DE2162987A1 - Piezoelektrisches Element, Verfahren zu seiner Fertigung und unter Verwendung dieses Elementes herzustellende Erzeugnisse - Google Patents
Piezoelektrisches Element, Verfahren zu seiner Fertigung und unter Verwendung dieses Elementes herzustellende ErzeugnisseInfo
- Publication number
- DE2162987A1 DE2162987A1 DE19712162987 DE2162987A DE2162987A1 DE 2162987 A1 DE2162987 A1 DE 2162987A1 DE 19712162987 DE19712162987 DE 19712162987 DE 2162987 A DE2162987 A DE 2162987A DE 2162987 A1 DE2162987 A1 DE 2162987A1
- Authority
- DE
- Germany
- Prior art keywords
- spiral
- piezoelectric element
- piezoelectric
- element according
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 39
- 238000000034 method Methods 0.000 title claims description 15
- 230000008569 process Effects 0.000 title description 5
- 239000010410 layer Substances 0.000 claims description 30
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 20
- 239000000463 material Substances 0.000 claims description 18
- 239000002356 single layer Substances 0.000 claims description 17
- 239000000126 substance Substances 0.000 claims description 17
- 239000011888 foil Substances 0.000 claims description 16
- 238000010276 construction Methods 0.000 claims description 15
- 238000004804 winding Methods 0.000 claims description 15
- 229910052697 platinum Inorganic materials 0.000 claims description 10
- 150000003839 salts Chemical class 0.000 claims description 8
- 229910052751 metal Inorganic materials 0.000 claims description 7
- 239000002184 metal Substances 0.000 claims description 7
- 238000001816 cooling Methods 0.000 claims description 6
- 229910010272 inorganic material Inorganic materials 0.000 claims description 4
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- 239000007788 liquid Substances 0.000 claims description 4
- 239000011248 coating agent Substances 0.000 claims description 3
- 238000000576 coating method Methods 0.000 claims description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims 2
- 229910052742 iron Inorganic materials 0.000 claims 1
- 238000006073 displacement reaction Methods 0.000 description 25
- 239000004020 conductor Substances 0.000 description 16
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- 238000011161 development Methods 0.000 description 9
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 8
- 229910052753 mercury Inorganic materials 0.000 description 7
- 230000004044 response Effects 0.000 description 7
- 230000009471 action Effects 0.000 description 6
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- 230000008859 change Effects 0.000 description 5
- 230000005284 excitation Effects 0.000 description 5
- 230000010287 polarization Effects 0.000 description 5
- 230000010358 mechanical oscillation Effects 0.000 description 4
- 229910044991 metal oxide Inorganic materials 0.000 description 4
- 150000004706 metal oxides Chemical class 0.000 description 4
- 230000010355 oscillation Effects 0.000 description 4
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 4
- 238000005245 sintering Methods 0.000 description 4
- MCMNRKCIXSYSNV-UHFFFAOYSA-N ZrO2 Inorganic materials O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 3
- 230000005520 electrodynamics Effects 0.000 description 3
- 230000013011 mating Effects 0.000 description 3
- 230000005499 meniscus Effects 0.000 description 3
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 230000011664 signaling Effects 0.000 description 3
- 230000035882 stress Effects 0.000 description 3
- 238000012546 transfer Methods 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- VKJLWXGJGDEGSO-UHFFFAOYSA-N barium(2+);oxygen(2-);titanium(4+) Chemical compound [O-2].[O-2].[O-2].[Ti+4].[Ba+2] VKJLWXGJGDEGSO-UHFFFAOYSA-N 0.000 description 2
- 239000002775 capsule Substances 0.000 description 2
- 229910010293 ceramic material Inorganic materials 0.000 description 2
- 230000006378 damage Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 230000001419 dependent effect Effects 0.000 description 2
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- 238000005516 engineering process Methods 0.000 description 2
