NL7110514A - - Google Patents
Info
- Publication number
- NL7110514A NL7110514A NL7110514A NL7110514A NL7110514A NL 7110514 A NL7110514 A NL 7110514A NL 7110514 A NL7110514 A NL 7110514A NL 7110514 A NL7110514 A NL 7110514A NL 7110514 A NL7110514 A NL 7110514A
- Authority
- NL
- Netherlands
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/063—Geometrical arrangement of electrodes for beam-forming
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J3/00—Details of electron-optical or ion-optical arrangements common to two or more basic types of discharge tubes or lamps
- H01J3/10—Arrangements for centring ray or beam
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/065—Construction of guns or parts thereof
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US6322670A | 1970-08-12 | 1970-08-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| NL7110514A true NL7110514A (https=) | 1972-02-15 |
Family
ID=22047803
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NL7110514A NL7110514A (https=) | 1970-08-12 | 1971-07-29 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US3694687A (https=) |
| JP (1) | JPS534388B1 (https=) |
| CA (1) | CA940996A (https=) |
| DE (1) | DE2140523A1 (https=) |
| FR (1) | FR2104183A5 (https=) |
| GB (1) | GB1330366A (https=) |
| NL (1) | NL7110514A (https=) |
| SE (1) | SE374619B (https=) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3010815C2 (de) * | 1980-03-20 | 1982-08-19 | Siemens AG, 1000 Berlin und 8000 München | Hochstrom-Elektronenquelle |
| CA1183570A (en) * | 1982-12-23 | 1985-03-05 | Her Majesty In Right Of Canada As Represented By The Atomic Energy Of Ca Nada Limited | Off-axis electron gun |
| US6288401B1 (en) | 1999-07-30 | 2001-09-11 | Etec Systems, Inc. | Electrostatic alignment of a charged particle beam |
| EP1530229B1 (en) * | 2003-11-04 | 2012-04-04 | ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | Beam optical component for charged particle beams |
| WO2011046897A1 (en) | 2009-10-12 | 2011-04-21 | Perkin Elmer Health Sciences, Inc. | Assemblies for ion and electron sources and methods of use |
| US20240312758A1 (en) * | 2021-06-18 | 2024-09-19 | Asml Netherlands B.V. | System and method for adjusting beam current using a feedback loop in charged particle systems |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3267322A (en) * | 1961-02-23 | 1966-08-16 | Varian Associates | Frequency stable temperature compensated electron tube |
| US3278781A (en) * | 1963-08-21 | 1966-10-11 | Fairchild Camera Instr Co | Storage tube flood gun with segmented anode |
| US3358174A (en) * | 1964-12-18 | 1967-12-12 | Gen Electric | Electron gun having a segmented control electrode |
| NL160428C (nl) * | 1968-02-13 | 1979-10-15 | Philips Nv | Beeldopneeminrichting met een beeldopneembuis en beeldop- neembuis voor een dergelijke inrichting. |
-
1970
- 1970-08-12 US US63226A patent/US3694687A/en not_active Expired - Lifetime
-
1971
- 1971-07-20 GB GB3394471A patent/GB1330366A/en not_active Expired
- 1971-07-29 CA CA119,393A patent/CA940996A/en not_active Expired
- 1971-07-29 NL NL7110514A patent/NL7110514A/xx unknown
- 1971-08-10 FR FR7129228A patent/FR2104183A5/fr not_active Expired
- 1971-08-11 SE SE7110234A patent/SE374619B/xx unknown
- 1971-08-11 JP JP6035371A patent/JPS534388B1/ja active Pending
- 1971-08-12 DE DE19712140523 patent/DE2140523A1/de active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| GB1330366A (en) | 1973-09-19 |
| US3694687A (en) | 1972-09-26 |
| FR2104183A5 (https=) | 1972-04-14 |
| CA940996A (en) | 1974-01-29 |
| DE2140523A1 (de) | 1972-02-17 |
| JPS534388B1 (https=) | 1978-02-16 |
| SE374619B (https=) | 1975-03-10 |