SE374619B - - Google Patents

Info

Publication number
SE374619B
SE374619B SE7110234A SE1023471A SE374619B SE 374619 B SE374619 B SE 374619B SE 7110234 A SE7110234 A SE 7110234A SE 1023471 A SE1023471 A SE 1023471A SE 374619 B SE374619 B SE 374619B
Authority
SE
Sweden
Application number
SE7110234A
Inventor
Jr W E Glenn
Original Assignee
Cbs Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cbs Inc filed Critical Cbs Inc
Publication of SE374619B publication Critical patent/SE374619B/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/063—Geometrical arrangement of electrodes for beam-forming
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/10—Arrangements for centring ray or beam
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/065—Construction of guns or parts thereof

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
SE7110234A 1970-08-12 1971-08-11 SE374619B (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US6322670A 1970-08-12 1970-08-12

Publications (1)

Publication Number Publication Date
SE374619B true SE374619B (fr) 1975-03-10

Family

ID=22047803

Family Applications (1)

Application Number Title Priority Date Filing Date
SE7110234A SE374619B (fr) 1970-08-12 1971-08-11

Country Status (8)

Country Link
US (1) US3694687A (fr)
JP (1) JPS534388B1 (fr)
CA (1) CA940996A (fr)
DE (1) DE2140523A1 (fr)
FR (1) FR2104183A5 (fr)
GB (1) GB1330366A (fr)
NL (1) NL7110514A (fr)
SE (1) SE374619B (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3010815C2 (de) * 1980-03-20 1982-08-19 Siemens AG, 1000 Berlin und 8000 München Hochstrom-Elektronenquelle
CA1183570A (fr) * 1982-12-23 1985-03-05 Her Majesty In Right Of Canada As Represented By The Atomic Energy Of Ca Nada Limited Canon electronique decentre
US6288401B1 (en) * 1999-07-30 2001-09-11 Etec Systems, Inc. Electrostatic alignment of a charged particle beam
EP1530229B1 (fr) * 2003-11-04 2012-04-04 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Composanté optique pour appareil à faisceau de particules
EP2489059B1 (fr) 2009-10-12 2019-12-04 PerkinElmer Health Sciences, Inc. Ensembles pour sources d'ions et d'électrons

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3267322A (en) * 1961-02-23 1966-08-16 Varian Associates Frequency stable temperature compensated electron tube
US3278781A (en) * 1963-08-21 1966-10-11 Fairchild Camera Instr Co Storage tube flood gun with segmented anode
US3358174A (en) * 1964-12-18 1967-12-12 Gen Electric Electron gun having a segmented control electrode
NL160428C (nl) * 1968-02-13 1979-10-15 Philips Nv Beeldopneeminrichting met een beeldopneembuis en beeldop- neembuis voor een dergelijke inrichting.

Also Published As

Publication number Publication date
FR2104183A5 (fr) 1972-04-14
DE2140523A1 (de) 1972-02-17
JPS534388B1 (fr) 1978-02-16
GB1330366A (en) 1973-09-19
NL7110514A (fr) 1972-02-15
US3694687A (en) 1972-09-26
CA940996A (en) 1974-01-29

Similar Documents

Publication Publication Date Title
ATA96471A (fr)
AU1146470A (fr)
AU2044470A (fr)
AU1473870A (fr)
AU1326870A (fr)
AU2130570A (fr)
AU2085370A (fr)
AU2017870A (fr)
AU1833270A (fr)
AU1716970A (fr)
AU1517670A (fr)
AU1336970A (fr)
AU1591370A (fr)
AU1841070A (fr)
AU2144270A (fr)
AU2131570A (fr)
AU2130770A (fr)
AU1328670A (fr)
AU1277070A (fr)
AU1343870A (fr)
AU1247570A (fr)
AU2119370A (fr)
AU1235770A (fr)
AU1581370A (fr)
AU1189670A (fr)