DE2216821C2 - - Google Patents

Info

Publication number
DE2216821C2
DE2216821C2 DE19722216821D DE2216821DA DE2216821C2 DE 2216821 C2 DE2216821 C2 DE 2216821C2 DE 19722216821 D DE19722216821 D DE 19722216821D DE 2216821D A DE2216821D A DE 2216821DA DE 2216821 C2 DE2216821 C2 DE 2216821C2
Authority
DE
Germany
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE19722216821D
Other languages
German (de)
Other versions
DE2216821B1 (de
Inventor
Ulrich Dr. 7500 Karlsruhe Weber
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of DE2216821B1 publication Critical patent/DE2216821B1/de
Application granted granted Critical
Publication of DE2216821C2 publication Critical patent/DE2216821C2/de
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/12—Lenses electrostatic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/227—Measuring photoelectric effect, e.g. photoelectron emission microscopy [PEEM]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H01J37/256—Tubes for spot-analysing by electron or ion beams; Microanalysers using scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
DE19722216821D 1972-04-07 1972-04-07 Analysegerät zur Untersuchung einer Meßprobe mittels ausgelöster Auger-Elektronen Granted DE2216821B1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2216821 1972-04-07

Publications (2)

Publication Number Publication Date
DE2216821B1 DE2216821B1 (de) 1973-09-27
DE2216821C2 true DE2216821C2 (enExample) 1974-05-09

Family

ID=5841301

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19722216821D Granted DE2216821B1 (de) 1972-04-07 1972-04-07 Analysegerät zur Untersuchung einer Meßprobe mittels ausgelöster Auger-Elektronen

Country Status (1)

Country Link
DE (1) DE2216821B1 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3961190A (en) * 1975-03-06 1976-06-01 International Business Machines Corporation Voltage contrast detector for a scanning electron beam instrument
US5444242A (en) * 1992-09-29 1995-08-22 Physical Electronics Inc. Scanning and high resolution electron spectroscopy and imaging
FR2852111B1 (fr) 2003-03-05 2005-06-24 Univ Franche Comte Dispositif d'horloge utilisant la technologie mems
GB0700754D0 (en) 2007-01-15 2007-02-21 Oxford Instr Analytical Ltd Charged particle analyser and method

Also Published As

Publication number Publication date
DE2216821B1 (de) 1973-09-27

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Legal Events

Date Code Title Description
E77 Valid patent as to the heymanns-index 1977
EHJ Ceased/non-payment of the annual fee