DE2243495C2 - Aufzeichnungsmaterial und dessen Verwendung - Google Patents
Aufzeichnungsmaterial und dessen VerwendungInfo
- Publication number
- DE2243495C2 DE2243495C2 DE19722243495 DE2243495A DE2243495C2 DE 2243495 C2 DE2243495 C2 DE 2243495C2 DE 19722243495 DE19722243495 DE 19722243495 DE 2243495 A DE2243495 A DE 2243495A DE 2243495 C2 DE2243495 C2 DE 2243495C2
- Authority
- DE
- Germany
- Prior art keywords
- layer
- catalyst
- energy
- recording material
- barrier layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000463 material Substances 0.000 title claims description 355
- 239000003054 catalyst Substances 0.000 claims description 233
- 230000004888 barrier function Effects 0.000 claims description 224
- 239000011232 storage material Substances 0.000 claims description 194
- 230000008859 change Effects 0.000 claims description 109
- 239000000203 mixture Substances 0.000 claims description 49
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 claims description 39
- 239000011669 selenium Substances 0.000 claims description 39
- 229910052711 selenium Inorganic materials 0.000 claims description 39
- 238000003860 storage Methods 0.000 claims description 32
- 229910052785 arsenic Inorganic materials 0.000 claims description 26
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 claims description 26
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 claims description 23
- 239000013078 crystal Substances 0.000 claims description 23
- 229910052717 sulfur Inorganic materials 0.000 claims description 23
- 239000011593 sulfur Substances 0.000 claims description 23
- 238000006243 chemical reaction Methods 0.000 claims description 21
- 239000000758 substrate Substances 0.000 claims description 21
- 239000000126 substance Substances 0.000 claims description 19
- 229910052709 silver Inorganic materials 0.000 claims description 16
- 239000004332 silver Substances 0.000 claims description 16
- 150000002500 ions Chemical class 0.000 claims description 15
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 14
- 150000001875 compounds Chemical class 0.000 claims description 12
- 229910052751 metal Inorganic materials 0.000 claims description 11
- 239000002184 metal Substances 0.000 claims description 11
- 230000005855 radiation Effects 0.000 claims description 8
- UKUVVAMSXXBMRX-UHFFFAOYSA-N 2,4,5-trithia-1,3-diarsabicyclo[1.1.1]pentane Chemical compound S1[As]2S[As]1S2 UKUVVAMSXXBMRX-UHFFFAOYSA-N 0.000 claims description 7
- 230000015572 biosynthetic process Effects 0.000 claims description 7
- 229940052288 arsenic trisulfide Drugs 0.000 claims description 6
- 229910052716 thallium Inorganic materials 0.000 claims description 5
- BKVIYDNLLOSFOA-UHFFFAOYSA-N thallium Chemical compound [Tl] BKVIYDNLLOSFOA-UHFFFAOYSA-N 0.000 claims description 5
- 230000007704 transition Effects 0.000 claims description 5
- 229910052736 halogen Inorganic materials 0.000 claims description 4
- 150000002367 halogens Chemical class 0.000 claims description 4
- 229910021645 metal ion Inorganic materials 0.000 claims description 4
- IOLCXVTUBQKXJR-UHFFFAOYSA-M potassium bromide Chemical compound [K+].[Br-] IOLCXVTUBQKXJR-UHFFFAOYSA-M 0.000 claims description 4
- 229910052783 alkali metal Inorganic materials 0.000 claims description 3
- 150000001340 alkali metals Chemical class 0.000 claims description 3
- 230000000903 blocking effect Effects 0.000 claims description 3
- 238000010894 electron beam technology Methods 0.000 claims description 3
- 229910052755 nonmetal Inorganic materials 0.000 claims description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 2
- 229910001508 alkali metal halide Inorganic materials 0.000 claims description 2
- 150000008045 alkali metal halides Chemical class 0.000 claims description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 2
- 229910052793 cadmium Inorganic materials 0.000 claims description 2
- BDOSMKKIYDKNTQ-UHFFFAOYSA-N cadmium atom Chemical compound [Cd] BDOSMKKIYDKNTQ-UHFFFAOYSA-N 0.000 claims description 2
- 229910052802 copper Inorganic materials 0.000 claims description 2
- 239000010949 copper Substances 0.000 claims description 2
- 229910052760 oxygen Inorganic materials 0.000 claims description 2
- 239000001301 oxygen Substances 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims description 2
- 150000002843 nonmetals Chemical class 0.000 claims 2
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 claims 1
