GB1330366A - Electron guns - Google Patents

Electron guns

Info

Publication number
GB1330366A
GB1330366A GB3394471A GB3394471A GB1330366A GB 1330366 A GB1330366 A GB 1330366A GB 3394471 A GB3394471 A GB 3394471A GB 3394471 A GB3394471 A GB 3394471A GB 1330366 A GB1330366 A GB 1330366A
Authority
GB
United Kingdom
Prior art keywords
segments
grid
inch
anode
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB3394471A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CBS Broadcasting Inc
Original Assignee
Columbia Broadcasting System Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Columbia Broadcasting System Inc filed Critical Columbia Broadcasting System Inc
Publication of GB1330366A publication Critical patent/GB1330366A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/063—Geometrical arrangement of electrodes for beam-forming
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements common to two or more basic types of discharge tubes or lamps
    • H01J3/10—Arrangements for centring ray or beam
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/065—Construction of guns or parts thereof

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
GB3394471A 1970-08-12 1971-07-20 Electron guns Expired GB1330366A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US6322670A 1970-08-12 1970-08-12

Publications (1)

Publication Number Publication Date
GB1330366A true GB1330366A (en) 1973-09-19

Family

ID=22047803

Family Applications (1)

Application Number Title Priority Date Filing Date
GB3394471A Expired GB1330366A (en) 1970-08-12 1971-07-20 Electron guns

Country Status (8)

Country Link
US (1) US3694687A (https=)
JP (1) JPS534388B1 (https=)
CA (1) CA940996A (https=)
DE (1) DE2140523A1 (https=)
FR (1) FR2104183A5 (https=)
GB (1) GB1330366A (https=)
NL (1) NL7110514A (https=)
SE (1) SE374619B (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0036618A1 (de) * 1980-03-20 1981-09-30 Siemens Aktiengesellschaft Hochstrom-Elektronenquelle

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1183570A (en) * 1982-12-23 1985-03-05 Her Majesty In Right Of Canada As Represented By The Atomic Energy Of Ca Nada Limited Off-axis electron gun
US6288401B1 (en) 1999-07-30 2001-09-11 Etec Systems, Inc. Electrostatic alignment of a charged particle beam
EP1530229B1 (en) * 2003-11-04 2012-04-04 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Beam optical component for charged particle beams
WO2011046897A1 (en) 2009-10-12 2011-04-21 Perkin Elmer Health Sciences, Inc. Assemblies for ion and electron sources and methods of use
US20240312758A1 (en) * 2021-06-18 2024-09-19 Asml Netherlands B.V. System and method for adjusting beam current using a feedback loop in charged particle systems

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3267322A (en) * 1961-02-23 1966-08-16 Varian Associates Frequency stable temperature compensated electron tube
US3278781A (en) * 1963-08-21 1966-10-11 Fairchild Camera Instr Co Storage tube flood gun with segmented anode
US3358174A (en) * 1964-12-18 1967-12-12 Gen Electric Electron gun having a segmented control electrode
NL160428C (nl) * 1968-02-13 1979-10-15 Philips Nv Beeldopneeminrichting met een beeldopneembuis en beeldop- neembuis voor een dergelijke inrichting.

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0036618A1 (de) * 1980-03-20 1981-09-30 Siemens Aktiengesellschaft Hochstrom-Elektronenquelle

Also Published As

Publication number Publication date
US3694687A (en) 1972-09-26
NL7110514A (https=) 1972-02-15
FR2104183A5 (https=) 1972-04-14
CA940996A (en) 1974-01-29
DE2140523A1 (de) 1972-02-17
JPS534388B1 (https=) 1978-02-16
SE374619B (https=) 1975-03-10

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PLNP Patent lapsed through nonpayment of renewal fees