DE2140523A1 - Elektronenstrahlerzeuger - Google Patents

Elektronenstrahlerzeuger

Info

Publication number
DE2140523A1
DE2140523A1 DE19712140523 DE2140523A DE2140523A1 DE 2140523 A1 DE2140523 A1 DE 2140523A1 DE 19712140523 DE19712140523 DE 19712140523 DE 2140523 A DE2140523 A DE 2140523A DE 2140523 A1 DE2140523 A1 DE 2140523A1
Authority
DE
Germany
Prior art keywords
anode
segments
beam system
opening
grid electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE19712140523
Other languages
German (de)
English (en)
Inventor
William E Stamford Conn Glenn jun (V St A)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CBS Broadcasting Inc
Original Assignee
Columbia Broadcasting System Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Columbia Broadcasting System Inc filed Critical Columbia Broadcasting System Inc
Publication of DE2140523A1 publication Critical patent/DE2140523A1/de
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/063—Geometrical arrangement of electrodes for beam-forming
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements common to two or more basic types of discharge tubes or lamps
    • H01J3/10—Arrangements for centring ray or beam
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/065—Construction of guns or parts thereof

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
DE19712140523 1970-08-12 1971-08-12 Elektronenstrahlerzeuger Pending DE2140523A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US6322670A 1970-08-12 1970-08-12

Publications (1)

Publication Number Publication Date
DE2140523A1 true DE2140523A1 (de) 1972-02-17

Family

ID=22047803

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19712140523 Pending DE2140523A1 (de) 1970-08-12 1971-08-12 Elektronenstrahlerzeuger

Country Status (8)

Country Link
US (1) US3694687A (https=)
JP (1) JPS534388B1 (https=)
CA (1) CA940996A (https=)
DE (1) DE2140523A1 (https=)
FR (1) FR2104183A5 (https=)
GB (1) GB1330366A (https=)
NL (1) NL7110514A (https=)
SE (1) SE374619B (https=)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3010815C2 (de) * 1980-03-20 1982-08-19 Siemens AG, 1000 Berlin und 8000 München Hochstrom-Elektronenquelle
CA1183570A (en) * 1982-12-23 1985-03-05 Her Majesty In Right Of Canada As Represented By The Atomic Energy Of Ca Nada Limited Off-axis electron gun
US6288401B1 (en) 1999-07-30 2001-09-11 Etec Systems, Inc. Electrostatic alignment of a charged particle beam
EP1530229B1 (en) * 2003-11-04 2012-04-04 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Beam optical component for charged particle beams
WO2011046897A1 (en) 2009-10-12 2011-04-21 Perkin Elmer Health Sciences, Inc. Assemblies for ion and electron sources and methods of use
US20240312758A1 (en) * 2021-06-18 2024-09-19 Asml Netherlands B.V. System and method for adjusting beam current using a feedback loop in charged particle systems

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3267322A (en) * 1961-02-23 1966-08-16 Varian Associates Frequency stable temperature compensated electron tube
US3278781A (en) * 1963-08-21 1966-10-11 Fairchild Camera Instr Co Storage tube flood gun with segmented anode
US3358174A (en) * 1964-12-18 1967-12-12 Gen Electric Electron gun having a segmented control electrode
NL160428C (nl) * 1968-02-13 1979-10-15 Philips Nv Beeldopneeminrichting met een beeldopneembuis en beeldop- neembuis voor een dergelijke inrichting.

Also Published As

Publication number Publication date
GB1330366A (en) 1973-09-19
US3694687A (en) 1972-09-26
NL7110514A (https=) 1972-02-15
FR2104183A5 (https=) 1972-04-14
CA940996A (en) 1974-01-29
JPS534388B1 (https=) 1978-02-16
SE374619B (https=) 1975-03-10

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