DE2527739C3 - Verfahren zur Herstellung eines elektrischen Meßwiderstandes für ein Widerstandsthermometer - Google Patents

Verfahren zur Herstellung eines elektrischen Meßwiderstandes für ein Widerstandsthermometer

Info

Publication number
DE2527739C3
DE2527739C3 DE2527739A DE2527739A DE2527739C3 DE 2527739 C3 DE2527739 C3 DE 2527739C3 DE 2527739 A DE2527739 A DE 2527739A DE 2527739 A DE2527739 A DE 2527739A DE 2527739 C3 DE2527739 C3 DE 2527739C3
Authority
DE
Germany
Prior art keywords
platinum
measuring resistor
electrical measuring
substrate
ppm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE2527739A
Other languages
German (de)
English (en)
Other versions
DE2527739A1 (de
DE2527739B2 (de
Inventor
Walter Dr. 6450 Hanau Reichelt
Guenter 6457 Maintal Sauer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
WC Heraus GmbH and Co KG
Original Assignee
WC Heraus GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by WC Heraus GmbH and Co KG filed Critical WC Heraus GmbH and Co KG
Priority to DE2527739A priority Critical patent/DE2527739C3/de
Priority to FR7617831A priority patent/FR2315086A1/fr
Priority to US05/695,783 priority patent/US4050052A/en
Priority to GB25238/76A priority patent/GB1527386A/en
Publication of DE2527739A1 publication Critical patent/DE2527739A1/de
Publication of DE2527739B2 publication Critical patent/DE2527739B2/de
Application granted granted Critical
Publication of DE2527739C3 publication Critical patent/DE2527739C3/de
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/16—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements
    • G01K7/18—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a linear resistance, e.g. platinum resistance thermometer
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
    • H01C17/075—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques
    • H01C17/08—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques by vapour deposition
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
    • H01C17/075—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques
    • H01C17/12—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques by sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
    • H01C7/22—Elongated resistive element being bent or curved, e.g. sinusoidal, helical

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
  • Thermistors And Varistors (AREA)
  • Non-Adjustable Resistors (AREA)
DE2527739A 1975-06-21 1975-06-21 Verfahren zur Herstellung eines elektrischen Meßwiderstandes für ein Widerstandsthermometer Expired DE2527739C3 (de)

Priority Applications (4)

Application Number Priority Date Filing Date Title
DE2527739A DE2527739C3 (de) 1975-06-21 1975-06-21 Verfahren zur Herstellung eines elektrischen Meßwiderstandes für ein Widerstandsthermometer
FR7617831A FR2315086A1 (fr) 1975-06-21 1976-06-11 Resistance de mesure electrique pour thermometre a resistance
US05/695,783 US4050052A (en) 1975-06-21 1976-06-14 Electrical temperature measuring resistor structure, particularly for resistance thermometers
GB25238/76A GB1527386A (en) 1975-06-21 1976-06-17 Electrical measuring resistors

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2527739A DE2527739C3 (de) 1975-06-21 1975-06-21 Verfahren zur Herstellung eines elektrischen Meßwiderstandes für ein Widerstandsthermometer

Publications (3)

Publication Number Publication Date
DE2527739A1 DE2527739A1 (de) 1976-12-23
DE2527739B2 DE2527739B2 (de) 1977-07-21
DE2527739C3 true DE2527739C3 (de) 1978-08-31

Family

ID=5949647

Family Applications (1)

Application Number Title Priority Date Filing Date
DE2527739A Expired DE2527739C3 (de) 1975-06-21 1975-06-21 Verfahren zur Herstellung eines elektrischen Meßwiderstandes für ein Widerstandsthermometer

Country Status (4)

Country Link
US (1) US4050052A (enExample)
DE (1) DE2527739C3 (enExample)
FR (1) FR2315086A1 (enExample)
GB (1) GB1527386A (enExample)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4026061C1 (enExample) * 1990-08-17 1992-02-13 Heraeus Sensor Gmbh, 6450 Hanau, De
DE19540194C1 (de) * 1995-10-30 1997-02-20 Heraeus Sensor Gmbh Widerstandsthermometer aus einem Metall der Platingruppe
DE19640058C2 (de) * 1996-09-30 1999-06-10 Heraeus Sensor Nite Gmbh Leiterplatte mit Zugentlastung für Anschluß-Kabel, Verfahren zu deren Herstellung und Verbindung sowie deren Verwendung
DE102007046900A1 (de) 2007-09-28 2009-04-30 Heraeus Sensor Technology Gmbh 1200°C-Schichtwiderstand
DE102011051845B3 (de) * 2011-07-14 2012-10-25 Heraeus Sensor Technology Gmbh Messwiderstand mit Schutzrahmen

