GB1365369A - Ion scattering spectrometer with neutralization - Google Patents
Ion scattering spectrometer with neutralizationInfo
- Publication number
- GB1365369A GB1365369A GB4843471A GB4843471A GB1365369A GB 1365369 A GB1365369 A GB 1365369A GB 4843471 A GB4843471 A GB 4843471A GB 4843471 A GB4843471 A GB 4843471A GB 1365369 A GB1365369 A GB 1365369A
- Authority
- GB
- United Kingdom
- Prior art keywords
- filament
- target support
- oct
- ion
- sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/26—Mass spectrometers or separator tubes
- H01J49/28—Static spectrometers
- H01J49/282—Static spectrometers using electrostatic analysers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
- G01N23/201—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials by measuring small-angle scattering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/10—Ion sources; Ion guns
- H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
- H01J49/142—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers using a solid target which is not previously vapourised
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
- H01J49/46—Static spectrometers
- H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Plasma & Fusion (AREA)
- Crystallography & Structural Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
1365369 Mass spectrometers MINNESOTA MINING & MFG CO 18 Oct 1971 [19 Oct 1970] 48434/71 Heading H1D Apparatus for elemental analysis of surface layers of an insulating specimen 19 includes means for neutralizing any charge acquired by the specimen, said means comprising a filament 75 which supplies flooding electrons, and a feedback circuit 79 connected to the conductive target support 78 for sensing a change in the current flowing through said target support as a result of the ion bombardment of the sample 19 and the flow of electrons from said filament and for adjusting the power supply 76 to stabilize the current flowing through said target support to a predetermined valve whereby said sample is maintained at substantially earth potential. The ion generator 12 comprises a filament 24, cylindrical grid 25, extractor plate 26 and tubular repeller 27. Ions are extracted by anode plates 30-33. A feed-back stabilization loop established between the filament power supply 28 and the grid power-supply 29 maintains a predetermined ion beam current. The ion beam 40 is scanned over the target 19 by deflector plates 43. The scattered ions 46 pass through electrostatic analyser 14 to the collector 55 of a detector 16 connected to indicating apparatus 18.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US8195270A | 1970-10-19 | 1970-10-19 |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1365369A true GB1365369A (en) | 1974-09-04 |
Family
ID=22167448
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB4843471A Expired GB1365369A (en) | 1970-10-19 | 1971-10-18 | Ion scattering spectrometer with neutralization |
Country Status (8)
Country | Link |
---|---|
US (1) | US3665185A (en) |
JP (1) | JPS5416236B1 (en) |
CA (1) | CA943670A (en) |
CH (1) | CH542440A (en) |
DE (1) | DE2152467C3 (en) |
FR (1) | FR2111481A5 (en) |
GB (1) | GB1365369A (en) |
NL (1) | NL7114200A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5286974A (en) * | 1991-10-18 | 1994-02-15 | Kratos Analytical Limited | Charged particle energy analyzers |
CN108493091A (en) * | 2018-03-09 | 2018-09-04 | 中国计量科学研究院 | A kind of high electronics utilization rate low energy ionization device, mass spectrometer system and method |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3920989A (en) * | 1974-09-20 | 1975-11-18 | Minnesota Mining & Mfg | Ion scattering spectrometer utilizing charge exchange processes |
US4249077A (en) * | 1978-08-04 | 1981-02-03 | Crawford Charles K | Ion charge neutralization for electron beam devices |
DE2950330C2 (en) * | 1979-12-14 | 1983-06-01 | Leybold-Heraeus GmbH, 5000 Köln | Device for chemical analysis of samples |
US4361762A (en) * | 1980-07-30 | 1982-11-30 | Rca Corporation | Apparatus and method for neutralizing the beam in an ion implanter |
DE3128814A1 (en) * | 1981-07-21 | 1983-02-10 | Siemens AG, 1000 Berlin und 8000 München | ELECTRICALLY CONDUCTIVE SAMPLE HOLDER FOR THE ANALYSIS TECHNOLOGY OF SECONDARY ION MASS SPECTROMETRY |
FR2542089B1 (en) * | 1983-01-14 | 1985-11-08 | Cameca | METHOD AND DEVICE FOR IONIC ANALYSIS OF AN INSULATING SAMPLE |
JPS60135846A (en) * | 1983-12-26 | 1985-07-19 | Anelva Corp | Secondary ion mass spectrometer |
US4564758A (en) * | 1984-02-01 | 1986-01-14 | Cameca | Process and device for the ionic analysis of an insulating sample |
US4680467A (en) * | 1986-04-08 | 1987-07-14 | Kevex Corporation | Electron spectroscopy system for chemical analysis of electrically isolated specimens |
GB8703012D0 (en) * | 1987-02-10 | 1987-03-18 | Vg Instr Group | Secondary ion mass spectrometer |
JPH01220350A (en) * | 1988-02-26 | 1989-09-04 | Hitachi Ltd | Electrification suppression and particle beam radiating device using its device |
US7320733B2 (en) * | 2003-05-09 | 2008-01-22 | Sukegawa Electric Co., Ltd. | Electron bombardment heating apparatus and temperature controlling apparatus and control method thereof |
DE102004014582B4 (en) * | 2004-03-25 | 2009-08-20 | Bruker Daltonik Gmbh | Ion optical phase volume compression |
DE102014118797A1 (en) * | 2014-12-17 | 2016-06-23 | Vorwerk & Co. Interholding Gesellschaft mit beschränkter Haftung | Container with an accumulator-operated hot glue gun and hot glue gun with preheat function |
US10847356B2 (en) * | 2015-11-17 | 2020-11-24 | Atonarp Inc. | Analyzer apparatus and control method |
CN114047215B (en) * | 2021-10-20 | 2023-08-15 | 北京科技大学顺德研究生院 | Device and method for eliminating uneven charge on surface of sample to be measured |
-
1970
- 1970-10-19 US US81952A patent/US3665185A/en not_active Expired - Lifetime
-
1971
- 1971-10-15 NL NL7114200A patent/NL7114200A/xx not_active Application Discontinuation
- 1971-10-18 GB GB4843471A patent/GB1365369A/en not_active Expired
- 1971-10-18 DE DE2152467A patent/DE2152467C3/en not_active Expired
- 1971-10-18 CA CA125,412A patent/CA943670A/en not_active Expired
- 1971-10-18 JP JP8172771A patent/JPS5416236B1/ja active Pending
- 1971-10-18 FR FR7137286A patent/FR2111481A5/fr not_active Expired
- 1971-10-18 CH CH1520271A patent/CH542440A/en not_active IP Right Cessation
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5286974A (en) * | 1991-10-18 | 1994-02-15 | Kratos Analytical Limited | Charged particle energy analyzers |
CN108493091A (en) * | 2018-03-09 | 2018-09-04 | 中国计量科学研究院 | A kind of high electronics utilization rate low energy ionization device, mass spectrometer system and method |
Also Published As
Publication number | Publication date |
---|---|
NL7114200A (en) | 1972-04-21 |
DE2152467A1 (en) | 1972-04-20 |
CA943670A (en) | 1974-03-12 |
DE2152467B2 (en) | 1980-04-17 |
CH542440A (en) | 1973-09-30 |
FR2111481A5 (en) | 1972-06-02 |
JPS5416236B1 (en) | 1979-06-20 |
US3665185A (en) | 1972-05-23 |
DE2152467C3 (en) | 1981-01-08 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PS | Patent sealed [section 19, patents act 1949] | ||
PCNP | Patent ceased through non-payment of renewal fee |