DE2719660A1 - Steuergitter fuer eine elektronenquelle, damit ausgestattete elektronenquelle und verfahren zu deren herstellung - Google Patents
Steuergitter fuer eine elektronenquelle, damit ausgestattete elektronenquelle und verfahren zu deren herstellungInfo
- Publication number
- DE2719660A1 DE2719660A1 DE19772719660 DE2719660A DE2719660A1 DE 2719660 A1 DE2719660 A1 DE 2719660A1 DE 19772719660 DE19772719660 DE 19772719660 DE 2719660 A DE2719660 A DE 2719660A DE 2719660 A1 DE2719660 A1 DE 2719660A1
- Authority
- DE
- Germany
- Prior art keywords
- grid
- cathode
- electron source
- barrier layer
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000000034 method Methods 0.000 title claims description 6
- 238000004519 manufacturing process Methods 0.000 title claims description 5
- 229910052751 metal Inorganic materials 0.000 claims description 30
- 239000002184 metal Substances 0.000 claims description 30
- 230000004888 barrier function Effects 0.000 claims description 11
- 239000000463 material Substances 0.000 claims description 5
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 5
- 229910052582 BN Inorganic materials 0.000 claims description 4
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 claims description 4
- 239000011810 insulating material Substances 0.000 claims description 4
- 229910052721 tungsten Inorganic materials 0.000 claims description 4
- 239000010937 tungsten Substances 0.000 claims description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 2
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims description 2
- 229910052788 barium Inorganic materials 0.000 claims description 2
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 claims description 2
- 239000002245 particle Substances 0.000 claims description 2
- 239000010936 titanium Substances 0.000 claims description 2
- 229910052719 titanium Inorganic materials 0.000 claims description 2
- 229910052726 zirconium Inorganic materials 0.000 claims description 2
- 239000011833 salt mixture Substances 0.000 claims 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical class [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims 1
- 101001030169 Homo sapiens Myozenin-1 Proteins 0.000 claims 1
- 102100038898 Myozenin-1 Human genes 0.000 claims 1
- 238000009792 diffusion process Methods 0.000 description 5
- 239000012212 insulator Substances 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 3
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 238000009388 chemical precipitation Methods 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- KGWWEXORQXHJJQ-UHFFFAOYSA-N [Fe].[Co].[Ni] Chemical compound [Fe].[Co].[Ni] KGWWEXORQXHJJQ-UHFFFAOYSA-N 0.000 description 1
- RMOSMMUWFCLGCL-UHFFFAOYSA-N [W].[Nb].[Ta] Chemical compound [W].[Nb].[Ta] RMOSMMUWFCLGCL-UHFFFAOYSA-N 0.000 description 1
- QKYBEKAEVQPNIN-UHFFFAOYSA-N barium(2+);oxido(oxo)alumane Chemical compound [Ba+2].[O-][Al]=O.[O-][Al]=O QKYBEKAEVQPNIN-UHFFFAOYSA-N 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 238000005234 chemical deposition Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 230000024121 nodulation Effects 0.000 description 1
- 239000011224 oxide ceramic Substances 0.000 description 1
- 229910052574 oxide ceramic Inorganic materials 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 239000002574 poison Substances 0.000 description 1
- 231100000614 poison Toxicity 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J19/00—Details of vacuum tubes of the types covered by group H01J21/00
