CN108493091B - High-electron-utilization-rate low-energy ionization device, mass spectrum system and method - Google Patents
High-electron-utilization-rate low-energy ionization device, mass spectrum system and method Download PDFInfo
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Abstract
The embodiment of the invention provides a high-electron-utilization-rate low-energy ionization device, a mass spectrum system and a method, which comprise the following steps: the ionization chamber, the electron incidence grid and the low-energy electric field component; the ionization chamber is positioned on the inner side of the electron incidence grid mesh and is used for accommodating molecules and electrons of an object to be detected, and the electrons bombard the molecules of the object to be detected to ionize; the electron incidence grid mesh is arranged between the ionization chamber and the low-energy electric field component and is used for improving the electron utilization rate; and the low-energy electric field component is arranged on the outer side of the electron incidence grid and is used for generating a low-energy electric field. A mass spectrometry system employing the ionization device, and a mass spectrometry method employing the mass spectrometry system. The invention can effectively reduce fragment ions generated by the molecules of the object to be detected and improve the utilization rate of electrons, thereby avoiding the need of chromatography in the detection of gas components.
Description
Technical Field
The embodiment of the invention relates to the technical field of mass spectrometry, in particular to a high-electron-utilization-rate low-energy ionization device, a mass spectrometry system and a mass spectrometry method.
Background
Mass spectrometry is one of the most basic instruments for researching the basic composition, structural characteristics, physical and chemical properties of substances, is a necessary instrument in the fields of life science, material science, food safety, environmental protection and the like, and is the core of modern analytical instruments. Along with the development of industries such as petrochemical industry, electric power industry, metallurgy industry, coal chemical industry and the like, the requirements of the process industry on-line gas monitoring and control technology are higher and higher, and the key for implementing efficient control on the process technology is to acquire data of process gas components in real time, quickly and accurately. Due to the limitation of application technology, the analysis of gas components in the traditional process industry generally adopts a chromatographic analysis system. Although the chromatographic analysis system can meet part of requirements of process control, the chromatographic analysis system has obvious defects, such as low analysis speed, no real-time online performance, poor universality and the like. In addition, some real-time monitoring techniques, such as spectroscopy and mass spectrometry, are also used in process industrial gas analysis. Compared with a spectrum analyzer, the online process gas mass analyzer has the characteristics of high sensitivity, broad-spectrum non-specificity, capability of simultaneously performing multi-channel detection and the like, and has greater potential and wider development space in online gas analysis in the process industry.
On-line process gas mass spectrometers mostly use hard ionization sources, i.e. electron bombardment ionization sources of 70 eV. The ionization of the gas molecules is realized by bombarding the gas molecules to be measured by the electron beams with 70eV, and because the ionization energy is far higher than the first ionization energy of the gas components to be measured, the excessive energy can cause the breakage of multiple bonds of the molecules or the rearrangement of the molecules, and a great amount of fragment ions can be generated while generating molecular ions. When multi-component gas to be detected is directly injected without separation, a large number of fragment ions of various components are overlapped on a spectrogram, as shown in fig. 8, and the overlapped spectral peaks increase the difficulty of quantitative detection. Soft ionization techniques can reduce or avoid the problem of fragment overlapping peaks, however, conventional soft ionization techniques such as chemical ionization sources require the use of an ionization buffer gas, such as methane, which is typically the gas to be measured in the process industry, and thus, chemical ionization sources are not suitable for use in online process gas mass spectrometry. In addition, another soft ionization source, the ultraviolet ionization source, has a constant electron energy, such as 10.6eV, which is commonly used, and cannot ionize substances with ionization energy higher than this value, and therefore, has certain defects. In addition, most electron bombardment ionization sources used in the process of mass spectrometry adopt a mode of opening a slit on an ionization chamber for electrons to enter the ionization chamber, but by adopting the mode, a large number of electrons directly strike the outer wall of the ionization chamber and cannot enter the inside of the ionization chamber for ionization of gas molecules, so that the electron utilization rate is low.
