DE2439020B2 - Vorrichtung zum allseitigen, kontinuierlichen bedampfen langgestreckter koerper - Google Patents

Vorrichtung zum allseitigen, kontinuierlichen bedampfen langgestreckter koerper

Info

Publication number
DE2439020B2
DE2439020B2 DE19742439020 DE2439020A DE2439020B2 DE 2439020 B2 DE2439020 B2 DE 2439020B2 DE 19742439020 DE19742439020 DE 19742439020 DE 2439020 A DE2439020 A DE 2439020A DE 2439020 B2 DE2439020 B2 DE 2439020B2
Authority
DE
Germany
Prior art keywords
crucible
electron beam
evaporator
elongated body
rotation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE19742439020
Other languages
German (de)
English (en)
Other versions
DE2439020A1 (de
Inventor
Walter Anton Dipl.-Phys. Dr.; Sommerkamp Peter Walter Wilhelm Dipl.-Phys. Dr.; 6450 Hanau; Manz Rolf DipL-Ing. Dr. 6451 Bruchköbel; Fischhof Josef Karl Dipl.-Ing. 6450 Hanau Dietrich
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold Heraeus GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus GmbH filed Critical Leybold Heraeus GmbH
Priority to DE19742439020 priority Critical patent/DE2439020B2/de
Priority to NL7506093A priority patent/NL7506093A/xx
Priority to BE2054516A priority patent/BE832233A/xx
Priority to FR7525072A priority patent/FR2281997A1/fr
Priority to LU73195A priority patent/LU73195A1/xx
Publication of DE2439020A1 publication Critical patent/DE2439020A1/de
Publication of DE2439020B2 publication Critical patent/DE2439020B2/de
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Physical Vapour Deposition (AREA)
  • Electron Sources, Ion Sources (AREA)
DE19742439020 1974-08-14 1974-08-14 Vorrichtung zum allseitigen, kontinuierlichen bedampfen langgestreckter koerper Granted DE2439020B2 (de)

Priority Applications (5)

Application Number Priority Date Filing Date Title
DE19742439020 DE2439020B2 (de) 1974-08-14 1974-08-14 Vorrichtung zum allseitigen, kontinuierlichen bedampfen langgestreckter koerper
NL7506093A NL7506093A (nl) 1974-08-14 1975-05-23 Inrichting voor het alzijdig continu opdampen van langgerekte lichamen.
BE2054516A BE832233A (fr) 1974-08-14 1975-08-08 Appareil pour recouvrir en continu des corps filiformes tout autour d'un depot par vaporisation sous vide
FR7525072A FR2281997A1 (fr) 1974-08-14 1975-08-12 Appareil de metallisation sous vide destine a recouvrir en continu d'un depot qui les recouvre tout autour, des corps de forme allongee, notamment des fils
LU73195A LU73195A1 (enExample) 1974-08-14 1975-08-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19742439020 DE2439020B2 (de) 1974-08-14 1974-08-14 Vorrichtung zum allseitigen, kontinuierlichen bedampfen langgestreckter koerper

Publications (2)

Publication Number Publication Date
DE2439020A1 DE2439020A1 (de) 1976-02-26
DE2439020B2 true DE2439020B2 (de) 1977-06-02

Family

ID=5923191

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19742439020 Granted DE2439020B2 (de) 1974-08-14 1974-08-14 Vorrichtung zum allseitigen, kontinuierlichen bedampfen langgestreckter koerper

Country Status (5)

Country Link
BE (1) BE832233A (enExample)
DE (1) DE2439020B2 (enExample)
FR (1) FR2281997A1 (enExample)
LU (1) LU73195A1 (enExample)
NL (1) NL7506093A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4018340C2 (de) * 1990-06-08 1993-10-07 Deutsche Forsch Luft Raumfahrt Verfahren und Vorrichtung zum Beschichten von hochtemperaturfesten Langfasern

Also Published As

Publication number Publication date
DE2439020A1 (de) 1976-02-26
FR2281997B3 (enExample) 1978-04-07
FR2281997A1 (fr) 1976-03-12
BE832233A (fr) 1976-02-09
NL7506093A (nl) 1976-02-17
LU73195A1 (enExample) 1976-08-13

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Legal Events

Date Code Title Description
C3 Grant after two publication steps (3rd publication)
8339 Ceased/non-payment of the annual fee