DE2153523A1 - Verfahren zum Abscheiden polymerer Überzüge unter Anwendung elektrischer Anregung - Google Patents
Verfahren zum Abscheiden polymerer Überzüge unter Anwendung elektrischer AnregungInfo
- Publication number
- DE2153523A1 DE2153523A1 DE19712153523 DE2153523A DE2153523A1 DE 2153523 A1 DE2153523 A1 DE 2153523A1 DE 19712153523 DE19712153523 DE 19712153523 DE 2153523 A DE2153523 A DE 2153523A DE 2153523 A1 DE2153523 A1 DE 2153523A1
- Authority
- DE
- Germany
- Prior art keywords
- starting material
- chamber
- carrier
- carrier gas
- polymerized
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims description 20
- 238000000576 coating method Methods 0.000 title claims description 9
- 230000005284 excitation Effects 0.000 title claims description 5
- 238000000151 deposition Methods 0.000 title description 4
- 239000012159 carrier gas Substances 0.000 claims description 20
- 239000007858 starting material Substances 0.000 claims description 19
- 239000012876 carrier material Substances 0.000 claims description 11
- 239000000463 material Substances 0.000 claims description 9
- -1 polytetrafluoroethylene Polymers 0.000 claims description 8
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 6
- 239000011248 coating agent Substances 0.000 claims description 6
- 229920000052 poly(p-xylylene) Polymers 0.000 claims description 5
- 229920000642 polymer Polymers 0.000 claims description 5
- 229910052743 krypton Inorganic materials 0.000 claims description 4
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 claims description 4
- 229910052724 xenon Inorganic materials 0.000 claims description 4
- 239000004952 Polyamide Substances 0.000 claims description 3
- 239000004698 Polyethylene Substances 0.000 claims description 3
- 239000004642 Polyimide Substances 0.000 claims description 3
- 229910052786 argon Inorganic materials 0.000 claims description 3
- 239000007789 gas Substances 0.000 claims description 3
- 229920002647 polyamide Polymers 0.000 claims description 3
- 229920000573 polyethylene Polymers 0.000 claims description 3
- 229920001721 polyimide Polymers 0.000 claims description 3
- 239000004810 polytetrafluoroethylene Substances 0.000 claims description 3
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 claims description 3
- 239000004812 Fluorinated ethylene propylene Substances 0.000 claims description 2
- 239000004721 Polyphenylene oxide Substances 0.000 claims description 2
- HQQADJVZYDDRJT-UHFFFAOYSA-N ethene;prop-1-ene Chemical group C=C.CC=C HQQADJVZYDDRJT-UHFFFAOYSA-N 0.000 claims description 2
- 229930195733 hydrocarbon Natural products 0.000 claims description 2
- 150000002430 hydrocarbons Chemical class 0.000 claims description 2
- 229920009441 perflouroethylene propylene Polymers 0.000 claims description 2
- 229920006380 polyphenylene oxide Polymers 0.000 claims description 2
- 229920001343 polytetrafluoroethylene Polymers 0.000 claims description 2
- 229920002620 polyvinyl fluoride Chemical class 0.000 claims description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical class [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 claims 1
- 229920001577 copolymer Polymers 0.000 claims 1
- 238000004070 electrodeposition Methods 0.000 claims 1
- 125000000816 ethylene group Chemical group [H]C([H])([*:1])C([H])([H])[*:2] 0.000 claims 1
- 150000002222 fluorine compounds Chemical class 0.000 claims 1
- 229920002493 poly(chlorotrifluoroethylene) Polymers 0.000 claims 1
- 239000005023 polychlorotrifluoroethylene (PCTFE) polymer Substances 0.000 claims 1
- 229920002554 vinyl polymer Polymers 0.000 claims 1
- 239000004020 conductor Substances 0.000 description 6
- 239000007787 solid Substances 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 238000005137 deposition process Methods 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- 239000011343 solid material Substances 0.000 description 3
- 239000002699 waste material Substances 0.000 description 3
- 230000008021 deposition Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 229940058401 polytetrafluoroethylene Drugs 0.000 description 2
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical class C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 1
- 239000002033 PVDF binder Substances 0.000 description 1
- 206010035148 Plague Diseases 0.000 description 1
- 241000607479 Yersinia pestis Species 0.000 description 1
- XMPZLAQHPIBDSO-UHFFFAOYSA-N argon dimer Chemical compound [Ar].[Ar] XMPZLAQHPIBDSO-UHFFFAOYSA-N 0.000 description 1
- WZSUOQDIYKMPMT-UHFFFAOYSA-N argon krypton Chemical compound [Ar].[Kr] WZSUOQDIYKMPMT-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000000539 dimer Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 229920002981 polyvinylidene fluoride Polymers 0.000 description 1
- 239000011253 protective coating Substances 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000005019 vapor deposition process Methods 0.000 description 1
- 239000011364 vaporized material Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/62—Plasma-deposition of organic layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/31504—Composite [nonstructural laminate]
- Y10T428/31507—Of polycarbonate
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/31504—Composite [nonstructural laminate]
