DE2207852C3 - Piezoelektrisches Kristallelement - Google Patents
Piezoelektrisches KristallelementInfo
- Publication number
- DE2207852C3 DE2207852C3 DE2207852A DE2207852A DE2207852C3 DE 2207852 C3 DE2207852 C3 DE 2207852C3 DE 2207852 A DE2207852 A DE 2207852A DE 2207852 A DE2207852 A DE 2207852A DE 2207852 C3 DE2207852 C3 DE 2207852C3
- Authority
- DE
- Germany
- Prior art keywords
- piezoelectric
- temperature
- axis
- crystal
- cos
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000013078 crystal Substances 0.000 title claims description 57
- 230000000694 effects Effects 0.000 claims description 22
- 239000000463 material Substances 0.000 claims description 12
- 230000001133 acceleration Effects 0.000 claims description 6
- 230000035945 sensitivity Effects 0.000 description 34
- 239000010453 quartz Substances 0.000 description 25
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 25
- 241001442234 Cosa Species 0.000 description 21
- 244000089409 Erythrina poeppigiana Species 0.000 description 15
- 235000009776 Rathbunia alamosensis Nutrition 0.000 description 15
- 239000011159 matrix material Substances 0.000 description 9
- 230000004044 response Effects 0.000 description 8
- 238000005259 measurement Methods 0.000 description 7
- 230000001419 dependent effect Effects 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 5
- 238000010276 construction Methods 0.000 description 4
- 230000009467 reduction Effects 0.000 description 4
- 230000007423 decrease Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000014509 gene expression Effects 0.000 description 2
- YBMRDBCBODYGJE-UHFFFAOYSA-N germanium dioxide Chemical compound O=[Ge]=O YBMRDBCBODYGJE-UHFFFAOYSA-N 0.000 description 2
- 230000010355 oscillation Effects 0.000 description 2
- 230000001151 other effect Effects 0.000 description 2
- 230000036316 preload Effects 0.000 description 2
- 230000009466 transformation Effects 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- 229910017119 AlPO Inorganic materials 0.000 description 1
- 229910005793 GeO 2 Inorganic materials 0.000 description 1
- ILRRQNADMUWWFW-UHFFFAOYSA-K aluminium phosphate Chemical compound O1[Al]2OP1(=O)O2 ILRRQNADMUWWFW-UHFFFAOYSA-K 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000009530 blood pressure measurement Methods 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000013013 elastic material Substances 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 229940119177 germanium dioxide Drugs 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 241000894007 species Species 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
- H03H9/02015—Characteristics of piezoelectric layers, e.g. cutting angles
- H03H9/02023—Characteristics of piezoelectric layers, e.g. cutting angles consisting of quartz
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/008—Transmitting or indicating the displacement of flexible diaphragms using piezoelectric devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/09—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Measuring Fluid Pressure (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Gyroscopes (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CH375771A CH536561A (de) | 1971-03-15 | 1971-03-15 | Piezoelektrisches Kristallelement |
| US23470272A | 1972-03-15 | 1972-03-15 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| DE2207852A1 DE2207852A1 (de) | 1972-10-26 |
| DE2207852B2 DE2207852B2 (de) | 1974-10-17 |
| DE2207852C3 true DE2207852C3 (de) | 1975-07-10 |
Family
ID=25693780
