FR2344006A1 - Transducteur de pression capacitif et procede de fabrication d'un tel transducteur - Google Patents

Transducteur de pression capacitif et procede de fabrication d'un tel transducteur

Info

Publication number
FR2344006A1
FR2344006A1 FR7639183A FR7639183A FR2344006A1 FR 2344006 A1 FR2344006 A1 FR 2344006A1 FR 7639183 A FR7639183 A FR 7639183A FR 7639183 A FR7639183 A FR 7639183A FR 2344006 A1 FR2344006 A1 FR 2344006A1
Authority
FR
France
Prior art keywords
transducer
manufacturing
capacitive pressure
pressure transducer
capacitive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7639183A
Other languages
English (en)
French (fr)
Other versions
FR2344006B1 (enExample
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kavlico Corp
Original Assignee
Kavlico Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kavlico Corp filed Critical Kavlico Corp
Publication of FR2344006A1 publication Critical patent/FR2344006A1/fr
Application granted granted Critical
Publication of FR2344006B1 publication Critical patent/FR2344006B1/fr
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0082—Transmitting or indicating the displacement of capsules by electric, electromechanical, magnetic, or electromechanical means
    • G01L9/0086—Transmitting or indicating the displacement of capsules by electric, electromechanical, magnetic, or electromechanical means using variations in capacitance

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Measuring Fluid Pressure (AREA)
FR7639183A 1976-03-12 1976-12-27 Transducteur de pression capacitif et procede de fabrication d'un tel transducteur Granted FR2344006A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US66618876A 1976-03-12 1976-03-12

Publications (2)

Publication Number Publication Date
FR2344006A1 true FR2344006A1 (fr) 1977-10-07
FR2344006B1 FR2344006B1 (enExample) 1983-07-01

Family

ID=24673185

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7639183A Granted FR2344006A1 (fr) 1976-03-12 1976-12-27 Transducteur de pression capacitif et procede de fabrication d'un tel transducteur

Country Status (4)

Country Link
JP (1) JPS6034687B2 (enExample)
DE (1) DE2709945C2 (enExample)
FR (1) FR2344006A1 (enExample)
GB (1) GB1563894A (enExample)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0007596A1 (en) * 1978-07-21 1980-02-06 Hitachi, Ltd. Capacitive pressure sensor
FR2442439A1 (fr) * 1978-11-24 1980-06-20 Vaisala Oy Manometre aneroide
FR2449277A1 (fr) * 1978-10-02 1980-09-12 Bendix Corp Procede d'etalonnage d'un condensateur par rayon laser
FR2450500A1 (fr) * 1978-10-02 1980-09-26 Bendix Corp Condensateur formant sonde de pression et procede pour etalonner ce condensateur
EP0018284A1 (en) * 1979-04-16 1980-10-29 The Bendix Corporation Method of vacuum sealing a capacitive pressure capsule
EP0018283A1 (en) * 1979-04-16 1980-10-29 The Bendix Corporation Pressure sensor
FR2477709A1 (fr) * 1980-03-06 1981-09-11 Bosch Gmbh Robert Capsule manometrique
US4340409A (en) 1979-04-16 1982-07-20 The Bendix Corporation Method of fabricating a pressure sensor
FR2632069A1 (fr) * 1988-05-30 1989-12-01 Garcia Manuel Capteur de detection par vitesse de variation d'impedance ou par variation d'impedance
EP0962752A1 (en) * 1998-06-05 1999-12-08 AlliedSignal Inc. Method for making glass pressure capacitance transducers in batch

