DE2532646A1 - Integrierte duennfilmschaltung mit den eigenschaften eines tankkreises - Google Patents
Integrierte duennfilmschaltung mit den eigenschaften eines tankkreisesInfo
- Publication number
- DE2532646A1 DE2532646A1 DE19752532646 DE2532646A DE2532646A1 DE 2532646 A1 DE2532646 A1 DE 2532646A1 DE 19752532646 DE19752532646 DE 19752532646 DE 2532646 A DE2532646 A DE 2532646A DE 2532646 A1 DE2532646 A1 DE 2532646A1
- Authority
- DE
- Germany
- Prior art keywords
- conductors
- parallel
- comb electrodes
- converter according
- circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 title claims description 15
- 239000004020 conductor Substances 0.000 claims description 88
- 239000000758 substrate Substances 0.000 claims description 24
- 238000005516 engineering process Methods 0.000 claims description 6
- 239000003990 capacitor Substances 0.000 description 13
- 239000000463 material Substances 0.000 description 13
- 230000001939 inductive effect Effects 0.000 description 11
- 230000003068 static effect Effects 0.000 description 11
- 230000001965 increasing effect Effects 0.000 description 8
- 238000010586 diagram Methods 0.000 description 7
- 229920002120 photoresistant polymer Polymers 0.000 description 7
- 238000000034 method Methods 0.000 description 6
- 230000004044 response Effects 0.000 description 6
- 230000008569 process Effects 0.000 description 5
- 230000005684 electric field Effects 0.000 description 4
- 238000010894 electron beam technology Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000010408 film Substances 0.000 description 3
- 239000010453 quartz Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 230000010355 oscillation Effects 0.000 description 2
- 238000004088 simulation Methods 0.000 description 2
- 238000010897 surface acoustic wave method Methods 0.000 description 2
- 101100390736 Danio rerio fign gene Proteins 0.000 description 1
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 1
- 101100390738 Mus musculus Fign gene Proteins 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 230000003760 hair shine Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- 230000036316 preload Effects 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/02535—Details of surface acoustic wave devices
- H03H9/02637—Details concerning reflective or coupling arrays
- H03H9/02685—Grating lines having particular arrangements
- H03H9/02692—Arched grating lines
- H03H9/027—U-shaped grating lines
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/46—Filters
- H03H9/64—Filters using surface acoustic waves
- H03H9/6423—Means for obtaining a particular transfer characteristic
- H03H9/6433—Coupled resonator filters
- H03H9/6483—Ladder SAW filters
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/125—Driving means, e.g. electrodes, coils
- H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
- H03H9/14517—Means for weighting
- H03H9/1452—Means for weighting by finger overlap length, apodisation
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US05/501,552 US4166258A (en) | 1974-08-29 | 1974-08-29 | Thin-film integrated circuit with tank circuit characteristics and applications to thin-film filters and oscillators |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE2532646A1 true DE2532646A1 (de) | 1976-03-11 |
Family
ID=23994026
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19752532646 Pending DE2532646A1 (de) | 1974-08-29 | 1975-07-22 | Integrierte duennfilmschaltung mit den eigenschaften eines tankkreises |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US4166258A (enExample) |
| JP (1) | JPS581850B2 (enExample) |
| DE (1) | DE2532646A1 (enExample) |