In summary, it is a problem to be solved in the art how to reduce fragment ions as much as possible during the over-formation of the gas component analysis, so as to achieve the chromatographic separation effect during the detection process and improve the electron utilization rate during the ionization process.
Disclosure of Invention
In view of the above problems in the prior art, embodiments of the present invention provide a high electron utilization low energy ionization device, a mass spectrometry system, and a method.
In one aspect, an embodiment of the present invention provides a high electron utilization low energy ionization device, including: the ionization chamber, the electron incidence grid and the low-energy electric field component; the ionization chamber is positioned on the inner side of the electron incidence grid mesh and is used for accommodating molecules and electrons of an object to be detected, and the electrons bombard the molecules of the object to be detected to ionize; the electron incidence grid mesh is arranged between the ionization chamber and the low-energy electric field component and is used for improving the electron utilization rate; and the low-energy electric field component is arranged on the outer side of the electron incidence grid and is used for generating a low-energy electric field.
In another aspect, an embodiment of the present invention provides a mass spectrometry system, including: the ion source device comprises a sample inlet, an ion repulsion pole, an ion source heater, an ion source temperature sensor, an ion source magnet, an ion shaping and conveying device, a quadrupole rod assembly, a quadrupole rod sleeve, an ion receiving and amplifying device, a vacuum cavity, a vacuum feed-through flange, a molecular pump, a vacuum gauge and a backing pump; the sample inlet is arranged on the side surface of the ionization chamber and is used for introducing gas molecules of an object to be detected; the ion repulsion electrode is arranged on the side surface of the ionization chamber and is used for pushing the ions generated in the ionization chamber to the ion shaping and conveying device; the ion source heater is sleeved on the ion repulsion electrode and used for heating the ionization chamber; the ion source temperature sensor is arranged outside the ionization chamber and used for measuring the temperature of the ionization chamber; the ion source magnet is arranged on the outer side of the electron repulsion pole and used for increasing the movement path of electrons; the ion shaping and transmitting device is arranged at a position close to the ion emergent hole of the ionization chamber and used for shaping ions and sending the shaped ions to the quadrupole rod component; the quadrupole rod assembly is arranged close to the ion shaping and transmitting device and is used for screening ions and sending the screened ions to the ion receiving and amplifying device; the quadrupole rod sleeve is wrapped around the quadrupole rod assembly and used for fixing the quadrupole rod assembly; the ion receiving and amplifying device is arranged at the tail part of the quadrupole rod sleeve and is used for receiving ions, amplifying the ion flow into electron flow and then sending the electron flow to mass spectrogram imaging equipment to obtain a mass spectrogram; the vacuum cavity is positioned at the outermost part of the mass spectrum system and is used for providing a vacuum environment for the mass spectrum system; the vacuum feed-through flanges are arranged at the front end and the rear end of the vacuum cavity and are used for sealing the vacuum cavity and fixing the power supply electrode, and the power supply electrode introduces a power supply and outputs signals for corresponding parts; the molecular pump is hermetically fixed on the side surface of the vacuum cavity and used for pumping gas in the vacuum cavity; the vacuum gauge is hermetically fixed on the side surface of the vacuum cavity and used for monitoring the vacuum degree of the vacuum cavity; the backing pump is connected with the molecular pump through a gas conveying pipe and is used for providing pre-vacuum pumping for the molecular pump.
Finally, an embodiment of the present invention further provides a mass spectrometry method, including: determining the final analytical ionization energy of the gas to be analyzed; and under the final analysis ionization energy, introducing the gas to be analyzed into any mass spectrum system in the invention to obtain a mass spectrum of the gas to be analyzed.
