CN107068532B - A kind of electron impact ionization source - Google Patents
A kind of electron impact ionization source Download PDFInfo
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- CN107068532B CN107068532B CN201710196165.4A CN201710196165A CN107068532B CN 107068532 B CN107068532 B CN 107068532B CN 201710196165 A CN201710196165 A CN 201710196165A CN 107068532 B CN107068532 B CN 107068532B
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- filament
- electron impact
- impact ionization
- ionization source
- ionisation chamber
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/10—Ion sources; Ion guns
- H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
- H01J49/147—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers with electrons, e.g. electron impact ionisation, electron attachment
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/022—Circuit arrangements, e.g. for generating deviation currents or voltages ; Components associated with high voltage supply
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/26—Mass spectrometers or separator tubes
Abstract
The present invention provides a kind of electron impact ionization sources, comprising: feedthrough flange assembly and electron impact ionization source component；Feedthrough flange assembly includes: a standard flange and multiple feed through pole, includes the threaded hole that several are used to fix electron impact ionization source component on standard flange；Feed through pole is cylindrical metallic rod, and feed through pole passes axially through standard flange；The lead electrode outlet of feed through pole layout and electron impact ionization source component on feedthrough flange assembly, which is laid out, to be corresponded, and the lead electrode outlet of the feed through pole on feedthrough flange assembly and electron impact ionization source component is by directly realizing electrical communication to slotting mode；Electron impact ionization source component includes: ion source pedestal, ionisation chamber, two filament components, repeller electrode, lens group, heater, temperature sensor, temperature controller and a pair of magnet.Electron impact ionization volume source provided by the invention is smaller, and function is more complete, can easily be integrated into portable mass spectrometer.
Description
Technical field
The present invention relates to mass spectrometry art fields, and in particular to a kind of electron impact ionization source.
Background technique
Mass spectrograph be research substance form substantially, one of the instrument that structure feature, physics and chemical property are most basic, be raw
The requisite instrumentation in the fields such as the science of life, material science, food safety, environmental protection, is the core of Modern Analytical Instrument.Its essence
It is a kind of spectral method detected after being separated the ion of movement by their mass-to-charge ratio using electric field and/or magnetic field.It is logical
The exact mass for crossing measurement ion can determine the compound composition of ion.It is mainly used for the Structural Identification of compound, its energy
The structural informations such as the molecular weight, element composition and functional group of compound are provided.Its analyst coverage is extensive, is suitable for gas, liquid
Body and solid；It is small that it analyzes fast speed, high sensitivity, amount of samples；It can direct qualitative analysis；By various separation hands
Section can also carry out accurate quantitative analysis to complex compound.Because these mass spectrometric features, it, which is widely used in, organises
The fields such as, biology, geochemistry, nuclear industry, material science, environmental science, medical hygiene, Food Chemistry, petrochemical industry
And the special analysis such as space technology and public security work field.Mass spectrograph is divided into magnetic substance spectrum according to the difference of mass analyzer
Instrument, time of-flight mass spectrometer, quadrupole mass spectrometer (including quadrupole mass spectrometer and ion trap mass spectrometer), Fourier cyclotron resonance matter
Spectrometer, orbit ion trap mass spectrograph and various hybridization mass spectrographs etc..
Most of mass spectrographs belong to Large-Scale Precision Instrument and Equipment, are typically mounted in laboratory and are operated and used.And
The on-site tests such as military operation, industrial production, accident rescue field proposes the thriving demand of miniaturization to mass spectrograph, portable
Mass spectrometric research and development become research hotspot.Quadrupole mass spectrometer is because small in size, structure is simple, technology relative maturity, low in cost
One of and become a kind of most widely used mass spectrograph, this also becomes the first choice of portable mass spectrometer development.
One quadrupole mass spectrometer is usually by sampling system, ion source, quadrupole rod mass analyzer, detector, vacuum system
It is formed with systems such as data processings.As depicted in figs. 1 and 2.Ion source be make neutral atom or molecular ionization, and therefrom draw from
The device of beamlet stream, it is the essential component of mass spectrograph.Wherein, common for the ion source of quadrupole mass spectrometer
There are the source electron impact ionization (EI), chemical ionization source, ultraviolet light ionization ion source, glow discharge source, electric spray ion source, atmosphere
Press chemical ionization source etc..Although various atmospheric pressure ionizationions using more and more, using most extensively, be also most basic
Be still electron impact ionization source, commercial standard spectrogram is exactly to use standard ionization condition, i.e. the electron bombardment of 70eV electricity
It ionizes to obtain from source.