Families Citing this family (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5565128A (en) * 1978-11-09 1980-05-16 Vaisala Oy Pressure gauge
DE2903994A1 (de) * 1979-02-02 1980-08-07 Sprenger Albin Kg Luftdruckgeber
DE3108300C2 (de) * 1980-03-06 1986-05-28 Robert Bosch Gmbh, 7000 Stuttgart Druckmeßdose und Verfahren zu deren Herstellung
US4287553A (en) * 1980-06-06 1981-09-01 The Bendix Corporation Capacitive pressure transducer
US4558600A (en) * 1982-03-18 1985-12-17 Setra Systems, Inc. Force transducer
US4899600A (en) * 1981-05-19 1990-02-13 Setra Systems, Inc. Compact force transducer with mechanical motion amplification
US4649759A (en) * 1981-05-19 1987-03-17 Setra Systems, Inc. Force transducer
US4389895A (en) * 1981-07-27 1983-06-28 Rosemount Inc. Capacitance pressure sensor
US4425799A (en) * 1982-06-03 1984-01-17 Kavlico Corporation Liquid capacitance pressure transducer technique
DE3238430A1 (de) * 1982-10-16 1984-04-19 Philips Patentverwaltung Gmbh, 2000 Hamburg Differenzdrucksensor
JPS59171826A (ja) * 1983-03-22 1984-09-28 Copal Takeda Medical Kenkyusho:Kk 静電容量型圧力センサ−の温度補償装置
JPS60133335A (ja) * 1983-12-22 1985-07-16 Yokogawa Hokushin Electric Corp 圧力センサ
IT1187900B (it) * 1986-02-10 1987-12-23 Marelli Autronica Dispositivo sensore di pressione
JPH0750789B2 (ja) * 1986-07-18 1995-05-31 日産自動車株式会社 半導体圧力変換装置の製造方法
JPH0652212B2 (ja) * 1986-12-12 1994-07-06 富士電機株式会社 静電容量式圧力センサにおけるギヤツプ形成方法
JPH061228B2 (ja) * 1987-08-13 1994-01-05 富士電機株式会社 静電容量式圧力検出器
DE3733766A1 (de) * 1987-10-06 1989-04-27 Murata Elektronik Gmbh Verfahren zum herstellen eines drucksensors
DE3811047A1 (de) * 1988-03-31 1989-10-12 Draegerwerk Ag Fuehler zur kapazitiven messung des druckes in gasen
DE3901492A1 (de) * 1988-07-22 1990-01-25 Endress Hauser Gmbh Co Drucksensor und verfahren zu seiner herstellung
DE8815425U1 (de) * 1988-12-12 1990-04-12 Fibronix Sensoren GmbH, 2300 Kiel Überlastfester kapazitiver Drucksensor
DE3909185A1 (de) * 1989-03-21 1990-09-27 Endress Hauser Gmbh Co Kapazitiver drucksensor und verfahren zu seiner herstellung
DE3910646A1 (de) * 1989-04-01 1990-10-04 Endress Hauser Gmbh Co Kapazitiver drucksensor und verfahren zu seiner herstellung
DE3912217A1 (de) * 1989-04-13 1990-10-18 Endress Hauser Gmbh Co Drucksensor
DE3932443C1 (enExample) * 1989-09-28 1990-12-20 Endress U. Hauser Gmbh U. Co, 7864 Maulburg, De
DE3933512A1 (de) * 1989-10-06 1991-04-18 Endress Hauser Gmbh Co Differenzdruckmessgeraet
DE3942020C2 (de) * 1989-12-20 1993-11-04 Vega Grieshaber Gmbh & Co Druckaufnehmer fuer hydrostatische fuellstandsmessung mit einem kapazitiven druckwandler
DE4000326C2 (de) * 1990-01-08 1995-12-14 Mannesmann Ag Drucksensor
DE9013959U1 (de) * 1990-10-08 1990-12-13 Leybold AG, 6450 Hanau Sensor für ein Kapazitäts-Manometer
DE4031791A1 (de) * 1990-10-08 1992-04-09 Leybold Ag Sensor fuer ein kapazitaetsmanometer
SE9601336L (sv) * 1996-04-10 1997-10-11 Samba Sensors Ab Anordning för mätning av tryck
DE59607726D1 (de) * 1996-10-04 2001-10-25 Endress Hauser Gmbh Co Verfahren zum Verbinden von Aluminiumoxid-Keramik-Körpern
US5954900A (en) * 1996-10-04 1999-09-21 Envec Mess- Und Regeltechnik Gmbh + Co. Process for joining alumina ceramic bodies
WO2008042903A2 (en) * 2006-10-03 2008-04-10 Kla-Tencor Technologies Corporation Systems for sensing pressure/shear force
DE102011051441B4 (de) 2011-06-29 2018-10-25 CiS Forschungsinstitut für Mikrosensorik und Photovoltaik GmbH Druckwandlungsbasierter Sensor zur Bestimmung einer Messgröße in einem Medium
DE202014007298U1 (de) 2014-09-12 2015-12-16 Vacuubrand Gmbh + Co Kg Gasdruckmessvorichtung
DE102014013270A1 (de) 2014-09-12 2016-03-17 Vaccubrand Gmbh + Co Kg Gasdruckmessvorrichtung

