JPS5435957B2 - - Google Patents
Info
- Publication number
- JPS5435957B2 JPS5435957B2 JP11353375A JP11353375A JPS5435957B2 JP S5435957 B2 JPS5435957 B2 JP S5435957B2 JP 11353375 A JP11353375 A JP 11353375A JP 11353375 A JP11353375 A JP 11353375A JP S5435957 B2 JPS5435957 B2 JP S5435957B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/295—Electron or ion diffraction tubes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
- G01N23/203—Measuring back scattering
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/022—Circuit arrangements, e.g. for generating deviation currents or voltages ; Components associated with high voltage supply
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/10—Ion sources; Ion guns
- H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
- H01J49/142—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers using a solid target which is not previously vapourised
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/26—Mass spectrometers or separator tubes
- H01J49/28—Static spectrometers
- H01J49/282—Static spectrometers using electrostatic analysers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
- H01J49/46—Static spectrometers
- H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Crystallography & Structural Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Electron Tubes For Measurement (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US507713A US3920989A (en) | 1974-09-20 | 1974-09-20 | Ion scattering spectrometer utilizing charge exchange processes |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5157494A JPS5157494A (en) | 1976-05-19 |
JPS5435957B2 true JPS5435957B2 (en) | 1979-11-06 |
Family
ID=24019819
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11353375A Expired JPS5435957B2 (en) | 1974-09-20 | 1975-09-19 |
Country Status (9)
Country | Link |
---|---|
US (1) | US3920989A (en) |
JP (1) | JPS5435957B2 (en) |
CA (1) | CA1021882A (en) |
CH (1) | CH594249A5 (en) |
DE (1) | DE2542362C3 (en) |
FR (1) | FR2285610A1 (en) |
GB (1) | GB1526787A (en) |
NL (1) | NL7508730A (en) |
SU (1) | SU574172A3 (en) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0722011B2 (en) * | 1983-03-30 | 1995-03-08 | 日新電機株式会社 | High resolution ion scattering analyzer |
IT1246375B (en) * | 1990-04-11 | 1994-11-18 | Consiglio Nazionale Ricerche | APPARATUS AND METHOD FOR THE ABSOLUTE DETERMINATION OF THE ENERGY OF A BAND OF IONS |
JP2642881B2 (en) * | 1994-09-28 | 1997-08-20 | 東京大学長 | Ultrasensitive hydrogen detection method using slow multiply charged ions |
CA3050512A1 (en) * | 2017-01-18 | 2018-08-09 | Phoenix Llc | High power ion beam generator systems and methods |
CN114252653B (en) * | 2021-01-06 | 2023-12-12 | 中国科学院物理研究所 | Ultrafast imaging device and method thereof |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3480774A (en) * | 1967-05-26 | 1969-11-25 | Minnesota Mining & Mfg | Low-energy ion scattering apparatus and method for analyzing the surface of a solid |
US3665182A (en) * | 1969-08-18 | 1972-05-23 | Minnesota Mining & Mfg | Elemental analyzing apparatus |
US3665185A (en) * | 1970-10-19 | 1972-05-23 | Minnesota Mining & Mfg | Ion scattering spectrometer with neutralization |
-
1974
- 1974-09-20 US US507713A patent/US3920989A/en not_active Expired - Lifetime
-
1975
- 1975-07-22 NL NL7508730A patent/NL7508730A/en not_active Application Discontinuation
- 1975-08-25 CA CA234,059A patent/CA1021882A/en not_active Expired
- 1975-09-19 SU SU7502172007A patent/SU574172A3/en active
- 1975-09-19 DE DE2542362A patent/DE2542362C3/en not_active Expired
- 1975-09-19 JP JP11353375A patent/JPS5435957B2/ja not_active Expired
- 1975-09-19 GB GB38626/75A patent/GB1526787A/en not_active Expired
- 1975-09-19 CH CH1216675A patent/CH594249A5/xx not_active IP Right Cessation
- 1975-09-19 FR FR7528800A patent/FR2285610A1/en active Granted
Also Published As
Publication number | Publication date |
---|---|
NL7508730A (en) | 1976-03-23 |
DE2542362C3 (en) | 1980-01-17 |
DE2542362A1 (en) | 1976-04-01 |
SU574172A3 (en) | 1977-09-25 |
DE2542362B2 (en) | 1979-05-23 |
FR2285610A1 (en) | 1976-04-16 |
CA1021882A (en) | 1977-11-29 |
GB1526787A (en) | 1978-09-27 |
CH594249A5 (en) | 1977-12-30 |
FR2285610B1 (en) | 1981-08-07 |
JPS5157494A (en) | 1976-05-19 |
US3920989A (en) | 1975-11-18 |