- 229910052753 mercury Inorganic materials 0.000 claims 1
- 238000003384 imaging method Methods 0.000 description 150
- 238000002425 crystallisation Methods 0.000 description 42
- 230000008025 crystallization Effects 0.000 description 42
- 230000000694 effects Effects 0.000 description 36
- 230000035699 permeability Effects 0.000 description 26
- 238000011161 development Methods 0.000 description 25
- 230000018109 developmental process Effects 0.000 description 25
- 229910052732 germanium Inorganic materials 0.000 description 20
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 20
- 238000000034 method Methods 0.000 description 20
- 230000009471 action Effects 0.000 description 19
- 244000052616 bacterial pathogen Species 0.000 description 19
- 229910052714 tellurium Inorganic materials 0.000 description 19
- PORWMNRCUJJQNO-UHFFFAOYSA-N tellurium atom Chemical compound [Te] PORWMNRCUJJQNO-UHFFFAOYSA-N 0.000 description 19
- 230000005684 electric field Effects 0.000 description 18
- 230000012010 growth Effects 0.000 description 16
- 230000003197 catalytic effect Effects 0.000 description 15
- 230000005012 migration Effects 0.000 description 13
- 238000013508 migration Methods 0.000 description 13
- 230000008901 benefit Effects 0.000 description 12
- 238000009792 diffusion process Methods 0.000 description 12
- 230000006911 nucleation Effects 0.000 description 11
- 238000010899 nucleation Methods 0.000 description 11
- 230000003993 interaction Effects 0.000 description 10
- 230000004913 activation Effects 0.000 description 8
- 229910052787 antimony Inorganic materials 0.000 description 8
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 8
- 239000000969 carrier Substances 0.000 description 8
- 239000011521 glass Substances 0.000 description 8
- 239000002245 particle Substances 0.000 description 8
- 150000003839 salts Chemical class 0.000 description 8
- 238000005755 formation reaction Methods 0.000 description 7
- 230000008569 process Effects 0.000 description 7
- 230000035784 germination Effects 0.000 description 6
- 239000012041 precatalyst Substances 0.000 description 6
- 230000000875 corresponding effect Effects 0.000 description 5
- 230000003111 delayed effect Effects 0.000 description 5
- 239000003863 metallic catalyst Substances 0.000 description 5
- 230000035945 sensitivity Effects 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 239000002800 charge carrier Substances 0.000 description 4
- 238000004132 cross linking Methods 0.000 description 4
- 239000003431 cross linking reagent Substances 0.000 description 4
- 230000005670 electromagnetic radiation Effects 0.000 description 4
- 238000002347 injection Methods 0.000 description 4
- 239000007924 injection Substances 0.000 description 4
- 230000007246 mechanism Effects 0.000 description 4
- 150000002739 metals Chemical class 0.000 description 4
- 230000000704 physical effect Effects 0.000 description 4
- 238000011282 treatment Methods 0.000 description 4
- 238000010521 absorption reaction Methods 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 3
- 229910052797 bismuth Inorganic materials 0.000 description 3
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 3
- 239000007795 chemical reaction product Substances 0.000 description 3
- KDSXXMBJKHQCAA-UHFFFAOYSA-N disilver;selenium(2-) Chemical compound [Se-2].[Ag+].[Ag+] KDSXXMBJKHQCAA-UHFFFAOYSA-N 0.000 description 3
- 229910052738 indium Inorganic materials 0.000 description 3
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 3
- 239000011147 inorganic material Substances 0.000 description 3
- 230000033001 locomotion Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000011368 organic material Substances 0.000 description 3
- 239000002904 solvent Substances 0.000 description 3
- 230000001960 triggered effect Effects 0.000 description 3
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- AYRZLUSHOXJGKY-UHFFFAOYSA-N [bis(sulfanylidene)-$l^{5}-arsanyl]sulfanyl-bis(sulfanylidene)-$l^{5}-arsane Chemical compound S=[As](=S)S[As](=S)=S AYRZLUSHOXJGKY-UHFFFAOYSA-N 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- 239000002585 base Substances 0.000 description 2
- 230000006399 behavior Effects 0.000 description 2
- 238000006555 catalytic reaction Methods 0.000 description 2
- 238000012937 correction Methods 0.000 description 2
- 230000001934 delay Effects 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 229910052733 gallium Inorganic materials 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000003112 inhibitor Substances 0.000 description 2