- H01J19/02—Electron-emitting electrodes; Cathodes
- H01J19/04—Thermionic cathodes
- H01J19/14—Cathodes heated indirectly by an electric current; Cathodes heated by electron or ion bombardment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J23/00—Details of transit-time tubes of the types covered by group H01J25/00
- H01J23/02—Electrodes; Magnetic control means; Screens
- H01J23/06—Electron or ion guns
- H01J23/065—Electron or ion guns producing a solid cylindrical beam
Landscapes
- Microwave Tubes (AREA)
- Solid Thermionic Cathode (AREA)
- Common Detailed Techniques For Electron Tubes Or Discharge Tubes (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US05/684,689 US4096406A (en) | 1976-05-10 | 1976-05-10 | Thermionic electron source with bonded control grid |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE2719660A1 true DE2719660A1 (de) | 1977-12-01 |
Family
ID=24749144
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19772719660 Withdrawn DE2719660A1 (de) | 1976-05-10 | 1977-05-03 | Steuergitter fuer eine elektronenquelle, damit ausgestattete elektronenquelle und verfahren zu deren herstellung |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US4096406A (OSRAM) |
| JP (1) | JPS52136559A (OSRAM) |
| CA (1) | CA1085907A (OSRAM) |
| DE (1) | DE2719660A1 (OSRAM) |
| FR (1) | FR2351489A1 (OSRAM) |
| GB (1) | GB1551867A (OSRAM) |
| IL (1) | IL51913A (OSRAM) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2917269A1 (de) * | 1978-05-03 | 1979-11-15 | Varian Associates | Steuergitter fuer eine elektronenquelle |
Families Citing this family (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2390825A1 (fr) * | 1977-05-13 | 1978-12-08 | Thomson Csf | Cathode thermo-ionique a grille incorporee, son procede de fabrication et tube electronique comportant une telle cathode |
| CH629033A5 (de) * | 1978-05-05 | 1982-03-31 | Bbc Brown Boveri & Cie | Gluehkathode. |
| US4321505A (en) * | 1978-07-24 | 1982-03-23 | Varian Associates, Inc. | Zero-bias gridded gun |
| US4227116A (en) * | 1978-07-24 | 1980-10-07 | Varian Associates, Inc. | Zero-bias gridded gun |
| US4250428A (en) * | 1979-05-09 | 1981-02-10 | The United States Of America As Represented By The Secretary Of The Army | Bonded cathode and electrode structure with layered insulation, and method of manufacture |
| US4254357A (en) * | 1979-09-14 | 1981-03-03 | The United States Of America As Represented By The Secretary Of The Navy | Multi-arrayed micro-patch emitter with integral control grid |
| JPS56106334A (en) * | 1980-01-25 | 1981-08-24 | New Japan Radio Co Ltd | Thermion emission type cathode |
| FR2481000A1 (fr) * | 1980-04-18 | 1981-10-23 | Thomson Csf | Procede de realisation d'une cathode impregnee a grille integree, cathode obtenue par ce procede, et tube electronique muni d'une telle cathode |
| US4371809A (en) * | 1980-06-19 | 1983-02-01 | The United States Of America As Represented By The Secretary Of The Navy | Integral-shadow-grid controlled-porosity dispenser cathode |
| JPS5868846A (ja) * | 1981-10-07 | 1983-04-23 | バリアン・アソシエイツ・インコ−ポレイテツド | 永久磁石で集束される線形ビ−ムマイクロ波管 |
| FR2596198A1 (fr) * | 1986-03-19 | 1987-09-25 | Thomson Csf | Cathodes pour klystron a faisceaux multiples, klystron comportant de telles cathodes et procede de fabrication de telles cathodes |
| US5015908A (en) * | 1989-01-23 | 1991-05-14 | Varian Associates, Inc. | Fast warm-up cathode for high power vacuum tubes |
