FR2333872A1 - Creuset vaporisateur pour installations de metallisation sous vide - Google Patents

Creuset vaporisateur pour installations de metallisation sous vide

Info

Publication number
FR2333872A1
FR2333872A1 FR7531710A FR7531710A FR2333872A1 FR 2333872 A1 FR2333872 A1 FR 2333872A1 FR 7531710 A FR7531710 A FR 7531710A FR 7531710 A FR7531710 A FR 7531710A FR 2333872 A1 FR2333872 A1 FR 2333872A1
Authority
FR
France
Prior art keywords
crucer
vaporizing
vacuum metallization
plants
metallization plants
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7531710A
Other languages
English (en)
French (fr)
Other versions
FR2333872B1 (OSRAM
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold Heraeus GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus GmbH filed Critical Leybold Heraeus GmbH
Publication of FR2333872A1 publication Critical patent/FR2333872A1/fr
Application granted granted Critical
Publication of FR2333872B1 publication Critical patent/FR2333872B1/fr
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
FR7531710A 1974-10-16 1975-10-16 Creuset vaporisateur pour installations de metallisation sous vide Granted FR2333872A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2449225A DE2449225C3 (de) 1974-10-16 1974-10-16 Verdampfungstiegel für Vakuumbedampfungs anlagen

Publications (2)

Publication Number Publication Date
FR2333872A1 true FR2333872A1 (fr) 1977-07-01
FR2333872B1 FR2333872B1 (OSRAM) 1980-02-08

Family

ID=5928427

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7531710A Granted FR2333872A1 (fr) 1974-10-16 1975-10-16 Creuset vaporisateur pour installations de metallisation sous vide

Country Status (5)

Country Link
US (1) US3984088A (OSRAM)
BE (1) BE834557A (OSRAM)
DE (1) DE2449225C3 (OSRAM)
FR (1) FR2333872A1 (OSRAM)
GB (1) GB1499364A (OSRAM)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4023523A (en) * 1975-04-23 1977-05-17 Xerox Corporation Coater hardware and method for obtaining uniform photoconductive layers on a xerographic photoreceptor
JPS5274580A (en) * 1975-12-19 1977-06-22 Hitachi Ltd Boat for vacuum evaporation
DE3420246A1 (de) * 1984-05-30 1985-12-05 Leybold-Heraeus GmbH, 5000 Köln Verdampfertiegel fuer vakuum-aufdampfanlagen
US4620081A (en) * 1984-08-03 1986-10-28 The United States Of America As Represented By The United States Department Of Energy Self-contained hot-hollow cathode gun source assembly
US5395180A (en) * 1993-12-14 1995-03-07 Advanced Ceramics Corporation Boron nitride vaporization vessel
US20030026601A1 (en) * 2001-07-31 2003-02-06 The Arizona Board Of Regents On Behalf Of The University Of Arizona Vapor deposition and in-situ purification of organic molecules
DE102010055285A1 (de) * 2010-12-21 2012-06-21 Solarion Ag Photovoltaik Verdampferquelle, Verdampferkammer und Beschichtungsverfahren
US20230115177A1 (en) * 2021-10-08 2023-04-13 Entegris, Inc. Compressible tray for solid chemical vaporizing chamber

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3227431A (en) * 1961-11-22 1966-01-04 Nat Res Corp Crucible externally lined with filamentary carbon
DE1276421B (de) * 1966-08-24 1968-08-29 Leybold Heraeus Gmbh & Co Kg Verdampfungstiegel fuer Vakuum-Bandbedampfungsanlagen
US3514575A (en) * 1967-08-10 1970-05-26 Sylvania Electric Prod Metal-evaporating source
DE1945508B2 (de) * 1968-09-13 1971-06-09 Vorrichtung zum freisetzen von metalldaempfen
US3863907A (en) * 1972-10-24 1975-02-04 M & T Mfg Co Radiant heating system

Also Published As

Publication number Publication date
US3984088A (en) 1976-10-05
GB1499364A (en) 1978-02-01
DE2449225B2 (de) 1979-09-27
DE2449225A1 (de) 1976-04-29
BE834557A (fr) 1976-04-16
FR2333872B1 (OSRAM) 1980-02-08
DE2449225C3 (de) 1980-06-04

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Legal Events

Date Code Title Description
ST Notification of lapse