DE2449225C3 - Verdampfungstiegel für Vakuumbedampfungs anlagen - Google Patents
Verdampfungstiegel für Vakuumbedampfungs anlagenInfo
- Publication number
- DE2449225C3 DE2449225C3 DE2449225A DE2449225A DE2449225C3 DE 2449225 C3 DE2449225 C3 DE 2449225C3 DE 2449225 A DE2449225 A DE 2449225A DE 2449225 A DE2449225 A DE 2449225A DE 2449225 C3 DE2449225 C3 DE 2449225C3
- Authority
- DE
- Germany
- Prior art keywords
- segments
- crucible
- evaporation
- elastic
- electrically conductive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001704 evaporation Methods 0.000 title claims description 20
- 230000008020 evaporation Effects 0.000 title claims description 20
- 238000007738 vacuum evaporation Methods 0.000 title claims description 3
- 239000004020 conductor Substances 0.000 claims description 21
- 238000010438 heat treatment Methods 0.000 claims description 14
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 4
- 229910002804 graphite Inorganic materials 0.000 claims description 4
- 239000010439 graphite Substances 0.000 claims description 4
- 230000006835 compression Effects 0.000 claims description 2
- 238000007906 compression Methods 0.000 claims description 2
- 239000000463 material Substances 0.000 description 15
- 238000010894 electron beam technology Methods 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 239000002826 coolant Substances 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 229910010293 ceramic material Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- 210000002268 wool Anatomy 0.000 description 2
- 239000000654 additive Substances 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 238000005275 alloying Methods 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 239000002800 charge carrier Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 239000013013 elastic material Substances 0.000 description 1
- 239000003779 heat-resistant material Substances 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000012811 non-conductive material Substances 0.000 description 1
- 239000000615 nonconductor Substances 0.000 description 1
- 238000013021 overheating Methods 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000013022 venting Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE2449225A DE2449225C3 (de) | 1974-10-16 | 1974-10-16 | Verdampfungstiegel für Vakuumbedampfungs anlagen |
| US05/620,073 US3984088A (en) | 1974-10-16 | 1975-10-06 | Vaporizing crucible for vacuum vapor coating systems |
| GB41529/75A GB1499364A (en) | 1974-10-16 | 1975-10-09 | Vaporising crucible for vacuum vapour deposition equipmen |
| BE2054625A BE834557A (fr) | 1974-10-16 | 1975-10-16 | Creuset vaporisateur pour installations de metallisation sous vide |
| FR7531710A FR2333872A1 (fr) | 1974-10-16 | 1975-10-16 | Creuset vaporisateur pour installations de metallisation sous vide |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE2449225A DE2449225C3 (de) | 1974-10-16 | 1974-10-16 | Verdampfungstiegel für Vakuumbedampfungs anlagen |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| DE2449225A1 DE2449225A1 (de) | 1976-04-29 |
| DE2449225B2 DE2449225B2 (de) | 1979-09-27 |
| DE2449225C3 true DE2449225C3 (de) | 1980-06-04 |
Family
ID=5928427
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE2449225A Expired DE2449225C3 (de) | 1974-10-16 | 1974-10-16 | Verdampfungstiegel für Vakuumbedampfungs anlagen |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US3984088A (OSRAM) |
| BE (1) | BE834557A (OSRAM) |
| DE (1) | DE2449225C3 (OSRAM) |
| FR (1) | FR2333872A1 (OSRAM) |
| GB (1) | GB1499364A (OSRAM) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4023523A (en) * | 1975-04-23 | 1977-05-17 | Xerox Corporation | Coater hardware and method for obtaining uniform photoconductive layers on a xerographic photoreceptor |
| JPS5274580A (en) * | 1975-12-19 | 1977-06-22 | Hitachi Ltd | Boat for vacuum evaporation |
| DE3420246A1 (de) * | 1984-05-30 | 1985-12-05 | Leybold-Heraeus GmbH, 5000 Köln | Verdampfertiegel fuer vakuum-aufdampfanlagen |
| US4620081A (en) * | 1984-08-03 | 1986-10-28 | The United States Of America As Represented By The United States Department Of Energy | Self-contained hot-hollow cathode gun source assembly |
| US5395180A (en) * | 1993-12-14 | 1995-03-07 | Advanced Ceramics Corporation | Boron nitride vaporization vessel |
| US20030026601A1 (en) * | 2001-07-31 | 2003-02-06 | The Arizona Board Of Regents On Behalf Of The University Of Arizona | Vapor deposition and in-situ purification of organic molecules |
| DE102010055285A1 (de) * | 2010-12-21 | 2012-06-21 | Solarion Ag Photovoltaik | Verdampferquelle, Verdampferkammer und Beschichtungsverfahren |
| US20230115177A1 (en) * | 2021-10-08 | 2023-04-13 | Entegris, Inc. | Compressible tray for solid chemical vaporizing chamber |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3227431A (en) * | 1961-11-22 | 1966-01-04 | Nat Res Corp | Crucible externally lined with filamentary carbon |
| DE1276421B (de) * | 1966-08-24 | 1968-08-29 | Leybold Heraeus Gmbh & Co Kg | Verdampfungstiegel fuer Vakuum-Bandbedampfungsanlagen |
| US3514575A (en) * | 1967-08-10 | 1970-05-26 | Sylvania Electric Prod | Metal-evaporating source |
| DE1945508B2 (de) * | 1968-09-13 | 1971-06-09 | Vorrichtung zum freisetzen von metalldaempfen | |
| US3863907A (en) * | 1972-10-24 | 1975-02-04 | M & T Mfg Co | Radiant heating system |
-
1974
- 1974-10-16 DE DE2449225A patent/DE2449225C3/de not_active Expired
-
1975
- 1975-10-06 US US05/620,073 patent/US3984088A/en not_active Expired - Lifetime
- 1975-10-09 GB GB41529/75A patent/GB1499364A/en not_active Expired
- 1975-10-16 FR FR7531710A patent/FR2333872A1/fr active Granted
- 1975-10-16 BE BE2054625A patent/BE834557A/xx unknown
Also Published As
| Publication number | Publication date |
|---|---|
| US3984088A (en) | 1976-10-05 |
| GB1499364A (en) | 1978-02-01 |
| DE2449225B2 (de) | 1979-09-27 |
| DE2449225A1 (de) | 1976-04-29 |
| FR2333872A1 (fr) | 1977-07-01 |
| BE834557A (fr) | 1976-04-16 |
| FR2333872B1 (OSRAM) | 1980-02-08 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OD | Request for examination | ||
| C3 | Grant after two publication steps (3rd publication) | ||
| 8339 | Ceased/non-payment of the annual fee |