DE2124979C2 - Kapazitiver Druckfühler - Google Patents
Kapazitiver DruckfühlerInfo
- Publication number
- DE2124979C2 DE2124979C2 DE2124979A DE2124979A DE2124979C2 DE 2124979 C2 DE2124979 C2 DE 2124979C2 DE 2124979 A DE2124979 A DE 2124979A DE 2124979 A DE2124979 A DE 2124979A DE 2124979 C2 DE2124979 C2 DE 2124979C2
- Authority
- DE
- Germany
- Prior art keywords
- capacitor plate
- bearing block
- tube
- layer
- pressure sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000003990 capacitor Substances 0.000 claims description 36
- 239000004020 conductor Substances 0.000 claims description 21
- 239000012528 membrane Substances 0.000 claims description 16
- 239000007787 solid Substances 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 2
- 230000002093 peripheral effect Effects 0.000 claims description 2
- 239000011810 insulating material Substances 0.000 claims 3
- 229910052751 metal Inorganic materials 0.000 description 18
- 239000002184 metal Substances 0.000 description 18
- 229910010293 ceramic material Inorganic materials 0.000 description 8
- 239000011521 glass Substances 0.000 description 6
- 239000011248 coating agent Substances 0.000 description 5
- 238000000576 coating method Methods 0.000 description 5
- 238000010276 construction Methods 0.000 description 5
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 5
- 239000000919 ceramic Substances 0.000 description 4
- 238000001465 metallisation Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000005476 soldering Methods 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 1
- 238000009530 blood pressure measurement Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000012774 insulation material Substances 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 229910000595 mu-metal Inorganic materials 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/43—Electric condenser making
- Y10T29/435—Solid dielectric type
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49005—Acoustic transducer
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US3933670A | 1970-05-21 | 1970-05-21 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE2124979A1 DE2124979A1 (de) | 1971-12-02 |
| DE2124979C2 true DE2124979C2 (de) | 1984-06-14 |
Family
ID=21904931
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE2124979A Expired DE2124979C2 (de) | 1970-05-21 | 1971-05-19 | Kapazitiver Druckfühler |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US3619742A (enExample) |
| JP (1) | JPS5518853B1 (enExample) |
| CA (1) | CA936252A (enExample) |
| DE (1) | DE2124979C2 (enExample) |
| FR (1) | FR2091788A5 (enExample) |
| GB (1) | GB1335128A (enExample) |
Families Citing this family (66)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3948102A (en) * | 1974-07-31 | 1976-04-06 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Trielectrode capacitive pressure transducer |
| US3993939A (en) * | 1975-01-07 | 1976-11-23 | The Bendix Corporation | Pressure variable capacitor |
| US3968694A (en) * | 1975-04-21 | 1976-07-13 | Geophysical Research Corporation | Gauge for remotely indicating the pressure of a subterranean formation |
| US4186749A (en) * | 1977-05-12 | 1980-02-05 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Induction powered biological radiosonde |
| US4178621A (en) * | 1978-01-23 | 1979-12-11 | Motorola, Inc. | Electromechanical pressure transducer |
| US4277814A (en) * | 1979-09-04 | 1981-07-07 | Ford Motor Company | Semiconductor variable capacitance pressure transducer assembly |
| US4683757A (en) * | 1986-03-24 | 1987-08-04 | Motorola, Inc. | Axial pressure sensor |
| US4732042A (en) * | 1986-04-22 | 1988-03-22 | Motorola Inc. | Cast membrane protected pressure sensor |
| FR2599147B1 (fr) * | 1986-05-23 | 1989-03-31 | Otic Fischer & Porter | Cellule de contention d'un capteur de pression notamment en ceramique |
| EP0333714A1 (en) * | 1987-09-08 | 1989-09-27 | Panex Corporation | Pressure sensor system |
| SE461300B (sv) * | 1988-05-17 | 1990-01-29 | Hydrolab Ab | Tryckmaetare |
| US4972717A (en) * | 1989-09-18 | 1990-11-27 | Texas Instruments Incorporated | Pressure transducer apparatus and method for making same |
