DE2642208C2 - Polierfolie bzw. Polierplatte - Google Patents
Polierfolie bzw. PolierplatteInfo
- Publication number
- DE2642208C2 DE2642208C2 DE2642208A DE2642208A DE2642208C2 DE 2642208 C2 DE2642208 C2 DE 2642208C2 DE 2642208 A DE2642208 A DE 2642208A DE 2642208 A DE2642208 A DE 2642208A DE 2642208 C2 DE2642208 C2 DE 2642208C2
- Authority
- DE
- Germany
- Prior art keywords
- polishing
- plate
- metallic
- foil
- polished
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005498 polishing Methods 0.000 title claims description 63
- 239000011888 foil Substances 0.000 title description 7
- 238000000576 coating method Methods 0.000 claims description 8
- 239000011248 coating agent Substances 0.000 claims description 7
- 150000001875 compounds Chemical class 0.000 claims 1
- 239000004033 plastic Substances 0.000 description 10
- 239000003795 chemical substances by application Substances 0.000 description 8
- 229910003460 diamond Inorganic materials 0.000 description 7
- 239000010432 diamond Substances 0.000 description 7
- 230000000694 effects Effects 0.000 description 7
- 229910052751 metal Inorganic materials 0.000 description 7
- 239000002184 metal Substances 0.000 description 7
- 229910052782 aluminium Inorganic materials 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 238000007517 polishing process Methods 0.000 description 4
- 239000000523 sample Substances 0.000 description 4
- 229910000831 Steel Inorganic materials 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- MEFBJEMVZONFCJ-UHFFFAOYSA-N molybdate Chemical compound [O-][Mo]([O-])(=O)=O MEFBJEMVZONFCJ-UHFFFAOYSA-N 0.000 description 3
- 239000002985 plastic film Substances 0.000 description 3
- 229920006255 plastic film Polymers 0.000 description 3
- 239000010959 steel Substances 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000000227 grinding Methods 0.000 description 2
- 239000000314 lubricant Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- -1 AIiOj Substances 0.000 description 1
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- QGZKDVFQNNGYKY-UHFFFAOYSA-O Ammonium Chemical compound [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 description 1
- 229910021578 Iron(III) chloride Inorganic materials 0.000 description 1
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 1
- 229910019142 PO4 Inorganic materials 0.000 description 1
- 229910000639 Spring steel Inorganic materials 0.000 description 1
- GSEJCLTVZPLZKY-UHFFFAOYSA-N Triethanolamine Chemical compound OCCN(CCO)CCO GSEJCLTVZPLZKY-UHFFFAOYSA-N 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 239000006061 abrasive grain Substances 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- QGAVSDVURUSLQK-UHFFFAOYSA-N ammonium heptamolybdate Chemical compound N.N.N.N.N.N.O.O.O.O.O.O.O.O.O.O.O.O.O.O.O.O.O.O.O.O.O.O.O.O.[Mo].[Mo].[Mo].[Mo].[Mo].[Mo].[Mo] QGAVSDVURUSLQK-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- ZCDOYSPFYFSLEW-UHFFFAOYSA-N chromate(2-) Chemical compound [O-][Cr]([O-])(=O)=O ZCDOYSPFYFSLEW-UHFFFAOYSA-N 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000002848 electrochemical method Methods 0.000 description 1
- 239000003792 electrolyte Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- RBTARNINKXHZNM-UHFFFAOYSA-K iron trichloride Chemical compound Cl[Fe](Cl)Cl RBTARNINKXHZNM-UHFFFAOYSA-K 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000011224 oxide ceramic Substances 0.000 description 1
- 229910052574 oxide ceramic Inorganic materials 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 description 1
- 239000010452 phosphate Substances 0.000 description 1
- 238000000053 physical method Methods 0.000 description 1
