DE2216821B1 - Analysegerät zur Untersuchung einer Meßprobe mittels ausgelöster Auger-Elektronen - Google Patents
Analysegerät zur Untersuchung einer Meßprobe mittels ausgelöster Auger-ElektronenInfo
- Publication number
- DE2216821B1 DE2216821B1 DE19722216821D DE2216821DA DE2216821B1 DE 2216821 B1 DE2216821 B1 DE 2216821B1 DE 19722216821 D DE19722216821 D DE 19722216821D DE 2216821D A DE2216821D A DE 2216821DA DE 2216821 B1 DE2216821 B1 DE 2216821B1
- Authority
- DE
- Germany
- Prior art keywords
- grid
- electrons
- analysis device
- potential
- cylinder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000012360 testing method Methods 0.000 title claims description 41
- 238000004458 analytical method Methods 0.000 title claims description 34
- 238000007654 immersion Methods 0.000 claims description 14
- 230000004075 alteration Effects 0.000 claims description 10
- 230000000737 periodic effect Effects 0.000 claims description 5
- 239000004020 conductor Substances 0.000 claims description 4
- 230000035515 penetration Effects 0.000 claims description 4
- 230000005684 electric field Effects 0.000 claims description 3
- 238000001514 detection method Methods 0.000 claims description 2
- 239000000523 sample Substances 0.000 description 52
- 238000010894 electron beam technology Methods 0.000 description 28
- 238000005259 measurement Methods 0.000 description 15
- 238000001228 spectrum Methods 0.000 description 9
- 230000001960 triggered effect Effects 0.000 description 7
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 6
- 229910052729 chemical element Inorganic materials 0.000 description 6
- 230000008901 benefit Effects 0.000 description 5
- 230000009467 reduction Effects 0.000 description 5
- 229910052709 silver Inorganic materials 0.000 description 4
- 239000004332 silver Substances 0.000 description 4
- 238000009826 distribution Methods 0.000 description 3
- 230000005284 excitation Effects 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 238000013459 approach Methods 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000003111 delayed effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000000682 scanning probe acoustic microscopy Methods 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 238000004904 shortening Methods 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 238000004833 X-ray photoelectron spectroscopy Methods 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000001493 electron microscopy Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000004452 microanalysis Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000001420 photoelectron spectroscopy Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000005211 surface analysis Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 238000012549 training Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/10—Lenses
- H01J37/12—Lenses electrostatic
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/227—Measuring photoelectric effect, e.g. photoelectron emission microscopy [PEEM]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
- H01J37/256—Tubes for spot-analysing by electron or ion beams; Microanalysers using scanning beams
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
- H01J49/46—Static spectrometers
- H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE2216821 | 1972-04-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE2216821B1 true DE2216821B1 (de) | 1973-09-27 |
| DE2216821C2 DE2216821C2 (enExample) | 1974-05-09 |
Family
ID=5841301
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19722216821D Granted DE2216821B1 (de) | 1972-04-07 | 1972-04-07 | Analysegerät zur Untersuchung einer Meßprobe mittels ausgelöster Auger-Elektronen |
Country Status (1)
| Country | Link |
|---|---|
| DE (1) | DE2216821B1 (enExample) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2607788A1 (de) * | 1975-03-06 | 1976-09-16 | Ibm | Sekundaerelektronen-detektor |
| EP0669635A3 (en) * | 1994-02-25 | 1995-12-06 | Physical Electronics Ind Inc | High resolution scanning electron spectroscopy and imaging. |
| WO2008087384A3 (en) * | 2007-01-15 | 2008-11-27 | Oxford Instr Analytical Ltd | Charged particle analyser and method |
| US7592737B2 (en) | 2003-03-05 | 2009-09-22 | Universite De Franche-Comte | MEMS device comprising an actuator generating a hysteresis driving motion |
-
1972
- 1972-04-07 DE DE19722216821D patent/DE2216821B1/de active Granted
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2607788A1 (de) * | 1975-03-06 | 1976-09-16 | Ibm | Sekundaerelektronen-detektor |
| EP0669635A3 (en) * | 1994-02-25 | 1995-12-06 | Physical Electronics Ind Inc | High resolution scanning electron spectroscopy and imaging. |
| US7592737B2 (en) | 2003-03-05 | 2009-09-22 | Universite De Franche-Comte | MEMS device comprising an actuator generating a hysteresis driving motion |
| WO2008087384A3 (en) * | 2007-01-15 | 2008-11-27 | Oxford Instr Analytical Ltd | Charged particle analyser and method |
| US8421027B2 (en) | 2007-01-15 | 2013-04-16 | Oxford Instruments Nanotechnology Tools Limited | Charged particle analyser and method using electrostatic filter grids to filter charged particles |
Also Published As
| Publication number | Publication date |
|---|---|
| DE2216821C2 (enExample) | 1974-05-09 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| E77 | Valid patent as to the heymanns-index 1977 | ||
| EHJ | Ceased/non-payment of the annual fee |