| US5466982A (en) * | 1993-10-18 | 1995-11-14 | Honeywell Inc. | Comb toothed field emitter structure having resistive and capacitive coupled input |
| DE4400353A1 (de) * | 1994-01-08 | 1995-07-13 | Philips Patentverwaltung | Steuerbarer thermionischer Elektronenemitter |
| GB2312322B (en) * | 1996-04-20 | 2000-06-14 | Eev Ltd | Electron guns |
| US6004830A (en) * | 1998-02-09 | 1999-12-21 | Advanced Vision Technologies, Inc. | Fabrication process for confined electron field emission device |
| US6664720B2 (en) * | 2001-04-23 | 2003-12-16 | L-3 Communications Corporation | Temperature compensated gun |
| JP2004111292A (ja) * | 2002-09-20 | 2004-04-08 | Hitachi Displays Ltd | 表示装置及びその製造方法 |
| US20050104506A1 (en) * | 2003-11-18 | 2005-05-19 | Youh Meng-Jey | Triode Field Emission Cold Cathode Devices with Random Distribution and Method |
| RU2314590C2 (ru) * | 2005-12-06 | 2008-01-10 | Открытое акционерное общество "Корпорация "Фазотрон-Научно-исследовательский институт радиостроения" | Катодно-сеточный узел |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE857540C (de) * | 1950-12-28 | 1952-12-01 | Siemens Ag | Elektrodensystem fuer elektrische Entladungsgefaesse |
| US2883576A (en) * | 1955-04-04 | 1959-04-21 | Gen Electric | Thermionic valves |
| US2889483A (en) * | 1954-09-01 | 1959-06-02 | Sylvania Electric Prod | Glass base grid |
| DE1232272B (de) * | 1964-02-13 | 1967-01-12 | Telefunken Patent | Scheibenfoermiges Gitter fuer Elektronenstrahlroehren |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3196043A (en) * | 1961-05-17 | 1965-07-20 | Gen Electric | Method for making an electrode structure |
| US3154711A (en) * | 1961-06-19 | 1964-10-27 | Gen Electric | Electron beam focusing by means of contact differences of potential |
| US3278779A (en) * | 1962-05-17 | 1966-10-11 | Rauland Corp | Cathode-ray tube having an insulating spacer between the cathode and the control grid |
| US3297902A (en) * | 1965-12-22 | 1967-01-10 | Gen Electric | Electron discharge device having a laminated and finely reticulated grid structure therein |
| US3463978A (en) * | 1966-12-22 | 1969-08-26 | Machlett Lab Inc | Monolithic electrode for electron tubes |
| US3694260A (en) * | 1970-05-21 | 1972-09-26 | James E Beggs | Bonded heater,cathode,control electrode structure and method of manufacture |
| US3662209A (en) * | 1970-05-21 | 1972-05-09 | Gen Electric | Electron discharge device with helical conductor providing swap fit |
| US3599031A (en) * | 1970-05-21 | 1971-08-10 | Gen Electric | Bonded heater, cathode, control electrode structure |
| US3638062A (en) * | 1970-10-23 | 1972-01-25 | Gen Electric | Support for composite electrode structure |
-
1976
- 1976-05-10 US US05/684,689 patent/US4096406A/en not_active Expired - Lifetime
-
1977
- 1977-04-19 IL IL51913A patent/IL51913A/xx unknown
- 1977-05-03 DE DE19772719660 patent/DE2719660A1/de not_active Withdrawn
- 1977-05-03 GB GB18473/77A patent/GB1551867A/en not_active Expired
- 1977-05-06 FR FR7713969A patent/FR2351489A1/fr active Granted
- 1977-05-09 JP JP5213577A patent/JPS52136559A/ja active Granted
- 1977-05-09 CA CA278,003A patent/CA1085907A/en not_active Expired
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE857540C (de) * | 1950-12-28 | 1952-12-01 | Siemens Ag | Elektrodensystem fuer elektrische Entladungsgefaesse |
| US2889483A (en) * | 1954-09-01 | 1959-06-02 | Sylvania Electric Prod | Glass base grid |
| US2883576A (en) * | 1955-04-04 | 1959-04-21 | Gen Electric | Thermionic valves |