The embodiment of the invention provides a high-electron-utilization-rate low-energy ionization device, a mass spectrum system and a method, wherein a low-energy electric field is formed by introducing an electron incidence grid and adjusting, so that fragment ions generated by molecules of an object to be detected can be effectively reduced, the electron utilization rate is improved, and chromatography is not needed in the detection of gas components.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and those skilled in the art can also obtain other drawings according to the drawings without creative efforts.
FIG. 1 is a schematic diagram of a high electron utilization low energy ionization apparatus in an embodiment of the present invention;
FIG. 2 is a schematic diagram of an electron injection grid structure according to an embodiment of the present invention;
FIG. 3 is a schematic diagram of electron utilization in an embodiment of the present invention;
FIG. 4 is a schematic diagram of a mass spectrometry system according to an embodiment of the present invention;
figure 5 is a schematic diagram of a quadrupole rod assembly according to an embodiment of the present invention;
FIG. 6 is a flow chart of an implementation of a mass spectrometry method in an embodiment of the invention;
FIG. 7 is a schematic diagram showing ionization energy selection for carbon dioxide analysis according to an embodiment of the present invention;
FIG. 8 is a mass spectrum of the sample after ionization in the high energy electric field in the prior art;
FIG. 9 is a mass spectrum generated under a low energy electric field in an embodiment of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The embodiment of the invention provides a high-electron-utilization-rate low-energy ionization device, a mass spectrometry system and a method. Referring to fig. 1, fig. 1 is a schematic structural diagram of a low-energy ionization device with high electron utilization rate according to an embodiment of the present invention, including:
the ionization chamber 101, the electron incidence grid 104, the electron incidence grid 105, the electron repulsion electrode 102, the filament 103, the electron repulsion electrode 107 and the filament 106, wherein one low-energy electric field component comprises the electron repulsion electrode 102 and the filament 103, and the other low-energy electric field component comprises the electron repulsion electrode 107 and the filament 106;
the ionization chamber 101 is located inside the electron incidence grid 104 and the electron incidence grid 105, and is used for accommodating molecules and electrons of an object to be detected, and the electrons bombard the molecules of the object to be detected to ionize;
the electron incidence grid 104 is arranged between the ionization chamber 101 and the low-energy electric field component (i.e. the electron repulsion electrode 102 and the filament 103) and is used for improving the electron utilization rate;
the electron incidence grid 105 is installed between the ionization chamber 101 and the low-energy electric field components (i.e., the electron repulsion electrode 107 and the filament 106) for improving the electron utilization rate;
an electron repulsion electrode 107 and a filament 106 (low energy electric field component) installed outside the electron incidence grid 105 for generating a low energy electric field, wherein the range of the absolute value of the voltage of the low energy electric field includes: 5V to 70V, and the step length is 0.1V;
an electron repeller 102 and a filament 103 (low energy electric field element) are installed outside the electron incidence grid 104 for generating a low energy electric field. The range of the absolute value of the low-energy electric field voltage comprises: 5V to 70V, and the step size is 0.1V.
The filament 103 is installed outside the electron incidence grid 104, is located between the electron incidence grid 104 and the electron repulsion electrode 102, and is used for emitting electrons;
the filament 106 is installed outside the electron incidence grid 105, is located between the electron incidence grid 105 and the electron repulsion electrode 107, and is used for emitting electrons;
the electron repulsion electrode 102 is arranged on the outer side close to the filament 103 and used for being connected with a floating voltage, and a low-energy electric field is formed by the voltage difference between the floating voltage and the electron incidence grid 104. The range of the absolute value of the low-energy electric field voltage comprises: 5V to 70V, and the step length is 0.1V;
the electron repulsion electrode 107 is installed on the outer side close to the filament 106 and is used for receiving the floating voltage, and the voltage difference between the floating voltage and the electron incidence grid 105 forms a low-energy electric field. The range of the absolute value of the low-energy electric field voltage comprises: 5V to 70V, and the step size is 0.1V.
