FR2281997B3 - - Google Patents

Info

Publication number
FR2281997B3
FR2281997B3 FR7525072A FR7525072A FR2281997B3 FR 2281997 B3 FR2281997 B3 FR 2281997B3 FR 7525072 A FR7525072 A FR 7525072A FR 7525072 A FR7525072 A FR 7525072A FR 2281997 B3 FR2281997 B3 FR 2281997B3
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7525072A
Other languages
French (fr)
Other versions
FR2281997A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold Heraeus GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus GmbH filed Critical Leybold Heraeus GmbH
Publication of FR2281997A1 publication Critical patent/FR2281997A1/fr
Application granted granted Critical
Publication of FR2281997B3 publication Critical patent/FR2281997B3/fr
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Physical Vapour Deposition (AREA)
  • Electron Sources, Ion Sources (AREA)
FR7525072A 1974-08-14 1975-08-12 Appareil de metallisation sous vide destine a recouvrir en continu d'un depot qui les recouvre tout autour, des corps de forme allongee, notamment des fils Granted FR2281997A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19742439020 DE2439020B2 (de) 1974-08-14 1974-08-14 Vorrichtung zum allseitigen, kontinuierlichen bedampfen langgestreckter koerper

Publications (2)

Publication Number Publication Date
FR2281997A1 FR2281997A1 (fr) 1976-03-12
FR2281997B3 true FR2281997B3 (enExample) 1978-04-07

Family

ID=5923191

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7525072A Granted FR2281997A1 (fr) 1974-08-14 1975-08-12 Appareil de metallisation sous vide destine a recouvrir en continu d'un depot qui les recouvre tout autour, des corps de forme allongee, notamment des fils

Country Status (5)

Country Link
BE (1) BE832233A (enExample)
DE (1) DE2439020B2 (enExample)
FR (1) FR2281997A1 (enExample)
LU (1) LU73195A1 (enExample)
NL (1) NL7506093A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4018340C2 (de) * 1990-06-08 1993-10-07 Deutsche Forsch Luft Raumfahrt Verfahren und Vorrichtung zum Beschichten von hochtemperaturfesten Langfasern

Also Published As

Publication number Publication date
DE2439020A1 (de) 1976-02-26
FR2281997A1 (fr) 1976-03-12
DE2439020B2 (de) 1977-06-02
BE832233A (fr) 1976-02-09
NL7506093A (nl) 1976-02-17
LU73195A1 (enExample) 1976-08-13

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Legal Events

Date Code Title Description
ST Notification of lapse