Families Citing this family (44)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2507731C3 (de) * 1975-02-22 1978-09-07 Deutsche Gold- Und Silber-Scheideanstalt Vormals Roessler, 6000 Frankfurt Meßwiderstand für Widerstandsthermometer und Verfahren zu seiner Herstellung
US4146957A (en) * 1977-01-17 1979-04-03 Engelhard Minerals & Chemicals Corporation Thick film resistance thermometer
US4311982A (en) * 1980-08-01 1982-01-19 The Yellow Springs Instrument Company, Inc. Trimmable wirewound resistance temperature transducer
US4436438A (en) 1981-07-21 1984-03-13 Wahl Instruments, Inc. Multiple probe temperature measuring system and probes therefor
US4400684A (en) * 1981-08-31 1983-08-23 Ford Motor Company Fast response temperature sensor
DE3146020C2 (de) * 1981-11-20 1985-11-07 Danfoss A/S, Nordborg Temperaturabhängiger Widerstand, insbesondere für Widerstandsthermometer
FR2538546B1 (fr) * 1982-12-28 1987-02-13 Renault Sonde thermique, notamment pour la detection de la presence ou de l'absence d'un liquide
JPH076849B2 (ja) * 1984-06-13 1995-01-30 オムロン株式会社 電子温度計
US5089293A (en) * 1984-07-31 1992-02-18 Rosemount Inc. Method for forming a platinum resistance thermometer
CA1250155A (en) * 1984-07-31 1989-02-21 James A. Ruf Platinum resistance thermometer
IN165267B (enExample) * 1984-07-31 1989-09-09 Rosemount Inc
JPS61181104A (ja) * 1985-02-06 1986-08-13 シャープ株式会社 白金測温抵抗体
US4647895A (en) * 1985-05-08 1987-03-03 Motorola, Inc. Ceramic temperature sensor
GB2179748B (en) * 1985-08-20 1989-09-06 Sharp Kk Thermal flow sensor
US4791398A (en) * 1986-02-13 1988-12-13 Rosemount Inc. Thin film platinum resistance thermometer with high temperature diffusion barrier
JP2605297B2 (ja) * 1987-09-04 1997-04-30 株式会社村田製作所 白金温度センサおよびその製造方法
JP2564845B2 (ja) * 1987-09-04 1996-12-18 株式会社村田製作所 白金温度センサ
DE3906405A1 (de) * 1989-03-01 1990-09-06 Leybold Ag Verfahren zur herstellung eines schichtwiderstands
US5026971A (en) * 1990-01-08 1991-06-25 General Electric Company Temperature control system for a heating oven using a glass-ceramic temperature sensor
US5041809A (en) * 1990-01-08 1991-08-20 General Electric Company Glass-ceramic temperature sensor for heating ovens
US5053740A (en) * 1990-01-11 1991-10-01 General Electric Company Porcelain enamel temperature sensor for heating ovens
JPH0833327B2 (ja) * 1990-06-11 1996-03-29 株式会社村田製作所 温度センサ
US5242225A (en) * 1990-06-11 1993-09-07 Murata Manufacturing Co., Ltd. Temperature sensor
US5134248A (en) * 1990-08-15 1992-07-28 Advanced Temperature Devices, Inc. Thin film flexible electrical connector
WO1992015101A1 (de) * 1991-02-15 1992-09-03 Siemens Aktiengesellschaft Hochtemperatur-platinmetall-temperatursensor
US5155800A (en) * 1991-02-27 1992-10-13 Process Technology Inc. Panel heater assembly for use in a corrosive environment and method of manufacturing the heater
US5123752A (en) * 1991-04-15 1992-06-23 Eastman Kodak Company Wear resistant temperature sensing device
DE4300084C2 (de) * 1993-01-06 1995-07-27 Heraeus Sensor Gmbh Widerstandsthermometer mit einem Meßwiderstand
US5521576A (en) * 1993-10-06 1996-05-28 Collins; Franklyn M. Fine-line thick film resistors and resistor networks and method of making same
DE4424384C2 (de) * 1994-07-13 1998-04-09 Heraeus Sensor Nite Gmbh Temperaturfühler rascher Ansprechzeit
DE19621000C2 (de) * 1996-05-24 1999-01-28 Heraeus Sensor Nite Gmbh Temperatur-Sensor mit einem Meßwiderstand
US5958606A (en) * 1997-02-05 1999-09-28 Cyntec Company Substrate structure with adhesive anchoring-seams for securely attaching and boding to a thin film supported thereon
DE19742236C2 (de) * 1997-09-25 2000-10-05 Heraeus Electro Nite Int Elektrischer Sensor, insbesondere Temperatur-Sensor, mit Leiterplatte
US6004471A (en) * 1998-02-05 1999-12-21 Opto Tech Corporation Structure of the sensing element of a platinum resistance thermometer and method for manufacturing the same
EP0973020B1 (de) 1998-07-16 2009-06-03 EPIQ Sensor-Nite N.V. Elektrischer Temperatur-Sensor mit Mehrfachschicht
DE19901183C2 (de) * 1999-01-14 2001-01-25 Sensotherm Temperatursensorik Platintemperatursensor und Herstellungsverfahren für denselben
US6437681B1 (en) * 1999-10-27 2002-08-20 Cyntec Company Structure and fabrication process for an improved high temperature sensor
US7106167B2 (en) * 2002-06-28 2006-09-12 Heetronix Stable high temperature sensor system with tungsten on AlN
DE102006033856B3 (de) * 2006-07-21 2008-02-21 Georg Bernitz Temperaturmesssensor und Verfahren zu dessen Herstellung
US7733212B2 (en) * 2007-04-26 2010-06-08 Hewlett-Packard Development Company, L.P. Resistor
JP5163277B2 (ja) * 2007-05-18 2013-03-13 山里産業株式会社 白金測温抵抗素子の製造方法
DE102011103828B4 (de) * 2011-06-01 2017-04-06 Heraeus Sensor Technology Gmbh Massenproduktion kleiner Temepratursensoren mit Flip-Chips
CN103487160A (zh) * 2013-09-27 2014-01-01 北京理工大学 一种Pt电阻温度传感器的制造方法
DE102018110889A1 (de) * 2017-05-16 2018-11-22 Koa Corporation Temperatursensor-Element