Referring to fig. 2, fig. 2 is a schematic diagram of an electron incident grid structure in an embodiment of the present invention, including: an oval grid port 201. The shape of the grid opening can be adjusted to be rectangular, circular and the like according to specific situations, but is not limited to the shapes.
Referring to fig. 3, fig. 3 is a schematic diagram of an electronic utilization ratio in an embodiment of the present invention, including:
the case of electrons passing through the electron incident grid of the present invention 301 and the case of electrons passing through the gaps of the prior art 302. It can be seen from the figure that the electron incident grid adopted by the invention obviously improves the utilization rate of electrons.
Referring to fig. 4, fig. 4 is a schematic structural diagram of a mass spectrometry system according to an embodiment of the present invention, including:
a sample inlet 401, an ion repeller 402, an ion source heater 403, an ion source temperature sensor 404, an ionization chamber 405, an electron entrance grid 406, a filament 407, an electron repeller 408, an ion source magnet 409, an ion extraction lens 410, an ion focusing lens 411, an ion ejection lens 412, a quadrupole rod assembly 413, a quadrupole rod sleeve 414, an electron multiplier 415, a faraday cup 416, a vacuum cavity 417, a vacuum feed-through flange 418, a vacuum feed-through flange 419, a molecular pump 420, a vacuum gauge 421, and a backing pump 422. The ion shaping transport device includes an ion extraction lens 410, an ion focusing lens 411, and an ion ejecting lens 412. The ion receiving and amplifying means includes an electron multiplier 415 and a faraday cup 416.
The sample inlet 401 is arranged on the side surface of the ionization chamber 405 and is used for introducing gas molecules of an object to be detected;
the ion repulsion pole 402 is arranged on the side surface of the ionization chamber 405 and is used for pushing the ions generated in the ionization chamber 405 to the ion shaping and conveying device;
the ion source heater 403 is sleeved on the ion repeller 402 and is used for heating the ionization chamber 405;
the ion source temperature sensor 404 is installed outside the ionization chamber 405 and used for measuring the temperature of the ionization chamber 405;
the ion source magnet 409 is installed outside the electron repulsion pole 408, and is used for increasing the movement path of electrons;
the ion shaping and transmitting device is arranged at a position close to the ion exit hole of the ionization chamber 405, and is used for shaping ions and sending the shaped ions to the quadrupole rod assembly 413;
the quadrupole rod assembly 413 is mounted close to the ion shaping and transmitting device and used for screening ions and sending the screened ions to the ion receiving and amplifying device;
the quadrupole rod sleeve 414 is wrapped around the quadrupole rod assembly 413 and used for fixing the quadrupole rod assembly 413;
the ion receiving and amplifying device is mounted at the tail of the quadrupole rod sleeve 414 and is used for receiving ions, amplifying the ion flow into an electron flow and then sending the electron flow to mass spectrogram imaging equipment to obtain a mass spectrogram;
the vacuum chamber 417 is located at the outermost part of the mass spectrometry system and is used for providing a vacuum environment for the mass spectrometry system;
the vacuum feed-through flange 418 is installed at the front end of the vacuum cavity 417 and is used for sealing the vacuum cavity 417 and fixing a power supply electrode, and the power supply electrode introduces a power supply and outputs signals for corresponding components;
the vacuum feed-through flange 419 is installed at the rear end of the vacuum cavity 417, and is used for sealing the vacuum cavity 417 and fixing a power supply electrode, wherein the power supply electrode introduces a power supply and outputs signals for corresponding components;
the molecular pump 420 is hermetically fixed on the side surface of the vacuum cavity 417 and is used for pumping gas in the vacuum cavity 417;
the vacuum gauge 421 is hermetically fixed on the side surface of the vacuum cavity 417 and is used for monitoring the vacuum degree of the vacuum cavity 417;
the backing pump 422 is connected with the molecular pump 420 through a gas pipe and is used for providing a pre-vacuum for the molecular pump 420;
the ion receiving and amplifying device includes: an electron multiplier 415 and a faraday cup 416;