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- 238000011068 loading method Methods 0.000 description 2
- 239000000696 magnetic material Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 244000052769 pathogen Species 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 238000005476 soldering Methods 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 230000005236 sound signal Effects 0.000 description 2
- 230000001960 triggered effect Effects 0.000 description 2
- QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 241000446313 Lamella Species 0.000 description 1
- 241001465754 Metazoa Species 0.000 description 1
- 101100400378 Mus musculus Marveld2 gene Proteins 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- 240000007313 Tilia cordata Species 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 239000003708 ampul Substances 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 230000033228 biological regulation Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 239000003985 ceramic capacitor Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 239000010431 corundum Substances 0.000 description 1
- 229910052593 corundum Inorganic materials 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 230000005281 excited state Effects 0.000 description 1
- 230000006355 external stress Effects 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 230000005294 ferromagnetic effect Effects 0.000 description 1
- 238000011049 filling Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 230000005764 inhibitory process Effects 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
- 230000000302 ischemic effect Effects 0.000 description 1
- 231100000518 lethal Toxicity 0.000 description 1
- 230000001665 lethal effect Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000013017 mechanical damping Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- CBBVHSHLSCZIHD-UHFFFAOYSA-N mercury silver Chemical compound [Ag].[Hg] CBBVHSHLSCZIHD-UHFFFAOYSA-N 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 230000003534 oscillatory effect Effects 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 230000001717 pathogenic effect Effects 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- -1 polyethylene Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 230000008092 positive effect Effects 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000002336 repolarization Effects 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- 238000002604 ultrasonography Methods 0.000 description 1
- 239000002966 varnish Substances 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/46—Filters
- H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
- H03H9/545—Filters comprising resonators of piezoelectric or electrostrictive material including active elements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0644—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element
-
- G—PHYSICS
- G04—HOROLOGY
- G04C—ELECTROMECHANICAL CLOCKS OR WATCHES
- G04C3/00—Electromechanical clocks or watches independent of other time-pieces and in which the movement is maintained by electric means
- G04C3/08—Electromechanical clocks or watches independent of other time-pieces and in which the movement is maintained by electric means wherein movement is regulated by a mechanical oscillator other than a pendulum or balance, e.g. by a tuning fork, e.g. electrostatically
- G04C3/12—Electromechanical clocks or watches independent of other time-pieces and in which the movement is maintained by electric means wherein movement is regulated by a mechanical oscillator other than a pendulum or balance, e.g. by a tuning fork, e.g. electrostatically driven by piezoelectric means; driven by magneto-strictive means
-
- G—PHYSICS
- G04—HOROLOGY
- G04D—APPARATUS OR TOOLS SPECIALLY DESIGNED FOR MAKING OR MAINTAINING CLOCKS OR WATCHES
- G04D3/00—Watchmakers' or watch-repairers' machines or tools for working materials
- G04D3/0002—Watchmakers' or watch-repairers' machines or tools for working materials for mechanical working other than with a lathe
