DE2141182A1 - Verfahren zur herstellung einer halbleiteranordnung - Google Patents
Verfahren zur herstellung einer halbleiteranordnungInfo
- Publication number
- DE2141182A1 DE2141182A1 DE2141182A DE2141182A DE2141182A1 DE 2141182 A1 DE2141182 A1 DE 2141182A1 DE 2141182 A DE2141182 A DE 2141182A DE 2141182 A DE2141182 A DE 2141182A DE 2141182 A1 DE2141182 A1 DE 2141182A1
- Authority
- DE
- Germany
- Prior art keywords
- semiconductor
- protective layer
- semiconductor crystal
- heated
- vpa
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title claims description 31
- 238000004519 manufacturing process Methods 0.000 title claims description 7
- 239000011241 protective layer Substances 0.000 claims description 25
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 12
- 239000013078 crystal Substances 0.000 claims description 12
- 239000000203 mixture Substances 0.000 claims description 11
- 238000000034 method Methods 0.000 claims description 8
- 239000012495 reaction gas Substances 0.000 claims description 8
- 229910052786 argon Inorganic materials 0.000 claims description 6
- 239000007789 gas Substances 0.000 claims description 5
- 229910052782 aluminium Inorganic materials 0.000 claims description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 4
- 239000001301 oxygen Substances 0.000 claims description 4
- 229910052760 oxygen Inorganic materials 0.000 claims description 4
- 150000003377 silicon compounds Chemical class 0.000 claims description 4
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims description 2
- -1 aluminum alkyl compound Chemical class 0.000 claims description 2
- 239000011261 inert gas Substances 0.000 claims description 2
- 230000003647 oxidation Effects 0.000 claims description 2
- 238000007254 oxidation reaction Methods 0.000 claims description 2
- 229910004298 SiO 2 Inorganic materials 0.000 claims 2
- 230000015556 catabolic process Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 150000001875 compounds Chemical class 0.000 description 3
- 239000010410 layer Substances 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- JLTRXTDYQLMHGR-UHFFFAOYSA-N trimethylaluminium Chemical group C[Al](C)C JLTRXTDYQLMHGR-UHFFFAOYSA-N 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 125000004429 atom Chemical group 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 125000004432 carbon atom Chemical group C* 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000002845 discoloration Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 239000006200 vaporizer Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
- H01L21/02263—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3157—Partial encapsulation or coating
- H01L23/3192—Multilayer coating
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Formation Of Insulating Films (AREA)
Priority Applications (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE2141182A DE2141182A1 (de) | 1971-08-17 | 1971-08-17 | Verfahren zur herstellung einer halbleiteranordnung |
| CH843572A CH565450A5 (cs) | 1971-08-17 | 1972-06-07 | |
| NL7209209A NL7209209A (cs) | 1971-08-17 | 1972-06-30 | |
| IT28017/72A IT963845B (it) | 1971-08-17 | 1972-08-09 | Procedimento per la preparazione di un dispositivo a semiconduttore |
| FR7229316A FR2149485B1 (cs) | 1971-08-17 | 1972-08-16 | |
| GB3816872A GB1347178A (en) | 1971-08-17 | 1972-08-16 | Production of semiconductor arrangements |
| JP47082418A JPS4830378A (cs) | 1971-08-17 | 1972-08-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE2141182A DE2141182A1 (de) | 1971-08-17 | 1971-08-17 | Verfahren zur herstellung einer halbleiteranordnung |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE2141182A1 true DE2141182A1 (de) | 1973-02-22 |
Family
ID=5816981
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE2141182A Pending DE2141182A1 (de) | 1971-08-17 | 1971-08-17 | Verfahren zur herstellung einer halbleiteranordnung |
Country Status (7)
| Country | Link |
|---|---|
| JP (1) | JPS4830378A (cs) |
| CH (1) | CH565450A5 (cs) |
| DE (1) | DE2141182A1 (cs) |
| FR (1) | FR2149485B1 (cs) |
| GB (1) | GB1347178A (cs) |
| IT (1) | IT963845B (cs) |
| NL (1) | NL7209209A (cs) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102008013529B4 (de) * | 2008-03-11 | 2016-12-15 | Krones Aktiengesellschaft | Verfahren und Vorrichtung zum Kontrollieren einer Innenraumbehandlung eines Behälters |
-
1971
- 1971-08-17 DE DE2141182A patent/DE2141182A1/de active Pending
-
1972
- 1972-06-07 CH CH843572A patent/CH565450A5/xx not_active IP Right Cessation
- 1972-06-30 NL NL7209209A patent/NL7209209A/xx unknown
- 1972-08-09 IT IT28017/72A patent/IT963845B/it active
- 1972-08-16 GB GB3816872A patent/GB1347178A/en not_active Expired
- 1972-08-16 FR FR7229316A patent/FR2149485B1/fr not_active Expired
- 1972-08-17 JP JP47082418A patent/JPS4830378A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| NL7209209A (cs) | 1973-02-20 |
| FR2149485A1 (cs) | 1973-03-30 |
| FR2149485B1 (cs) | 1977-07-29 |
| JPS4830378A (cs) | 1973-04-21 |
| IT963845B (it) | 1974-01-21 |
| GB1347178A (en) | 1974-02-27 |
| CH565450A5 (cs) | 1975-08-15 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OHJ | Non-payment of the annual fee |