the electron multiplier 415 is installed at the tail of the quadrupole rod sleeve 414 and is used for receiving ions, amplifying the ions into electron flow, and then sending the electron flow to a mass spectrogram imaging device to obtain a mass spectrogram;
the faraday cup 416 is installed at the tail of the quadrupole rod sleeve 414 in parallel with the electron multiplier 415, serves as a receiving electrode of the electron multiplier 415, and is further used for receiving ions and sending the ion flow to a mass spectrogram imaging device to obtain a mass spectrogram;
the ion-shaping transport device includes: an ion extraction lens 410, an ion focusing lens 411, and an ion ejecting lens 412;
the ion extraction lens 410, which is installed close to the ion exit hole of the ionization chamber 405, is used to receive and extract ions out of the ionization chamber 405, and send the ions to the ion focusing lens 411;
the ion focusing lens 411, which is installed next to the ion extraction lens 410, is used for focusing ions and sending the ions to the ion expelling lens 412;
the ion ejecting lens 412, mounted in close proximity to the ion focusing lens 411, is used to eject ions and send them to the quadrupole rod assembly 413.
Referring to fig. 5, fig. 5 is a schematic structural diagram of a quadrupole rod assembly in an embodiment of the present invention, including:
a parallel bar 501, a parallel bar 502, a parallel bar 503, and a parallel bar 504;
the parallel rods 501 to 504 are provided with direct current voltage and superposed radio frequency voltage, the voltage polarities of the opposite parallel rods (for example, the parallel rod 502 and the parallel rod 504) are the same, the voltage polarities of the adjacent parallel rods (for example, the parallel rod 501 and the parallel rod 503) are opposite, and the parallel rods 501 to 504 are used for screening ions and sending the screened ions to the ion receiving and amplifying device.
Referring to fig. 6, fig. 6 is a flow chart of an implementation of a mass spectrometry method in an embodiment of the present invention, including:
s601: the final analytical ionization energy of the gas to be analyzed is determined. The gas to be analyzed includes several gases, such as carbon dioxide, oxygen, nitrogen, and the like. The determining of the final analysis ionization energy of the gas to be analyzed specifically includes:
for each gas in the gas to be analyzed, selecting the maximum ionization energy of a fragment ion peak disappearance critical point as the analysis ionization energy of each gas;
and selecting the lowest analytical ionization energy in the analytical ionization energies of each gas as the final analytical ionization energy of the gas to be analyzed.
S602: and under the final analysis ionization energy, introducing the gas to be analyzed into any mass spectrum system in the invention to obtain a mass spectrum of the gas to be analyzed.
Referring to fig. 7, fig. 7 is a schematic diagram of ionization energy extraction in carbon dioxide analysis according to an embodiment of the present invention, including:
carbon dioxide fragment ion peak 701, ionization energy at critical point 702, mass-to-charge ratio (m/z) axis, ionization energy (ev) axis, and CO2Signal relative intensity (%) axis. As can be seen from the figure, at the ionization energy 702(24eV) of the critical point, the carbon dioxide fragment ion peak 701 almost disappears, so 24eV is taken as the analytical ionization energy of carbon dioxide.
The invention adopts the electric field with lower energy, and has the advantage of less fragment ions after ionization compared with the traditional high-energy electric field. In the mixed gas, the situation that excessive gas fragment ions overlap each other on a spectrogram occurs, so that the difficulty of quantitative detection of the components of the mixed gas is increased. Referring to fig. 8, fig. 8 is a mass spectrum of the analyte molecule after ionization under the high-energy electric field in the prior art, which includes:
example mass columns 801, carbon dioxide, neon, water, nitrogen, argon, carbon monoxide, oxygen, hydrogen, mass (m) axis, and relative intensity (%) axis. As can be seen from the figure, three gases of carbon dioxide, nitrogen and carbon monoxide are superimposed on the exemplary mass column 801, and other mass columns in a similar manner exist. Thus, the prior art is unable to detect the composition of a gas without the addition of chromatographic techniques.
