FR2285610A1 - Procede et appareil de spectroscopie par diffusion d'ions avec echange de charges - Google Patents

Procede et appareil de spectroscopie par diffusion d'ions avec echange de charges

Info

Publication number
FR2285610A1
FR2285610A1 FR7528800A FR7528800A FR2285610A1 FR 2285610 A1 FR2285610 A1 FR 2285610A1 FR 7528800 A FR7528800 A FR 7528800A FR 7528800 A FR7528800 A FR 7528800A FR 2285610 A1 FR2285610 A1 FR 2285610A1
Authority
FR
France
Prior art keywords
ion diffusion
charge exchange
diffusion spectroscopy
spectroscopy
exchange
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7528800A
Other languages
English (en)
Other versions
FR2285610B1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
3M Co
Original Assignee
Minnesota Mining and Manufacturing Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Minnesota Mining and Manufacturing Co filed Critical Minnesota Mining and Manufacturing Co
Publication of FR2285610A1 publication Critical patent/FR2285610A1/fr
Application granted granted Critical
Publication of FR2285610B1 publication Critical patent/FR2285610B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/295—Electron or ion diffraction tubes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G01N23/203—Measuring back scattering
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/022—Circuit arrangements, e.g. for generating deviation currents or voltages ; Components associated with high voltage supply
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
    • H01J49/142—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers using a solid target which is not previously vapourised
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/28—Static spectrometers
    • H01J49/282—Static spectrometers using electrostatic analysers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
FR7528800A 1974-09-20 1975-09-19 Procede et appareil de spectroscopie par diffusion d'ions avec echange de charges Granted FR2285610A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US507713A US3920989A (en) 1974-09-20 1974-09-20 Ion scattering spectrometer utilizing charge exchange processes

Publications (2)

Publication Number Publication Date
FR2285610A1 true FR2285610A1 (fr) 1976-04-16
FR2285610B1 FR2285610B1 (fr) 1981-08-07

Family

ID=24019819

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7528800A Granted FR2285610A1 (fr) 1974-09-20 1975-09-19 Procede et appareil de spectroscopie par diffusion d'ions avec echange de charges

Country Status (9)

Country Link
US (1) US3920989A (fr)
JP (1) JPS5435957B2 (fr)
CA (1) CA1021882A (fr)
CH (1) CH594249A5 (fr)
DE (1) DE2542362C3 (fr)
FR (1) FR2285610A1 (fr)
GB (1) GB1526787A (fr)
NL (1) NL7508730A (fr)
SU (1) SU574172A3 (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0722011B2 (ja) * 1983-03-30 1995-03-08 日新電機株式会社 高分解能イオン散乱分析装置
IT1246375B (it) * 1990-04-11 1994-11-18 Consiglio Nazionale Ricerche Apparecchiatura e metodo per la determinazione assoluta dell'energia di un fascio di ioni
JP2642881B2 (ja) * 1994-09-28 1997-08-20 東京大学長 低速多価イオンによる超高感度水素検出法
US10206273B2 (en) * 2017-01-18 2019-02-12 Phoenix Llc High power ion beam generator systems and methods
CN114252653B (zh) * 2021-01-06 2023-12-12 中国科学院物理研究所 超快成像装置及其方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3480774A (en) * 1967-05-26 1969-11-25 Minnesota Mining & Mfg Low-energy ion scattering apparatus and method for analyzing the surface of a solid
US3665182A (en) * 1969-08-18 1972-05-23 Minnesota Mining & Mfg Elemental analyzing apparatus
US3665185A (en) * 1970-10-19 1972-05-23 Minnesota Mining & Mfg Ion scattering spectrometer with neutralization

Also Published As

Publication number Publication date
CH594249A5 (fr) 1977-12-30
JPS5157494A (fr) 1976-05-19
DE2542362A1 (de) 1976-04-01
JPS5435957B2 (fr) 1979-11-06
NL7508730A (nl) 1976-03-23
GB1526787A (en) 1978-09-27
CA1021882A (fr) 1977-11-29
SU574172A3 (ru) 1977-09-25
DE2542362C3 (de) 1980-01-17
US3920989A (en) 1975-11-18
DE2542362B2 (de) 1979-05-23
FR2285610B1 (fr) 1981-08-07

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Legal Events

Date Code Title Description
TP Transmission of property
CD Change of name or company name
ST Notification of lapse