CA933238A - Ion gauge - Google Patents

Ion gauge

Info

Publication number
CA933238A
CA933238A CA096891A CA96891A CA933238A CA 933238 A CA933238 A CA 933238A CA 096891 A CA096891 A CA 096891A CA 96891 A CA96891 A CA 96891A CA 933238 A CA933238 A CA 933238A
Authority
CA
Canada
Prior art keywords
ion gauge
gauge
ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA096891A
Other versions
CA96891S (en
Inventor
G. Pittaway Lawrence
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Application granted granted Critical
Publication of CA933238A publication Critical patent/CA933238A/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/02Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
    • H01J41/06Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas with ionisation by means of cold cathodes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/02Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
    • H01J41/04Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas with ionisation by means of thermionic cathodes
CA096891A 1969-10-29 1970-10-29 Ion gauge Expired CA933238A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB5300769 1969-10-29

Publications (1)

Publication Number Publication Date
CA933238A true CA933238A (en) 1973-09-04

Family

ID=10466254

Family Applications (1)

Application Number Title Priority Date Filing Date
CA096891A Expired CA933238A (en) 1969-10-29 1970-10-29 Ion gauge

Country Status (6)

Country Link
US (1) US3742343A (en)
JP (1) JPS497511B1 (en)
CA (1) CA933238A (en)
DE (1) DE2052094A1 (en)
FR (1) FR2066651A5 (en)
GB (1) GB1336126A (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1437174A (en) * 1972-05-26 1976-05-26 Mullard Ltd Ion gauges
US4307323A (en) * 1980-04-04 1981-12-22 Granville-Phillips Company Vacuum gauge
US4636680A (en) * 1983-05-24 1987-01-13 Granville-Phillips Company Vacuum gauge
US5422573A (en) * 1990-04-11 1995-06-06 Granville-Phillips Company Ionization gauge and method of using and calibrating same
US5296817A (en) * 1990-04-11 1994-03-22 Granville-Phillips Company Ionization gauge and method of using and calibrating same
US5250906A (en) * 1991-10-17 1993-10-05 Granville-Phillips Company Ionization gauge and method of using and calibrating same
DE4338535C2 (en) * 1993-11-11 2003-06-18 Unaxis Deutschland Holding Extractor ion gauge
DE29614489U1 (en) * 1996-08-21 1996-10-10 Leybold Vakuum Gmbh Measuring system for a vacuum meter
CH707685A1 (en) * 2013-03-06 2014-09-15 Inficon Gmbh Ionization vacuum measuring cell with shielding.

Also Published As

Publication number Publication date
DE2052094A1 (en) 1971-05-06
US3742343A (en) 1973-06-26
JPS497511B1 (en) 1974-02-20
FR2066651A5 (en) 1971-08-06
GB1336126A (en) 1973-11-07

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