- Y10T428/3154—Of fluorinated addition polymer from unsaturated monomers
- Y10T428/31544—Addition polymer is perhalogenated
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Polymerisation Methods In General (AREA)
- Coating Apparatus (AREA)
- Laminated Bodies (AREA)
- Chemical Vapour Deposition (AREA)
- Physical Vapour Deposition (AREA)
- Other Resins Obtained By Reactions Not Involving Carbon-To-Carbon Unsaturated Bonds (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US8996970A | 1970-11-16 | 1970-11-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE2153523A1 true DE2153523A1 (de) | 1972-05-18 |
Family
ID=22220445
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19712153523 Pending DE2153523A1 (de) | 1970-11-16 | 1971-10-22 | Verfahren zum Abscheiden polymerer Überzüge unter Anwendung elektrischer Anregung |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US3663265A (enExample) |
| CA (1) | CA957735A (enExample) |
| DE (1) | DE2153523A1 (enExample) |
| FR (1) | FR2114475A5 (enExample) |
| GB (1) | GB1326145A (enExample) |
| IT (1) | IT939515B (enExample) |
| NL (1) | NL7115612A (enExample) |
Families Citing this family (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3920483A (en) * | 1974-11-25 | 1975-11-18 | Ibm | Method of ion implantation through a photoresist mask |
| US4252848A (en) * | 1977-04-11 | 1981-02-24 | Rca Corporation | Perfluorinated polymer thin films |
| US4125152A (en) * | 1977-09-19 | 1978-11-14 | Borg-Warner Corporation | Scale resistant heat transfer surfaces and a method for their preparation |
| US4188426A (en) * | 1977-12-12 | 1980-02-12 | Lord Corporation | Cold plasma modification of organic and inorganic surfaces |
| US4291244A (en) * | 1979-09-04 | 1981-09-22 | Union Carbide Corporation | Electrets |
| US4291245A (en) * | 1979-09-04 | 1981-09-22 | Union Carbide Corporation | Electrets |
| JPS586536A (ja) * | 1981-07-01 | 1983-01-14 | Pioneer Electronic Corp | 光学式デイスク |
| US4613517A (en) * | 1983-04-27 | 1986-09-23 | Becton, Dickinson And Company | Heparinization of plasma treated surfaces |
| US5034265A (en) * | 1983-08-01 | 1991-07-23 | Washington Research Foundation | Plasma gas discharge treatment for improving the compatibility of biomaterials |
| US4718907A (en) * | 1985-06-20 | 1988-01-12 | Atrium Medical Corporation | Vascular prosthesis having fluorinated coating with varying F/C ratio |
| US4632842A (en) * | 1985-06-20 | 1986-12-30 | Atrium Medical Corporation | Glow discharge process for producing implantable devices |
| DE3682130D1 (de) * | 1985-07-15 | 1991-11-28 | Japan Res Dev Corp | Verfahren zur herstellung von ultrafeinen organischen verbindungen. |
| US4756925A (en) * | 1986-03-31 | 1988-07-12 | Teijin Limited | Plasma and ion plating treatment of polymer fibers to improve adhesion to RFL rubber |
| US5108667A (en) * | 1989-08-30 | 1992-04-28 | Revlon, Inc. | Process for the treatment of polymer cosmetic molds |
| US5526546A (en) * | 1993-04-23 | 1996-06-18 | Revlon Consumer Products Corporation | Surface treated applicators having bristles coated with an etched layer ions produced by an ion-producing gas plasma |
| US5688556A (en) * | 1994-04-01 | 1997-11-18 | Mobil Oil Corporation | Barrier films having vapor coated EVOH surfaces |
| CN1144503A (zh) * | 1994-04-01 | 1997-03-05 | 美孚石油公司 | 具有涂碳的高能表面的保护膜 |
| US5560800A (en) * | 1994-08-31 | 1996-10-01 | Mobil Oil Corporation | Protective coating for pressure-activated adhesives |
| US6709715B1 (en) * | 1999-06-17 | 2004-03-23 | Applied Materials Inc. | Plasma enhanced chemical vapor deposition of copolymer of parylene N and comonomers with various double bonds |
| KR100427996B1 (ko) * | 2001-07-19 | 2004-04-28 | 주식회사 아이피에스 | 박막증착용 반응용기 및 그를 이용한 박막증착방법 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3310424A (en) * | 1963-05-14 | 1967-03-21 | Litton Systems Inc | Method for providing an insulating film on a substrate |
| US3379803A (en) * | 1964-05-04 | 1968-04-23 | Union Carbide Corp | Coating method and apparatus for deposition of polymer-forming vapor under vacuum |
| US3406040A (en) * | 1964-06-24 | 1968-10-15 | Ibm | Vapor deposition method for forming thin polymeric films |
| US3415986A (en) * | 1965-06-25 | 1968-12-10 | Union Carbide Corp | Process for masking a para-xylylene polymer and selectively etching it by a gaseous electrical glow discharge |
| US3419487A (en) * | 1966-01-24 | 1968-12-31 | Dow Corning | Method of growing thin film semiconductors using an electron beam |
-
1970
- 1970-11-16 US US3663265D patent/US3663265A/en not_active Expired - Lifetime
-
1971
- 1971-08-27 CA CA121,542A patent/CA957735A/en not_active Expired
- 1971-10-07 IT IT5334271A patent/IT939515B/it active
- 1971-10-22 DE DE19712153523 patent/DE2153523A1/de active Pending
- 1971-11-03 GB GB5117571A patent/GB1326145A/en not_active Expired
- 1971-11-08 FR FR7139934A patent/FR2114475A5/fr not_active Expired
- 1971-11-12 NL NL7115612A patent/NL7115612A/xx unknown
Also Published As
| Publication number | Publication date |
|---|---|
| US3663265A (en) | 1972-05-16 |
| GB1326145A (en) | 1973-08-08 |
| FR2114475A5 (enExample) | 1972-06-30 |
| IT939515B (it) | 1973-02-10 |
| NL7115612A (enExample) | 1972-05-18 |
| CA957735A (en) | 1974-11-12 |
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