- G04D3/0035—Watchmakers' or watch-repairers' machines or tools for working materials for mechanical working other than with a lathe for components of the regulating mechanism
-
- G—PHYSICS
- G04—HOROLOGY
- G04D—APPARATUS OR TOOLS SPECIALLY DESIGNED FOR MAKING OR MAINTAINING CLOCKS OR WATCHES
- G04D3/00—Watchmakers' or watch-repairers' machines or tools for working materials
- G04D3/0074—Watchmakers' or watch-repairers' machines or tools for working materials for treatment of the material, e.g. surface treatment
- G04D3/0089—Watchmakers' or watch-repairers' machines or tools for working materials for treatment of the material, e.g. surface treatment for components of the regulating mechanism, e.g. coil springs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H57/00—Electrostrictive relays; Piezoelectric relays
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders or supports
- H03H9/10—Mounting in enclosures
- H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/176—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of ceramic material
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/46—Filters
- H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
- H03H9/56—Monolithic crystal filters
- H03H9/562—Monolithic crystal filters comprising a ceramic piezoelectric layer
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/46—Filters
- H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
- H03H9/58—Multiple crystal filters
- H03H9/581—Multiple crystal filters comprising ceramic piezoelectric layers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/08—Shaping or machining of piezoelectric or electrostrictive bodies
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/09—Forming piezoelectric or electrostrictive materials
- H10N30/093—Forming inorganic materials
- H10N30/097—Forming inorganic materials by sintering
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/40—Piezoelectric or electrostrictive devices with electrical input and electrical output, e.g. functioning as transformers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H57/00—Electrostrictive relays; Piezoelectric relays
- H01H2057/003—Electrostrictive relays; Piezoelectric relays the relay being latched in actuated position by magnet
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/42—Piezoelectric device making
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/43—Electric condenser making
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/4981—Utilizing transitory attached element or associated separate material
- Y10T29/49812—Temporary protective coating, impregnation, or cast layer
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Acoustics & Sound (AREA)
- General Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Crystallography & Structural Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Mechanical Engineering (AREA)
- Power Engineering (AREA)
- Inorganic Chemistry (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
- Circuit For Audible Band Transducer (AREA)
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| SU7001600106A SU355903A1 (ru) | 1970-12-21 | 1970-12-21 | Пьезоэлектрическое реле |
| SU1608697A SU440127A1 (ru) | 1971-01-18 | 1971-01-18 | Пьезоэлектрический трансформатор |
| SU1611885 | 1971-01-25 | ||
| SU7101658506A SU374036A1 (ru) | 1971-05-24 | 1971-05-24 | Пьезоэлектрическое реле |
| SU1658786 | 1971-05-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE2162987A1 true DE2162987A1 (de) | 1972-07-20 |
Family
ID=27532811
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19712162987 Pending DE2162987A1 (de) | 1970-12-21 | 1971-12-18 | Piezoelektrisches Element, Verfahren zu seiner Fertigung und unter Verwendung dieses Elementes herzustellende Erzeugnisse |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US3781955A (enExample) |
| DE (1) | DE2162987A1 (enExample) |
| FR (1) | FR2119482A5 (enExample) |
| GB (1) | GB1370674A (enExample) |
Families Citing this family (56)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4093883A (en) * | 1975-06-23 | 1978-06-06 | Yujiro Yamamoto | Piezoelectric multimorph switches |
