DE2320168A1 - Verfahren zum aetzen von ausnehmungen - Google Patents
Verfahren zum aetzen von ausnehmungenInfo
- Publication number
- DE2320168A1 DE2320168A1 DE19732320168 DE2320168A DE2320168A1 DE 2320168 A1 DE2320168 A1 DE 2320168A1 DE 19732320168 DE19732320168 DE 19732320168 DE 2320168 A DE2320168 A DE 2320168A DE 2320168 A1 DE2320168 A1 DE 2320168A1
- Authority
- DE
- Germany
- Prior art keywords
- etching liquid
- flow
- etching
- etched
- template
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
- 238000005530 etching Methods 0.000 title claims description 81
- 238000000034 method Methods 0.000 title claims description 47
- 239000007788 liquid Substances 0.000 claims description 45
- 230000015572 biosynthetic process Effects 0.000 claims description 4
- 238000005260 corrosion Methods 0.000 claims description 4
- 230000007797 corrosion Effects 0.000 claims description 4
- 239000012790 adhesive layer Substances 0.000 claims description 3
- 239000004033 plastic Substances 0.000 claims description 3
- 239000007787 solid Substances 0.000 claims description 3
- 238000003860 storage Methods 0.000 claims description 3
- 239000003795 chemical substances by application Substances 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 description 8
- 239000000463 material Substances 0.000 description 6
- 239000002184 metal Substances 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000010410 layer Substances 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 229910017604 nitric acid Inorganic materials 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 229910000851 Alloy steel Inorganic materials 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 239000000084 colloidal system Substances 0.000 description 1
- 238000010924 continuous production Methods 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000010970 precious metal Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
- F16C33/02—Parts of sliding-contact bearings
- F16C33/04—Brasses; Bushes; Linings
- F16C33/06—Sliding surface mainly made of metal
- F16C33/10—Construction relative to lubrication
- F16C33/1025—Construction relative to lubrication with liquid, e.g. oil, as lubricant
- F16C33/106—Details of distribution or circulation inside the bearings, e.g. details of the bearing surfaces to affect flow or pressure of the liquid
- F16C33/107—Grooves for generating pressure
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/02—Local etching
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C17/00—Sliding-contact bearings for exclusively rotary movement
- F16C17/04—Sliding-contact bearings for exclusively rotary movement for axial load only
- F16C17/045—Sliding-contact bearings for exclusively rotary movement for axial load only with grooves in the bearing surface to generate hydrodynamic pressure, e.g. spiral groove thrust bearings
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Fluid Mechanics (AREA)
- Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- ing And Chemical Polishing (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL7205289A NL7205289A (enrdf_load_stackoverflow) | 1972-04-20 | 1972-04-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE2320168A1 true DE2320168A1 (de) | 1973-11-15 |
Family
ID=19815879
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19732320168 Ceased DE2320168A1 (de) | 1972-04-20 | 1973-04-19 | Verfahren zum aetzen von ausnehmungen |
Country Status (7)
| Country | Link |
|---|---|
| JP (1) | JPS5549156B2 (enrdf_load_stackoverflow) |
| CA (1) | CA992855A (enrdf_load_stackoverflow) |
| DE (1) | DE2320168A1 (enrdf_load_stackoverflow) |
| FR (1) | FR2185695B1 (enrdf_load_stackoverflow) |
| GB (1) | GB1423005A (enrdf_load_stackoverflow) |
| NL (1) | NL7205289A (enrdf_load_stackoverflow) |
| SE (1) | SE388441B (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SE419657B (sv) * | 1979-12-07 | 1981-08-17 | Sandvik Ab | Metod for tillverkning av en genginsats |
| GB2192254B (en) * | 1986-07-02 | 1990-03-21 | Nippon Tenshashi Kk | Metal roller |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1085074B (de) * | 1955-08-11 | 1960-07-07 | Telefunken Gmbh | Verfahren und Vorrichtung zum Aufbringen von Schrift- oder Bildzeichen auf Gegenstaende durch Tiefaetzen, insbesondere zum Herstellen von gedruckten Schaltungen fuer die Elektrotechnik |
-
1972
- 1972-04-20 NL NL7205289A patent/NL7205289A/xx not_active Application Discontinuation
-
1973
- 1973-04-18 SE SE7305589A patent/SE388441B/xx unknown
- 1973-04-19 CA CA169,212A patent/CA992855A/en not_active Expired
- 1973-04-19 DE DE19732320168 patent/DE2320168A1/de not_active Ceased
- 1973-04-19 JP JP4373073A patent/JPS5549156B2/ja not_active Expired
- 1973-04-20 FR FR7314559A patent/FR2185695B1/fr not_active Expired
- 1973-04-24 GB GB1921673A patent/GB1423005A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| SE388441B (sv) | 1976-10-04 |
| GB1423005A (en) | 1976-01-28 |
| FR2185695B1 (enrdf_load_stackoverflow) | 1978-12-29 |
| NL7205289A (enrdf_load_stackoverflow) | 1973-10-23 |
| CA992855A (en) | 1976-07-13 |
| JPS5549156B2 (enrdf_load_stackoverflow) | 1980-12-10 |
| JPS4935243A (enrdf_load_stackoverflow) | 1974-04-01 |
| FR2185695A1 (enrdf_load_stackoverflow) | 1974-01-04 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OD | Request for examination | ||
| 8131 | Rejection |