DE2709945C2 - Kapazitiver Druckwandler - Google Patents

Kapazitiver Druckwandler

Info

Publication number
DE2709945C2
DE2709945C2 DE19772709945 DE2709945A DE2709945C2 DE 2709945 C2 DE2709945 C2 DE 2709945C2 DE 19772709945 DE19772709945 DE 19772709945 DE 2709945 A DE2709945 A DE 2709945A DE 2709945 C2 DE2709945 C2 DE 2709945C2
Authority
DE
Germany
Prior art keywords
pressure transducer
pressure
capacitive
plates
glass frit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE19772709945
Other languages
German (de)
English (en)
Other versions
DE2709945A1 (de
Inventor
Robert Lee Chatsworth Calif. Bell
Fred Woodland Hills Calif. Kavli
Robert Anaheim Calif. Willing
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KAVLICO CORP CHATSWORTH CALIF US
Original Assignee
KAVLICO CORP CHATSWORTH CALIF US
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KAVLICO CORP CHATSWORTH CALIF US filed Critical KAVLICO CORP CHATSWORTH CALIF US
Publication of DE2709945A1 publication Critical patent/DE2709945A1/de
Application granted granted Critical
Publication of DE2709945C2 publication Critical patent/DE2709945C2/de
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0082—Transmitting or indicating the displacement of capsules by electric, electromechanical, magnetic, or electromechanical means
    • G01L9/0086—Transmitting or indicating the displacement of capsules by electric, electromechanical, magnetic, or electromechanical means using variations in capacitance

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Measuring Fluid Pressure (AREA)
DE19772709945 1976-03-12 1977-03-08 Kapazitiver Druckwandler Expired DE2709945C2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US66618876A 1976-03-12 1976-03-12

Publications (2)

Publication Number Publication Date
DE2709945A1 DE2709945A1 (de) 1977-09-15
DE2709945C2 true DE2709945C2 (de) 1986-07-17

Family

ID=24673185

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19772709945 Expired DE2709945C2 (de) 1976-03-12 1977-03-08 Kapazitiver Druckwandler

Country Status (4)

Country Link
JP (1) JPS6034687B2 (enExample)
DE (1) DE2709945C2 (enExample)
FR (1) FR2344006A1 (enExample)
GB (1) GB1563894A (enExample)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3703697A1 (de) * 1986-02-10 1987-08-13 Marelli Autronica Drucksensor
DE3811047A1 (de) * 1988-03-31 1989-10-12 Draegerwerk Ag Fuehler zur kapazitiven messung des druckes in gasen
DE3942020A1 (de) * 1989-12-20 1991-07-04 Vega Grieshaber Gmbh & Co Druckaufnehmer fuer hydrostatische fuellstandsmessung mit einem kapazitiven druckwandler
DE4000326A1 (de) * 1990-01-08 1991-07-11 Degussa Drucksensor
EP0480170A3 (en) * 1990-10-08 1993-03-17 Leybold Aktiengesellschaft Sensor for a capacitive manometer
WO1997038291A1 (en) * 1996-04-10 1997-10-16 Samba Sensors Ab Device for measuring pressure
DE102011051441A1 (de) * 2011-06-29 2013-01-03 CiS Forschungsinstitut für Mikrosensorik und Photovoltaik GmbH Druckwandlungsbasierter Sensor zur Bestimmung einer Messgrösse in einem Medium