- 239000000976 ink Substances 0.000 description 2
- 229910010272 inorganic material Inorganic materials 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004660 morphological change Effects 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 150000002902 organometallic compounds Chemical class 0.000 description 2
- 238000005191 phase separation Methods 0.000 description 2
- 239000002243 precursor Substances 0.000 description 2
- 230000009257 reactivity Effects 0.000 description 2
- 230000006798 recombination Effects 0.000 description 2
- 238000005215 recombination Methods 0.000 description 2
- 230000002441 reversible effect Effects 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 238000004904 shortening Methods 0.000 description 2
- -1 therefore Chemical compound 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 230000005641 tunneling Effects 0.000 description 2
- 230000000007 visual effect Effects 0.000 description 2
- JKFYKCYQEWQPTM-UHFFFAOYSA-N 2-azaniumyl-2-(4-fluorophenyl)acetate Chemical compound OC(=O)C(N)C1=CC=C(F)C=C1 JKFYKCYQEWQPTM-UHFFFAOYSA-N 0.000 description 1
- 241001463143 Auca Species 0.000 description 1
- 229920002799 BoPET Polymers 0.000 description 1
- BWGNESOTFCXPMA-UHFFFAOYSA-N Dihydrogen disulfide Chemical compound SS BWGNESOTFCXPMA-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 239000005041 Mylar™ Substances 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 206010034972 Photosensitivity reaction Diseases 0.000 description 1
- 240000004808 Saccharomyces cerevisiae Species 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910021612 Silver iodide Inorganic materials 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 229910001413 alkali metal ion Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 150000001540 azides Chemical class 0.000 description 1
- 239000004566 building material Substances 0.000 description 1
- 239000012876 carrier material Substances 0.000 description 1
- 238000010382 chemical cross-linking Methods 0.000 description 1
- 230000002925 chemical effect Effects 0.000 description 1
- 238000003776 cleavage reaction Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 230000002596 correlated effect Effects 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 239000002178 crystalline material Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000012217 deletion Methods 0.000 description 1
- 230000037430 deletion Effects 0.000 description 1
- 150000008049 diazo compounds Chemical class 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000000975 dye Substances 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 210000003608 fece Anatomy 0.000 description 1
- 238000005187 foaming Methods 0.000 description 1
- 230000008014 freezing Effects 0.000 description 1
- 238000007710 freezing Methods 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 230000009477 glass transition Effects 0.000 description 1
- 150000004820 halides Chemical class 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 230000000977 initiatory effect Effects 0.000 description 1
- 125000001905 inorganic group Chemical group 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000013507 mapping Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- CBBVHSHLSCZIHD-UHFFFAOYSA-N mercury silver Chemical compound [Ag].[Hg] CBBVHSHLSCZIHD-UHFFFAOYSA-N 0.000 description 1
- 150000002736 metal compounds Chemical class 0.000 description 1
- 229910001507 metal halide Inorganic materials 0.000 description 1
- 150000005309 metal halides Chemical class 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 230000009149 molecular binding Effects 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 230000000877 morphologic effect Effects 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- 125000000962 organic group Chemical group 0.000 description 1
- 230000008520 organization Effects 0.000 description 1
- 239000000075 oxide glass Substances 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 238000006552 photochemical reaction Methods 0.000 description 1
- 238000006303 photolysis reaction Methods 0.000 description 1
- 230000036211 photosensitivity Effects 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 238000010791 quenching Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000004043 responsiveness Effects 0.000 description 1
