FR2104183A5 - - Google Patents

Info

Publication number
FR2104183A5
FR2104183A5 FR7129228A FR7129228A FR2104183A5 FR 2104183 A5 FR2104183 A5 FR 2104183A5 FR 7129228 A FR7129228 A FR 7129228A FR 7129228 A FR7129228 A FR 7129228A FR 2104183 A5 FR2104183 A5 FR 2104183A5
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7129228A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CBS Broadcasting Inc
Original Assignee
Columbia Broadcasting System Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Columbia Broadcasting System Inc filed Critical Columbia Broadcasting System Inc
Application granted granted Critical
Publication of FR2104183A5 publication Critical patent/FR2104183A5/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/063—Geometrical arrangement of electrodes for beam-forming
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/10—Arrangements for centring ray or beam
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/065—Construction of guns or parts thereof

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
FR7129228A 1970-08-12 1971-08-10 Expired FR2104183A5 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US6322670A 1970-08-12 1970-08-12

Publications (1)

Publication Number Publication Date
FR2104183A5 true FR2104183A5 (fr) 1972-04-14

Family

ID=22047803

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7129228A Expired FR2104183A5 (fr) 1970-08-12 1971-08-10

Country Status (8)

Country Link
US (1) US3694687A (fr)
JP (1) JPS534388B1 (fr)
CA (1) CA940996A (fr)
DE (1) DE2140523A1 (fr)
FR (1) FR2104183A5 (fr)
GB (1) GB1330366A (fr)
NL (1) NL7110514A (fr)
SE (1) SE374619B (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3010815C2 (de) * 1980-03-20 1982-08-19 Siemens AG, 1000 Berlin und 8000 München Hochstrom-Elektronenquelle
CA1183570A (fr) * 1982-12-23 1985-03-05 Her Majesty In Right Of Canada As Represented By The Atomic Energy Of Ca Nada Limited Canon electronique decentre
US6288401B1 (en) * 1999-07-30 2001-09-11 Etec Systems, Inc. Electrostatic alignment of a charged particle beam
EP1530229B1 (fr) * 2003-11-04 2012-04-04 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Composanté optique pour appareil à faisceau de particules
US8916821B2 (en) * 2009-10-12 2014-12-23 Perkinelmer Health Sciences, Inc. Assemblies for ion and electron sources and methods of use

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3267322A (en) * 1961-02-23 1966-08-16 Varian Associates Frequency stable temperature compensated electron tube
US3278781A (en) * 1963-08-21 1966-10-11 Fairchild Camera Instr Co Storage tube flood gun with segmented anode
US3358174A (en) * 1964-12-18 1967-12-12 Gen Electric Electron gun having a segmented control electrode
NL160428C (nl) * 1968-02-13 1979-10-15 Philips Nv Beeldopneeminrichting met een beeldopneembuis en beeldop- neembuis voor een dergelijke inrichting.

Also Published As

Publication number Publication date
NL7110514A (fr) 1972-02-15
US3694687A (en) 1972-09-26
CA940996A (en) 1974-01-29
JPS534388B1 (fr) 1978-02-16
GB1330366A (en) 1973-09-19
SE374619B (fr) 1975-03-10
DE2140523A1 (de) 1972-02-17

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Legal Events

Date Code Title Description
ST Notification of lapse