JPS6034687B2 - 圧力電子変換素子 - Google Patents

圧力電子変換素子

Info

Publication number
JPS6034687B2
JPS6034687B2 JP51150679A JP15067976A JPS6034687B2 JP S6034687 B2 JPS6034687 B2 JP S6034687B2 JP 51150679 A JP51150679 A JP 51150679A JP 15067976 A JP15067976 A JP 15067976A JP S6034687 B2 JPS6034687 B2 JP S6034687B2
Authority
JP
Japan
Prior art keywords
pressure
conductive
conductive layer
pair
members
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP51150679A
Other languages
English (en)
Japanese (ja)
Other versions
JPS52123283A (en
Inventor
ロバ−ト・リ−・ベル
ロバ−ト・ウイリング
フレツド・カブリ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kavlico Corp
Original Assignee
Kavlico Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kavlico Corp filed Critical Kavlico Corp
Publication of JPS52123283A publication Critical patent/JPS52123283A/ja
Publication of JPS6034687B2 publication Critical patent/JPS6034687B2/ja
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0082—Transmitting or indicating the displacement of capsules by electric, electromechanical, magnetic, or electromechanical means
    • G01L9/0086—Transmitting or indicating the displacement of capsules by electric, electromechanical, magnetic, or electromechanical means using variations in capacitance

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Measuring Fluid Pressure (AREA)
JP51150679A 1976-03-12 1976-12-14 圧力電子変換素子 Expired JPS6034687B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US66618876A 1976-03-12 1976-03-12
US666188 1996-06-19

Publications (2)

Publication Number Publication Date
JPS52123283A JPS52123283A (en) 1977-10-17
JPS6034687B2 true JPS6034687B2 (ja) 1985-08-10

Family

ID=24673185

Family Applications (1)

Application Number Title Priority Date Filing Date
JP51150679A Expired JPS6034687B2 (ja) 1976-03-12 1976-12-14 圧力電子変換素子

Country Status (4)

Country Link
JP (1) JPS6034687B2 (enExample)
DE (1) DE2709945C2 (enExample)
FR (1) FR2344006A1 (enExample)
GB (1) GB1563894A (enExample)