The source electron impact ionization (EI) usually by ionisation chamber, filament, receiving pole, repeller electrode, pull out lens, condenser lens,
Evict lens composition from, as shown in Figure 3.Filament heating power generates electronics, and electronics forms high speed (high energy) electricity under electric field action
Beamlet, electron beam passes through ionisation chamber and is received pole reception, during electronics passes through ionisation chamber, electron beam bombardment ionisation chamber
In sample, to generate electronics and molecular ion M+, M+ continue the fracture or the molecule that by electron bombardment and cause chemical bond
It resets, moment generates different kinds of ions.Ion in repeller electrode, pull out lens, condenser lens and under the action of evict lens from by from electricity
It pulls out, focus and evicts from from room, to be analyzed for next step.
But the current general volume in the source electron impact ionization (EI) is larger, is poorly suitable for small portable mass spectrograph.
Summary of the invention
For the defects in the prior art, the present invention provides a kind of electron impact ionization source, and electronics provided by the invention bangs
Ionization source small volume is hit, function is more complete, can easily be integrated into portable mass spectrometer.
To solve the above problems, the present invention provides following technical schemes:
A kind of electron impact ionization source, comprising: feedthrough flange assembly and electron impact ionization source component；
The feedthrough flange assembly includes: a standard flange and multiple feed through pole, includes on the standard flange
Several are used to fix the threaded hole of the electron impact ionization source component；The feed through pole is cylindrical metallic rod, institute
It states feed through pole and passes axially through the standard flange, and the electric insulation between standard flange；On the feedthrough flange assembly
Feed through pole layout be laid out and correspond with the lead electrode outlet of the electron impact ionization source component, and the feedthrough method
The lead electrode outlet of feed through pole and the electron impact ionization source component on blue component passes through directly to slotting mode reality
Existing electrical communication；
The electron impact ionization source component includes: ion source pedestal, ionisation chamber, two filament components, repeller electrode, lens
Group, heater, temperature sensor, temperature controller and a pair of magnet；
Wherein, the ion source pedestal is for carrying the electron impact ionization source component；
The ionisation chamber is the cavity structure of open at one end, and described two filament components are oppositely arranged on the ionisation chamber
Outside side wall, for generating the electronics with preset energy, the electronics of generation passes through the electricity being arranged on the ionisation chamber side wall
Sub- entrance aperture enters inside the ionisation chamber, enters the ionization to the sample introduction aperture by being arranged on the ionisation chamber side wall
The sample of chamber interior is bombarded, and sample is transformed into electrically charged ion, and the ion of generation is in the repeller electrode and described
It is evicted under the action of microscope group from the open one end of the ionisation chamber；Wherein, the repeller electrode setting is not opened wide in the ionisation chamber
One end, the lens group is arranged in the open one end of the ionisation chamber, and the repeller electrode is oppositely arranged with the lens group, and
It is vertical with the direction that described two filament components are oppositely arranged；Wherein, the electron impact hole and the sample introduction aperture are in 90 degree
Position relation；
The heater is arranged in the not open one end of the ionisation chamber, for heating to the ionisation chamber；
The side-wall outer side of the ionisation chamber is arranged in the temperature sensor, for measuring the temperature of the ionisation chamber；
The temperature controller, for carrying out temperature control to the heater according to the temperature of the temperature sensor measurement
System；
The pair of magnet is oppositely arranged on the side-wall outer side of the ionisation chamber, for generating inside the ionisation chamber
Magnetic field.
Further, the filament component includes: that filament pedestal, filament, two filament electrodes, filament baffle and ceramics are small
Pipe；
Wherein, two filament electrodes are fixed on the filament pedestal by the technique of sealing-in, and with the filament pedestal
Keep insulation；
The both ends of the filament are put respectively to be welded on two filament electrodes, and the filament baffle is placed in the back side of filament, and
One end welding is wherein on a filament electrode；Wherein, another filament electrode is wrapped with ceramic tubule, for preventing the lamp
Silk electrode is contacted with the filament baffle.