| FR (1) | FR2283587A1 (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3032847A1 (de) * | 1979-09-03 | 1981-03-19 | Murata Manufacturing Co | Elektrisches bauelement mit einem oberflaechenwellen-resonator |
| US4567453A (en) * | 1982-09-20 | 1986-01-28 | U.S. Philips Corporation | Acoustic surface wave device |
Families Citing this family (46)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52105752A (en) * | 1976-03-01 | 1977-09-05 | Nec Corp | Surface elastic wave vibrator |
| JPS5925525B2 (ja) * | 1979-08-31 | 1984-06-19 | 株式会社東芝 | 弾性表面波共振子 |
| US4354166A (en) * | 1980-10-23 | 1982-10-12 | United Technologies Corporation | Carrier concentration controlled surface acoustic wave resonator and oscillator |
| USRE33957E (en) * | 1982-07-26 | 1992-06-09 | Toyo Communication Equipment Co., Ltd. | High frequency narrow-band multi-mode filter |
| JPS59200519A (ja) * | 1983-04-28 | 1984-11-13 | Toshiba Corp | 弾性表面波共振器 |
| US4625208A (en) * | 1983-06-30 | 1986-11-25 | X-Cyte Inc. | Surface acoustic wave passive transponder having acoustic wave reflectors |
| AU573655B2 (en) * | 1983-12-05 | 1988-06-16 | Kay, L. | Transducer array |
| US4599587A (en) * | 1984-12-03 | 1986-07-08 | R. F. Monolithics, Inc. | Impedance element |
| US4577168A (en) * | 1984-12-03 | 1986-03-18 | R. F. Monolithics, Inc. | Notch filter |
| JPH0697727B2 (ja) * | 1985-03-27 | 1994-11-30 | 株式会社日立製作所 | 弾性表面波フィルタ |
| US4694266A (en) * | 1986-07-29 | 1987-09-15 | R. F. Monolithic, Inc. | Notch filter |
| JPS63132515A (ja) * | 1986-11-25 | 1988-06-04 | Hitachi Ltd | 弾性表面波複合フイルタ |
| JPH01260911A (ja) * | 1988-04-11 | 1989-10-18 | Hitachi Ltd | 弾性表面波共振器複合形フィルタ |
| JP2800905B2 (ja) * | 1991-10-28 | 1998-09-21 | 富士通株式会社 | 弾性表面波フィルタ |
| USRE40036E1 (en) | 1991-10-28 | 2008-01-29 | Fujitsu Limited | Surface acoustic wave filter |
| US5287036A (en) * | 1992-03-02 | 1994-02-15 | Motorola, Inc. | Method and apparatus for acoustic wave inductance |
| JPH06338756A (ja) | 1993-05-27 | 1994-12-06 | Fujitsu Ltd | 共振子型弾性表面波フィルタ |
| JP3139225B2 (ja) * | 1993-07-08 | 2001-02-26 | 株式会社村田製作所 | 弾性表面波フィルタ |
| JP3189508B2 (ja) * | 1993-07-08 | 2001-07-16 | 株式会社村田製作所 | 弾性表面波フィルタ |
| GB2280807B (en) * | 1993-08-04 | 1997-10-22 | Advanced Saw Prod Sa | Saw filter |
| DE4431612C2 (de) * | 1993-09-06 | 1998-07-16 | Sanyo Electric Co | Akustisches Oberflächenwellenfilter |
| US5506552A (en) * | 1993-11-05 | 1996-04-09 | Matsushita Electric Industrial Co., Ltd. | Surface acoustic wave filter with multiple ground terminals |
| JP3375712B2 (ja) * | 1994-01-12 | 2003-02-10 | 松下電器産業株式会社 | 弾性表面波フィルタ |
| JP3424971B2 (ja) * | 1994-01-20 | 2003-07-07 | 松下電器産業株式会社 | 弾性表面波フィルタ |
| US5600287A (en) * | 1994-02-03 | 1997-02-04 | Motorola, Inc. | Acoustic wave filter with reduced bulk-wave scattering loss, ladder filter incorporating same and method |
| US5471178A (en) * | 1994-02-03 | 1995-11-28 | Motorola, Inc. | Ladder filter and method for producing conjugately matched impedance |
| JPH07297675A (ja) * | 1994-04-26 | 1995-11-10 | Fujitsu Ltd | 弾性表面波共振器 |
| US5486800A (en) * | 1994-09-29 | 1996-01-23 | Motorola, Inc. | Surface acoustic wave device |
| US5499003A (en) * | 1994-10-03 | 1996-03-12 | Motorola, Inc. | Differential saw filter including series coupled resonant/antiresonant tracks |
| JP3491073B2 (ja) | 1994-11-10 | 2004-01-26 | 富士通株式会社 | 弾性表面波フィルタ |
| GB2296614B (en) * | 1994-12-23 | 1999-09-15 | Advanced Saw Prod Sa | Saw filter |
| DE69625734T2 (de) * | 1995-03-15 | 2003-05-22 | Matsushita Electric Industrial Co., Ltd. | Akustischer Oberflächenwellenfilter |
| JPH08265087A (ja) * | 1995-03-22 | 1996-10-11 | Mitsubishi Electric Corp | 弾性表面波フィルタ |
| US5635883A (en) * | 1995-08-28 | 1997-06-03 | Motorola, Inc. | Acoustic wave filter with filter-shaping element and method |
