DE2851330A1 - Magnetoresistives halbleiterelement - Google Patents
Magnetoresistives halbleiterelementInfo
- Publication number
- DE2851330A1 DE2851330A1 DE19782851330 DE2851330A DE2851330A1 DE 2851330 A1 DE2851330 A1 DE 2851330A1 DE 19782851330 DE19782851330 DE 19782851330 DE 2851330 A DE2851330 A DE 2851330A DE 2851330 A1 DE2851330 A1 DE 2851330A1
- Authority
- DE
- Germany
- Prior art keywords
- electrode
- electrodes
- short
- semiconductor element
- element according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title claims description 59
- 230000005291 magnetic effect Effects 0.000 claims description 50
- 239000000758 substrate Substances 0.000 claims description 38
- 239000000463 material Substances 0.000 claims description 28
- 230000035945 sensitivity Effects 0.000 claims description 10
- 239000003302 ferromagnetic material Substances 0.000 claims description 4
- 239000000919 ceramic Substances 0.000 claims description 3
- 239000004020 conductor Substances 0.000 claims description 3
- 239000011521 glass Substances 0.000 claims description 3
- WPYVAWXEWQSOGY-UHFFFAOYSA-N indium antimonide Chemical compound [Sb]#[In] WPYVAWXEWQSOGY-UHFFFAOYSA-N 0.000 description 11
- 239000013078 crystal Substances 0.000 description 10
- 239000010410 layer Substances 0.000 description 10
- 239000010408 film Substances 0.000 description 9
- 239000000126 substance Substances 0.000 description 8
- 229910052802 copper Inorganic materials 0.000 description 6
- 239000010949 copper Substances 0.000 description 6
- 230000005496 eutectics Effects 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 229920005989 resin Polymers 0.000 description 6
- 239000011347 resin Substances 0.000 description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 5
- 238000010276 construction Methods 0.000 description 5
- 239000003822 epoxy resin Substances 0.000 description 5
- 229920000647 polyepoxide Polymers 0.000 description 5
- 239000010409 thin film Substances 0.000 description 5
- 230000008859 change Effects 0.000 description 4
- 229910052738 indium Inorganic materials 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 229910052709 silver Inorganic materials 0.000 description 4
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 3
- 239000000956 alloy Substances 0.000 description 3
- 230000001419 dependent effect Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000004907 flux Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000001259 photo etching Methods 0.000 description 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 239000004332 silver Substances 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- KUBDPQJOLOUJRM-UHFFFAOYSA-N 2-(chloromethyl)oxirane;4-[2-(4-hydroxyphenyl)propan-2-yl]phenol Chemical compound ClCC1CO1.C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 KUBDPQJOLOUJRM-UHFFFAOYSA-N 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 2
- -1 Gap Inorganic materials 0.000 description 2
- 229910000673 Indium arsenide Inorganic materials 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 239000011230 binding agent Substances 0.000 description 2
- 229910052797 bismuth Inorganic materials 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 238000007772 electroless plating Methods 0.000 description 2
- 230000005294 ferromagnetic effect Effects 0.000 description 2
- 229910021478 group 5 element Inorganic materials 0.000 description 2
- RPQDHPTXJYYUPQ-UHFFFAOYSA-N indium arsenide Chemical compound [In]#[As] RPQDHPTXJYYUPQ-UHFFFAOYSA-N 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 239000010445 mica Substances 0.000 description 2
- 229910052618 mica group Inorganic materials 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 229910052763 palladium Inorganic materials 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 229910000859 α-Fe Inorganic materials 0.000 description 2
- 229910017115 AlSb Inorganic materials 0.000 description 1
- 229910000976 Electrical steel Inorganic materials 0.000 description 1
- 229910005542 GaSb Inorganic materials 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- GPXJNWSHGFTCBW-UHFFFAOYSA-N Indium phosphide Chemical compound [In]#P GPXJNWSHGFTCBW-UHFFFAOYSA-N 0.000 description 1