Further, it is 1mm that the shape of the filament, which is diameter, and spiral spacing is the spiral-shaped of 0.5mm.
Further, electric insulation is realized by repeller electrode felt pad between the repeller electrode and the ionisation chamber.
Further, the lens group includes three pieces ion lens, respectively pull-out electrode lens, focusing electrode lens and
Evict electrode lens from, the centre of this three pieces electrode lens is drum-shaped structure, and keeps concentric, passes through ceramics each other
Existing concentric locating and insulation are padded, the lens group is fixed by screws on the ion source pedestal.
Further, the pair of magnet is a pair of of cylinder NS magnet, and a filament component is arranged in the first magnet
The outside of another filament component is arranged in outside, the second magnet, and the pole N of the first magnet is oppositely arranged with the pole S of the second magnet.
Further, the heater is ceramic heating flake；The ceramic heating flake is tied using the square of intermediate aperture
Structure, intermediate aperture segment are used for so that the lead electrode of the repeller electrode partially passes through.
Further, the temperature sensor is the ceramic mould platinum resistance of laminated structure, solid using nut and spring shim
Due on the side wall of the ionisation chamber.
Further, the quantity of the threaded hole on the standard flange for fixing the electron impact ionization source component is
2~4.
Further, be additionally provided with the conical opening for sample introduction on the outside of the ionisation chamber, the conical opening and it is described into
Sample aperture communicates, and realizes the sample introduction of sample.
As shown from the above technical solution, electron impact ionization source provided by the invention is expanded using standard flange as carrier
The use scope in electron impact ionization source.Further, since containing magnet device, heating element in electron impact ionization source component
And temperature element, therefore have simultaneously and increase ionizing efficiency and guarantee that ion source is clean and improve the advantage of contamination resistance,
And the arrangement of magnet device, heating element and temperature element is simple and reliable, while more saving volume.Further, exist
In electron impact ionization source provided by the invention, the feed through pole of feedthrough flange assembly and the electron impact ionization source component
Lead electrode outlet directly realizes electrical communication to slotting mode by contact pin, so that it has been reduced as far as the use of cable,
The welding or thread connecting mode between cable are also avoided, has not only been facilitated but also reliable, while also saving volume.By being analyzed above
It is found that electron impact ionization source provided by the invention, small volume, function is more complete, can be used as an ion source separate standards
Part has compatibility well, can very easily be integrated into portable mass spectrometer system.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is the present invention
Some embodiments for those of ordinary skill in the art without creative efforts, can also basis
These attached drawings obtain other attached drawings.
Fig. 1 is the structure composition block diagram of quadrupole mass spectrometer in the prior art；
Fig. 2 is the structural schematic diagram of quadrupole mass spectrometer in the prior art；
Fig. 3 is the structural schematic diagram in electron impact ionization source in the prior art；
Fig. 4 is the structural schematic diagram in the electron impact ionization source that one embodiment of the invention provides；
Fig. 5 a and Fig. 5 b are the structural schematic diagrams for the feedthrough flange assembly 401 that one embodiment of the invention provides；Wherein, Fig. 5 b
It is the side view of Fig. 5 a；
Fig. 6 a and Fig. 6 b are the structural schematic diagrams for the son bombardment ionization source component 402 that one embodiment of the invention provides；Wherein,
Fig. 6 a is the side view of Fig. 6 b；
Fig. 7 is the structural schematic diagram for the lens group 605 that one embodiment of the invention provides；
Fig. 8 is the structural schematic diagram for the filament component 603 that one embodiment of the invention provides；
Fig. 9 is feed through pole and electron impact ionization source on the feedthrough flange assembly 401 that one embodiment of the invention provides
The lead electrode outlet of component 402 is carried out directly by vehicle needle 901 to the slotting structural schematic diagram for realizing electrical communication.