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2802925A (en) * 1954-03-13 1957-08-13 Degussa Resistance thermometer
US3287161A (en) * 1962-10-01 1966-11-22 Xerox Corp Method for forming a thin film resistor
DE1490773A1 (de) * 1963-11-14 1969-08-14 Telefunken Patent Traegerkoerper mit aufgebrachter Widerstandsschicht
US3586743A (en) * 1965-05-04 1971-06-22 Philippe F Van Eeck Process for making solid state current limiters and other solid state devices
US3412043A (en) * 1966-08-05 1968-11-19 Dexter Corp Electrically conductive resinous compositions
GB1415644A (en) * 1971-11-18 1975-11-26 Johnson Matthey Co Ltd Resistance thermometer element
US3845443A (en) * 1972-06-14 1974-10-29 Bailey Meter Co Thin film resistance thermometer
DE2507731C3 (de) * 1975-02-22 1978-09-07 Deutsche Gold- Und Silber-Scheideanstalt Vormals Roessler, 6000 Frankfurt Meßwiderstand für Widerstandsthermometer und Verfahren zu seiner Herstellung

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4026061C1 (enExample) * 1990-08-17 1992-02-13 Heraeus Sensor Gmbh, 6450 Hanau, De
DE19540194C1 (de) * 1995-10-30 1997-02-20 Heraeus Sensor Gmbh Widerstandsthermometer aus einem Metall der Platingruppe
DE19640058C2 (de) * 1996-09-30 1999-06-10 Heraeus Sensor Nite Gmbh Leiterplatte mit Zugentlastung für Anschluß-Kabel, Verfahren zu deren Herstellung und Verbindung sowie deren Verwendung
DE102007046900A1 (de) 2007-09-28 2009-04-30 Heraeus Sensor Technology Gmbh 1200°C-Schichtwiderstand
DE102007046900B4 (de) * 2007-09-28 2011-07-21 Heraeus Sensor Technology GmbH, 63450 Hochtemperatursensor und ein Verfahren zu dessen Herstellung
DE102007046900C5 (de) 2007-09-28 2018-07-26 Heraeus Sensor Technology Gmbh Hochtemperatursensor und ein Verfahren zu dessen Herstellung
DE102011051845B3 (de) * 2011-07-14 2012-10-25 Heraeus Sensor Technology Gmbh Messwiderstand mit Schutzrahmen
WO2013007343A2 (de) 2011-07-14 2013-01-17 Heraeus Sensor Technology Gmbh Messwiderstand mit schutzrahmen

Also Published As

Publication number Publication date
US4050052A (en) 1977-09-20
FR2315086B1 (enExample) 1980-09-26
DE2527739A1 (de) 1976-12-23
FR2315086A1 (fr) 1977-01-14
GB1527386A (en) 1978-10-04
DE2527739B2 (de) 1977-07-21

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Legal Events

Date Code Title Description
C3 Grant after two publication steps (3rd publication)
8339 Ceased/non-payment of the annual fee