DE2228117A1 - Hohlkathoden-duoplasmatron-ionenquelle - Google Patents

Hohlkathoden-duoplasmatron-ionenquelle

Info

Publication number
DE2228117A1
DE2228117A1 DE19722228117 DE2228117A DE2228117A1 DE 2228117 A1 DE2228117 A1 DE 2228117A1 DE 19722228117 DE19722228117 DE 19722228117 DE 2228117 A DE2228117 A DE 2228117A DE 2228117 A1 DE2228117 A1 DE 2228117A1
Authority
DE
Germany
Prior art keywords
cathode
ion source
anode
hollow cathode
hollow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE19722228117
Other languages
German (de)
English (en)
Inventor
Frans Boeschoten
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
European Atomic Energy Community Euratom
Original Assignee
European Atomic Energy Community Euratom
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by European Atomic Energy Community Euratom filed Critical European Atomic Energy Community Euratom
Publication of DE2228117A1 publication Critical patent/DE2228117A1/de
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/08—Ion sources; Ion guns using arc discharge
    • H01J27/10—Duoplasmatrons ; Duopigatrons

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
DE19722228117 1971-06-29 1972-06-06 Hohlkathoden-duoplasmatron-ionenquelle Pending DE2228117A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
LU63436 1971-06-29

Publications (1)

Publication Number Publication Date
DE2228117A1 true DE2228117A1 (de) 1973-01-11

Family

ID=19726750

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19722228117 Pending DE2228117A1 (de) 1971-06-29 1972-06-06 Hohlkathoden-duoplasmatron-ionenquelle

Country Status (7)

Country Link
BE (1) BE785307A (enrdf_load_stackoverflow)
DE (1) DE2228117A1 (enrdf_load_stackoverflow)
FR (1) FR2143800A1 (enrdf_load_stackoverflow)
GB (1) GB1383128A (enrdf_load_stackoverflow)
IT (1) IT960285B (enrdf_load_stackoverflow)
LU (1) LU63436A1 (enrdf_load_stackoverflow)
NL (1) NL7209031A (enrdf_load_stackoverflow)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3739253A1 (de) * 1987-11-19 1989-06-01 Max Planck Gesellschaft Mit kontaktionisation arbeitende einrichtung zum erzeugen eines strahles beschleunigter ionen
US7342236B2 (en) * 2004-02-23 2008-03-11 Veeco Instruments, Inc. Fluid-cooled ion source
US7425711B2 (en) 2005-02-18 2008-09-16 Veeco Instruments, Inc. Thermal control plate for ion source
US7566883B2 (en) 2005-02-18 2009-07-28 Veeco Instruments, Inc. Thermal transfer sheet for ion source
US7476869B2 (en) 2005-02-18 2009-01-13 Veeco Instruments, Inc. Gas distributor for ion source

Also Published As

Publication number Publication date
NL7209031A (enrdf_load_stackoverflow) 1973-01-03
GB1383128A (en) 1975-02-05
FR2143800A1 (enrdf_load_stackoverflow) 1973-02-09
IT960285B (it) 1973-11-20
LU63436A1 (enrdf_load_stackoverflow) 1972-08-23
BE785307A (enrdf_load_stackoverflow) 1972-10-16

Similar Documents

Publication Publication Date Title
DE3689349T2 (de) Ionenquelle.
DE69019741T2 (de) Ionenstrahlkanone.
DE69830664T2 (de) Vorrichtung zum emittieren eines geladenen teilchenstrahls
DE3429591A1 (de) Ionenquelle mit wenigstens zwei ionisationskammern, insbesondere zur bildung von chemisch aktiven ionenstrahlen
DE882769C (de) Verfahren und Einrichtung zur Trennung geladener Teilchen von verschiedenem e/m-Verhaeltnis
DE3328423A1 (de) Negative ionenquelle
DE2151167C3 (de) Elektronenstrahl-Mikroanalysator mit Auger-Elektronen-Nachweis
DE1439828B2 (de) Elektronenmikroskop
DE69112166T2 (de) Plasmaquellenvorrichtung für Ionenimplantierung.
DE3782789T2 (de) Elektronenkanone mit plasmaanode.
DE1156515B (de) Vorrichtung zur Erzeugung negativer Ionen
DE2445603C3 (de) Ionenquelle
DE68922364T2 (de) Mit einer multizellulären Ionenquelle mit magnetischem Einschluss versehene abgeschmolzene Neutronenröhre.
DE3424449A1 (de) Quelle fuer negative ionen
DE3881579T2 (de) Ionenquelle.
DE3688860T2 (de) Mittels Elektronenstrahl angeregte Ionenstrahlquelle.
DE69303409T2 (de) Ionenimplantergerät
DE69609358T2 (de) Ionenquelle zur erzeugung von ionen aus gas oder dampf
DE1156521B (de) Elektronenstrahlkanone zum Erhitzen von Metallen
DE2608958A1 (de) Vorrichtung zum erzeugen von strahlen aus geladenen teilchen
DE69207616T2 (de) Schnelle Atomstrahlquelle
DE2228117A1 (de) Hohlkathoden-duoplasmatron-ionenquelle
DE1179309B (de) Hochfrequenz-Ionenquelle
DE4214417C1 (en) Plasma lens e.g. for focussing charged particle beam - has insulating wall enclosing cylindrical discharge plasma between two opposing electrodes with aligned apertures for passage of particle beam
DE1130083B (de) Vorrichtung zur raeumlichen Begrenzung einer Vielzahl von geladenen Teilchen