DE2542362C3 - Ionenstreuspektroskopisches Verfahren und Vorrichtung zur Durchführung desselben - Google Patents
Ionenstreuspektroskopisches Verfahren und Vorrichtung zur Durchführung desselbenInfo
- Publication number
- DE2542362C3 DE2542362C3 DE2542362A DE2542362A DE2542362C3 DE 2542362 C3 DE2542362 C3 DE 2542362C3 DE 2542362 A DE2542362 A DE 2542362A DE 2542362 A DE2542362 A DE 2542362A DE 2542362 C3 DE2542362 C3 DE 2542362C3
- Authority
- DE
- Germany
- Prior art keywords
- ions
- energy
- ion
- primary
- scattered
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004969 ion scattering spectroscopy Methods 0.000 title claims description 12
- 150000002500 ions Chemical class 0.000 claims description 185
- 238000001228 spectrum Methods 0.000 claims description 35
- 239000007787 solid Substances 0.000 claims description 16
- 239000000463 material Substances 0.000 claims description 8
- 238000011835 investigation Methods 0.000 claims description 3
- 238000010884 ion-beam technique Methods 0.000 description 12
- 238000000034 method Methods 0.000 description 12
- 238000012545 processing Methods 0.000 description 10
- 230000008569 process Effects 0.000 description 8
- 239000007789 gas Substances 0.000 description 7
- 230000003993 interaction Effects 0.000 description 7
- 229910052756 noble gas Inorganic materials 0.000 description 6
- 230000008859 change Effects 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 230000001360 synchronised effect Effects 0.000 description 4
- 229910000673 Indium arsenide Inorganic materials 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- RPQDHPTXJYYUPQ-UHFFFAOYSA-N indium arsenide Chemical compound [In]#[As] RPQDHPTXJYYUPQ-UHFFFAOYSA-N 0.000 description 3
- 238000012546 transfer Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 238000012935 Averaging Methods 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000001419 dependent effect Effects 0.000 description 2
- 238000006386 neutralization reaction Methods 0.000 description 2
- 230000010355 oscillation Effects 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 230000000737 periodic effect Effects 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000004833 X-ray photoelectron spectroscopy Methods 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000009795 derivation Methods 0.000 description 1
- 238000001941 electron spectroscopy Methods 0.000 description 1
- RDYMFSUJUZBWLH-UHFFFAOYSA-N endosulfan Chemical compound C12COS(=O)OCC2C2(Cl)C(Cl)=C(Cl)C1(Cl)C2(Cl)Cl RDYMFSUJUZBWLH-UHFFFAOYSA-N 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 229910052745 lead Inorganic materials 0.000 description 1
- 229910052754 neon Inorganic materials 0.000 description 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 1
- 238000010606 normalization Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 230000005610 quantum mechanics Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 238000005211 surface analysis Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/295—Electron or ion diffraction tubes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
- G01N23/203—Measuring back scattering
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/022—Circuit arrangements, e.g. for generating deviation currents or voltages ; Components associated with high voltage supply
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/10—Ion sources; Ion guns
- H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
- H01J49/142—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers using a solid target which is not previously vapourised
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/26—Mass spectrometers or separator tubes
- H01J49/28—Static spectrometers
- H01J49/282—Static spectrometers using electrostatic analysers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
- H01J49/46—Static spectrometers
- H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Crystallography & Structural Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Electron Tubes For Measurement (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US507713A US3920989A (en) | 1974-09-20 | 1974-09-20 | Ion scattering spectrometer utilizing charge exchange processes |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| DE2542362A1 DE2542362A1 (de) | 1976-04-01 |
