DE2721704C2 - Korpuskularoptisches Gerät - Google Patents
Korpuskularoptisches GerätInfo
- Publication number
- DE2721704C2 DE2721704C2 DE2721704A DE2721704A DE2721704C2 DE 2721704 C2 DE2721704 C2 DE 2721704C2 DE 2721704 A DE2721704 A DE 2721704A DE 2721704 A DE2721704 A DE 2721704A DE 2721704 C2 DE2721704 C2 DE 2721704C2
- Authority
- DE
- Germany
- Prior art keywords
- lens
- diaphragm
- image
- point
- electrostatic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003287 optical effect Effects 0.000 title claims description 23
- 238000010894 electron beam technology Methods 0.000 claims description 7
- 210000001747 pupil Anatomy 0.000 claims description 5
- 239000000696 magnetic material Substances 0.000 claims description 4
- 238000004804 winding Methods 0.000 claims description 3
- 229910000859 α-Fe Inorganic materials 0.000 claims description 3
- 238000003384 imaging method Methods 0.000 claims 1
- 241000219739 Lens Species 0.000 description 34
- 238000010586 diagram Methods 0.000 description 3
- 241001136792 Alle Species 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 230000015654 memory Effects 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 240000004322 Lens culinaris Species 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/3002—Details
- H01J37/3007—Electron or ion-optical systems
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/302—Controlling tubes by external information, e.g. programme control
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Beam Exposure (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR7614719A FR2351497A1 (fr) | 1976-05-14 | 1976-05-14 | Dispositif permettant le trace programme de figures de formes differentes |
| FR7702600A FR2379159A2 (fr) | 1977-01-31 | 1977-01-31 | Dispositif permettant le trace programme de figures de formes differentes |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE2721704A1 DE2721704A1 (de) | 1977-11-24 |
| DE2721704C2 true DE2721704C2 (de) | 1987-05-07 |
Family
ID=26219446
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE2721704A Expired DE2721704C2 (de) | 1976-05-14 | 1977-05-13 | Korpuskularoptisches Gerät |
Country Status (7)
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA1166766A (en) * | 1977-02-23 | 1984-05-01 | Hans C. Pfeiffer | Method and apparatus for forming a variable size electron beam |
| US4167676A (en) * | 1978-02-21 | 1979-09-11 | Bell Telephone Laboratories, Incorporated | Variable-spot scanning in an electron beam exposure system |
| US4475044A (en) * | 1979-04-23 | 1984-10-02 | Hitachi, Ltd. | Apparatus for focus-deflecting a charged particle beam |
| FR2472831A1 (fr) * | 1979-08-08 | 1981-07-03 | Zeiss Jena Veb Carl | Procede et dispositif pour l'inclinaison de sondes de rayonnement superficiel |
| JPS57206173A (en) * | 1981-06-15 | 1982-12-17 | Nippon Telegr & Teleph Corp <Ntt> | Focusing deflecting device for charged corpuscule beam |
| GB2115976A (en) * | 1982-02-26 | 1983-09-14 | Philips Electronic Associated | Charged particle beam apparatus |
| EP0242602B1 (de) * | 1986-04-24 | 1993-07-21 | ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | Elektrostatisch-magnetische-Linse für Korpuskularstrahlgeräte |
| DE3766092D1 (de) * | 1986-12-12 | 1990-12-13 | Integrated Circuit Testing | Detektoranordnung mit einem detektorobjektiv fuer korpuskularstrahlgeraete. |
| JP2002217088A (ja) * | 2001-01-17 | 2002-08-02 | Nikon Corp | 荷電粒子線露光装置、荷電粒子線露光方法及び半導体デバイスの製造方法 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2356535A (en) * | 1940-08-31 | 1944-08-22 | Ruska Ernst | Electronic lens |
| NL154050B (nl) * | 1966-08-13 | 1977-07-15 | Philips Nv | Elektronenmicroscoop. |
| NL6807439A (US08063081-20111122-C00102.png) * | 1968-05-27 | 1969-12-01 | ||
| US3857034A (en) * | 1970-08-31 | 1974-12-24 | Max Planck Gesellschaft | Scanning charged beam particle beam microscope |
| US3996468A (en) * | 1972-01-28 | 1976-12-07 | Nasa | Electron microscope aperture system |
| US4000440A (en) * | 1974-07-26 | 1976-12-28 | International Business Machines Corporation | Method and apparatus for controlling brightness and alignment of a beam of charged particles |
| GB1557924A (en) * | 1976-02-05 | 1979-12-19 | Western Electric Co | Irradiation apparatus and methods |
| JPS52147977A (en) * | 1976-04-02 | 1977-12-08 | Jeol Ltd | Electronic lens unit |
| JPS5320391A (en) * | 1976-08-09 | 1978-02-24 | Becton Dickinson Co | Blood inspection apparatus |
-
1977
- 1977-05-11 NL NLAANVRAGE7705207,A patent/NL177578C/xx not_active IP Right Cessation
- 1977-05-12 GB GB20082/77A patent/GB1570347A/en not_active Expired
- 1977-05-12 SE SE7705531A patent/SE415309B/xx not_active IP Right Cessation
- 1977-05-13 US US05/796,708 patent/US4110622A/en not_active Expired - Lifetime
- 1977-05-13 CA CA278,403A patent/CA1085073A/en not_active Expired
- 1977-05-13 DE DE2721704A patent/DE2721704C2/de not_active Expired
- 1977-05-14 JP JP5592077A patent/JPS538064A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| CA1085073A (en) | 1980-09-02 |
| NL177578C (nl) | 1985-10-16 |
| US4110622A (en) | 1978-08-29 |
| SE415309B (sv) | 1980-09-22 |
| NL177578B (nl) | 1985-05-17 |
| JPS538064A (en) | 1978-01-25 |
| DE2721704A1 (de) | 1977-11-24 |
| GB1570347A (en) | 1980-07-02 |
| NL7705207A (nl) | 1977-11-16 |
| SE7705531L (sv) | 1977-11-15 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OD | Request for examination | ||
| D2 | Grant after examination | ||
| 8364 | No opposition during term of opposition |