- 230000007017 scission Effects 0.000 description 1
- 230000009291 secondary effect Effects 0.000 description 1
- 229940065287 selenium compound Drugs 0.000 description 1
- 150000003343 selenium compounds Chemical class 0.000 description 1
- 125000003748 selenium group Chemical group *[Se]* 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 229940100890 silver compound Drugs 0.000 description 1
- 150000003379 silver compounds Chemical class 0.000 description 1
- 229940045105 silver iodide Drugs 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000003381 stabilizer Substances 0.000 description 1
- PGWMQVQLSMAHHO-UHFFFAOYSA-N sulfanylidenesilver Chemical compound [Ag]=S PGWMQVQLSMAHHO-UHFFFAOYSA-N 0.000 description 1
- 230000003319 supportive effect Effects 0.000 description 1
- 238000012549 training Methods 0.000 description 1
- 238000003949 trap density measurement Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03C—PHOTOSENSITIVE MATERIALS FOR PHOTOGRAPHIC PURPOSES; PHOTOGRAPHIC PROCESSES, e.g. CINE, X-RAY, COLOUR, STEREO-PHOTOGRAPHIC PROCESSES; AUXILIARY PROCESSES IN PHOTOGRAPHY
- G03C1/00—Photosensitive materials
- G03C1/72—Photosensitive compositions not covered by the groups G03C1/005 - G03C1/705
- G03C1/73—Photosensitive compositions not covered by the groups G03C1/005 - G03C1/705 containing organic compounds
- G03C1/734—Tellurium or selenium compounds
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03C—PHOTOSENSITIVE MATERIALS FOR PHOTOGRAPHIC PURPOSES; PHOTOGRAPHIC PROCESSES, e.g. CINE, X-RAY, COLOUR, STEREO-PHOTOGRAPHIC PROCESSES; AUXILIARY PROCESSES IN PHOTOGRAPHY
- G03C1/00—Photosensitive materials
- G03C1/705—Compositions containing chalcogenides, metals or alloys thereof, as photosensitive substances, e.g. photodope systems
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Metallurgy (AREA)
- Non-Silver Salt Photosensitive Materials And Non-Silver Salt Photography (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US17814271A | 1971-09-07 | 1971-09-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE2243495A1 DE2243495A1 (de) | 1973-03-15 |
| DE2243495C2 true DE2243495C2 (de) | 1983-12-22 |
Family
ID=22651374
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19722243495 Expired DE2243495C2 (de) | 1971-09-07 | 1972-09-05 | Aufzeichnungsmaterial und dessen Verwendung |
Country Status (5)
| Country | Link |
|---|---|
| DE (1) | DE2243495C2 (enrdf_load_html_response) |
| FR (1) | FR2152688B1 (enrdf_load_html_response) |
| GB (1) | GB1410024A (enrdf_load_html_response) |
| IT (1) | IT968401B (enrdf_load_html_response) |
| NL (1) | NL7211808A (enrdf_load_html_response) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3959799A (en) * | 1974-09-09 | 1976-05-25 | International Business Machines Corporation | Information storage by laser beam initiated reactions |
| FR2337892A1 (fr) * | 1976-01-12 | 1977-08-05 | Inst Poluprovodnikov | Procede de fabrication de produits a relief de configuration predeterminee |
| FR2460205A1 (fr) * | 1979-07-03 | 1981-01-23 | Inst Elektrodinamiki Akademii | Materiau sensible aux radiations et procede d'enregistrement d'information sur le materiau sensible aux radiations |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| IL32745A (en) * | 1968-08-22 | 1973-06-29 | Energy Conversion Devices Inc | Method and apparatus for producing,storing and retrieving information |
-
1972
- 1972-08-30 NL NL7211808A patent/NL7211808A/xx unknown
- 1972-09-05 DE DE19722243495 patent/DE2243495C2/de not_active Expired
- 1972-09-05 IT IT2882672A patent/IT968401B/it active
- 1972-09-06 FR FR7231634A patent/FR2152688B1/fr not_active Expired
- 1972-09-07 GB GB3974372A patent/GB1410024A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| FR2152688A1 (enrdf_load_html_response) | 1973-04-27 |
| FR2152688B1 (enrdf_load_html_response) | 1976-05-21 |
| IT968401B (it) | 1974-03-20 |
| GB1410024A (en) | 1975-10-15 |
| NL7211808A (enrdf_load_html_response) | 1973-03-09 |
| DE2243495A1 (de) | 1973-03-15 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OD | Request for examination | ||
| 8128 | New person/name/address of the agent |
Representative=s name: MUELLER, H., DIPL.-ING., PAT.-ANW., 8000 MUENCHEN |
|
| 8125 | Change of the main classification |
Ipc: G03X / |
|
| 8126 | Change of the secondary classification |
Free format text: G03F 7/10 G03C 1/72 |
|
| D2 | Grant after examination | ||
| 8364 | No opposition during term of opposition |