DE2554647B2 - Verfahren zur erhoehung der ueberschlagsfestigkeit beim tiegellosen zonenziehen - Google Patents
Verfahren zur erhoehung der ueberschlagsfestigkeit beim tiegellosen zonenziehenInfo
- Publication number
- DE2554647B2 DE2554647B2 DE19752554647 DE2554647A DE2554647B2 DE 2554647 B2 DE2554647 B2 DE 2554647B2 DE 19752554647 DE19752554647 DE 19752554647 DE 2554647 A DE2554647 A DE 2554647A DE 2554647 B2 DE2554647 B2 DE 2554647B2
- Authority
- DE
- Germany
- Prior art keywords
- rod
- increasing
- recipient
- seed crystal
- ductless
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
- 238000000034 method Methods 0.000 title claims description 9
- 239000013078 crystal Substances 0.000 claims description 17
- 230000001681 protective effect Effects 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 claims description 2
- 230000006698 induction Effects 0.000 claims description 2
- 229910052710 silicon Inorganic materials 0.000 claims description 2
- 239000010703 silicon Substances 0.000 claims description 2
- 239000010453 quartz Substances 0.000 description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 9
- 238000009413 insulation Methods 0.000 description 4
- 239000007789 gas Substances 0.000 description 3
- 229910052739 hydrogen Inorganic materials 0.000 description 3
- 239000001257 hydrogen Substances 0.000 description 3
- 239000011810 insulating material Substances 0.000 description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 230000006378 damage Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 229910052756 noble gas Inorganic materials 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 239000008710 crystal-8 Substances 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- RZWWGOCLMSGROE-UHFFFAOYSA-N n-(2,6-dichlorophenyl)-5,7-dimethyl-[1,2,4]triazolo[1,5-a]pyrimidine-2-sulfonamide Chemical compound N1=C2N=C(C)C=C(C)N2N=C1S(=O)(=O)NC1=C(Cl)C=CC=C1Cl RZWWGOCLMSGROE-UHFFFAOYSA-N 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 238000004857 zone melting Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
- C30B13/28—Controlling or regulating
- C30B13/285—Crystal holders, e.g. chucks
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
- C30B13/16—Heating of the molten zone
- C30B13/20—Heating of the molten zone by induction, e.g. hot wire technique
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19752554647 DE2554647B2 (de) | 1975-12-04 | 1975-12-04 | Verfahren zur erhoehung der ueberschlagsfestigkeit beim tiegellosen zonenziehen |
| NL7610913A NL7610913A (nl) | 1975-12-04 | 1976-10-01 | Werkwijze ter vergroting van de bestandheid te- gen overslag bij het trekken van kristallen in zones zonder toepassing van een kroes. |
| GB4371976A GB1524607A (en) | 1975-12-04 | 1976-10-21 | Crucible-free zone melting of semiconductor rods |
| BE172896A BE848980A (fr) | 1975-12-04 | 1976-12-02 | Procede d'augmentation de la resistance aux decharges disruptives dans le cas d'un tirage par zone sans creuset |
| IT5242876A IT1074209B (it) | 1975-12-04 | 1976-12-02 | Procedimento e dispositivo per aumentare la resistenza a scarica disruptiva nella fusione a zone senza crogiuolo |
| FR7636464A FR2333568A1 (fr) | 1975-12-04 | 1976-12-03 | Procede d'augmentation de la resistance aux decharges disruptives dans le cas d'un tirage par zone sans creuset |
| JP14551876A JPS5268803A (en) | 1975-12-04 | 1976-12-03 | Method of increasing flashover resistance in time of crucibleless zone displacement |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19752554647 DE2554647B2 (de) | 1975-12-04 | 1975-12-04 | Verfahren zur erhoehung der ueberschlagsfestigkeit beim tiegellosen zonenziehen |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE2554647A1 DE2554647A1 (de) | 1977-06-08 |
| DE2554647B2 true DE2554647B2 (de) | 1978-02-09 |
Family
ID=5963488
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19752554647 Ceased DE2554647B2 (de) | 1975-12-04 | 1975-12-04 | Verfahren zur erhoehung der ueberschlagsfestigkeit beim tiegellosen zonenziehen |
Country Status (7)
| Country | Link |
|---|---|
| JP (1) | JPS5268803A (enExample) |
| BE (1) | BE848980A (enExample) |
| DE (1) | DE2554647B2 (enExample) |
| FR (1) | FR2333568A1 (enExample) |
| GB (1) | GB1524607A (enExample) |
| IT (1) | IT1074209B (enExample) |
| NL (1) | NL7610913A (enExample) |
-
1975
- 1975-12-04 DE DE19752554647 patent/DE2554647B2/de not_active Ceased
-
1976
- 1976-10-01 NL NL7610913A patent/NL7610913A/xx not_active Application Discontinuation
- 1976-10-21 GB GB4371976A patent/GB1524607A/en not_active Expired
- 1976-12-02 BE BE172896A patent/BE848980A/xx unknown
- 1976-12-02 IT IT5242876A patent/IT1074209B/it active
- 1976-12-03 JP JP14551876A patent/JPS5268803A/ja active Pending
- 1976-12-03 FR FR7636464A patent/FR2333568A1/fr active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| FR2333568A1 (fr) | 1977-07-01 |
| FR2333568B1 (enExample) | 1978-06-30 |
| GB1524607A (en) | 1978-09-13 |
| BE848980A (fr) | 1977-06-02 |
| NL7610913A (nl) | 1977-06-07 |
| JPS5268803A (en) | 1977-06-08 |
| DE2554647A1 (de) | 1977-06-08 |
| IT1074209B (it) | 1985-04-17 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| BHV | Refusal |