LU73195A1 - - Google Patents

Info

Publication number
LU73195A1
LU73195A1 LU73195A LU73195A LU73195A1 LU 73195 A1 LU73195 A1 LU 73195A1 LU 73195 A LU73195 A LU 73195A LU 73195 A LU73195 A LU 73195A LU 73195 A1 LU73195 A1 LU 73195A1
Authority
LU
Luxembourg
Application number
LU73195A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of LU73195A1 publication Critical patent/LU73195A1/xx

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • C23C14/28Vacuum evaporation by wave energy or particle radiation
    • C23C14/30Vacuum evaporation by wave energy or particle radiation by electron bombardment

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Physical Vapour Deposition (AREA)
  • Electron Sources, Ion Sources (AREA)
LU73195A 1974-08-14 1975-08-12 LU73195A1 (enExample)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19742439020 DE2439020B2 (de) 1974-08-14 1974-08-14 Vorrichtung zum allseitigen, kontinuierlichen bedampfen langgestreckter koerper

Publications (1)

Publication Number Publication Date
LU73195A1 true LU73195A1 (enExample) 1976-08-13

Family

ID=5923191

Family Applications (1)

Application Number Title Priority Date Filing Date
LU73195A LU73195A1 (enExample) 1974-08-14 1975-08-12

Country Status (5)

Country Link
BE (1) BE832233A (enExample)
DE (1) DE2439020B2 (enExample)
FR (1) FR2281997A1 (enExample)
LU (1) LU73195A1 (enExample)
NL (1) NL7506093A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4018340C2 (de) * 1990-06-08 1993-10-07 Deutsche Forsch Luft Raumfahrt Verfahren und Vorrichtung zum Beschichten von hochtemperaturfesten Langfasern

Also Published As

Publication number Publication date
DE2439020A1 (de) 1976-02-26
FR2281997B3 (enExample) 1978-04-07
FR2281997A1 (fr) 1976-03-12
DE2439020B2 (de) 1977-06-02
BE832233A (fr) 1976-02-09
NL7506093A (nl) 1976-02-17

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