DE2504796A1 - Verfahren zur herstellung eines elektrothermischen druckkopfes - Google Patents
Verfahren zur herstellung eines elektrothermischen druckkopfesInfo
- Publication number
- DE2504796A1 DE2504796A1 DE19752504796 DE2504796A DE2504796A1 DE 2504796 A1 DE2504796 A1 DE 2504796A1 DE 19752504796 DE19752504796 DE 19752504796 DE 2504796 A DE2504796 A DE 2504796A DE 2504796 A1 DE2504796 A1 DE 2504796A1
- Authority
- DE
- Germany
- Prior art keywords
- layer
- etching
- semiconductor material
- areas
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 11
- 238000000034 method Methods 0.000 claims description 31
- 238000005530 etching Methods 0.000 claims description 21
- 239000000463 material Substances 0.000 claims description 18
- 239000000758 substrate Substances 0.000 claims description 18
- 239000004065 semiconductor Substances 0.000 claims description 16
- 229910052710 silicon Inorganic materials 0.000 claims description 15
- 239000010703 silicon Substances 0.000 claims description 15
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 14
- 230000001419 dependent effect Effects 0.000 claims description 11
- 239000007800 oxidant agent Substances 0.000 claims description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims description 2
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 claims description 2
- 239000002253 acid Substances 0.000 claims description 2
- 239000013078 crystal Substances 0.000 claims description 2
- 229910000040 hydrogen fluoride Inorganic materials 0.000 claims description 2
- 229910017604 nitric acid Inorganic materials 0.000 claims description 2
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 239000003518 caustics Substances 0.000 claims 1
- 239000012535 impurity Substances 0.000 claims 1
- 229910052814 silicon oxide Inorganic materials 0.000 claims 1
- 238000000227 grinding Methods 0.000 description 8
- 238000007639 printing Methods 0.000 description 5
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 4
- 238000005498 polishing Methods 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 3
- 238000002955 isolation Methods 0.000 description 3
- 238000002161 passivation Methods 0.000 description 3
- 229910052698 phosphorus Inorganic materials 0.000 description 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 3
- 229920005591 polysilicon Polymers 0.000 description 3
- 238000000926 separation method Methods 0.000 description 3
- 239000002210 silicon-based material Substances 0.000 description 3
- 239000011521 glass Substances 0.000 description 2
- 230000000873 masking effect Effects 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000007517 polishing process Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 230000004807 localization Effects 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 102220028539 rs398123075 Human genes 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/315—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of heat to a heat sensitive printing or impression-transfer material
- B41J2/32—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of heat to a heat sensitive printing or impression-transfer material using thermal heads
- B41J2/335—Structure of thermal heads
- B41J2/34—Structure of thermal heads comprising semiconductors
Landscapes
- Weting (AREA)
- Facsimile Heads (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US44256274A | 1974-02-14 | 1974-02-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE2504796A1 true DE2504796A1 (de) | 1975-08-21 |
Family
ID=23757282
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19752504796 Withdrawn DE2504796A1 (de) | 1974-02-14 | 1975-02-05 | Verfahren zur herstellung eines elektrothermischen druckkopfes |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JPS50124654A (enrdf_load_stackoverflow) |
| DE (1) | DE2504796A1 (enrdf_load_stackoverflow) |
| FR (1) | FR2261134A1 (enrdf_load_stackoverflow) |
| GB (1) | GB1487259A (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5537428B2 (enrdf_load_stackoverflow) * | 1974-09-18 | 1980-09-27 | ||
| JPS5839675B2 (ja) * | 1975-12-27 | 1983-08-31 | カブシキガイシヤ トウヨウデングセイサクシヨ | ネツインジヘツド |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5520874A (en) * | 1978-07-31 | 1980-02-14 | Matsushita Electric Works Ltd | Flush toilet stool with hand washer |
-
1974
- 1974-12-31 GB GB5614974A patent/GB1487259A/en not_active Expired
-
1975
- 1975-02-05 DE DE19752504796 patent/DE2504796A1/de not_active Withdrawn
- 1975-02-10 FR FR7504097A patent/FR2261134A1/fr not_active Withdrawn
- 1975-02-13 JP JP50018389A patent/JPS50124654A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| GB1487259A (en) | 1977-09-28 |
| JPS50124654A (enrdf_load_stackoverflow) | 1975-09-30 |
| FR2261134A1 (enrdf_load_stackoverflow) | 1975-09-12 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8141 | Disposal/no request for examination |