| DE4213857C2 (de) * | 1992-04-27 | 1995-10-19 | Endress Hauser Gmbh Co | Vorrichtung zum Messen von Druck und Differenzdruck |
| FI99267C (fi) * | 1992-12-29 | 1998-02-10 | Nokia Kondensaattorit Oy | Sisäisellä suojauksella varustettu kondensaattori |
| US5444901A (en) * | 1993-10-25 | 1995-08-29 | United Technologies Corporation | Method of manufacturing silicon pressure sensor having dual elements simultaneously mounted |
| SE516716C2 (sv) * | 1994-04-14 | 2002-02-19 | Mks Instr | Tryckgivare för mätning av trycket hos en fluid |
| DE4445457A1 (de) * | 1994-12-20 | 1996-07-04 | Heidelberger Druckmasch Ag | Verfahren zum Aufbringen eines Abstandstoffes auf einen Druckbogen und zur Durchführung des Verfahrens ausgerüstete Bogendruckmaschine |
| US5911162A (en) * | 1997-06-20 | 1999-06-08 | Mks Instruments, Inc. | Capacitive pressure transducer with improved electrode support |
| US5965821A (en) * | 1997-07-03 | 1999-10-12 | Mks Instruments, Inc. | Pressure sensor |
| US20040099061A1 (en) | 1997-12-22 | 2004-05-27 | Mks Instruments | Pressure sensor for detecting small pressure differences and low pressures |
| WO1999034184A1 (de) * | 1997-12-23 | 1999-07-08 | Unaxis Trading Ag | Kapazitive vakuummesszelle |
| DE59804701D1 (de) * | 1997-12-23 | 2002-08-08 | Unaxis Balzers Ag | Membrane für eine kapazitive vakuummesszelle |
| US6568274B1 (en) * | 1998-02-04 | 2003-05-27 | Mks Instruments, Inc. | Capacitive based pressure sensor design |
| US6029525A (en) * | 1998-02-04 | 2000-02-29 | Mks Instruments, Inc. | Capacitive based pressure sensor design |
| US6453749B1 (en) * | 1999-10-28 | 2002-09-24 | Motorola, Inc. | Physical sensor component |
| EP1309840B1 (en) * | 2000-08-11 | 2010-06-09 | MKS Instruments, Inc. | Capacitive based pressure sensor design |
| US6772640B1 (en) | 2000-10-10 | 2004-08-10 | Mks Instruments, Inc. | Multi-temperature heater for use with pressure transducers |
| US6769319B2 (en) | 2001-07-09 | 2004-08-03 | Freescale Semiconductor, Inc. | Component having a filter |
| US6993973B2 (en) | 2003-05-16 | 2006-02-07 | Mks Instruments, Inc. | Contaminant deposition control baffle for a capacitive pressure transducer |
| US7201057B2 (en) | 2004-09-30 | 2007-04-10 | Mks Instruments, Inc. | High-temperature reduced size manometer |
| US7137301B2 (en) | 2004-10-07 | 2006-11-21 | Mks Instruments, Inc. | Method and apparatus for forming a reference pressure within a chamber of a capacitance sensor |
| US7141447B2 (en) | 2004-10-07 | 2006-11-28 | Mks Instruments, Inc. | Method of forming a seal between a housing and a diaphragm of a capacitance sensor |
| US7204150B2 (en) * | 2005-01-14 | 2007-04-17 | Mks Instruments, Inc. | Turbo sump for use with capacitive pressure sensor |
| US7775966B2 (en) | 2005-02-24 | 2010-08-17 | Ethicon Endo-Surgery, Inc. | Non-invasive pressure measurement in a fluid adjustable restrictive device |
| US7927270B2 (en) | 2005-02-24 | 2011-04-19 | Ethicon Endo-Surgery, Inc. | External mechanical pressure sensor for gastric band pressure measurements |
| US8016744B2 (en) | 2005-02-24 | 2011-09-13 | Ethicon Endo-Surgery, Inc. | External pressure-based gastric band adjustment system and method |
| US7699770B2 (en) | 2005-02-24 | 2010-04-20 | Ethicon Endo-Surgery, Inc. | Device for non-invasive measurement of fluid pressure in an adjustable restriction device |
| US8066629B2 (en) | 2005-02-24 | 2011-11-29 | Ethicon Endo-Surgery, Inc. | Apparatus for adjustment and sensing of gastric band pressure |
| US7658196B2 (en) | 2005-02-24 | 2010-02-09 | Ethicon Endo-Surgery, Inc. | System and method for determining implanted device orientation |
| US7775215B2 (en) | 2005-02-24 | 2010-08-17 | Ethicon Endo-Surgery, Inc. | System and method for determining implanted device positioning and obtaining pressure data |
| US7400042B2 (en) * | 2005-05-03 | 2008-07-15 | Rosemount Aerospace Inc. | Substrate with adhesive bonding metallization with diffusion barrier |
| US7628309B1 (en) | 2005-05-03 | 2009-12-08 | Rosemount Aerospace Inc. | Transient liquid phase eutectic bonding |
| US20070013014A1 (en) * | 2005-05-03 | 2007-01-18 | Shuwen Guo | High temperature resistant solid state pressure sensor |
| US7538401B2 (en) | 2005-05-03 | 2009-05-26 | Rosemount Aerospace Inc. | Transducer for use in harsh environments |
