DE2204153C3 - Temperaturmeßfühler für sehr tiefe Temperaturen - Google Patents

Temperaturmeßfühler für sehr tiefe Temperaturen

Info

Publication number
DE2204153C3
DE2204153C3 DE2204153A DE2204153A DE2204153C3 DE 2204153 C3 DE2204153 C3 DE 2204153C3 DE 2204153 A DE2204153 A DE 2204153A DE 2204153 A DE2204153 A DE 2204153A DE 2204153 C3 DE2204153 C3 DE 2204153C3
Authority
DE
Germany
Prior art keywords
temperature sensor
doping
temperature
single crystal
surface zone
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE2204153A
Other languages
German (de)
English (en)
Other versions
DE2204153A1 (de
DE2204153B2 (de
Inventor
Jean St. Martin D'heres Bernard
Giorgio Grenoble-Gare Frossati
Georges Grenoble Guernet
Michel Meylan Montier
Louise Claix Peccoud Geb. Toupillier
Daniel Echirolles Thoulouze
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bpifrance Financement SA
Commissariat à l'Énergie Atomique et Aux Énergies Alternatives
Original Assignee
Agence National de Valorisation de la Recherche ANVAR
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agence National de Valorisation de la Recherche ANVAR, Commissariat a lEnergie Atomique CEA filed Critical Agence National de Valorisation de la Recherche ANVAR
Publication of DE2204153A1 publication Critical patent/DE2204153A1/de
Publication of DE2204153B2 publication Critical patent/DE2204153B2/de
Application granted granted Critical
Publication of DE2204153C3 publication Critical patent/DE2204153C3/de
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/01—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using semiconducting elements having PN junctions

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Radiation Pyrometers (AREA)
  • Thermistors And Varistors (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Pressure Sensors (AREA)
DE2204153A 1971-01-28 1972-01-28 Temperaturmeßfühler für sehr tiefe Temperaturen Expired DE2204153C3 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR717102774A FR2123179B1 (enExample) 1971-01-28 1971-01-28

Publications (3)

Publication Number Publication Date
DE2204153A1 DE2204153A1 (de) 1972-08-24
DE2204153B2 DE2204153B2 (de) 1979-03-01
DE2204153C3 true DE2204153C3 (de) 1979-10-31

Family

ID=9071007

Family Applications (1)

Application Number Title Priority Date Filing Date
DE2204153A Expired DE2204153C3 (de) 1971-01-28 1972-01-28 Temperaturmeßfühler für sehr tiefe Temperaturen

Country Status (4)

Country Link
US (1) US4047436A (enExample)
DE (1) DE2204153C3 (enExample)
FR (1) FR2123179B1 (enExample)
GB (1) GB1356235A (enExample)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2407972C3 (de) * 1974-02-19 1981-06-19 Siemens AG, 1000 Berlin und 8000 München Magnetfeldunabhängige Temperaturmeßvorrichtung, die für tiefe Temperaturen geeignet ist
DE2944015C2 (de) * 1979-10-31 1985-01-10 Siemens AG, 1000 Berlin und 8000 München Temperatursensor
JPS57113332A (en) * 1980-12-30 1982-07-14 Horiba Ltd Compensating thermopile detector
DE3139556A1 (de) * 1981-10-05 1983-04-21 Philips Patentverwaltung Gmbh, 2000 Hamburg Schaltungsanordnung zur messung von temperaturen
DE3245178C2 (de) * 1982-12-07 1986-12-11 Philips Patentverwaltung Gmbh, 2000 Hamburg Symmetrischer Temperatursensor
GB2140615B (en) * 1983-03-22 1987-03-18 Standard Telephones Cables Ltd Thermistor composite
US4881979A (en) * 1984-08-29 1989-11-21 Varian Associates, Inc. Junctions for monolithic cascade solar cells and methods
US4937552A (en) * 1986-03-28 1990-06-26 Weed Instrument Company Resistance temperature detector
JPS62245602A (ja) * 1986-04-17 1987-10-26 鐘淵化学工業株式会社 温度検出器
US4808009A (en) * 1986-06-05 1989-02-28 Rosemount, Inc. Integrated semiconductor resistance temperature sensor and resistive heater
DE3715231A1 (de) * 1987-05-07 1988-11-17 Siemens Ag Messvorrichtung zur bestimmung der temperatur von halbleiterkoerpern, verfahren zur herstellung der messvorrichtung und verfahren zur bestimmung der temperatur von halbleiterkoerpern waehrend temperprozessen
KR910007657B1 (ko) * 1989-05-23 1991-09-30 삼성전자 주식회사 반도체 온도검출회로
GB9009117D0 (en) * 1990-04-24 1990-08-08 Emi Plc Thorn Pyroelectric detector and method of manufacturing the same
US5302024A (en) * 1990-10-09 1994-04-12 Lockheed Sanders, Inc. Monolithic microwave power sensor using a heat sensing diode junction
US5141334A (en) * 1991-09-24 1992-08-25 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Sub-kelvin resistance thermometer
US5837929A (en) * 1994-07-05 1998-11-17 Mantron, Inc. Microelectronic thermoelectric device and systems incorporating such device
CA2150502A1 (en) * 1994-08-05 1996-02-06 Michael F. Mattes Method and apparatus for measuring temperature
US5909004A (en) * 1996-04-17 1999-06-01 General Electric Company Thermocouple array and method of fabrication
US6180867B1 (en) 1996-04-17 2001-01-30 General Electric Company Thermal sensor array and methods of fabrication and use
US6926768B2 (en) 2003-04-14 2005-08-09 Sun Chemical Corporation Treatment of high performance pigments
DE10317466A1 (de) * 2003-04-16 2004-12-09 Robert Bosch Gmbh Elektromotor
US7306967B1 (en) 2003-05-28 2007-12-11 Adsem, Inc. Method of forming high temperature thermistors
US7812705B1 (en) 2003-12-17 2010-10-12 Adsem, Inc. High temperature thermistor probe
US7292132B1 (en) * 2003-12-17 2007-11-06 Adsem, Inc. NTC thermistor probe

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3141135A (en) * 1962-05-11 1964-07-14 Westinghouse Electric Corp Semiconductive oscillator-mixer device
US3411199A (en) * 1965-05-28 1968-11-19 Rca Corp Semiconductor device fabrication
US3413531A (en) * 1966-09-06 1968-11-26 Ion Physics Corp High frequency field effect transistor
US3479234A (en) * 1967-05-01 1969-11-18 Gen Electric Method of producing field effect transistors
US3533158A (en) * 1967-10-30 1970-10-13 Hughes Aircraft Co Method of utilizing an ion beam to form custom circuits
US3655457A (en) * 1968-08-06 1972-04-11 Ibm Method of making or modifying a pn-junction by ion implantation
US3665256A (en) * 1968-10-15 1972-05-23 Rca Corp Heat dissipation for power integrated circuits
GB1249317A (en) * 1968-11-19 1971-10-13 Mullard Ltd Semiconductor devices
BE759057A (enExample) * 1969-11-19 1971-05-17 Philips Nv

Also Published As

Publication number Publication date
GB1356235A (en) 1974-06-12
DE2204153A1 (de) 1972-08-24
DE2204153B2 (de) 1979-03-01
US4047436A (en) 1977-09-13
FR2123179B1 (enExample) 1974-02-15
FR2123179A1 (enExample) 1972-09-08

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Legal Events

Date Code Title Description
C3 Grant after two publication steps (3rd publication)
8339 Ceased/non-payment of the annual fee