- 229910018605 Ni—Zn Inorganic materials 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- USYLIGCRWXYYPZ-UHFFFAOYSA-N [Cl].[Fe] Chemical compound [Cl].[Fe] USYLIGCRWXYYPZ-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 229910052745 lead Inorganic materials 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
- G01R33/09—Magnetoresistive devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N50/00—Galvanomagnetic devices
- H10N50/10—Magnetoresistive devices
Landscapes
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Hall/Mr Elements (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14224077A JPS5475284A (en) | 1977-11-29 | 1977-11-29 | Threeeterminal magnetic reluctance effect element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE2851330A1 true DE2851330A1 (de) | 1979-06-07 |
| DE2851330C2 DE2851330C2 (forum.php) | 1983-07-28 |
Family
ID=15310684
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19782851330 Granted DE2851330A1 (de) | 1977-11-29 | 1978-11-28 | Magnetoresistives halbleiterelement |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US4251795A (forum.php) |
| JP (1) | JPS5475284A (forum.php) |
| DE (1) | DE2851330A1 (forum.php) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3216147A1 (de) * | 1982-04-30 | 1983-11-03 | Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt | Magnetfeldsensor |
Families Citing this family (63)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4584552A (en) * | 1982-03-26 | 1986-04-22 | Pioneer Electronic Corporation | Hall element with improved composite substrate |
| DE3526166C2 (de) * | 1984-07-23 | 1996-05-02 | Asahi Chemical Ind | Bürstenloser Elektromotor und Verfahren zum Herstellen einer Spuleneinheit für diesen |
| JPS6145922A (ja) * | 1984-08-10 | 1986-03-06 | Hitachi Ltd | 位置検出センサ |
| US4926154A (en) * | 1988-12-23 | 1990-05-15 | General Motors Corporation | Indium arsenide magnetoresistor |
| WO1991014288A1 (en) * | 1990-03-07 | 1991-09-19 | Santa Barbara Research Center | Magnetoresistor structure and operating method |
| US5038130A (en) * | 1990-11-06 | 1991-08-06 | Santa Barbara Research Center | System for sensing changes in a magnetic field |
| US5184106A (en) * | 1991-01-28 | 1993-02-02 | General Motors Corporation | Magnetic field sensor with improved electron mobility |
| US5153557A (en) * | 1991-01-28 | 1992-10-06 | General Motors Corporation | Magnetic field sensor contacts |
| DE9215228U1 (de) * | 1992-11-09 | 1993-04-01 | Woelke Magnetbandtechnik GmbH & Co KG, 8069 Schweitenkirchen | Magnetfeldempfindlicher Sensor |
| US5883564A (en) * | 1994-04-18 | 1999-03-16 | General Motors Corporation | Magnetic field sensor having high mobility thin indium antimonide active layer on thin aluminum indium antimonide buffer layer |
| US6222361B1 (en) * | 1997-12-04 | 2001-04-24 | Sony Precision Technology Inc. | Position detecting device using varying width magneto-resistive effect sensor |
| EP0971423A1 (en) * | 1998-07-10 | 2000-01-12 | Interuniversitair Micro-Elektronica Centrum Vzw | Spin-valve structure and method for making same |
| JP2001134911A (ja) * | 1999-11-01 | 2001-05-18 | Tdk Corp | 薄膜磁気ヘッド、ヘッドサスペンションアセンブリ、磁気ディスク装置及びそれらの製造方法 |
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| MY158019A (en) * | 2006-10-25 | 2016-08-30 | Proteus Digital Health Inc | Controlled activation ingestible identifier |
| WO2008063626A2 (en) | 2006-11-20 | 2008-05-29 | Proteus Biomedical, Inc. | Active signal processing personal health signal receivers |
| EP2107883A4 (en) | 2007-02-01 | 2013-07-03 | Proteus Digital Health Inc | SYSTEMS WITH EFFECTIVE EVENT MARKERS |
| AU2008216170B2 (en) | 2007-02-14 | 2012-07-26 | Otsuka Pharmaceutical Co., Ltd. | In-body power source having high surface area electrode |
| WO2008112578A1 (en) | 2007-03-09 | 2008-09-18 | Proteus Biomedical, Inc. | In-body device having a deployable antenna |
| US8932221B2 (en) * | 2007-03-09 | 2015-01-13 | Proteus Digital Health, Inc. | In-body device having a multi-directional transmitter |
| US8540632B2 (en) * | 2007-05-24 | 2013-09-24 | Proteus Digital Health, Inc. | Low profile antenna for in body device |
| EP2192946B1 (en) | 2007-09-25 | 2022-09-14 | Otsuka Pharmaceutical Co., Ltd. | In-body device with virtual dipole signal amplification |
| MY154699A (en) * | 2007-11-27 | 2015-07-15 | Proteus Digital Health Inc | Transbody communication systems employing communication channels |
