BE832233A - Appareil pour recouvrir en continu des corps filiformes tout autour d'un depot par vaporisation sous vide - Google Patents

Appareil pour recouvrir en continu des corps filiformes tout autour d'un depot par vaporisation sous vide

Info

Publication number
BE832233A
BE832233A BE2054516A BE2054516A BE832233A BE 832233 A BE832233 A BE 832233A BE 2054516 A BE2054516 A BE 2054516A BE 2054516 A BE2054516 A BE 2054516A BE 832233 A BE832233 A BE 832233A
Authority
BE
Belgium
Prior art keywords
filiforn
deposit
bodies
around
continuously covering
Prior art date
Application number
BE2054516A
Other languages
English (en)
French (fr)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of BE832233A publication Critical patent/BE832233A/xx

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Physical Vapour Deposition (AREA)
  • Electron Sources, Ion Sources (AREA)
BE2054516A 1974-08-14 1975-08-08 Appareil pour recouvrir en continu des corps filiformes tout autour d'un depot par vaporisation sous vide BE832233A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19742439020 DE2439020B2 (de) 1974-08-14 1974-08-14 Vorrichtung zum allseitigen, kontinuierlichen bedampfen langgestreckter koerper

Publications (1)

Publication Number Publication Date
BE832233A true BE832233A (fr) 1976-02-09

Family

ID=5923191

Family Applications (1)

Application Number Title Priority Date Filing Date
BE2054516A BE832233A (fr) 1974-08-14 1975-08-08 Appareil pour recouvrir en continu des corps filiformes tout autour d'un depot par vaporisation sous vide

Country Status (5)

Country Link
BE (1) BE832233A (enExample)
DE (1) DE2439020B2 (enExample)
FR (1) FR2281997A1 (enExample)
LU (1) LU73195A1 (enExample)
NL (1) NL7506093A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4018340C2 (de) * 1990-06-08 1993-10-07 Deutsche Forsch Luft Raumfahrt Verfahren und Vorrichtung zum Beschichten von hochtemperaturfesten Langfasern

Also Published As

Publication number Publication date
DE2439020A1 (de) 1976-02-26
FR2281997B3 (enExample) 1978-04-07
FR2281997A1 (fr) 1976-03-12
DE2439020B2 (de) 1977-06-02
NL7506093A (nl) 1976-02-17
LU73195A1 (enExample) 1976-08-13

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