CA943670A - Ion scattering spectrometer with neutralization - Google Patents

Ion scattering spectrometer with neutralization

Info

Publication number
CA943670A
CA943670A CA125,412A CA125412A CA943670A CA 943670 A CA943670 A CA 943670A CA 125412 A CA125412 A CA 125412A CA 943670 A CA943670 A CA 943670A
Authority
CA
Canada
Prior art keywords
neutralization
ion scattering
scattering spectrometer
spectrometer
ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA125,412A
Other versions
CA125412S (en
Inventor
Robert F. Goff
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
3M Co
Original Assignee
Minnesota Mining and Manufacturing Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Minnesota Mining and Manufacturing Co filed Critical Minnesota Mining and Manufacturing Co
Application granted granted Critical
Publication of CA943670A publication Critical patent/CA943670A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/28—Static spectrometers
    • H01J49/282—Static spectrometers using electrostatic analysers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G01N23/201—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials by measuring small-angle scattering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
    • H01J49/142—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers using a solid target which is not previously vapourised
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)
CA125,412A 1970-10-19 1971-10-18 Ion scattering spectrometer with neutralization Expired CA943670A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US8195270A 1970-10-19 1970-10-19

Publications (1)

Publication Number Publication Date
CA943670A true CA943670A (en) 1974-03-12

Family

ID=22167448

Family Applications (1)

Application Number Title Priority Date Filing Date
CA125,412A Expired CA943670A (en) 1970-10-19 1971-10-18 Ion scattering spectrometer with neutralization

Country Status (8)

Country Link
US (1) US3665185A (en)
JP (1) JPS5416236B1 (en)
CA (1) CA943670A (en)
CH (1) CH542440A (en)
DE (1) DE2152467C3 (en)
FR (1) FR2111481A5 (en)
GB (1) GB1365369A (en)
NL (1) NL7114200A (en)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3920989A (en) * 1974-09-20 1975-11-18 Minnesota Mining & Mfg Ion scattering spectrometer utilizing charge exchange processes
US4249077A (en) * 1978-08-04 1981-02-03 Crawford Charles K Ion charge neutralization for electron beam devices
DE2950330C2 (en) * 1979-12-14 1983-06-01 Leybold-Heraeus GmbH, 5000 Köln Device for chemical analysis of samples
US4361762A (en) * 1980-07-30 1982-11-30 Rca Corporation Apparatus and method for neutralizing the beam in an ion implanter
DE3128814A1 (en) * 1981-07-21 1983-02-10 Siemens AG, 1000 Berlin und 8000 München ELECTRICALLY CONDUCTIVE SAMPLE HOLDER FOR THE ANALYSIS TECHNOLOGY OF SECONDARY ION MASS SPECTROMETRY
FR2542089B1 (en) * 1983-01-14 1985-11-08 Cameca METHOD AND DEVICE FOR IONIC ANALYSIS OF AN INSULATING SAMPLE
JPS60135846A (en) * 1983-12-26 1985-07-19 Anelva Corp Secondary ion mass spectrometry method
US4564758A (en) * 1984-02-01 1986-01-14 Cameca Process and device for the ionic analysis of an insulating sample
US4680467A (en) * 1986-04-08 1987-07-14 Kevex Corporation Electron spectroscopy system for chemical analysis of electrically isolated specimens
GB8703012D0 (en) * 1987-02-10 1987-03-18 Vg Instr Group Secondary ion mass spectrometer
JPH01220350A (en) * 1988-02-26 1989-09-04 Hitachi Ltd Charge suppression method and particle beam irradiation device using the device
GB9122161D0 (en) * 1991-10-18 1991-11-27 Kratos Analytical Ltd Charged particle energy analysers
US7320733B2 (en) * 2003-05-09 2008-01-22 Sukegawa Electric Co., Ltd. Electron bombardment heating apparatus and temperature controlling apparatus and control method thereof
DE102004014582B4 (en) * 2004-03-25 2009-08-20 Bruker Daltonik Gmbh Ion optical phase volume compression
DE102014118797A1 (en) * 2014-12-17 2016-06-23 Vorwerk & Co. Interholding Gesellschaft mit beschränkter Haftung Container with an accumulator-operated hot glue gun and hot glue gun with preheat function
WO2017086393A1 (en) * 2015-11-17 2017-05-26 アトナープ株式会社 Analysis device and control method therefor
CN108493091B (en) * 2018-03-09 2020-03-24 中国计量科学研究院 High-electron-utilization-rate low-energy ionization device, mass spectrum system and method
CN114047215B (en) * 2021-10-20 2023-08-15 北京科技大学顺德研究生院 Device and method for eliminating uneven charge on surface of sample to be measured

Also Published As

Publication number Publication date
US3665185A (en) 1972-05-23
DE2152467C3 (en) 1981-01-08
DE2152467A1 (en) 1972-04-20
FR2111481A5 (en) 1972-06-02
JPS5416236B1 (en) 1979-06-20
CH542440A (en) 1973-09-30
DE2152467B2 (en) 1980-04-17
NL7114200A (en) 1972-04-21
GB1365369A (en) 1974-09-04

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