| US4056742A (en) * | 1976-04-30 | 1977-11-01 | Tibbetts Industries, Inc. | Transducer having piezoelectric film arranged with alternating curvatures |
| US4376302A (en) * | 1978-04-13 | 1983-03-08 | The United States Of America As Represented By The Secretary Of The Navy | Piezoelectric polymer hydrophone |
| FR2422866A1 (fr) * | 1978-04-14 | 1979-11-09 | Quantel Sa | Dispositif d'accouplement, notamment pour embrayage ou frein |
| US4378721A (en) * | 1978-07-20 | 1983-04-05 | Kabushiki Kaisha Kawai Seisakusho | Pickup apparatus for an electric string type instrument |
| US4227111A (en) * | 1979-03-28 | 1980-10-07 | The United States Of America As Represented By The Secretary Of The Navy | Flexible piezoelectric composite transducers |
| CA1192646A (en) * | 1980-02-04 | 1985-08-27 | Herzl Laor | Piezoelectric apparatus for positioning optical fibers |
| US4339682A (en) * | 1980-09-22 | 1982-07-13 | Rca Corporation | Rotative motor using a piezoelectric element |
| US4375042A (en) * | 1980-11-24 | 1983-02-22 | Eastman Kodak Company | Temperature gradient method of nonuniformly poling a body of polymeric piezoelectric material and novel flexure elements produced thereby |
| US4395719A (en) * | 1981-01-05 | 1983-07-26 | Exxon Research And Engineering Co. | Ink jet apparatus with a flexible piezoelectric member and method of operating same |
| US4399385A (en) * | 1982-02-11 | 1983-08-16 | Rca Corporation | Rotative motor using a triangular piezoelectric element |
| US4399386A (en) * | 1982-02-11 | 1983-08-16 | Rca Corporation | Rotative motor using plural arrays of piezoelectric elements |
| US4435667A (en) | 1982-04-28 | 1984-03-06 | Peizo Electric Products, Inc. | Spiral piezoelectric rotary actuator |
| US4422003A (en) * | 1982-08-16 | 1983-12-20 | The United States Of America As Represented By The Secretary Of The Navy | Perforated PZT polymer composites |
| US4514247A (en) * | 1983-08-15 | 1985-04-30 | North American Philips Corporation | Method for fabricating composite transducers |
| DE3435569A1 (de) * | 1984-09-27 | 1986-04-10 | Siemens AG, 1000 Berlin und 8000 München | Verfahren zur herstellung einer array-ultraschall-antenne |
| GB2191909B (en) * | 1986-06-19 | 1989-12-20 | Plessey Co Plc | Acoustic transducer |
| JP2905643B2 (ja) * | 1992-05-29 | 1999-06-14 | 住友重機械工業株式会社 | 圧電リニアアクチュエータ |
| FR2701188B1 (fr) * | 1993-01-29 | 1995-03-03 | Thomson Csf | Procédé de fabrication de composant piézoélectrique. |
| US5505364A (en) * | 1993-12-30 | 1996-04-09 | Compaq Computer Corporation | Method of manufacturing ink jet printheads |
| US5440194A (en) * | 1994-05-13 | 1995-08-08 | Beurrier; Henry R. | Piezoelectric actuators |
| US5559387A (en) * | 1994-05-13 | 1996-09-24 | Beurrier; Henry R. | Piezoelectric actuators |
| GB9618052D0 (en) * | 1996-08-29 | 1996-10-09 | Univ Birmingham | Piezoelectric elements and devices incorporating same |
| DK176073B1 (da) * | 1998-03-03 | 2006-04-03 | Limiel Aps | Piezoelektrisk transformer |
| JPH11299273A (ja) * | 1998-04-15 | 1999-10-29 | Minolta Co Ltd | 圧電変換素子及び圧電変換素子を使用したアクチエ−タ |
| US6307202B1 (en) * | 1998-06-15 | 2001-10-23 | The Board Of Trustees Of The Leland Stanford Junior University | Bimorph spirals for uncooled photothermal spectroscopy |
| WO2000021340A1 (en) * | 1998-10-08 | 2000-04-13 | Richard Patten Bishop | Fluorescent lamp excitation circuit having a multi-layer piezoelectric acoustic transformer and methods for using the same |
| US6545391B1 (en) * | 1999-10-22 | 2003-04-08 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Polymer-polymer bilayer actuator |
| WO2001031715A1 (en) * | 1999-10-22 | 2001-05-03 | The Government Of The United States As Represented By The Administrator Of The National Aeronautics And Space Administration | Non-uniform thickness electroactive device |
| JP2001135873A (ja) * | 1999-11-08 | 2001-05-18 | Minolta Co Ltd | 圧電変換素子 |
| US7224813B2 (en) * | 1999-12-21 | 2007-05-29 | 1. . . Limited | Loudspeaker using an electro-active device |
| JP2001230462A (ja) | 2000-02-17 | 2001-08-24 | Minolta Co Ltd | 圧電変換素子 |
| DE10025561A1 (de) * | 2000-05-24 | 2001-12-06 | Siemens Ag | Energieautarker Hochfrequenzsender |
| CN1162859C (zh) * | 2000-06-08 | 2004-08-18 | 新科实业有限公司 | 采用环形旋转压电执行机构的高密度硬盘驱动器的双级执行机构系统 |