| ES2840773T3 (es) | 2008-03-05 | 2021-07-07 | Otsuka Pharma Co Ltd | Sistemas y marcadores de eventos ingeribles de comunicación multimodo |
| EP3427660A1 (en) | 2008-07-08 | 2019-01-16 | Proteus Digital Health, Inc. | Ingestible event marker data framework |
| US8540633B2 (en) * | 2008-08-13 | 2013-09-24 | Proteus Digital Health, Inc. | Identifier circuits for generating unique identifiable indicators and techniques for producing same |
| AU2009305770A1 (en) * | 2008-10-14 | 2010-04-22 | Proteus Digital Health, Inc. | Method and system for incorporating physiologic data in a gaming environment |
| JP2012511961A (ja) | 2008-12-11 | 2012-05-31 | プロテウス バイオメディカル インコーポレイテッド | 携帯用内臓電気記録システムを用いた消化管機能の判断およびそれを用いた方法 |
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| US8540664B2 (en) | 2009-03-25 | 2013-09-24 | Proteus Digital Health, Inc. | Probablistic pharmacokinetic and pharmacodynamic modeling |
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| US9107806B2 (en) | 2010-11-22 | 2015-08-18 | Proteus Digital Health, Inc. | Ingestible device with pharmaceutical product |
| US9756874B2 (en) | 2011-07-11 | 2017-09-12 | Proteus Digital Health, Inc. | Masticable ingestible product and communication system therefor |
| WO2015112603A1 (en) | 2014-01-21 | 2015-07-30 | Proteus Digital Health, Inc. | Masticable ingestible product and communication system therefor |
| RU2014106126A (ru) | 2011-07-21 | 2015-08-27 | Протеус Диджитал Хелс, Инк. | Устройство, система и способ мобильной связи |
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| TWI619280B (zh) * | 2014-04-01 | 2018-03-21 | 友達光電股份有限公司 | 感測元件 |
| US11051543B2 (en) | 2015-07-21 | 2021-07-06 | Otsuka Pharmaceutical Co. Ltd. | Alginate on adhesive bilayer laminate film |
| BR112019000861B1 (pt) | 2016-07-22 | 2020-10-27 | Proteus Digital Health, Inc | dispositivo eletrônico |
| JP2019535377A (ja) | 2016-10-26 | 2019-12-12 | プロテウス デジタル ヘルス， インコーポレイテッド | 摂取可能なイベントマーカを有するカプセルの製造方法 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1050868B (forum.php) * | ||||
| DE2534414A1 (de) * | 1975-08-01 | 1977-02-10 | Precision Electronic Component | Magneto-widerstand und verfahren zu dessen herstellung |
| JPH05267583A (ja) * | 1992-03-18 | 1993-10-15 | Nec Corp | 半導体集積回路装置 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3691502A (en) * | 1968-04-24 | 1972-09-12 | Kogyo Gijutsuin | Semiconductor type potentiometer device |
| US3852103A (en) * | 1968-07-26 | 1974-12-03 | D Collins | Raster pattern magnetoresistors |
| JPS4934675B1 (forum.php) * | 1970-01-09 | 1974-09-17 | ||
| US3731007A (en) * | 1971-04-19 | 1973-05-01 | Denki Onkyo Co Ltd | Magnetic head having a magneto-resistive bridge circuit |
| US3921217A (en) * | 1971-12-27 | 1975-11-18 | Ibm | Three-legged magnetic recording head using a magnetorestive element |
| NL168981C (nl) * | 1975-04-15 | 1982-05-17 | Philips Nv | Magnetoweerstand leeskop. |
| JPS5267583A (en) * | 1975-12-03 | 1977-06-04 | Fujitsu Ltd | Magnetic reluctance device |
-
1977
- 1977-11-29 JP JP14224077A patent/JPS5475284A/ja active Pending
-
1978
- 1978-11-28 DE DE19782851330 patent/DE2851330A1/de active Granted
- 1978-11-29 US US05/964,554 patent/US4251795A/en not_active Expired - Lifetime
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1050868B (forum.php) * | ||||
| DE2534414A1 (de) * | 1975-08-01 | 1977-02-10 | Precision Electronic Component | Magneto-widerstand und verfahren zu dessen herstellung |
| JPH05267583A (ja) * | 1992-03-18 | 1993-10-15 | Nec Corp | 半導体集積回路装置 |
Non-Patent Citations (1)
| Title |
|---|
| DE-B.: Herbert Weiß "Physik und Anwendung salvanomagnitischer Bauelemente", Sammlung Vieweg 1969, S. 81-83 u. 245-250 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3216147A1 (de) * | 1982-04-30 | 1983-11-03 | Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt | Magnetfeldsensor |
Also Published As
| Publication number | Publication date |
|---|---|
| DE2851330C2 (forum.php) | 1983-07-28 |
| US4251795A (en) | 1981-02-17 |
| JPS5475284A (en) | 1979-06-15 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OAP | Request for examination filed | ||
| OD | Request for examination | ||
| D2 | Grant after examination | ||
| 8363 | Opposition against the patent | ||
| 8331 | Complete revocation |