DE2155220A1 - Verfahren zur Anodisierung von Dünnfilmbaueinheiten - Google Patents
Verfahren zur Anodisierung von DünnfilmbaueinheitenInfo
- Publication number
- DE2155220A1 DE2155220A1 DE19712155220 DE2155220A DE2155220A1 DE 2155220 A1 DE2155220 A1 DE 2155220A1 DE 19712155220 DE19712155220 DE 19712155220 DE 2155220 A DE2155220 A DE 2155220A DE 2155220 A1 DE2155220 A1 DE 2155220A1
- Authority
- DE
- Germany
- Prior art keywords
- anodizing
- value
- steps
- resistance
- time
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007743 anodising Methods 0.000 title claims description 119
- 238000000034 method Methods 0.000 title claims description 54
- 239000010409 thin film Substances 0.000 title claims description 47
- 230000008569 process Effects 0.000 title description 18
- 230000000712 assembly Effects 0.000 title description 7
- 238000000429 assembly Methods 0.000 title description 7
- 238000002048 anodisation reaction Methods 0.000 claims description 28
- 230000008859 change Effects 0.000 claims description 7
- 239000003792 electrolyte Substances 0.000 claims description 7
- 230000000694 effects Effects 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 10
- 238000004519 manufacturing process Methods 0.000 description 10
- 238000012360 testing method Methods 0.000 description 7
- 238000004364 calculation method Methods 0.000 description 6
- 230000007423 decrease Effects 0.000 description 5
- 230000003247 decreasing effect Effects 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 238000004886 process control Methods 0.000 description 4
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 description 3
- 239000010408 film Substances 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 230000014509 gene expression Effects 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 2
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 1
- 230000003213 activating effect Effects 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 229920002678 cellulose Polymers 0.000 description 1
- 239000001913 cellulose Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000011112 process operation Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000011946 reduction process Methods 0.000 description 1
- 230000011664 signaling Effects 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
- 238000012800 visualization Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
- H01C17/22—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming
- H01C17/26—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming by converting resistive material
- H01C17/262—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming by converting resistive material by electrolytic treatment, e.g. anodic oxydation
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
- C25D11/02—Anodisation
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05F—SYSTEMS FOR REGULATING ELECTRIC OR MAGNETIC VARIABLES
- G05F1/00—Automatic systems in which deviations of an electric quantity from one or more predetermined values are detected at the output of the system and fed back to a device within the system to restore the detected quantity to its predetermined value or values, i.e. retroactive systems
- G05F1/10—Regulating voltage or current
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N97/00—Electric solid-state thin-film or thick-film devices, not otherwise provided for
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Electromagnetism (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Electrochemistry (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Automation & Control Theory (AREA)
- Manufacturing & Machinery (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Apparatuses And Processes For Manufacturing Resistors (AREA)
- Cold Cathode And The Manufacture (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US8737070A | 1970-11-06 | 1970-11-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE2155220A1 true DE2155220A1 (de) | 1972-05-10 |
Family
ID=22204779
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19712155220 Pending DE2155220A1 (de) | 1970-11-06 | 1971-11-06 | Verfahren zur Anodisierung von Dünnfilmbaueinheiten |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US3635802A (enExample) |
| BE (1) | BE774895A (enExample) |
| CA (1) | CA928433A (enExample) |
| DE (1) | DE2155220A1 (enExample) |
| FR (1) | FR2112510B1 (enExample) |
| GB (1) | GB1363528A (enExample) |
| IT (1) | IT942267B (enExample) |
| NL (1) | NL7115203A (enExample) |
| SE (1) | SE393133B (enExample) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5017302B1 (enExample) * | 1971-05-13 | 1975-06-19 | ||
| US3956081A (en) * | 1973-04-09 | 1976-05-11 | General Radio | Method of high speed resistor trimming |
| DE3004149A1 (de) * | 1980-02-05 | 1981-08-13 | Siemens AG, 1000 Berlin und 8000 München | Verfahren zur reproduzierbaren herstellung metallischer schichten |
| US6730984B1 (en) * | 2000-11-14 | 2004-05-04 | International Business Machines Corporation | Increasing an electrical resistance of a resistor by oxidation or nitridization |
| DE10214618B4 (de) * | 2002-04-03 | 2007-07-12 | Robert Bosch Gmbh | Verfahren zum Bearbeiten von Werkstücken mittels eines Bearbeitungsverfahrens, insbesondere des elektrochemischen Bearbeitungsverfahrens |
| CN111863365B (zh) * | 2019-04-28 | 2022-04-26 | 深圳市杰普特光电股份有限公司 | 调阻机及其调阻方法 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2920018A (en) * | 1957-04-22 | 1960-01-05 | Electro Chem Mfg Co Inc | Anodizing process and system |
| US3520783A (en) * | 1967-02-10 | 1970-07-14 | Northern Electric Co | Method of adjusting a resistor by anodizing |
-
1970
- 1970-11-06 US US87370A patent/US3635802A/en not_active Expired - Lifetime
-
1971
- 1971-06-02 CA CA114667A patent/CA928433A/en not_active Expired
- 1971-10-29 SE SE7113790A patent/SE393133B/xx unknown
- 1971-11-03 IT IT197153862A patent/IT942267B/it active
- 1971-11-04 BE BE774895A patent/BE774895A/xx unknown
- 1971-11-04 GB GB5131271A patent/GB1363528A/en not_active Expired
- 1971-11-04 NL NL7115203A patent/NL7115203A/xx unknown
- 1971-11-05 FR FR7139845A patent/FR2112510B1/fr not_active Expired
- 1971-11-06 DE DE19712155220 patent/DE2155220A1/de active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| BE774895A (fr) | 1972-03-01 |
| SE393133B (sv) | 1977-05-02 |
| CA928433A (en) | 1973-06-12 |
| IT942267B (it) | 1973-03-20 |
| US3635802A (en) | 1972-01-18 |
| FR2112510B1 (enExample) | 1974-08-19 |
| FR2112510A1 (enExample) | 1972-06-16 |
| GB1363528A (en) | 1974-08-14 |
| NL7115203A (enExample) | 1972-05-09 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OHN | Withdrawal |