Specific embodiment
In order to make the object, technical scheme and advantages of the embodiment of the invention clearer, below in conjunction with the embodiment of the present invention
In attached drawing, the technical scheme in the embodiment of the invention is clearly and completely described, it is clear that described embodiment is
A part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, those of ordinary skill in the art
Every other embodiment obtained without creative efforts, shall fall within the protection scope of the present invention.
One embodiment of the invention provides a kind of electron impact ionization source, referring to fig. 4, electronics provided in an embodiment of the present invention
Bombard ionization source, comprising: feedthrough flange assembly 401 and electron impact ionization source component 402；
Referring to Fig. 5 a and Fig. 5 b, the feedthrough flange assembly 401 includes: a standard flange 501 and multiple feed through pole
502, it include the threaded hole that several are used to fix the electron impact ionization source component 402 on the standard flange 501
503；The feed through pole 502 is cylindrical metallic rod, and the feed through pole 502 passes axially through the standard flange 501,
And the electric insulation between standard flange 501；Feed through pole layout and the electron bombardment on the feedthrough flange assembly 401
The lead electrode outlet for ionizing source component 402, which is laid out, to be corresponded, and the feedthrough referring to Fig. 9, on the feedthrough flange assembly 401
The lead electrode outlet of electrode and the electron impact ionization source component 402 directly realizes electricity to slotting mode by vehicle needle 901
Gas connection, has been reduced as far as the use of cable in this way, has also avoided welding or thread connecting mode between cable, i.e., just
Just again reliable, while also saving volume.Preferably, the vehicle needle 901 is 2 logical to plug in vehicle needle.
In the present embodiment, the installation that feedthrough flange assembly 401 both can be used as electron impact ionization source component 402 is fixed
With flange, meanwhile, and can be used as the feedthrough connector of 402 power on signal of electron impact ionization source component, so that shown in Fig. 4
Electron impact ionization source can be used as an ion source separate standards part.Wherein, it 501 is made of standard flange, increasing should
The scope of application of ion source.It both can use rubber seal, metal sealing form also can be used, as KF40,
DN63ISO-K, DN40CF etc..Feed through pole 502 is the electrode for realizing ion source power on signal feedthrough, it passes through mark
Quasi- flange 501, is fixed on standard flange 501 in the form of vacuum seal, it is electric insulation between standard flange 501,
Pressure-resistant 1KV or more, while guaranteeing vacuum sealing again, leak rate should be lower than 1.0 × 10-10Pa·m3/s.Feed through pole 502 is circle
Cylindrical electrode, quantity is depending on the requirement of ion source power on signal, in the present embodiment, quantity 12, this 12 electrodes according to
Certain centre for being regularly distributed on standard flange 501.The diameter of feed through pole 502 usually takes 1-3mm, depending on the electricity flowed through above
Depending on the size of stream and the size of standard flange 501 and required number, diameter is 1mm in this example.Its material is gold
Belong to, can be copper, 304 magnetism-free stainless steels, 316 magnetism-free stainless steels, kovar alloy etc..Have on standard flange 501 for fixing
The threaded hole 503 of electron impact ionization source component 402, quantity 2-4, be 2 M3 threaded holes in this example.
Referring to Fig. 6 a and Fig. 6 b, the electron impact ionization source component 402 include: ion source pedestal 601, ionisation chamber 602,
Two filament components 603, repeller electrode 604, lens group 605, heater 606, temperature sensor 607, temperature controller are (in figure not
Show) and a pair of magnet 608；
Wherein, the ion source pedestal 601 is for carrying the electron impact ionization source component 402；
The ionisation chamber 602 is the cavity structure of open at one end, and described two filament components 603 are oppositely arranged on the electricity
Outside side wall from room, for generating the electronics with preset energy, the electronics of generation is by being arranged in 602 side of ionisation chamber
Electron impact hole 611 on wall enters inside the ionisation chamber 602, for by being arranged in 602 side wall of ionisation chamber
Sample introduction aperture 610 enter the ionisation chamber 602 inside sample bombarded, sample is transformed into electrically charged ion, production
Raw ion is evicted under the action of the repeller electrode 604 and the lens group 605 from the open one end of the ionisation chamber 602；
Wherein, in the not open one end of the ionisation chamber 602, the lens group 605 is arranged in the ionization for the setting of repeller electrode 604
The open one end in room 602, the repeller electrode 604 are oppositely arranged with the lens group 605, and with described two filament components 603
The direction being oppositely arranged is vertical；Wherein, the electron impact hole 611 and the sample introduction aperture 610 are in 90 degree of position relation；
The heater 606, setting is in the not open one end of the ionisation chamber 602, for carrying out to the ionisation chamber 602
Heating；
The side-wall outer side of the ionisation chamber 602 is arranged in the temperature sensor 607, for measuring the ionisation chamber 602
Temperature；
The temperature controller, the temperature for being measured according to the temperature sensor 607 carry out the heater 606
Temperature control；
The pair of magnet 608 is oppositely arranged on the side-wall outer side of the ionisation chamber 602, in the ionisation chamber 602
Inside generates magnetic field.
