JPS497511B1 - - Google Patents

Info

Publication number
JPS497511B1
JPS497511B1 JP45094244A JP9424470A JPS497511B1 JP S497511 B1 JPS497511 B1 JP S497511B1 JP 45094244 A JP45094244 A JP 45094244A JP 9424470 A JP9424470 A JP 9424470A JP S497511 B1 JPS497511 B1 JP S497511B1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP45094244A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS497511B1 publication Critical patent/JPS497511B1/ja
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/02Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
    • H01J41/06Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas with ionisation by means of cold cathodes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/02Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
    • H01J41/04Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas with ionisation by means of thermionic cathodes

Landscapes

  • Measuring Fluid Pressure (AREA)
JP45094244A 1969-10-29 1970-10-27 Pending JPS497511B1 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB5300769 1969-10-29

Publications (1)

Publication Number Publication Date
JPS497511B1 true JPS497511B1 (ja) 1974-02-20

Family

ID=10466254

Family Applications (1)

Application Number Title Priority Date Filing Date
JP45094244A Pending JPS497511B1 (ja) 1969-10-29 1970-10-27

Country Status (6)

Country Link
US (1) US3742343A (ja)
JP (1) JPS497511B1 (ja)
CA (1) CA933238A (ja)
DE (1) DE2052094A1 (ja)
FR (1) FR2066651A5 (ja)
GB (1) GB1336126A (ja)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1437174A (en) * 1972-05-26 1976-05-26 Mullard Ltd Ion gauges
US4307323A (en) * 1980-04-04 1981-12-22 Granville-Phillips Company Vacuum gauge
US4636680A (en) * 1983-05-24 1987-01-13 Granville-Phillips Company Vacuum gauge
US5422573A (en) * 1990-04-11 1995-06-06 Granville-Phillips Company Ionization gauge and method of using and calibrating same
US5296817A (en) * 1990-04-11 1994-03-22 Granville-Phillips Company Ionization gauge and method of using and calibrating same
US5250906A (en) * 1991-10-17 1993-10-05 Granville-Phillips Company Ionization gauge and method of using and calibrating same
DE4338535C2 (de) * 1993-11-11 2003-06-18 Unaxis Deutschland Holding Extraktor-Ionisationsvakuummeter
DE29614489U1 (de) * 1996-08-21 1996-10-10 Leybold Vakuum Gmbh Meßsystem für ein Vakuummeter
CH707685A1 (de) * 2013-03-06 2014-09-15 Inficon Gmbh Ionisations-Vakuummesszelle mit Abschirmvorrichtung.

Also Published As

Publication number Publication date
DE2052094A1 (de) 1971-05-06
US3742343A (en) 1973-06-26
CA933238A (en) 1973-09-04
FR2066651A5 (ja) 1971-08-06
GB1336126A (en) 1973-11-07

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