| US8870742B2 (en) | 2006-04-06 | 2014-10-28 | Ethicon Endo-Surgery, Inc. | GUI for an implantable restriction device and a data logger |
| US8152710B2 (en) | 2006-04-06 | 2012-04-10 | Ethicon Endo-Surgery, Inc. | Physiological parameter analysis for an implantable restriction device and a data logger |
| US8187163B2 (en) | 2007-12-10 | 2012-05-29 | Ethicon Endo-Surgery, Inc. | Methods for implanting a gastric restriction device |
| US8100870B2 (en) | 2007-12-14 | 2012-01-24 | Ethicon Endo-Surgery, Inc. | Adjustable height gastric restriction devices and methods |
| US8142452B2 (en) | 2007-12-27 | 2012-03-27 | Ethicon Endo-Surgery, Inc. | Controlling pressure in adjustable restriction devices |
| US8377079B2 (en) | 2007-12-27 | 2013-02-19 | Ethicon Endo-Surgery, Inc. | Constant force mechanisms for regulating restriction devices |
| EP2075563A3 (en) * | 2007-12-31 | 2011-10-19 | Rosemount Aerospace Inc. | High temperature capacitive static/dynamic pressure sensors |
| US8192350B2 (en) | 2008-01-28 | 2012-06-05 | Ethicon Endo-Surgery, Inc. | Methods and devices for measuring impedance in a gastric restriction system |
| US8337389B2 (en) | 2008-01-28 | 2012-12-25 | Ethicon Endo-Surgery, Inc. | Methods and devices for diagnosing performance of a gastric restriction system |
| US8591395B2 (en) | 2008-01-28 | 2013-11-26 | Ethicon Endo-Surgery, Inc. | Gastric restriction device data handling devices and methods |
| US8221439B2 (en) | 2008-02-07 | 2012-07-17 | Ethicon Endo-Surgery, Inc. | Powering implantable restriction systems using kinetic motion |
| US7844342B2 (en) | 2008-02-07 | 2010-11-30 | Ethicon Endo-Surgery, Inc. | Powering implantable restriction systems using light |
| US8114345B2 (en) | 2008-02-08 | 2012-02-14 | Ethicon Endo-Surgery, Inc. | System and method of sterilizing an implantable medical device |
| US8057492B2 (en) | 2008-02-12 | 2011-11-15 | Ethicon Endo-Surgery, Inc. | Automatically adjusting band system with MEMS pump |
| US8591532B2 (en) | 2008-02-12 | 2013-11-26 | Ethicon Endo-Sugery, Inc. | Automatically adjusting band system |
| US8034065B2 (en) | 2008-02-26 | 2011-10-11 | Ethicon Endo-Surgery, Inc. | Controlling pressure in adjustable restriction devices |
| US8233995B2 (en) | 2008-03-06 | 2012-07-31 | Ethicon Endo-Surgery, Inc. | System and method of aligning an implantable antenna |
| US8187162B2 (en) | 2008-03-06 | 2012-05-29 | Ethicon Endo-Surgery, Inc. | Reorientation port |
| US7819014B1 (en) * | 2009-04-23 | 2010-10-26 | Rosemount Inc. | Capacitive gage pressure sensor with vacuum dielectric |
| US8704538B2 (en) * | 2010-07-01 | 2014-04-22 | Mks Instruments, Inc. | Capacitance sensors |
| CN106323415B (zh) * | 2016-08-18 | 2023-05-09 | 四川泛华航空仪表电器有限公司 | 电容式油量传感器电容值调整方法 |
| US11940336B2 (en) * | 2021-03-26 | 2024-03-26 | Sporian Microsystems, Inc. | Driven-shield capacitive pressure sensor |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3027769A (en) * | 1959-03-03 | 1962-04-03 | Grant W Coon | Diaphragm type capacitance transducer |
| US3195028A (en) * | 1961-02-13 | 1965-07-13 | Rosemount Eng Co Ltd | Capacitance pressure gage |
-
1970
- 1970-05-21 US US39336A patent/US3619742A/en not_active Expired - Lifetime
-
1971
- 1971-05-11 GB GB1422871*[A patent/GB1335128A/en not_active Expired
- 1971-05-12 CA CA112817A patent/CA936252A/en not_active Expired
- 1971-05-19 FR FR7118159A patent/FR2091788A5/fr not_active Expired
- 1971-05-19 DE DE2124979A patent/DE2124979C2/de not_active Expired
- 1971-05-21 JP JP3416771A patent/JPS5518853B1/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| FR2091788A5 (enExample) | 1972-01-14 |
| CA936252A (en) | 1973-10-30 |
| DE2124979A1 (de) | 1971-12-02 |
| US3619742A (en) | 1971-11-09 |
| GB1335128A (en) | 1973-10-24 |
| JPS5518853B1 (enExample) | 1980-05-22 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OD | Request for examination | ||
| 8125 | Change of the main classification |
Ipc: G01L 9/06 |
|
| 8181 | Inventor (new situation) |
Free format text: RUD JUN., STANLEY EDWARD, HOPKINS, MINN., US |
|
| D2 | Grant after examination | ||
| 8364 | No opposition during term of opposition | ||
| 8339 | Ceased/non-payment of the annual fee |