By the scheme recorded above it is found that electron impact ionization source provided in an embodiment of the present invention, is to carry with standard flange
Body expands the use scope in electron impact ionization source.Further, since containing magnet member in electron impact ionization source component
Part, heating element and temperature element, therefore have simultaneously and increase ionizing efficiency and guarantee that ion source is clean and improve antipollution
The advantage of ability, and the arrangement of magnet device, heating element and temperature element is simple and reliable, while more saving volume.
Further, in electron impact ionization source provided in an embodiment of the present invention, the feed through pole of feedthrough flange assembly and the electricity
The lead electrode outlet of son bombardment ionization source component directly realizes electrical communication to slotting mode by contact pin, thus as much as possible
The use for reducing cable also avoids welding or thread connecting mode between cable, i.e., convenient and reliable, while also saving
Volume.It, can be with by being analyzed above it is found that electron impact ionization source provided in an embodiment of the present invention, small volume, function is more complete
As an ion source separate standards part, there is compatibility well, can very easily be integrated into portable mass spectrometer system.
In a kind of optional embodiment, referring to Fig. 8, the filament component 603 include: filament pedestal 801, filament 802,
Two filament electrodes 803 and 804, filament baffle 805 and ceramic tubule 806；
Wherein, two filament electrodes 803 and 804 are fixed on the filament pedestal 801 by the technique of sealing-in, and with institute
It states filament pedestal 801 and keeps insulation；
For example, the metal materials systems such as 304 stainless steels, 316L stainless steel or kovar alloy can be used in filament pedestal 801
At can also be made of ceramic materials.Filament electrode 803 and 804 is fixed on filament pedestal 801 by the technique of sealing-in, such as
Fruit filament pedestal 801 is to be made of metal material, then must be sealed using glass between filament electrode 803 and 804 and filament pedestal 801
It connects or crunch seal form, palpus guarantees electric insulation between 803 and 804 and 801.If filament pedestal 801 is by ceramic material
Material is made, then any form of sealing-in is used between filament electrode 803 and 804 need and filament pedestal 801, but must guarantee
It is electric insulation between 803 and 804.
Referring to Fig. 8, further, the both ends of the filament 802 are put respectively to be welded on two filament electrodes 803 and 804, institute
The back side that filament baffle 805 is placed in filament 802 is stated, and one end is welded on a filament electrode (such as filament electrode 803) wherein；
Wherein, another filament electrode (such as filament electrode 804) is wrapped with ceramic tubule 806, for prevent the filament electrode 804 with
The filament baffle 805 contacts.
Here, the material of filament 802 generally selects tungsten wire, rhenium silk, iridium wire or rhenium tengsten lamp material and is made, and shape can
To be filiform, it is also possible to sheet, can be also possible to spirally to be linear.Filiform is selected in the present embodiment, and
In order to increase the yield of electronics, by filament winding at diameter 1mm, spiral spacing 0.5mm's is spiral-shaped.Wherein, filament 802
It puts and is welded on filament electrode 803 and 804 respectively in both ends.Filament baffle 805 is placed in the rear portion of filament 802, and end point is welded in
On filament electrode 803.Filament baffle 805 is contacted with another filament electrode 804 in order to prevent, is covered on another filament electrode 804
Upper one ceramic tubule 806.It is understood that filament component 603 when installation, must guarantee that filament 802 is just placed in
The center in electron impact hole 611, and maintained a certain distance with the outer wall in electron impact hole 611, it is generally spaced on the left side 1-2mm
It is right.In the present embodiment, due to using double filamentray structures, it has been opened on the cylindrical wall of ionisation chamber 602 two small
Hole between hole diameter 1-3mm, can be circular hole, can be elliptical aperture, be also possible to rectangular opening, depending on the structure of filament.