Families Citing this family (39)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5516228A (en) * 1978-07-21 1980-02-04 Hitachi Ltd Capacity type sensor
US4238662A (en) * 1978-10-02 1980-12-09 The Bendix Corporation Pressure-sensing capacitor and method of trimming same
US4238661A (en) * 1978-10-02 1980-12-09 The Bendix Corporation Pressure-sensing capacitor and method of trimming same
JPS5565128A (en) * 1978-11-09 1980-05-16 Vaisala Oy Pressure gauge
FR2442439A1 (fr) * 1978-11-24 1980-06-20 Vaisala Oy Manometre aneroide
DE2903994A1 (de) * 1979-02-02 1980-08-07 Sprenger Albin Kg Luftdruckgeber
US4288835A (en) * 1979-04-16 1981-09-08 The Bendix Corporation Pressure sensor
US4340409A (en) 1979-04-16 1982-07-20 The Bendix Corporation Method of fabricating a pressure sensor
CA1159524A (en) * 1979-04-16 1983-12-27 Mark A. Brooks Method of fabricating a pressure sensor
US4382247A (en) * 1980-03-06 1983-05-03 Robert Bosch Gmbh Pressure sensor
DE3108300C2 (de) * 1980-03-06 1986-05-28 Robert Bosch Gmbh, 7000 Stuttgart Druckmeßdose und Verfahren zu deren Herstellung
US4287553A (en) * 1980-06-06 1981-09-01 The Bendix Corporation Capacitive pressure transducer
US4558600A (en) * 1982-03-18 1985-12-17 Setra Systems, Inc. Force transducer
US4899600A (en) * 1981-05-19 1990-02-13 Setra Systems, Inc. Compact force transducer with mechanical motion amplification
US4649759A (en) * 1981-05-19 1987-03-17 Setra Systems, Inc. Force transducer
US4389895A (en) * 1981-07-27 1983-06-28 Rosemount Inc. Capacitance pressure sensor
US4425799A (en) * 1982-06-03 1984-01-17 Kavlico Corporation Liquid capacitance pressure transducer technique
DE3238430A1 (de) * 1982-10-16 1984-04-19 Philips Patentverwaltung Gmbh, 2000 Hamburg Differenzdrucksensor
JPS59171826A (ja) * 1983-03-22 1984-09-28 Copal Takeda Medical Kenkyusho:Kk 静電容量型圧力センサ−の温度補償装置
JPS60133335A (ja) * 1983-12-22 1985-07-16 Yokogawa Hokushin Electric Corp 圧力センサ
JPH0750789B2 (ja) * 1986-07-18 1995-05-31 日産自動車株式会社 半導体圧力変換装置の製造方法
JPH0652212B2 (ja) * 1986-12-12 1994-07-06 富士電機株式会社 静電容量式圧力センサにおけるギヤツプ形成方法
JPH061228B2 (ja) * 1987-08-13 1994-01-05 富士電機株式会社 静電容量式圧力検出器
DE3733766A1 (de) * 1987-10-06 1989-04-27 Murata Elektronik Gmbh Verfahren zum herstellen eines drucksensors
FR2632069B1 (fr) * 1988-05-30 1990-12-14 Garcia Manuel Capteur de detection par vitesse de variation d'impedance ou par variation d'impedance
DE3901492A1 (de) * 1988-07-22 1990-01-25 Endress Hauser Gmbh Co Drucksensor und verfahren zu seiner herstellung
DE8815425U1 (de) * 1988-12-12 1990-04-12 Fibronix Sensoren GmbH, 2300 Kiel Überlastfester kapazitiver Drucksensor
DE3909185A1 (de) * 1989-03-21 1990-09-27 Endress Hauser Gmbh Co Kapazitiver drucksensor und verfahren zu seiner herstellung
DE3910646A1 (de) * 1989-04-01 1990-10-04 Endress Hauser Gmbh Co Kapazitiver drucksensor und verfahren zu seiner herstellung
DE3912217A1 (de) * 1989-04-13 1990-10-18 Endress Hauser Gmbh Co Drucksensor
DE3932443C1 (enExample) * 1989-09-28 1990-12-20 Endress U. Hauser Gmbh U. Co, 7864 Maulburg, De
DE3933512A1 (de) * 1989-10-06 1991-04-18 Endress Hauser Gmbh Co Differenzdruckmessgeraet
DE9013959U1 (de) * 1990-10-08 1990-12-13 Leybold AG, 6450 Hanau Sensor für ein Kapazitäts-Manometer
DE59607726D1 (de) * 1996-10-04 2001-10-25 Endress Hauser Gmbh Co Verfahren zum Verbinden von Aluminiumoxid-Keramik-Körpern
US5954900A (en) * 1996-10-04 1999-09-21 Envec Mess- Und Regeltechnik Gmbh + Co. Process for joining alumina ceramic bodies
EP0962752B1 (en) * 1998-06-05 2002-08-21 Honeywell International Inc. Method for making glass pressure capacitance transducers in batch
WO2008042903A2 (en) * 2006-10-03 2008-04-10 Kla-Tencor Technologies Corporation Systems for sensing pressure/shear force
DE202014007298U1 (de) 2014-09-12 2015-12-16 Vacuubrand Gmbh + Co Kg Gasdruckmessvorichtung
DE102014013270A1 (de) 2014-09-12 2016-03-17 Vaccubrand Gmbh + Co Kg Gasdruckmessvorrichtung

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3153156A (en) * 1962-05-17 1964-10-13 Frank W Watlington Pressure-proof ceramic transducer
US3634727A (en) * 1968-12-03 1972-01-11 Bendix Corp Capacitance-type pressure transducer
DE2021479A1 (de) * 1970-05-02 1971-11-11 Kleinwaechter Hans Druckmessgeraet zur Messung von Drucken in Gasen und Fluessigkeiten
US3715638A (en) * 1971-05-10 1973-02-06 Bendix Corp Temperature compensator for capacitive pressure transducers
US3858097A (en) * 1973-12-26 1974-12-31 Bendix Corp Pressure-sensing capacitor

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3703697A1 (de) * 1986-02-10 1987-08-13 Marelli Autronica Drucksensor
DE3811047A1 (de) * 1988-03-31 1989-10-12 Draegerwerk Ag Fuehler zur kapazitiven messung des druckes in gasen
DE3942020A1 (de) * 1989-12-20 1991-07-04 Vega Grieshaber Gmbh & Co Druckaufnehmer fuer hydrostatische fuellstandsmessung mit einem kapazitiven druckwandler
DE4000326A1 (de) * 1990-01-08 1991-07-11 Degussa Drucksensor
EP0480170A3 (en) * 1990-10-08 1993-03-17 Leybold Aktiengesellschaft Sensor for a capacitive manometer
WO1997038291A1 (en) * 1996-04-10 1997-10-16 Samba Sensors Ab Device for measuring pressure
DE102011051441A1 (de) * 2011-06-29 2013-01-03 CiS Forschungsinstitut für Mikrosensorik und Photovoltaik GmbH Druckwandlungsbasierter Sensor zur Bestimmung einer Messgrösse in einem Medium
DE102011051441B4 (de) * 2011-06-29 2018-10-25 CiS Forschungsinstitut für Mikrosensorik und Photovoltaik GmbH Druckwandlungsbasierter Sensor zur Bestimmung einer Messgröße in einem Medium

Also Published As

Publication number Publication date
GB1563894A (en) 1980-04-02
JPS52123283A (en) 1977-10-17
DE2709945A1 (de) 1977-09-15
FR2344006B1 (enExample) 1983-07-01
JPS6034687B2 (ja) 1985-08-10
FR2344006A1 (fr) 1977-10-07

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Legal Events

Date Code Title Description
D2 Grant after examination
8364 No opposition during term of opposition