gas sensitive device
KR960016712B1 (ko) * 1986-11-05 1996-12-20 오오니시 마사후미 가스센서 및 그의 제조방법
US4929598A (en) * 1987-06-19 1990-05-29 Bell Communications Research, Inc. Oxygen plasma treatment of yttrium barium copper oxide
US4981714A (en) * 1987-12-14 1991-01-01 Sharp Kabushiki Kaisha Method of producing ferroelectric LiNb1-31 x Tax O3 0<x<1) thin film by activated evaporation
US4836012A (en) * 1988-05-26 1989-06-06 Ametek, Inc. Gas sensor
FR2640048B1 (fr) * 1988-12-06 1993-01-22 Armines Procede de fabrication d'un capteur de detection de gaz, capteur en resultant
US5238729A (en) * 1991-04-05 1993-08-24 Minnesota Mining And Manufacturing Company Sensors based on nanosstructured composite films
US5225253A (en) * 1992-04-17 1993-07-06 General Motors Corporation Method of forming silver/molybdenum surface coating material
US5382341A (en) * 1992-09-10 1995-01-17 Aroutiounian; Vladimir M. Method of making smoke detector
US5466605A (en) * 1993-03-15 1995-11-14 Arizona Board Of Regents Method for detection of chemical components
DE69419020T2 (de) * 1993-08-13 2000-03-02 Haan Andre Paul Z De Herstellungsverfahren fur ein halbleiterelement und detektor mit einem solchen halbleiterelement
DE4402117C2 (de) * 1994-01-25 1995-11-23 Siemens Matsushita Components Hochtemperatur-Gassensor und Verfahren zu seiner Herstellung
WO1996019724A1 (en) * 1994-12-22 1996-06-27 Senova Corporation Apparatus for detecting selected chemical components of fluid streams
US5985673A (en) * 1994-12-22 1999-11-16 Arizona Baord Of Regents Method for regeneration of a sensor
DE19542715A1 (de) * 1995-11-16 1997-05-22 Asea Brown Boveri Verfahren zum Übertragen von binären, asynchronen Daten über einen synchronen Kanal
US5777207A (en) * 1995-11-27 1998-07-07 Lg Electronics Inc. Gas sensor and method for fabricating the same
KR100186286B1 (ko) * 1995-12-22 1999-05-15 한갑수 주석산화물 박막을 이용한 메탄 가스 감지용 센서 및 프로판 가스 감지용 센서와 그 제조방법
DE19549146A1 (de) * 1995-12-29 1997-07-03 Siemens Ag Gassensor
FR2745637B1 (fr) * 1996-03-04 1998-05-22 Motorola Semiconducteurs Dispositif capteur chimique a semiconducteur et procede de formation d'un thermocouple pour ce dispositif
US6087924A (en) * 1996-04-18 2000-07-11 Mikuni Corporation Gas sensors and methods of manufacturing the same
FR2754901B1 (fr) * 1996-10-21 1998-12-31 Sagem Capteur chimique de gaz et procede de fabrication d'un tel capteur
JP3983422B2 (ja) * 1998-09-29 2007-09-26 株式会社デンソー ガス濃度検出装置
US6237397B1 (en) * 1999-10-06 2001-05-29 Iowa State University Research Foundation, Inc. Chemical sensor and coating for same
US6418784B1 (en) 1999-10-08 2002-07-16 Ford Global Technologies, Inc. Combined combustible gas sensor and temperature detector
US6468682B1 (en) 2000-05-17 2002-10-22 Avista Laboratories, Inc. Ion exchange membrane fuel cell
US20040009585A1 (en) * 2001-02-21 2004-01-15 Venancio Everaldo Carlos Sensor for analysis of mixtures by global selectivity and its use in sensor system
US20020142478A1 (en) * 2001-03-28 2002-10-03 Hiroyuki Wado Gas sensor and method of fabricating a gas sensor
US20020168772A1 (en) * 2001-05-11 2002-11-14 Lloyd Greg A. Method of detecting poisoning of a MOS gas sensor
US6532792B2 (en) 2001-07-26 2003-03-18 Avista Laboratories, Inc. Method of compensating a MOS gas sensor, method of manufacturing a MOS gas sensor, MOS gas sensor, and fuel cell system
JP4325133B2 (ja) * 2001-08-27 2009-09-02 株式会社デンソー ガスセンサおよびその製造方法
JP3847162B2 (ja) * 2001-12-21 2006-11-15 本田技研工業株式会社 湿度センサの温度制御装置
US6627959B1 (en) 2002-04-16 2003-09-30 Boston Microsystems, Inc. P-n junction sensor
ITTO20030210A1 (it) * 2003-03-21 2004-09-22 Ist Trentino Di Cultura Procedimento e apparecchiatura per la determinazione del grado alcolico di una soluzione idroalcolica.
US20070140908A1 (en) * 2003-10-22 2007-06-21 Toyo Ink Mfg., Ltd. of Tokyo, Japan Proton acceptance type sensor, hydrogen gas sensor and acid sensor
US20060199271A1 (en) * 2005-03-07 2006-09-07 Ming-Ren Lian Temperature feedback control for solid state gas sensors
JP4692026B2 (ja) * 2005-03-08 2011-06-01 パナソニック株式会社 ガスセンサ
US8591818B2 (en) * 2005-04-29 2013-11-26 Gary Bokerman Gas permeable chemochromic compositions for hydrogen sensing
US20070143032A1 (en) * 2005-09-15 2007-06-21 Carl Zeiss Smt Ag Apparatus and method for the detection of a surface reaction, especially for cleaning of an arbitrary two-dimensional surface or three-dimensional body
DE102008042859A1 (de) 2008-10-15 2010-04-22 Robert Bosch Gmbh Elektronisches Bauelement
DE102012217428A1 (de) * 2012-09-26 2014-03-27 Robert Bosch Gmbh Sensor zur Detektion von Teilchen
US9857498B2 (en) * 2014-06-05 2018-01-02 Baker Hughes Incorporated Devices and methods for detecting chemicals
WO2016027692A1 (ja) * 2014-08-18 2016-02-25 株式会社村田製作所 電子部品および電子部品の製造方法
EP3062097A1 (de) * 2015-02-27 2016-08-31 EM Microelectronic-Marin SA Feuchtigkeitssensor mit wärmemodul
US10497486B2 (en) * 2016-12-13 2019-12-03 Honeywell International Inc. Robust sensing film for fire gases
JP6813461B2 (ja) * 2017-09-19 2021-01-13 タツタ電線株式会社 シートセンサ
CN114839231B (zh) * 2022-04-27 2022-12-16 河南森斯科传感技术有限公司 一种用于半导体可燃气体传感器的抗干扰气敏涂层及其制备方法、应用