In a kind of optional embodiment, referring to Fig. 6 a, by pushing away between the repeller electrode 604 and the ionisation chamber 602
Pole felt pad 609 is denounceed to realize electric insulation.
In a kind of optional embodiment, referring to Fig. 7, the lens group 605 includes three pieces ion lens, is respectively pulled out
Electrode lens 701, focusing electrode lens 702 and evict electrode lens 703 from, the centre of this three pieces electrode lens is drum-shaped knot
Structure, and keep concentric, realize that concentric locating and insulation, the lens group 605 pass through screw by ceramic blanket 704 each other
705 are fixed on the ion source pedestal 601.
In a kind of optional embodiment, in order to increase the motion path of electronics, so that ionizing efficiency is improved, in ionisation chamber
Side-wall outer side, more specifically, in close proximity to the outside of filament component 603, referring to Fig. 6 a, in the outside of filament component 603)
It placed 1 cylinder-shaped magnet 608 respectively.The opposite side of the two magnet is respectively different polarity, i.e. N is extremely to the pole S.
In a kind of optional embodiment, the heater 606 uses ceramic heating flake, that is, passes through ceramic heating flake 606
Ionisation chamber 602 is heated, ceramic heating flake can use the square structure of intermediate aperture.Intermediate aperture segment just may be used
To allow the lead electrode of repeller electrode 604 to partially pass through, heating and the repeller electrode to ionisation chamber 602 can be played in this way
Electric insulation effect between 604 and ionisation chamber 602.
In a kind of optional embodiment, ceramic mould platinum resistance of the temperature sensor 607 using laminated structure, sheet
The resistance of structure is easily installed on the outside of ionisation chamber, and nut can be used for example and spring shim is locked.
In a kind of optional embodiment, the conical opening 612 for sample introduction is additionally provided on the outside of the ionisation chamber, it is described
Conical opening 612 is communicated with the sample introduction aperture 610, realizes the sample introduction of sample.
Referring to Fig. 5 a, Fig. 5 b, Fig. 6 a and Fig. 6 b, in the present embodiment, one shares 12 tunnel electric signals, is 3 roads electricity respectively
Sub-lens, 2 groups of totally 4 street lamp silks, the heating of 2 tunnels, 2 channel Temperature Measurings, 1 road ion repulsion.This 12 tunnel electric signal passes through cable and feedthrough
Feed through pole 502 on flange assembly 401 is connected.Since entire ion source works in high vacuum environment, Ying Jinliang avoids cable
Bring, which is deflated etc., is unfavorable for the factor of vacuum, and therefore, cable used should select the material of low deflation rate to form, and prevent tin
The techniques such as weldering.In the present embodiment, it is preferred to use the mode of vehicle needle.Meanwhile in order to reduce the use of cable as far as possible, from
In the lead and feedthrough flange assembly 401 of component in the layout of feed through pole 502, using directly to by the way of slotting, to avoid
The use of cable, and directly adopt vehicle needle and disposably realize electrical communication.As shown in figure 9, vehicle needle 901 leads to for 2 to plug in vehicle needle,
Avoid all welding and threaded connection, i.e., it is convenient and reliable, while saving volume.
Specifically, electron impact ion source at work, connects the electric current of 1-3A on filament 802, and filament is powered
After generate heat, generate electronics.The electric field and two magnet that electronics is formed between filament baffle 805 and ion source ionisation chamber 602
608 are formed by under magnetic fields and are threadingly advanced.Electronics enters after ionisation chamber 602, with by conical opening 612 and sample introduction it is small
Hole 610 is collided between the gas molecule of ionisation chamber, so that gas molecule be ionized.The ion being dissociated ionisation chamber 602,
Repeller electrode 604, lens group 605 common electric field action under.It is drawn out, focuses and evicts from.In order to guarantee the clean of ion source and
Contamination resistance is improved, ionisation chamber 602 is heated in the energization of ceramic heat on piece, at the same time, passes through temperature sensor
607 pairs of ion source temperatures are monitored, and realize the control to ceramic heating flake by external temperature controller, to realize
To the thermometric and temperature control of ion source temperature.