| US6671380B2 (en) * | 2001-02-26 | 2003-12-30 | Schlumberger Technology Corporation | Acoustic transducer with spiral-shaped piezoelectric shell |
| KR20040014569A (ko) * | 2001-06-21 | 2004-02-14 | 1...리미티드 | 라우드 스피커 |
| CN1541423B (zh) | 2001-07-03 | 2012-02-22 | 布拉德伯里·R·法塞 | 自供电开关启动系统 |
| DE10150128C2 (de) * | 2001-10-11 | 2003-10-02 | Enocean Gmbh | Drahtloses Sensorsystem |
| JP3832338B2 (ja) * | 2001-12-25 | 2006-10-11 | 松下電工株式会社 | 電歪ポリマーアクチュエータ |
| US6713944B2 (en) * | 2002-01-02 | 2004-03-30 | Omron Corporation | Actuator and method of manufacturing a strain element |
| AU2003205162A1 (en) * | 2002-01-08 | 2003-07-24 | Lamina Ceramics, Inc. | Monolithic disc delay line and method for making same |
| US7026891B2 (en) * | 2002-01-08 | 2006-04-11 | Lamina Ceramics, Inc. | Monolithic disc delay line |
| DE102010055417A1 (de) * | 2010-12-21 | 2012-06-21 | Hochschule Heilbronn | Elektromechanischer Energiespeicher, insbesondere für integrierte Schaltungen |
| US8410665B2 (en) * | 2010-12-23 | 2013-04-02 | Taiwan Semiconductor Manufacturing Company, Ltd. | MEMS kinetic energy conversion |
| US9270254B2 (en) * | 2011-09-30 | 2016-02-23 | Qualcomm Mems Technologies, Inc. | Cross-sectional dilation mode resonators and resonator-based ladder filters |
| CH705679B1 (fr) | 2011-10-28 | 2017-01-31 | Swatch Group Res & Dev Ltd | Circuit d'autorégulation de la fréquence d'oscillation d'un système mécanique oscillant, et dispositif le comprenant. |
| EP2590035B1 (fr) | 2011-11-01 | 2020-12-30 | The Swatch Group Research and Development Ltd. | Circuit d'autorégulation de la fréquence d'oscillation d'un système mécanique oscillant, et dispositif le comprenant |
| US9913321B2 (en) * | 2013-01-25 | 2018-03-06 | Energyield, Llc | Energy harvesting container |
| JP7073646B2 (ja) * | 2017-07-26 | 2022-05-24 | ヤマハ株式会社 | トランスデューサ |
| EP3457223A1 (fr) * | 2017-09-14 | 2019-03-20 | The Swatch Group Research and Development Ltd | Element piezoelectrique pour un circuit d'autoregulation de frequence, et systeme mecanique oscillant et dispositif le comprenant |
| EP3457224B1 (fr) * | 2017-09-14 | 2020-10-28 | The Swatch Group Research and Development Ltd | Element piezoelectrique pour un circuit d'autoregulation de frequence, systeme mecanique oscillant et dispositif le comprenant, et procede de fabrication de l'element piezoelectrique |
| EP3629103B1 (fr) * | 2018-09-28 | 2021-05-12 | The Swatch Group Research and Development Ltd | Pièce d'horlogerie comprenant un mouvement mécanique dont la marche est régulée par un dispositif électronique |
| CN111162749A (zh) * | 2020-01-08 | 2020-05-15 | 武汉大学 | 一种新型谐振器结构 |
| CN113464609B (zh) * | 2021-06-03 | 2022-10-28 | 江苏大学 | 一种基于飞轮与弹簧同轴串联的防冲击惯容器 |
| EP4194960B1 (fr) * | 2021-12-10 | 2025-09-03 | The Swatch Group Research and Development Ltd | Ressort spiral piézoélectrique, et procédé de fabrication du ressort spiral |
| EP4390557A1 (fr) * | 2022-12-23 | 2024-06-26 | The Swatch Group Research and Development Ltd | Resonateur piezoelectrique a spiral, notamment pour moteur rotatif d'horlogerie |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US1219629A (en) * | 1914-02-13 | 1917-03-20 | Detroit Stove Works | Method of forming electrical heat units. |
| US3109112A (en) * | 1962-03-13 | 1963-10-29 | Robert A Lester | Double frequency transducer |
| US3230504A (en) * | 1962-11-30 | 1966-01-18 | John J Horan | Open hemispherical transducers |
| US3519902A (en) * | 1969-04-02 | 1970-07-07 | Itt | Spiral plate capacitor |
| US3600787A (en) * | 1969-05-26 | 1971-08-24 | Itt | Method of making capacitors with free-standing electrodes |
-
1971
- 1971-12-15 US US00208306A patent/US3781955A/en not_active Expired - Lifetime
- 1971-12-16 GB GB5855871A patent/GB1370674A/en not_active Expired
- 1971-12-18 DE DE19712162987 patent/DE2162987A1/de active Pending
- 1971-12-20 FR FR7145722A patent/FR2119482A5/fr not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| US3781955A (en) | 1974-01-01 |
| GB1370674A (en) | 1974-10-16 |
| FR2119482A5 (enExample) | 1972-08-04 |
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