DE2162808C3 - Einrichtung zum Analysieren der Energieverteilung von Elektronen mit einem Elektronen hoher Energie durchlassenden Kugelgitter-Filter - Google Patents
Einrichtung zum Analysieren der Energieverteilung von Elektronen mit einem Elektronen hoher Energie durchlassenden Kugelgitter-FilterInfo
- Publication number
- DE2162808C3 DE2162808C3 DE19712162808 DE2162808A DE2162808C3 DE 2162808 C3 DE2162808 C3 DE 2162808C3 DE 19712162808 DE19712162808 DE 19712162808 DE 2162808 A DE2162808 A DE 2162808A DE 2162808 C3 DE2162808 C3 DE 2162808C3
- Authority
- DE
- Germany
- Prior art keywords
- electrons
- energy
- electron
- filter
- mirror
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000011045 prefiltration Methods 0.000 claims description 11
- 230000000694 effects Effects 0.000 claims description 7
- 238000010521 absorption reaction Methods 0.000 claims description 2
- 238000010894 electron beam technology Methods 0.000 description 12
- 229910052782 aluminium Inorganic materials 0.000 description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 5
- 230000005540 biological transmission Effects 0.000 description 5
- 230000005855 radiation Effects 0.000 description 5
- 238000001228 spectrum Methods 0.000 description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- 238000004458 analytical method Methods 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 239000007787 solid Substances 0.000 description 4
- 229910000831 Steel Inorganic materials 0.000 description 3
- 230000004888 barrier function Effects 0.000 description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 239000010959 steel Substances 0.000 description 3
- 229910001369 Brass Inorganic materials 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 239000010951 brass Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- AZDRQVAHHNSJOQ-UHFFFAOYSA-N alumane Chemical group [AlH3] AZDRQVAHHNSJOQ-UHFFFAOYSA-N 0.000 description 1
- 238000005513 bias potential Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000010893 electron trap Methods 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 244000045947 parasite Species 0.000 description 1
- -1 polytetrafluoroethylene Polymers 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 238000012764 semi-quantitative analysis Methods 0.000 description 1
- 239000011343 solid material Substances 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 230000004304 visual acuity Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
- H01J49/46—Static spectrometers
- H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
- H01J49/488—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with retarding grids
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Electron Tubes For Measurement (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US9947570A | 1970-12-18 | 1970-12-18 | |
| US16857571A | 1971-08-03 | 1971-08-03 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| DE2162808A1 DE2162808A1 (de) | 1972-07-06 |
| DE2162808B2 DE2162808B2 (de) | 1977-12-29 |
| DE2162808C3 true DE2162808C3 (de) | 1978-09-07 |
Family
ID=26796151
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19712162808 Expired DE2162808C3 (de) | 1970-12-18 | 1971-12-17 | Einrichtung zum Analysieren der Energieverteilung von Elektronen mit einem Elektronen hoher Energie durchlassenden Kugelgitter-Filter |
Country Status (6)
| Country | Link |
|---|---|
| JP (1) | JPS512396B1 (OSRAM) |
| CA (1) | CA942435A (OSRAM) |
| DE (1) | DE2162808C3 (OSRAM) |
| GB (1) | GB1370360A (OSRAM) |
| NL (1) | NL173799C (OSRAM) |
| SE (1) | SE367279B (OSRAM) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5335691U (OSRAM) * | 1976-09-02 | 1978-03-29 | ||
| JPS55129083A (en) * | 1979-03-27 | 1980-10-06 | Kasai Kk | Playing tool for child |
| DE3138927A1 (de) * | 1981-09-30 | 1983-04-14 | Siemens AG, 1000 Berlin und 8000 München | Abbildendes spektrometer fuer die elektronenstrahl-messtechnik und elektronenstrahl-messgeraet |
| DE3206309A1 (de) * | 1982-02-22 | 1983-09-15 | Siemens AG, 1000 Berlin und 8000 München | Sekundaerelektronen-spektrometer und verfahren zu seinem betrieb |
| EP1605492B1 (en) * | 2004-06-11 | 2015-11-18 | ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | Charged particle beam device with retarding field analyzer |
| CN112799120B (zh) * | 2019-11-13 | 2024-03-22 | 中国科学院国家空间科学中心 | 一种离子和电子同步测量的双通道静电分析器 |
-
1971
- 1971-11-30 CA CA128,998A patent/CA942435A/en not_active Expired
- 1971-12-17 SE SE1622371A patent/SE367279B/xx unknown
- 1971-12-17 NL NL7117400A patent/NL173799C/xx not_active IP Right Cessation
- 1971-12-17 JP JP46101972A patent/JPS512396B1/ja active Pending
- 1971-12-17 GB GB5869571A patent/GB1370360A/en not_active Expired
- 1971-12-17 DE DE19712162808 patent/DE2162808C3/de not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| CA942435A (en) | 1974-02-19 |
| SE367279B (OSRAM) | 1974-05-20 |
| NL173799C (nl) | 1984-03-01 |
| NL7117400A (OSRAM) | 1972-06-20 |
| DE2162808A1 (de) | 1972-07-06 |
| DE2162808B2 (de) | 1977-12-29 |
| NL173799B (nl) | 1983-10-03 |
| GB1370360A (en) | 1974-10-16 |
| JPS512396B1 (OSRAM) | 1976-01-26 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C3 | Grant after two publication steps (3rd publication) |