In the description of the present invention, it should be noted that herein, relational terms such as first and second and the like
It is only used to distinguish one entity or operation from another entity or operation, without necessarily requiring or implying these
There are any actual relationship or orders between entity or operation.Moreover, the terms "include", "comprise" or its is any
Other variants are intended to non-exclusive inclusion, so that including the process, method, article or equipment of a series of elements
Include not only those elements, but also including other elements that are not explicitly listed, or further includes for this process, side
Method, article or the intrinsic element of equipment.In the absence of more restrictions, limited by sentence "including a ..."
Element, it is not excluded that there is also other identical elements in the process, method, article or apparatus that includes the element.
The above examples are only used to illustrate the technical scheme of the present invention, rather than its limitations；Although with reference to the foregoing embodiments
Invention is explained in detail, those skilled in the art should understand that: it still can be to aforementioned each implementation
Technical solution documented by example is modified or equivalent replacement of some of the technical features；And these are modified or replace
It changes, the spirit and scope for technical solution of various embodiments of the present invention that it does not separate the essence of the corresponding technical solution.
Claims (10)
1. a kind of electron impact ionization source characterized by comprising feedthrough flange assembly and electron impact ionization source component；
The feedthrough flange assembly includes: a standard flange and multiple feed through pole, includes several on the standard flange
A threaded hole for being used to fix the electron impact ionization source component；The feed through pole is cylindrical metallic rod, the feedback
Energization pole passes axially through the standard flange, and the electric insulation between standard flange；Feedback on the feedthrough flange assembly
The lead electrode outlet of logical electrode lay-out and the electron impact ionization source component, which is laid out, to be corresponded, and the feedthrough flange group
The lead electrode outlet of feed through pole and the electron impact ionization source component on part is by directly realizing electricity to slotting mode
Gas connection；
The electron impact ionization source component include: ion source pedestal, ionisation chamber, two filament components, repeller electrode, lens group,
Heater, temperature sensor, temperature controller and a pair of magnet；
Wherein, the ion source pedestal is for carrying the electron impact ionization source component；
The ionisation chamber is the cavity structure of open at one end, and described two filament components are oppositely arranged on the outside of the ionisation chamber
Side wall, for generating the electronics with preset energy, the electronics of generation passes through the electronics being arranged on the ionisation chamber side wall and enters
Perforation enters inside the ionisation chamber, enters in the ionisation chamber to by the way that the sample introduction aperture on the ionisation chamber side wall is arranged in
The sample in portion is bombarded, and sample is transformed into electrically charged ion, the ion of generation is in the repeller electrode and the lens group
Under the action of evicted from from the open one end of the ionisation chamber；Wherein, the repeller electrode is arranged in the ionisation chamber not open one
End, the lens group are arranged in the open one end of the ionisation chamber, and the repeller electrode is oppositely arranged with the lens group, and with institute
It is vertical to state the direction that two filament components are oppositely arranged；Wherein, the electron impact hole and the sample introduction aperture are in 90 degree of side
Position relationship；
The heater is arranged in the not open one end of the ionisation chamber, for heating to the ionisation chamber；
The side-wall outer side of the ionisation chamber is arranged in the temperature sensor, for measuring the temperature of the ionisation chamber；
The temperature controller, for carrying out temperature control to the heater according to the temperature of the temperature sensor measurement；
The pair of magnet is oppositely arranged on the side-wall outer side of the ionisation chamber, for generating magnetic field inside the ionisation chamber.
2. electron impact ionization source according to claim 1, which is characterized in that the filament component include: filament pedestal,
Filament, two filament electrodes, filament baffle and ceramic tubule；
Wherein, two filament electrodes are fixed on the filament pedestal by the technique of sealing-in, and are kept with the filament pedestal
Insulation；
The both ends of the filament are put respectively to be welded on two filament electrodes, and the filament baffle is placed in the back side of filament, and one end
Welding is wherein on a filament electrode；Wherein, another filament electrode is wrapped with ceramic tubule, for preventing the filament electric
Pole is contacted with the filament baffle.