- LJCNRYVRMXRIQR-OLXYHTOASA-L potassium sodium L-tartrate Chemical compound [Na+].[K+].[O-]C(=O)[C@H](O)[C@@H](O)C([O-])=O LJCNRYVRMXRIQR-OLXYHTOASA-L 0.000 description 1
- 229940074439 potassium sodium tartrate Drugs 0.000 description 1
- 230000008929 regeneration Effects 0.000 description 1
- 238000011069 regeneration method Methods 0.000 description 1
- 239000011435 rock Substances 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- VWDWKYIASSYTQR-UHFFFAOYSA-N sodium nitrate Inorganic materials [Na+].[O-][N+]([O-])=O VWDWKYIASSYTQR-UHFFFAOYSA-N 0.000 description 1
- 235000010344 sodium nitrate Nutrition 0.000 description 1
- 239000004317 sodium nitrate Substances 0.000 description 1
- 235000011006 sodium potassium tartrate Nutrition 0.000 description 1
- KTQCEUZGLUSJBQ-UHFFFAOYSA-M sodium zinc oxygen(2-) hydroxide Chemical compound [OH-].[Na+].[O-2].[Zn+2] KTQCEUZGLUSJBQ-UHFFFAOYSA-M 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000001238 wet grinding Methods 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Polishing Bodies And Polishing Tools (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CH1138076A CH622206A5 (en, 2012) | 1976-09-08 | 1976-09-08 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE2642208A1 DE2642208A1 (de) | 1978-03-16 |
| DE2642208C2 true DE2642208C2 (de) | 1981-09-17 |
Family
ID=4372960
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE2642208A Expired DE2642208C2 (de) | 1976-09-08 | 1976-09-20 | Polierfolie bzw. Polierplatte |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US4162899A (en, 2012) |
| AT (1) | AT351387B (en, 2012) |
| CH (1) | CH622206A5 (en, 2012) |
| DE (1) | DE2642208C2 (en, 2012) |
| DK (1) | DK394577A (en, 2012) |
| FR (1) | FR2402518A1 (en, 2012) |
| GB (1) | GB1588262A (en, 2012) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE20204088U1 (de) | 2002-03-13 | 2002-06-06 | Müller, Heinrich, 57635 Wölmersen | Oberflächenbearbeitungsvorrichtung für Probekörper |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4358295A (en) * | 1980-03-27 | 1982-11-09 | Matsushita Electric Industrial Co., Ltd. | Polishing method |
| US4629473A (en) * | 1985-06-26 | 1986-12-16 | Norton Company | Resilient abrasive polishing product |
| GB2198672B (en) * | 1986-12-16 | 1990-10-24 | Wylde J & S Ltd | A lens lapping pad |
| FI882662L (fi) * | 1987-07-24 | 1989-01-25 | Lonza Ag | Slipmedel. |
| JP2707264B2 (ja) * | 1987-12-28 | 1998-01-28 | ハイ・コントロール・リミテッド | 研磨シートおよびその製造方法 |
| YU32490A (en) * | 1989-03-13 | 1991-10-31 | Lonza Ag | Hydrophobic layered grinding particles |
| US5178645A (en) * | 1990-10-08 | 1993-01-12 | Sumitomo Electric Industries, Ltd. | Cutting tool of polycrystalline diamond and method of manufacturing the same |
| US6019672A (en) * | 1994-09-08 | 2000-02-01 | Struers A/S | Grinding/polishing cover sheet for placing on a rotatable grinding/polishing disc |
| US5795619A (en) * | 1995-12-13 | 1998-08-18 | National Science Council | Solder bump fabricated method incorporate with electroless deposit and dip solder |
| JP2842865B1 (ja) * | 1997-08-22 | 1999-01-06 | 九州日本電気株式会社 | 研磨装置 |
| US6224474B1 (en) | 1999-01-06 | 2001-05-01 | Buehler, Ltd. | Magnetic disc system for grinding or polishing specimens |
| US6783437B1 (en) * | 2003-05-08 | 2004-08-31 | Texas Instruments Incorporated | Edge-sealed pad for CMP process |
Family Cites Families (26)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| BE546656A (en, 2012) * | ||||
| US1966473A (en) * | 1932-12-30 | 1934-07-17 | Carborundum Co | Coated article |
| GB431062A (en) * | 1932-12-30 | 1935-07-01 | Carborundum Co | Improvements in or relating to the manufacture of bonded abrasive articles |