Referring to fig. 9, fig. 9 is a mass spectrum generated under a low-energy electric field in an embodiment of the present invention, which includes:
a mass spectrum 901 at a final analytical ionization energy of 70eV, a mass spectrum 902 at a final analytical ionization energy of 22eV, a mass (m) axis, and a relative intensity (%) axis. Comparing the mass spectrum 901 at the final analysis ionization energy of 70eV with the mass spectrum 902 at the final analysis ionization energy of 22eV, it can be known that more gas molecules form fragment ions during electron bombardment at the analysis ionization energy of 70 eV. For example, in the mass spectrum 902 at a final analytical ionization energy of 22eV, the relative intensity of the gas with mass 44 is significantly higher than that in the mass spectrum 901 at a final analytical ionization energy of 70 eV. This is because a portion of the gas molecules of mass 44 under the high energy electric field undergo intramolecular bond breakage upon electron bombardment, forming fragment ions of masses 28 and 16. From this, it is found that the mass spectrum under a low-energy electric field has a small number of fragment ions, and the mixture gas components are analyzed without introducing a chromatographic analysis.
Finally, it should be noted that: the above examples are only intended to illustrate the technical solution of the present invention, but not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present invention.
Claims (6)
1. A mass spectrometry system, comprising: a high electron utilization rate low energy ionization device, a sample inlet, an ion repulsion electrode, an ion source heater, an ion source temperature sensor, an ion source magnet, an ion shaping and transmitting device, a quadrupole rod assembly, a quadrupole rod sleeve, an ion receiving and amplifying device, a vacuum cavity, a vacuum feed-through flange, a molecular pump, a vacuum gauge and a backing pump;
the sample inlet is arranged on the side surface of the ionization chamber and is used for introducing molecules of an object to be detected;
the ion repulsion electrode is arranged on the side surface of the ionization chamber and is used for pushing the ions generated in the ionization chamber to the ion shaping and conveying device;
the ion source heater is sleeved on the ion repulsion electrode and used for heating the ionization chamber;
the ion source temperature sensor is arranged outside the ionization chamber and used for measuring the temperature of the ionization chamber;
the ion source magnet is arranged on the outer side of the electron repulsion pole and used for increasing the movement path of electrons;
the ion shaping and transmitting device is arranged at a position close to the ion emergent hole of the ionization chamber and used for shaping ions and sending the shaped ions to the quadrupole rod component;
the quadrupole rod assembly is arranged close to the ion shaping and transmitting device and is used for screening ions and sending the screened ions to the ion receiving and amplifying device;
the quadrupole rod sleeve is wrapped around the quadrupole rod assembly and used for fixing the quadrupole rod assembly;
the ion receiving and amplifying device is arranged at the tail part of the quadrupole rod sleeve and is used for receiving ions, amplifying the ion flow into electron flow and then sending the electron flow to mass spectrogram imaging equipment to obtain a mass spectrogram;
the vacuum cavity is positioned at the outermost part of the mass spectrum system and is used for providing a vacuum environment for the mass spectrum system;
the vacuum feed-through flanges are arranged at the front end and the rear end of the vacuum cavity and are used for sealing the vacuum cavity and fixing the power supply electrode, and the power supply electrode introduces a power supply and outputs signals for corresponding parts;
the molecular pump is hermetically fixed on the side surface of the vacuum cavity and used for pumping gas in the vacuum cavity;
the vacuum gauge is hermetically fixed on the side surface of the vacuum cavity and used for monitoring the vacuum degree of the vacuum cavity;
the backing pump is connected with the molecular pump through a gas pipe and is used for providing pre-vacuum for the molecular pump;
the ion shaping transport device includes:
an ion extraction lens, an ion focusing lens and an ion expelling lens;