Families Citing this family (46)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5516228A (en) * 1978-07-21 1980-02-04 Hitachi Ltd Capacity type sensor
US4238662A (en) * 1978-10-02 1980-12-09 The Bendix Corporation Pressure-sensing capacitor and method of trimming same
US4238661A (en) * 1978-10-02 1980-12-09 The Bendix Corporation Pressure-sensing capacitor and method of trimming same
JPS5565128A (en) * 1978-11-09 1980-05-16 Vaisala Oy Pressure gauge
FR2442439A1 (fr) * 1978-11-24 1980-06-20 Vaisala Oy Manometre aneroide
DE2903994A1 (de) * 1979-02-02 1980-08-07 Sprenger Albin Kg Luftdruckgeber
US4288835A (en) * 1979-04-16 1981-09-08 The Bendix Corporation Pressure sensor
US4340409A (en) 1979-04-16 1982-07-20 The Bendix Corporation Method of fabricating a pressure sensor
CA1159524A (en) * 1979-04-16 1983-12-27 Mark A. Brooks Method of fabricating a pressure sensor
US4382247A (en) * 1980-03-06 1983-05-03 Robert Bosch Gmbh Pressure sensor
DE3108300C2 (de) * 1980-03-06 1986-05-28 Robert Bosch Gmbh, 7000 Stuttgart Druckmeßdose und Verfahren zu deren Herstellung
US4287553A (en) * 1980-06-06 1981-09-01 The Bendix Corporation Capacitive pressure transducer
US4558600A (en) * 1982-03-18 1985-12-17 Setra Systems, Inc. Force transducer
US4899600A (en) * 1981-05-19 1990-02-13 Setra Systems, Inc. Compact force transducer with mechanical motion amplification
US4649759A (en) * 1981-05-19 1987-03-17 Setra Systems, Inc. Force transducer
US4389895A (en) * 1981-07-27 1983-06-28 Rosemount Inc. Capacitance pressure sensor
US4425799A (en) * 1982-06-03 1984-01-17 Kavlico Corporation Liquid capacitance pressure transducer technique
DE3238430A1 (de) * 1982-10-16 1984-04-19 Philips Patentverwaltung Gmbh, 2000 Hamburg Differenzdrucksensor
JPS59171826A (ja) * 1983-03-22 1984-09-28 Copal Takeda Medical Kenkyusho:Kk 静電容量型圧力センサ−の温度補償装置
JPS60133335A (ja) * 1983-12-22 1985-07-16 Yokogawa Hokushin Electric Corp 圧力センサ
IT1187900B (it) * 1986-02-10 1987-12-23 Marelli Autronica Dispositivo sensore di pressione
JPH0750789B2 (ja) * 1986-07-18 1995-05-31 日産自動車株式会社 半導体圧力変換装置の製造方法
JPH0652212B2 (ja) * 1986-12-12 1994-07-06 富士電機株式会社 静電容量式圧力センサにおけるギヤツプ形成方法
JPH061228B2 (ja) * 1987-08-13 1994-01-05 富士電機株式会社 静電容量式圧力検出器
DE3733766A1 (de) * 1987-10-06 1989-04-27 Murata Elektronik Gmbh Verfahren zum herstellen eines drucksensors
DE3811047A1 (de) * 1988-03-31 1989-10-12 Draegerwerk Ag Fuehler zur kapazitiven messung des druckes in gasen
FR2632069B1 (fr) * 1988-05-30 1990-12-14 Garcia Manuel Capteur de detection par vitesse de variation d'impedance ou par variation d'impedance
DE3901492A1 (de) * 1988-07-22 1990-01-25 Endress Hauser Gmbh Co Drucksensor und verfahren zu seiner herstellung
DE8815425U1 (de) * 1988-12-12 1990-04-12 Fibronix Sensoren GmbH, 2300 Kiel Überlastfester kapazitiver Drucksensor
DE3909185A1 (de) * 1989-03-21 1990-09-27 Endress Hauser Gmbh Co Kapazitiver drucksensor und verfahren zu seiner herstellung
DE3910646A1 (de) * 1989-04-01 1990-10-04 Endress Hauser Gmbh Co Kapazitiver drucksensor und verfahren zu seiner herstellung
DE3912217A1 (de) * 1989-04-13 1990-10-18 Endress Hauser Gmbh Co Drucksensor
DE3932443C1 (enExample) * 1989-09-28 1990-12-20 Endress U. Hauser Gmbh U. Co, 7864 Maulburg, De
DE3933512A1 (de) * 1989-10-06 1991-04-18 Endress Hauser Gmbh Co Differenzdruckmessgeraet
DE3942020C2 (de) * 1989-12-20 1993-11-04 Vega Grieshaber Gmbh & Co Druckaufnehmer fuer hydrostatische fuellstandsmessung mit einem kapazitiven druckwandler
DE4000326C2 (de) * 1990-01-08 1995-12-14 Mannesmann Ag Drucksensor
DE9013959U1 (de) * 1990-10-08 1990-12-13 Leybold AG, 6450 Hanau Sensor für ein Kapazitäts-Manometer
DE4031791A1 (de) * 1990-10-08 1992-04-09 Leybold Ag Sensor fuer ein kapazitaetsmanometer
SE9601336L (sv) * 1996-04-10 1997-10-11 Samba Sensors Ab Anordning för mätning av tryck
DE59607726D1 (de) * 1996-10-04 2001-10-25 Endress Hauser Gmbh Co Verfahren zum Verbinden von Aluminiumoxid-Keramik-Körpern
US5954900A (en) * 1996-10-04 1999-09-21 Envec Mess- Und Regeltechnik Gmbh + Co. Process for joining alumina ceramic bodies
EP0962752B1 (en) * 1998-06-05 2002-08-21 Honeywell International Inc. Method for making glass pressure capacitance transducers in batch
WO2008042903A2 (en) * 2006-10-03 2008-04-10 Kla-Tencor Technologies Corporation Systems for sensing pressure/shear force
DE102011051441B4 (de) 2011-06-29 2018-10-25 CiS Forschungsinstitut für Mikrosensorik und Photovoltaik GmbH Druckwandlungsbasierter Sensor zur Bestimmung einer Messgröße in einem Medium
DE202014007298U1 (de) 2014-09-12 2015-12-16 Vacuubrand Gmbh + Co Kg Gasdruckmessvorichtung
DE102014013270A1 (de) 2014-09-12 2016-03-17 Vaccubrand Gmbh + Co Kg Gasdruckmessvorrichtung

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3153156A (en) * 1962-05-17 1964-10-13 Frank W Watlington Pressure-proof ceramic transducer
US3634727A (en) * 1968-12-03 1972-01-11 Bendix Corp Capacitance-type pressure transducer
DE2021479A1 (de) * 1970-05-02 1971-11-11 Kleinwaechter Hans Druckmessgeraet zur Messung von Drucken in Gasen und Fluessigkeiten
US3715638A (en) * 1971-05-10 1973-02-06 Bendix Corp Temperature compensator for capacitive pressure transducers
US3858097A (en) * 1973-12-26 1974-12-31 Bendix Corp Pressure-sensing capacitor

Also Published As

Publication number Publication date
DE2709945C2 (de) 1986-07-17
GB1563894A (en) 1980-04-02
JPS52123283A (en) 1977-10-17
DE2709945A1 (de) 1977-09-15
FR2344006B1 (enExample) 1983-07-01
FR2344006A1 (fr) 1977-10-07

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