3. electron impact ionization source according to claim 2, which is characterized in that the shape of the filament is that diameter is 1mm,
Spiral spacing is the spiral-shaped of 0.5mm.
4. electron impact ionization source according to claim 1, which is characterized in that between the repeller electrode and the ionisation chamber
Electric insulation is realized by repeller electrode felt pad.
5. electron impact ionization source according to claim 1, which is characterized in that the lens group includes that three pieces ion is saturating
Mirror respectively pulls out electrode lens, focusing electrode lens and evicts electrode lens from, and the centre of this three pieces electrode lens is drum
Shape structure, and keep concentric, concentric locating and insulation are realized by ceramic blanket each other, the lens group is solid by screw
It is scheduled on the ion source pedestal.
6. electron impact ionization source according to claim 1, which is characterized in that the pair of magnet is a pair of of cylinder NS
Magnet, the first magnet are arranged in the outside of a filament component, and the second magnet is arranged in the outside of another filament component, and first
The pole N of magnet is oppositely arranged with the pole S of the second magnet.
7. electron impact ionization source according to claim 1, which is characterized in that the heater is ceramic heating flake；Institute
The square structure that ceramic heating flake uses intermediate aperture is stated, intermediate aperture segment is used for the lead electrode so that the repeller electrode
It partially passes through.
8. electron impact ionization source according to claim 1, which is characterized in that the temperature sensor is laminated structure
Ceramic mould platinum resistance is fixed on the side wall of the ionisation chamber using nut and spring shim.
9. electron impact ionization source according to claim 1, which is characterized in that described in being used to fix on the standard flange
The quantity of the threaded hole of electron impact ionization source component is 2~4.
10. electron impact ionization source according to claim 1, which is characterized in that be additionally provided on the outside of the ionisation chamber
For the conical opening of sample introduction, the conical opening is communicated with the sample introduction aperture, realizes the sample introduction of sample.
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| CN108231529B (en) * | 2018-03-09 | 2024-04-05 | 晓睿真空设备(嘉兴)有限公司 | Low-voltage magnetic control cathode ion source |
| CN108493091B (en) * | 2018-03-09 | 2020-03-24 | 中国计量科学研究院 | High-electron-utilization-rate low-energy ionization device, mass spectrum system and method |
| CN108760074A (en) * | 2018-07-16 | 2018-11-06 | 深圳大学 | A kind of temperature collecting device of neutron detector |
| CN110137071B (en) * | 2019-05-24 | 2021-02-23 | 中国计量科学研究院 | Split process mass spectrometer |
| CN111053978A (en) * | 2019-12-26 | 2020-04-24 | 上海联影医疗科技有限公司 | Ionization chamber and method for controlling temperature of ionization chamber |
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| US5155357A (en) * | 1990-07-23 | 1992-10-13 | Massachusetts Institute Of Technology | Portable mass spectrometer |
| CN103608894A (en) * | 2011-02-14 | 2014-02-26 | 麻省理工学院 | Methods, apparatus, and system for mass spectrometry |
| CN104599931A (en) * | 2013-10-31 | 2015-05-06 | 中国科学院大连化学物理研究所 | Compact charged particle detector |
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| US7157721B1 (en) * | 2003-12-22 | 2007-01-02 | Transducer Technology, Inc. | Coupled ionization apparatus and methods |
| WO2015040383A1 (en) * | 2013-09-20 | 2015-03-26 | Micromass Uk Limited | Interface for ion source and vacuum housing |
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| US5155357A (en) * | 1990-07-23 | 1992-10-13 | Massachusetts Institute Of Technology | Portable mass spectrometer |
| CN103608894A (en) * | 2011-02-14 | 2014-02-26 | 麻省理工学院 | Methods, apparatus, and system for mass spectrometry |
| CN104599931A (en) * | 2013-10-31 | 2015-05-06 | 中国科学院大连化学物理研究所 | Compact charged particle detector |
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