the ion pull-out lens is arranged close to an ion exit hole of the ionization chamber and used for receiving ions, pulling the ions out of the ionization chamber and then sending the ions to the ion focusing lens;
the ion focusing lens is arranged close to the ion pull-out lens and used for focusing ions and sending the ions to the ion expelling lens;
the ion expelling lens is arranged close to the ion focusing lens and used for expelling ions and sending the ions to the quadrupole rod assembly;
the high electron utilization low energy ionization device includes:
the ionization chamber, the electron incidence grid mesh and the low-energy electric field component are arranged in the ionization chamber;
the ionization chamber is positioned on the inner side of the electron incidence grid mesh and is used for accommodating molecules and electrons of the object to be detected, and the electrons bombard the molecules of the object to be detected to ionize;
the electron incidence grid mesh is arranged between the ionization chamber and the low-energy electric field component and is used for improving the electron utilization rate;
the low-energy electric field assembly is arranged on the outer side of the electron incidence grid and is used for generating a low-energy electric field and emitting electrons;
the low energy electric field assembly comprises:
a filament and the electron repulsion electrode;
the filament is arranged on the outer side of the electron incidence grid, is positioned between the electron incidence grid and the electron repulsion electrode and is used for emitting electrons, and the number of the filament is two;
the electron repulsion electrode is arranged on the outer side close to the filament and used for accessing a floating voltage, and the floating voltage is matched with the access voltage of the electron incidence grid mesh to generate a low-energy electric field;
the absolute value of the low-energy electric field voltage is 5V to 70V.
2. The mass spectrometry system of claim 1, wherein the ion receiving amplification device comprises:
electron multipliers and faraday cups;
the electron multiplier is arranged at the tail part of the quadrupole rod sleeve and used for receiving ions, amplifying the ions into electron flow and then sending the electron flow to mass spectrogram imaging equipment to obtain a mass spectrogram;
the Faraday cup and the electron multiplier are installed at the tail part of the quadrupole rod sleeve in parallel, serve as a receiving electrode of the electron multiplier, and are further used for receiving ions and sending the ions to mass spectrogram imaging equipment to obtain a mass spectrogram.
3. The mass spectrometry system of claim 1, wherein the quadrupole rod assembly comprises:
a parallel bar;
the parallel rods are provided with direct current voltage and superposed radio frequency voltage, the polarities of the voltages of the opposite parallel rods are the same, the polarities of the voltages of the adjacent parallel rods are opposite, and the parallel rods are used for screening ions and sending the screened ions to the ion receiving and amplifying device.
4. A method of mass spectrometry comprising:
determining the final analytical ionization energy of the gas to be analyzed;
passing the gas to be analyzed into the mass spectrometry system of any one of claims 1 to 3 under the final analysis ionization energy to obtain a mass spectrum of the gas to be analyzed.
5. The method of claim 4, wherein the gas to be analyzed comprises several gases.
6. The method of claim 4 or 5, wherein determining a final analytical ionization energy of the gas to be analyzed comprises:
for each gas in the gas to be analyzed, selecting the maximum ionization energy of a fragment ion peak disappearance critical point as the analysis ionization energy of each gas;
and selecting the lowest analytical ionization energy in the analytical ionization energies of each gas as the final analytical ionization energy of the gas to be analyzed.
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| US3665185A (en) * | 1970-10-19 | 1972-05-23 | Minnesota Mining & Mfg | Ion scattering spectrometer with neutralization |
| JP2000067809A (en) * | 1998-08-21 | 2000-03-03 | Shimadzu Corp | Quadrupole mass spectrometric device |
| CN107068532B (en) * | 2017-03-29 | 2019-03-05 | 中国计量科学研究院 | A kind of electron impact ionization source |
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