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3153156A (en) * 1962-05-17 1964-10-13 Frank W Watlington Pressure-proof ceramic transducer
DE2021479A1 (de) * 1970-05-02 1971-11-11 Kleinwaechter Hans Druckmessgeraet zur Messung von Drucken in Gasen und Fluessigkeiten
US3634727A (en) * 1968-12-03 1972-01-11 Bendix Corp Capacitance-type pressure transducer
US3715638A (en) * 1971-05-10 1973-02-06 Bendix Corp Temperature compensator for capacitive pressure transducers
US3858097A (en) * 1973-12-26 1974-12-31 Bendix Corp Pressure-sensing capacitor

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3153156A (en) * 1962-05-17 1964-10-13 Frank W Watlington Pressure-proof ceramic transducer
US3634727A (en) * 1968-12-03 1972-01-11 Bendix Corp Capacitance-type pressure transducer
DE2021479A1 (de) * 1970-05-02 1971-11-11 Kleinwaechter Hans Druckmessgeraet zur Messung von Drucken in Gasen und Fluessigkeiten
US3715638A (en) * 1971-05-10 1973-02-06 Bendix Corp Temperature compensator for capacitive pressure transducers
US3858097A (en) * 1973-12-26 1974-12-31 Bendix Corp Pressure-sensing capacitor

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0059488A1 (en) * 1978-07-21 1982-09-08 Hitachi, Ltd. Capacitive pressure sensor
EP0007596A1 (en) * 1978-07-21 1980-02-06 Hitachi, Ltd. Capacitive pressure sensor
FR2449277A1 (fr) * 1978-10-02 1980-09-12 Bendix Corp Procede d'etalonnage d'un condensateur par rayon laser
FR2450500A1 (fr) * 1978-10-02 1980-09-26 Bendix Corp Condensateur formant sonde de pression et procede pour etalonner ce condensateur
FR2442439A1 (fr) * 1978-11-24 1980-06-20 Vaisala Oy Manometre aneroide
EP0018284A1 (en) * 1979-04-16 1980-10-29 The Bendix Corporation Method of vacuum sealing a capacitive pressure capsule
EP0018283A1 (en) * 1979-04-16 1980-10-29 The Bendix Corporation Pressure sensor
US4340409A (en) 1979-04-16 1982-07-20 The Bendix Corporation Method of fabricating a pressure sensor
FR2477709A1 (fr) * 1980-03-06 1981-09-11 Bosch Gmbh Robert Capsule manometrique
FR2632069A1 (fr) * 1988-05-30 1989-12-01 Garcia Manuel Capteur de detection par vitesse de variation d'impedance ou par variation d'impedance
EP0345181A1 (fr) * 1988-05-30 1989-12-06 Manuel Garcia Procédé et dispositif de détection et de reconnaissance d'impact par mesure de variation d'impédance
US4990897A (en) * 1988-05-30 1991-02-05 Manuel J. Garcia Method and apparatus for detecting and recognizing impacts by measuring impedance variation
EP0962752A1 (en) * 1998-06-05 1999-12-08 AlliedSignal Inc. Method for making glass pressure capacitance transducers in batch

Also Published As

Publication number Publication date
DE2709945C2 (de) 1986-07-17
GB1563894A (en) 1980-04-02
JPS52123283A (en) 1977-10-17
DE2709945A1 (de) 1977-09-15
FR2344006B1 (enExample) 1983-07-01
JPS6034687B2 (ja) 1985-08-10

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Legal Events

Date Code Title Description
ST Notification of lapse
RN Application for restoration
FC Favourable decision of inpi director general on an application for restauration.