CA1021882A - Ion scattering spectrometer utilizing charge exchange processes - Google Patents

Ion scattering spectrometer utilizing charge exchange processes

Info

Publication number
CA1021882A
CA1021882A CA234,059A CA234059A CA1021882A CA 1021882 A CA1021882 A CA 1021882A CA 234059 A CA234059 A CA 234059A CA 1021882 A CA1021882 A CA 1021882A
Authority
CA
Canada
Prior art keywords
charge exchange
exchange processes
ion scattering
scattering spectrometer
utilizing charge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA234,059A
Other languages
French (fr)
Inventor
Robert L. Erickson
David P. Smith
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
3M Co
Original Assignee
Minnesota Mining and Manufacturing Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Minnesota Mining and Manufacturing Co filed Critical Minnesota Mining and Manufacturing Co
Application granted granted Critical
Publication of CA1021882A publication Critical patent/CA1021882A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/295—Electron or ion diffraction tubes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G01N23/203—Measuring back scattering
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/022—Circuit arrangements, e.g. for generating deviation currents or voltages ; Components associated with high voltage supply
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
    • H01J49/142—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers using a solid target which is not previously vapourised
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/28—Static spectrometers
    • H01J49/282—Static spectrometers using electrostatic analysers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
CA234,059A 1974-09-20 1975-08-25 Ion scattering spectrometer utilizing charge exchange processes Expired CA1021882A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US507713A US3920989A (en) 1974-09-20 1974-09-20 Ion scattering spectrometer utilizing charge exchange processes

Publications (1)

Publication Number Publication Date
CA1021882A true CA1021882A (en) 1977-11-29

Family

ID=24019819

Family Applications (1)

Application Number Title Priority Date Filing Date
CA234,059A Expired CA1021882A (en) 1974-09-20 1975-08-25 Ion scattering spectrometer utilizing charge exchange processes

Country Status (9)

Country Link
US (1) US3920989A (en)
JP (1) JPS5435957B2 (en)
CA (1) CA1021882A (en)
CH (1) CH594249A5 (en)
DE (1) DE2542362C3 (en)
FR (1) FR2285610A1 (en)
GB (1) GB1526787A (en)
NL (1) NL7508730A (en)
SU (1) SU574172A3 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0722011B2 (en) * 1983-03-30 1995-03-08 日新電機株式会社 High resolution ion scattering analyzer
IT1246375B (en) * 1990-04-11 1994-11-18 Consiglio Nazionale Ricerche APPARATUS AND METHOD FOR THE ABSOLUTE DETERMINATION OF THE ENERGY OF A BAND OF IONS
JP2642881B2 (en) * 1994-09-28 1997-08-20 東京大学長 Ultrasensitive hydrogen detection method using slow multiply charged ions
WO2018144225A2 (en) * 2017-01-18 2018-08-09 Phoenix Llc High power ion beam generator systems and methods
CN114252653B (en) * 2021-01-06 2023-12-12 中国科学院物理研究所 Ultrafast imaging device and method thereof

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3480774A (en) * 1967-05-26 1969-11-25 Minnesota Mining & Mfg Low-energy ion scattering apparatus and method for analyzing the surface of a solid
US3665182A (en) * 1969-08-18 1972-05-23 Minnesota Mining & Mfg Elemental analyzing apparatus
US3665185A (en) * 1970-10-19 1972-05-23 Minnesota Mining & Mfg Ion scattering spectrometer with neutralization

Also Published As

Publication number Publication date
CH594249A5 (en) 1977-12-30
NL7508730A (en) 1976-03-23
JPS5157494A (en) 1976-05-19
JPS5435957B2 (en) 1979-11-06
US3920989A (en) 1975-11-18
SU574172A3 (en) 1977-09-25
DE2542362C3 (en) 1980-01-17
GB1526787A (en) 1978-09-27
DE2542362A1 (en) 1976-04-01
DE2542362B2 (en) 1979-05-23
FR2285610B1 (en) 1981-08-07
FR2285610A1 (en) 1976-04-16

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