| CH179822A (fr) * | 1934-09-24 | 1935-09-30 | Camille Dr Baillod | Aiguisoir. |
| US2082916A (en) * | 1936-01-25 | 1937-06-08 | Stratmore Company | Surfacing apparatus |
| US2595733A (en) * | 1936-05-13 | 1952-05-06 | Carborundum Co | Coated abrasive article and the method of making the same |
| DE706004C (de) * | 1938-03-22 | 1941-05-15 | Albert Strasmann Praez S Werkz | Verfahren zum Wiederherstellen des Profils von Schleifscheiben |
| US2204826A (en) * | 1938-06-01 | 1940-06-18 | Pintsch Julius Kg | Grinding tool |
| US2298318A (en) * | 1940-03-20 | 1942-10-13 | Stratmore Company | Surfacing apparatus |
| US2292991A (en) * | 1941-03-06 | 1942-08-11 | Behr Manning Corp | Flexible abrasive product |
| US2339208A (en) * | 1941-04-04 | 1944-01-11 | Behr Manning Corp | Flexible abrasive product |
| US2367286A (en) * | 1943-06-22 | 1945-01-16 | George F Keeleric | Abrasive article |
| BE506837A (en, 2012) * | 1950-11-06 | |||
| US2937934A (en) * | 1951-06-29 | 1960-05-24 | Karl F Nefflen | Plastic film abrasive sheet |
| US2898148A (en) * | 1953-07-16 | 1959-08-04 | Fewsters Stocksfield Ltd | Tipping carrier for attachment to a tractor or similar vehicle |
| GB908928A (en) * | 1958-10-24 | 1962-10-24 | John Campbell Francis Dawkins | Improvements in or relating to abradant bands |
| US3249410A (en) * | 1962-09-28 | 1966-05-03 | A P De Sanno & Son Inc | Process of making metal bonded diamond abrasive articles |
| US3284178A (en) * | 1963-06-20 | 1966-11-08 | Norton Co | Metal backed abrasives |
| US3214253A (en) * | 1963-06-26 | 1965-10-26 | Vermont American Corp | Abrasive article backed with stretchable-compressible material |
| BE653816A (en, 2012) * | 1963-10-03 | |||
| US3398442A (en) * | 1965-03-04 | 1968-08-27 | Gar Prec Products Inc | Metal abrasive sheet and a method of making same |
| GB1151323A (en) * | 1967-03-07 | 1969-05-07 | Wheel Trueing Tool Co | Improvements in or relating to Dressing Tools |
| US3795497A (en) * | 1969-06-10 | 1974-03-05 | S Weiss | Metal bonded grinding wheels |
| GB1375571A (en, 2012) * | 1971-07-27 | 1974-11-27 | ||
| DE2256079C3 (de) * | 1972-11-16 | 1981-10-08 | Ted Bildplatten Ag Aeg-Telefunken-Teldec, 6301 Zug | Verfahren zur Herstellung einer Diamantschleiffolie |
| IE42084B1 (en) * | 1974-09-18 | 1980-06-04 | De Beers Ind Diamond | Abrasive bodies |
-
1976
- 1976-09-08 CH CH1138076A patent/CH622206A5/de not_active IP Right Cessation
- 1976-09-20 DE DE2642208A patent/DE2642208C2/de not_active Expired
-
1977
- 1977-08-15 US US05/824,561 patent/US4162899A/en not_active Expired - Lifetime
- 1977-09-06 DK DK394577A patent/DK394577A/da not_active Application Discontinuation
- 1977-09-07 GB GB37258/77A patent/GB1588262A/en not_active Expired
- 1977-09-07 AT AT643677A patent/AT351387B/de not_active IP Right Cessation
- 1977-09-08 FR FR7727256A patent/FR2402518A1/fr not_active Withdrawn
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE20204088U1 (de) | 2002-03-13 | 2002-06-06 | Müller, Heinrich, 57635 Wölmersen | Oberflächenbearbeitungsvorrichtung für Probekörper |
Also Published As
| Publication number | Publication date |
|---|---|
| AT351387B (de) | 1979-07-25 |
| GB1588262A (en) | 1981-04-23 |
| DE2642208A1 (de) | 1978-03-16 |
| CH622206A5 (en, 2012) | 1981-03-31 |
| US4162899A (en) | 1979-07-31 |
| ATA643677A (de) | 1978-12-15 |
| DK394577A (da) | 1978-03-09 |
| FR2402518A1 (fr) | 1979-04-06 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OAP | Request for examination filed | ||
| OD | Request for examination | ||
| D2 | Grant after examination | ||
| 8328 | Change in the person/name/address of the agent |
Free format text: VERTRETER ZUR ZEIT NICHT GENANNT |
|
| 8339 | Ceased/non-payment of the annual fee |