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US3479257A (en) * 1966-11-25 1969-11-18 Gen Electric Methods and apparatus for measuring the content of hydrogen or reducing gases in an atmosphere
DE2540161A1 (de) * 1974-09-09 1976-03-25 Semiconductor Sensors Inc Vorrichtung zum aufspueren von wasserstoff
US4007435A (en) * 1973-07-30 1977-02-08 Tien Tseng Ying Sensor device and method of manufacturing same

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DE1598554A1 (de) * 1965-04-19 1971-02-25 Honeywell Inc Gasspuergeraet
US3507145A (en) * 1966-11-25 1970-04-21 Gen Electric Indium sesquioxide thin film combustible gas detector
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US3793605A (en) * 1971-07-16 1974-02-19 Signetics Corp Ion sensitive solid state device and method
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CA995482A (en) * 1973-08-31 1976-08-24 Henry L. Stadler Gas sensor and method of manufacture
FR2273276B1 (de) * 1974-05-27 1978-08-04 Radiotechnique Compelec
IT1016660B (it) * 1974-07-23 1977-06-20 Fiat Spa Dispositivo per la determinazione del rapporto aria combustibile per ciclo otto
SE393967B (sv) * 1974-11-29 1977-05-31 Sateko Oy Forfarande och for utforande av stroleggning mellan lagren i ett virkespaket
US4091138A (en) * 1975-02-12 1978-05-23 Sumitomo Bakelite Company Limited Insulating film, sheet, or plate material with metallic coating and method for manufacturing same
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US4224280A (en) * 1977-07-18 1980-09-23 Fuji Electric Co., Ltd. Carbon monoxide detecting device

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US3479257A (en) * 1966-11-25 1969-11-18 Gen Electric Methods and apparatus for measuring the content of hydrogen or reducing gases in an atmosphere
US4007435A (en) * 1973-07-30 1977-02-08 Tien Tseng Ying Sensor device and method of manufacturing same
DE2540161A1 (de) * 1974-09-09 1976-03-25 Semiconductor Sensors Inc Vorrichtung zum aufspueren von wasserstoff

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Title
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Applied Physics Letters 11, 255(1967) *
G. Heiland, E. Mollwo und F. Stockmann: Electronic Processes in Zinc Oxide in: Solid State Physics - Advances in Research and Applications, herausgegeben von F. Seitz und D. Turnbull, Bd. 8, New York-London 1959, Academic Press, S. 191-278 *
G.-H. Comsa: Ramarks on the size distribution function of ultrafine metal particles *
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P.J. Shaver: Activated tungsten oxide gas detectors *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3634132A1 (de) * 1985-10-08 1987-04-16 Sharp Kk Sensoreinrichtung

Also Published As

Publication number Publication date
DE2953771C1 (de) 1982-07-22
CA1123052A (en) 1982-05-04
US4362765A (en) 1982-12-07
GB2029583A (en) 1980-03-19
US4313338A (en) 1982-02-02
GB2029583B (en) 1983-05-25
DE2933394C2 (de) 1982-05-13

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