| DE2542362B2 DE2542362B2 (de) | 1979-05-23 |
| DE2542362C3 true DE2542362C3 (de) | 1980-01-17 |
Family
ID=24019819
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE2542362A Expired DE2542362C3 (de) | 1974-09-20 | 1975-09-19 | Ionenstreuspektroskopisches Verfahren und Vorrichtung zur Durchführung desselben |
Country Status (9)
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0722011B2 (ja) * | 1983-03-30 | 1995-03-08 | 日新電機株式会社 | 高分解能イオン散乱分析装置 |
| IT1246375B (it) * | 1990-04-11 | 1994-11-18 | Consiglio Nazionale Ricerche | Apparecchiatura e metodo per la determinazione assoluta dell'energia di un fascio di ioni |
| JP2642881B2 (ja) * | 1994-09-28 | 1997-08-20 | 東京大学長 | 低速多価イオンによる超高感度水素検出法 |
| CA3229060A1 (en) * | 2017-01-18 | 2018-08-09 | Shine Technologies, Llc | High power ion beam generator systems and methods |
| CN114252653B (zh) * | 2021-01-06 | 2023-12-12 | 中国科学院物理研究所 | 超快成像装置及其方法 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3480774A (en) * | 1967-05-26 | 1969-11-25 | Minnesota Mining & Mfg | Low-energy ion scattering apparatus and method for analyzing the surface of a solid |
| US3665182A (en) * | 1969-08-18 | 1972-05-23 | Minnesota Mining & Mfg | Elemental analyzing apparatus |
| US3665185A (en) * | 1970-10-19 | 1972-05-23 | Minnesota Mining & Mfg | Ion scattering spectrometer with neutralization |
-
1974
- 1974-09-20 US US507713A patent/US3920989A/en not_active Expired - Lifetime
-
1975
- 1975-07-22 NL NL7508730A patent/NL7508730A/xx not_active Application Discontinuation
- 1975-08-25 CA CA234,059A patent/CA1021882A/en not_active Expired
- 1975-09-19 SU SU7502172007A patent/SU574172A3/ru active
- 1975-09-19 CH CH1216675A patent/CH594249A5/xx not_active IP Right Cessation
- 1975-09-19 GB GB38626/75A patent/GB1526787A/en not_active Expired
- 1975-09-19 FR FR7528800A patent/FR2285610A1/fr active Granted
- 1975-09-19 DE DE2542362A patent/DE2542362C3/de not_active Expired
- 1975-09-19 JP JP11353375A patent/JPS5435957B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5157494A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1976-05-19 |
| GB1526787A (en) | 1978-09-27 |
| FR2285610B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1981-08-07 |
| DE2542362A1 (de) | 1976-04-01 |
| JPS5435957B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1979-11-06 |
| NL7508730A (nl) | 1976-03-23 |
| SU574172A3 (ru) | 1977-09-25 |
| CA1021882A (en) | 1977-11-29 |
| CH594249A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1977-12-30 |
| US3920989A (en) | 1975-11-18 |
| DE2542362B2 (de) | 1979-05-23 |
| FR2285610A1 (fr) | 1976-04-16 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C3 | Grant after two publication steps (3rd publication) | ||
| 8327 | Change in the person/name/address of the patent owner |
Owner name: SPECTROS LTD., URMSTON, MANCHESTER, GB |
|
| 8328 | Change in the person/name/address of the agent |
Free format text: GRUENECKER, A., DIPL.-ING. KINKELDEY, H., DIPL.-ING. DR.-ING. STOCKMAIR, W., DIPL.-ING. DR.-ING. AE.E. CAL TECH SCHUMANN, K., DIPL.-PHYS. DR.RER.NAT. JAKOB, P., DIPL.-ING. BEZOLD, G., DIPL.-CHEM. DR.RER.NAT. MEISTER, W., DIPL.-ING. HILGERS, H., DIPL.-ING. MEYER-PLATH, H., DIPL.-ING. DR.-ING. KINKELDEY, U., DIPL.-BIOL. DR.RER.NAT. BOTT-BODENHAUSEN, M., DIPL.-PHYS. DR.RER.NAT. EHNOLD, A., DIPL.-ING. SCHOPPE, F., DIPL.-ING.UNIV. SCHUSTER, T., DIPL.-PHYS., PAT.-ANW., 8000 MUENCHEN |
|
| 8327 | Change in the person/name/address of the patent owner |
Owner name: KRATOS ANALYTICAL LTD., URMSTON, MANCHESTER, GB |
|
| 8328 | Change in the person/name/address of the agent |
Free format text: GRUENECKER, A., DIPL.-ING. KINKELDEY, H., DIPL.-ING. DR.-ING. STOCKMAIR, W., DIPL.-ING. DR.-ING. AE.E. CAL TECH SCHUMANN, K., DIPL.-PHYS. DR.RER.NAT. JAKOB, P., DIPL.-ING. BEZOLD, G., DIPL.-CHEM. DR.RER.NAT. MEISTER, W., DIPL.-ING. HILGERS, H., DIPL.-ING. MEYER-PLATH, H., DIPL.-ING. DR.-ING. KINKELDEY, U., DIPL.-BIOL. DR.RER.NAT. BOTT-BODENHAUSEN, M., DIPL.-PHYS. DR.RER.NAT. EHNOLD, A., DIPL.-ING. SCHUSTER, T., DIPL.-PHYS., PAT.-ANWAELTE, 8000 MUENCHEN |
|
| 8339 | Ceased/non-payment of the annual fee |