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE2207852A Expired DE2207852C3 (de) | 1971-03-15 | 1972-02-19 | Piezoelektrisches Kristallelement |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US4148530A (show.php) |
| AT (1) | AT319632B (show.php) |
| CH (1) | CH536561A (show.php) |
| DE (1) | DE2207852C3 (show.php) |
| FR (1) | FR2129643A5 (show.php) |
| GB (1) | GB1356917A (show.php) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2529670A1 (fr) * | 1982-07-01 | 1984-01-06 | Asulab Sa | Element sensible pour capteur de contraintes et capteur en faisant application |
| US4472655A (en) * | 1983-03-25 | 1984-09-18 | Kabushiki Kaisha Daini Seikosha | Tuning fork flexural quartz resonator |
| US4586018A (en) * | 1983-09-19 | 1986-04-29 | Ford Motor Company | Combustion pressure sensor |
| FR2634067B1 (fr) * | 1988-07-07 | 1992-04-03 | Electro Microtechn Centre | Resonateur piezoelectrique |
| US5311096A (en) * | 1991-01-25 | 1994-05-10 | Seiko Electronic Components Ltd. | KT cut width-extensional mode quartz crystal resonator |
| DE4229449A1 (de) * | 1992-09-03 | 1994-03-10 | Abb Research Ltd | Faseroptischer Quarz-Spannungs-Sensor |
| AT399778B (de) * | 1994-02-07 | 1995-07-25 | Avl Verbrennungskraft Messtech | Piezoelektrisches messelement |
| AT401201B (de) * | 1994-03-03 | 1996-07-25 | Avl Verbrennungskraft Messtech | Piezoelektrisches messelement |
| US6923068B2 (en) * | 2003-06-19 | 2005-08-02 | Dynisco, Inc. | Pressure transducer |
| CH706635A1 (de) * | 2012-06-20 | 2013-12-31 | Kistler Holding Ag | Messelement, Messkörper und Messanordnung zum Messen einer Kraft und Verwendung eines solchen Messkörpers. |
| US9762206B2 (en) * | 2014-02-07 | 2017-09-12 | Samsung Electro-Mechanics Co., Ltd. | AT-cut quartz crystal vibrator with a long side along the X-axis direction |
| CN104260214B (zh) * | 2014-06-04 | 2016-11-16 | 北京石晶光电科技股份有限公司济源分公司 | 一种高精密波长板晶片加工工艺 |
| AT520901B1 (de) * | 2018-01-24 | 2019-11-15 | Avl List Gmbh | Messvorrichtung und Verfahren zur Bestimmung einer Kraft und/oder eines Drehmoments an einer drehmomentübertragenden Welle |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2173589A (en) * | 1933-12-14 | 1939-09-19 | Bell Telephone Labor Inc | Piezoelectric apparatus |
| US2212139A (en) * | 1936-03-18 | 1940-08-20 | Rca Corp | Piezoelectric quartz element |
| BE424774A (show.php) * | 1936-11-25 | |||
| US2743144A (en) * | 1951-04-07 | 1956-04-24 | Motorola Inc | Zero temperature coefficient piezoelectric crystal |
| USRE25413E (en) * | 1961-07-05 | 1963-07-09 | Temperature xc | |
| US3423609A (en) * | 1964-01-30 | 1969-01-21 | Hewlett Packard Co | Quartz crystal temperature transducer |
-
1971
- 1971-03-15 CH CH375771A patent/CH536561A/de not_active IP Right Cessation
-
1972
- 1972-02-19 DE DE2207852A patent/DE2207852C3/de not_active Expired
- 1972-02-22 AT AT141672A patent/AT319632B/de not_active IP Right Cessation
- 1972-02-24 GB GB867172A patent/GB1356917A/en not_active Expired
- 1972-03-14 FR FR7208746A patent/FR2129643A5/fr not_active Expired
-
1977
- 1977-06-10 US US05/805,468 patent/US4148530A/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| GB1356917A (en) | 1974-06-19 |
| DE2207852B2 (de) | 1974-10-17 |
| AT319632B (de) | 1974-12-27 |
| US4148530A (en) | 1979-04-10 |
| CH536561A (de) | 1973-04-30 |
| FR2129643A5 (show.php) | 1972-10-27 |
| DE2207852A1 (de) | 1972-10-26 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C3 | Grant after two publication steps (3rd publication) | ||
| E77 | Valid patent as to the heymanns-index 1977 | ||
| 8339 | Ceased/non-payment of the annual fee |