| US6107910A (en) * | 1996-11-29 | 2000-08-22 | X-Cyte, Inc. | Dual mode transmitter/receiver and decoder for RF transponder tags |
| US6060815A (en) * | 1997-08-18 | 2000-05-09 | X-Cyte, Inc. | Frequency mixing passive transponder |
| US5986382A (en) | 1997-08-18 | 1999-11-16 | X-Cyte, Inc. | Surface acoustic wave transponder configuration |
| US6114971A (en) * | 1997-08-18 | 2000-09-05 | X-Cyte, Inc. | Frequency hopping spread spectrum passive acoustic wave identification device |
| US6208062B1 (en) | 1997-08-18 | 2001-03-27 | X-Cyte, Inc. | Surface acoustic wave transponder configuration |
| US20040077773A1 (en) * | 2002-07-12 | 2004-04-22 | Tavares Manuel J | Low viscosity, flexible, hydrolytically stable potting compounds |
| US7952482B2 (en) * | 2005-08-25 | 2011-05-31 | University Of Central Florida Research Foundation, Inc. | Surface acoustic wave coding for orthogonal frequency coded devices |
| US7777625B1 (en) * | 2005-08-25 | 2010-08-17 | University Of Central Florida Research Foundation, Inc. | Weighted saw reflector gratings for orthogonal frequency coded SAW ID tags and sensors |
| JP2009088999A (ja) * | 2007-09-28 | 2009-04-23 | Nippon Dempa Kogyo Co Ltd | 弾性波フィルタ |
| US8862192B2 (en) | 2010-05-17 | 2014-10-14 | Resonant Inc. | Narrow band-pass filter having resonators grouped into primary and secondary sets of different order |
| FR2974691B1 (fr) * | 2011-04-28 | 2019-08-30 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Dispositif electromecanique a ondes acoustiques comprenant une zone de transduction et une cavite etendue |
| US10097158B2 (en) * | 2014-10-16 | 2018-10-09 | Taiyo Yuden Co., Ltd. | Acoustic wave device, filter, and duplexer |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3568102A (en) * | 1967-07-06 | 1971-03-02 | Litton Precision Prod Inc | Split surface wave acoustic delay line |
| US3510674A (en) * | 1967-08-09 | 1970-05-05 | Texas Instruments Inc | Low noise reactance amplifier |
| US3550045A (en) * | 1969-06-25 | 1970-12-22 | Zenith Radio Corp | Acoustic surface wave filter devices |
| US3675054A (en) * | 1970-12-02 | 1972-07-04 | Texas Instruments Inc | Series connection of interdigitated surface wave transducers |
| BE785945A (fr) * | 1971-07-06 | 1973-01-08 | Siemens Ag | Filtre electrique utilisant le principe des ondes de surface |
| GB1362238A (en) * | 1971-07-21 | 1974-07-30 | Mullard Ltd | Acoustic surface wave devices |
| US3716809A (en) * | 1971-08-11 | 1973-02-13 | Us Air Force | Acoustic surface wave resonator |
| US3760204A (en) * | 1972-03-01 | 1973-09-18 | Motorola Inc | Acoustic surface wave resonator |
| US3855548A (en) * | 1973-10-18 | 1974-12-17 | Rockwell International Corp | Ultra high frequency single mode oscillation controlled by a surface acoustic wave crystal |
| JPS5824971B2 (ja) * | 1974-07-31 | 1983-05-24 | ハギワラデンキ カブシキガイシヤ | オンキヨウデンキキヨウシンシ |
-
1974
- 1974-08-29 US US05/501,552 patent/US4166258A/en not_active Expired - Lifetime
-
1975
- 1975-06-09 FR FR7518988A patent/FR2283587A1/fr active Granted
- 1975-07-17 JP JP50086756A patent/JPS581850B2/ja not_active Expired
- 1975-07-22 DE DE19752532646 patent/DE2532646A1/de active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3032847A1 (de) * | 1979-09-03 | 1981-03-19 | Murata Manufacturing Co | Elektrisches bauelement mit einem oberflaechenwellen-resonator |
| US4567453A (en) * | 1982-09-20 | 1986-01-28 | U.S. Philips Corporation | Acoustic surface wave device |
Also Published As
| Publication number | Publication date |
|---|---|
| US4166258A (en) | 1979-08-28 |
| FR2283587B1 (enExample) | 1978-02-24 |
| FR2283587A1 (fr) | 1976-03-26 |
| JPS581850B2 (ja) | 1983-01-13 |
| JPS5136091A (enExample) | 1976-03-26 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OHJ | Non-payment of the annual fee |