| DE1232272B (de) * | 1964-02-13 | 1967-01-12 | Telefunken Patent | Scheibenfoermiges Gitter fuer Elektronenstrahlroehren |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2917269A1 (de) * | 1978-05-03 | 1979-11-15 | Varian Associates | Steuergitter fuer eine elektronenquelle |
Also Published As
| Publication number | Publication date |
|---|---|
| FR2351489B1 (OSRAM) | 1981-08-07 |
| FR2351489A1 (fr) | 1977-12-09 |
| JPS5737093B2 (OSRAM) | 1982-08-07 |
| JPS52136559A (en) | 1977-11-15 |
| CA1085907A (en) | 1980-09-16 |
| US4096406A (en) | 1978-06-20 |
| IL51913A (en) | 1980-05-30 |
| GB1551867A (en) | 1979-09-05 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| DE2719660A1 (de) | Steuergitter fuer eine elektronenquelle, damit ausgestattete elektronenquelle und verfahren zu deren herstellung | |
| DE2602649C2 (OSRAM) | ||
| DE2536363C3 (de) | Dünnschicht-Feldelektronenemissionsquelle and Verfahren zu ihrer Herstellung | |
| DE4026301A1 (de) | Elektronenemitter einer roentgenroehre | |
| DE2917269A1 (de) | Steuergitter fuer eine elektronenquelle | |
| DE2612285C3 (de) | Direkt geheizte Vorratskathode für Elektronenröhren | |
| DE3341397A1 (de) | Verfahren zur herstellung einer anzeigevorrichtung und danach hergestellte anzeigevorrichtung | |
| DE69601957T2 (de) | Wellenförmige Stützsäulen einer Feldemissionsvorrichtung mit einer diskontinuierlichen leitfähigen Schicht | |
| EP0662703A1 (de) | Steuerbarer thermionischer Elektronenemitter | |
| DE4325340A1 (de) | Kathodenabstützeinrichtung für ein Magnetron | |
| DE2139582C3 (de) | Magnetron | |
| DE19728679A1 (de) | Kathode für die Elektronenkanone einer Kathodenstrahlröhre | |
| DE1149114B (de) | Verfahren zum Herstellen eines Wasserstoffergaenzers fuer eine elektrische Entladungsroehre, ferner mit einem so hergestellten Wasserstoff-ergaenzer versehene Gasentladungsroehre, sowie Verwendung so hergestellter Wasser-stoffergaenzer in einem Neutronengenerator | |
| DE1226229B (de) | Emitteranordnung fuer elektronische Festkoerperbauelemente und elektronisches Festkoerperbauelement | |
| US3212169A (en) | Grid electrode structure and manufacturing method therefor | |
| DE1244310B (de) | Elektrisch verstaerkendes Bauelement mit duennen isolierenden Festkoerperschichten | |
| US1432867A (en) | Electron-discharge device and method of making the same | |
| US3717503A (en) | Method of constructing a vapor deposited bi-potential cathode | |
| CH650102A5 (de) | Elektronenroehre mit einer anode und einer elektronenquellenbaugruppe. | |
| DE818821C (de) | Elektronenentladevorrichtung | |
| DE102022109499B4 (de) | Röntgenröhre | |
| DE2415384C3 (de) | Direkt geheizte Kathode für eine Elektronenröhre mit koaxialem Elektrodenaufbau | |
| EP0378793B1 (de) | Elektronenemissions-Kathode, Verfahren zum Herstellen und Elektronenstrahlerzeuger mit einer solchen Elektronenemissions-Kathode sowie Vakuumbehandlungsanlage | |
| EP1364382B1 (de) | Vorrichtung zur erzeugung von mikrowellen hoher frequenz | |
| DE2325136C3 (OSRAM) |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8110 | Request for examination paragraph 44 | ||
| 8128 | New person/name/address of the agent |
Representative=s name: BERNHARDT, K., DIPL.-ING., PAT.-ANW., 8000 MUENCHE |
|
| Q176 | The application caused the suspense of an application |
Ref document number: 2917269 Country of ref document: DE |
|
| 8128 | New person/name/address of the agent |
Representative=s name: BLUMBACH, P., DIPL.-ING., 6200 WIESBADEN WESER, W. |
|
| 8139 | Disposal/non-payment of the annual fee |