GB1365369A - Ion scattering spectrometer with neutralization - Google Patents

Ion scattering spectrometer with neutralization

Info

Publication number
GB1365369A
GB1365369A GB4843471A GB4843471A GB1365369A GB 1365369 A GB1365369 A GB 1365369A GB 4843471 A GB4843471 A GB 4843471A GB 4843471 A GB4843471 A GB 4843471A GB 1365369 A GB1365369 A GB 1365369A
Authority
GB
United Kingdom
Prior art keywords
filament
target support
oct
ion
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB4843471A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
3M Co
Original Assignee
Minnesota Mining and Manufacturing Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Minnesota Mining and Manufacturing Co filed Critical Minnesota Mining and Manufacturing Co
Publication of GB1365369A publication Critical patent/GB1365369A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/28—Static spectrometers
    • H01J49/282—Static spectrometers using electrostatic analysers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G01N23/201—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials by measuring small-angle scattering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
    • H01J49/142—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers using a solid target which is not previously vapourised
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Plasma & Fusion (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

1365369 Mass spectrometers MINNESOTA MINING & MFG CO 18 Oct 1971 [19 Oct 1970] 48434/71 Heading H1D Apparatus for elemental analysis of surface layers of an insulating specimen 19 includes means for neutralizing any charge acquired by the specimen, said means comprising a filament 75 which supplies flooding electrons, and a feedback circuit 79 connected to the conductive target support 78 for sensing a change in the current flowing through said target support as a result of the ion bombardment of the sample 19 and the flow of electrons from said filament and for adjusting the power supply 76 to stabilize the current flowing through said target support to a predetermined valve whereby said sample is maintained at substantially earth potential. The ion generator 12 comprises a filament 24, cylindrical grid 25, extractor plate 26 and tubular repeller 27. Ions are extracted by anode plates 30-33. A feed-back stabilization loop established between the filament power supply 28 and the grid power-supply 29 maintains a predetermined ion beam current. The ion beam 40 is scanned over the target 19 by deflector plates 43. The scattered ions 46 pass through electrostatic analyser 14 to the collector 55 of a detector 16 connected to indicating apparatus 18.
GB4843471A 1970-10-19 1971-10-18 Ion scattering spectrometer with neutralization Expired GB1365369A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US8195270A 1970-10-19 1970-10-19

Publications (1)

Publication Number Publication Date
GB1365369A true GB1365369A (en) 1974-09-04

Family

ID=22167448

Family Applications (1)

Application Number Title Priority Date Filing Date
GB4843471A Expired GB1365369A (en) 1970-10-19 1971-10-18 Ion scattering spectrometer with neutralization

Country Status (8)

Country Link
US (1) US3665185A (en)
JP (1) JPS5416236B1 (en)
CA (1) CA943670A (en)
CH (1) CH542440A (en)
DE (1) DE2152467C3 (en)
FR (1) FR2111481A5 (en)
GB (1) GB1365369A (en)
NL (1) NL7114200A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5286974A (en) * 1991-10-18 1994-02-15 Kratos Analytical Limited Charged particle energy analyzers
CN108493091A (en) * 2018-03-09 2018-09-04 中国计量科学研究院 A kind of high electronics utilization rate low energy ionization device, mass spectrometer system and method

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3920989A (en) * 1974-09-20 1975-11-18 Minnesota Mining & Mfg Ion scattering spectrometer utilizing charge exchange processes
US4249077A (en) * 1978-08-04 1981-02-03 Crawford Charles K Ion charge neutralization for electron beam devices
DE2950330C2 (en) * 1979-12-14 1983-06-01 Leybold-Heraeus GmbH, 5000 Köln Device for chemical analysis of samples
US4361762A (en) * 1980-07-30 1982-11-30 Rca Corporation Apparatus and method for neutralizing the beam in an ion implanter
DE3128814A1 (en) * 1981-07-21 1983-02-10 Siemens AG, 1000 Berlin und 8000 München ELECTRICALLY CONDUCTIVE SAMPLE HOLDER FOR THE ANALYSIS TECHNOLOGY OF SECONDARY ION MASS SPECTROMETRY
FR2542089B1 (en) * 1983-01-14 1985-11-08 Cameca METHOD AND DEVICE FOR IONIC ANALYSIS OF AN INSULATING SAMPLE
JPS60135846A (en) * 1983-12-26 1985-07-19 Anelva Corp Secondary ion mass spectrometer
US4564758A (en) * 1984-02-01 1986-01-14 Cameca Process and device for the ionic analysis of an insulating sample
US4680467A (en) * 1986-04-08 1987-07-14 Kevex Corporation Electron spectroscopy system for chemical analysis of electrically isolated specimens
GB8703012D0 (en) * 1987-02-10 1987-03-18 Vg Instr Group Secondary ion mass spectrometer
JPH01220350A (en) * 1988-02-26 1989-09-04 Hitachi Ltd Electrification suppression and particle beam radiating device using its device
US7320733B2 (en) * 2003-05-09 2008-01-22 Sukegawa Electric Co., Ltd. Electron bombardment heating apparatus and temperature controlling apparatus and control method thereof
DE102004014582B4 (en) * 2004-03-25 2009-08-20 Bruker Daltonik Gmbh Ion optical phase volume compression
DE102014118797A1 (en) * 2014-12-17 2016-06-23 Vorwerk & Co. Interholding Gesellschaft mit beschränkter Haftung Container with an accumulator-operated hot glue gun and hot glue gun with preheat function
US10847356B2 (en) * 2015-11-17 2020-11-24 Atonarp Inc. Analyzer apparatus and control method
CN114047215B (en) * 2021-10-20 2023-08-15 北京科技大学顺德研究生院 Device and method for eliminating uneven charge on surface of sample to be measured

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5286974A (en) * 1991-10-18 1994-02-15 Kratos Analytical Limited Charged particle energy analyzers
CN108493091A (en) * 2018-03-09 2018-09-04 中国计量科学研究院 A kind of high electronics utilization rate low energy ionization device, mass spectrometer system and method

Also Published As

Publication number Publication date
NL7114200A (en) 1972-04-21
DE2152467A1 (en) 1972-04-20
CA943670A (en) 1974-03-12
DE2152467B2 (en) 1980-04-17
CH542440A (en) 1973-09-30
FR2111481A5 (en) 1972-06-02
JPS5416236B1 (en) 1979-06-20
US3665185A (en) 1972-05-23
DE2152467C3 (en) 1981-01-08

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee