CA936252A - Shielded capacitance pressure sensor - Google Patents

Shielded capacitance pressure sensor

Info

Publication number
CA936252A
CA936252A CA112817A CA112817A CA936252A CA 936252 A CA936252 A CA 936252A CA 112817 A CA112817 A CA 112817A CA 112817 A CA112817 A CA 112817A CA 936252 A CA936252 A CA 936252A
Authority
CA
Canada
Prior art keywords
pressure sensor
capacitance pressure
shielded
shielded capacitance
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA112817A
Other languages
English (en)
Other versions
CA112817S (fr
Inventor
Stanley E. Rud, Jr.
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Emerson Process Management Ltd
Original Assignee
Rosemount Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rosemount Engineering Co Ltd filed Critical Rosemount Engineering Co Ltd
Application granted granted Critical
Publication of CA936252A publication Critical patent/CA936252A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/43—Electric condenser making
    • Y10T29/435—Solid dielectric type
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49005—Acoustic transducer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
CA112817A 1970-05-21 1971-05-12 Shielded capacitance pressure sensor Expired CA936252A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US3933670A 1970-05-21 1970-05-21

Publications (1)

Publication Number Publication Date
CA936252A true CA936252A (en) 1973-10-30

Family

ID=21904931

Family Applications (1)

Application Number Title Priority Date Filing Date
CA112817A Expired CA936252A (en) 1970-05-21 1971-05-12 Shielded capacitance pressure sensor

Country Status (6)

Country Link
US (1) US3619742A (enExample)
JP (1) JPS5518853B1 (enExample)
CA (1) CA936252A (enExample)
DE (1) DE2124979C2 (enExample)
FR (1) FR2091788A5 (enExample)
GB (1) GB1335128A (enExample)

Families Citing this family (66)

* Cited by examiner, † Cited by third party
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US3948102A (en) * 1974-07-31 1976-04-06 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Trielectrode capacitive pressure transducer
US3993939A (en) * 1975-01-07 1976-11-23 The Bendix Corporation Pressure variable capacitor
US3968694A (en) * 1975-04-21 1976-07-13 Geophysical Research Corporation Gauge for remotely indicating the pressure of a subterranean formation
US4186749A (en) * 1977-05-12 1980-02-05 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Induction powered biological radiosonde
US4178621A (en) * 1978-01-23 1979-12-11 Motorola, Inc. Electromechanical pressure transducer
US4277814A (en) * 1979-09-04 1981-07-07 Ford Motor Company Semiconductor variable capacitance pressure transducer assembly
US4683757A (en) * 1986-03-24 1987-08-04 Motorola, Inc. Axial pressure sensor
US4732042A (en) * 1986-04-22 1988-03-22 Motorola Inc. Cast membrane protected pressure sensor
FR2599147B1 (fr) * 1986-05-23 1989-03-31 Otic Fischer & Porter Cellule de contention d'un capteur de pression notamment en ceramique
EP0333714A1 (en) * 1987-09-08 1989-09-27 Panex Corporation Pressure sensor system
SE461300B (sv) * 1988-05-17 1990-01-29 Hydrolab Ab Tryckmaetare
US4972717A (en) * 1989-09-18 1990-11-27 Texas Instruments Incorporated Pressure transducer apparatus and method for making same
DE4213857C2 (de) * 1992-04-27 1995-10-19 Endress Hauser Gmbh Co Vorrichtung zum Messen von Druck und Differenzdruck
FI99267C (fi) * 1992-12-29 1998-02-10 Nokia Kondensaattorit Oy Sisäisellä suojauksella varustettu kondensaattori
US5444901A (en) * 1993-10-25 1995-08-29 United Technologies Corporation Method of manufacturing silicon pressure sensor having dual elements simultaneously mounted
SE516716C2 (sv) * 1994-04-14 2002-02-19 Mks Instr Tryckgivare för mätning av trycket hos en fluid
DE4445457A1 (de) * 1994-12-20 1996-07-04 Heidelberger Druckmasch Ag Verfahren zum Aufbringen eines Abstandstoffes auf einen Druckbogen und zur Durchführung des Verfahrens ausgerüstete Bogendruckmaschine
US5911162A (en) * 1997-06-20 1999-06-08 Mks Instruments, Inc. Capacitive pressure transducer with improved electrode support
US5965821A (en) * 1997-07-03 1999-10-12 Mks Instruments, Inc. Pressure sensor
US20040099061A1 (en) 1997-12-22 2004-05-27 Mks Instruments Pressure sensor for detecting small pressure differences and low pressures
WO1999034184A1 (de) * 1997-12-23 1999-07-08 Unaxis Trading Ag Kapazitive vakuummesszelle
DE59804701D1 (de) * 1997-12-23 2002-08-08 Unaxis Balzers Ag Membrane für eine kapazitive vakuummesszelle
US6568274B1 (en) * 1998-02-04 2003-05-27 Mks Instruments, Inc. Capacitive based pressure sensor design
US6029525A (en) * 1998-02-04 2000-02-29 Mks Instruments, Inc. Capacitive based pressure sensor design
US6453749B1 (en) * 1999-10-28 2002-09-24 Motorola, Inc. Physical sensor component
EP1309840B1 (en) * 2000-08-11 2010-06-09 MKS Instruments, Inc. Capacitive based pressure sensor design
US6772640B1 (en) 2000-10-10 2004-08-10 Mks Instruments, Inc. Multi-temperature heater for use with pressure transducers
US6769319B2 (en) 2001-07-09 2004-08-03 Freescale Semiconductor, Inc. Component having a filter
US6993973B2 (en) 2003-05-16 2006-02-07 Mks Instruments, Inc. Contaminant deposition control baffle for a capacitive pressure transducer
US7201057B2 (en) 2004-09-30 2007-04-10 Mks Instruments, Inc. High-temperature reduced size manometer
US7137301B2 (en) 2004-10-07 2006-11-21 Mks Instruments, Inc. Method and apparatus for forming a reference pressure within a chamber of a capacitance sensor
US7141447B2 (en) 2004-10-07 2006-11-28 Mks Instruments, Inc. Method of forming a seal between a housing and a diaphragm of a capacitance sensor
US7204150B2 (en) * 2005-01-14 2007-04-17 Mks Instruments, Inc. Turbo sump for use with capacitive pressure sensor
US7775966B2 (en) 2005-02-24 2010-08-17 Ethicon Endo-Surgery, Inc. Non-invasive pressure measurement in a fluid adjustable restrictive device
US7927270B2 (en) 2005-02-24 2011-04-19 Ethicon Endo-Surgery, Inc. External mechanical pressure sensor for gastric band pressure measurements
US8016744B2 (en) 2005-02-24 2011-09-13 Ethicon Endo-Surgery, Inc. External pressure-based gastric band adjustment system and method
US7699770B2 (en) 2005-02-24 2010-04-20 Ethicon Endo-Surgery, Inc. Device for non-invasive measurement of fluid pressure in an adjustable restriction device
US8066629B2 (en) 2005-02-24 2011-11-29 Ethicon Endo-Surgery, Inc. Apparatus for adjustment and sensing of gastric band pressure
US7658196B2 (en) 2005-02-24 2010-02-09 Ethicon Endo-Surgery, Inc. System and method for determining implanted device orientation
US7775215B2 (en) 2005-02-24 2010-08-17 Ethicon Endo-Surgery, Inc. System and method for determining implanted device positioning and obtaining pressure data
US7400042B2 (en) * 2005-05-03 2008-07-15 Rosemount Aerospace Inc. Substrate with adhesive bonding metallization with diffusion barrier
US7628309B1 (en) 2005-05-03 2009-12-08 Rosemount Aerospace Inc. Transient liquid phase eutectic bonding
US20070013014A1 (en) * 2005-05-03 2007-01-18 Shuwen Guo High temperature resistant solid state pressure sensor
US7538401B2 (en) 2005-05-03 2009-05-26 Rosemount Aerospace Inc. Transducer for use in harsh environments
US8870742B2 (en) 2006-04-06 2014-10-28 Ethicon Endo-Surgery, Inc. GUI for an implantable restriction device and a data logger
US8152710B2 (en) 2006-04-06 2012-04-10 Ethicon Endo-Surgery, Inc. Physiological parameter analysis for an implantable restriction device and a data logger
US8187163B2 (en) 2007-12-10 2012-05-29 Ethicon Endo-Surgery, Inc. Methods for implanting a gastric restriction device
US8100870B2 (en) 2007-12-14 2012-01-24 Ethicon Endo-Surgery, Inc. Adjustable height gastric restriction devices and methods
US8142452B2 (en) 2007-12-27 2012-03-27 Ethicon Endo-Surgery, Inc. Controlling pressure in adjustable restriction devices
US8377079B2 (en) 2007-12-27 2013-02-19 Ethicon Endo-Surgery, Inc. Constant force mechanisms for regulating restriction devices
EP2075563A3 (en) * 2007-12-31 2011-10-19 Rosemount Aerospace Inc. High temperature capacitive static/dynamic pressure sensors
US8192350B2 (en) 2008-01-28 2012-06-05 Ethicon Endo-Surgery, Inc. Methods and devices for measuring impedance in a gastric restriction system
US8337389B2 (en) 2008-01-28 2012-12-25 Ethicon Endo-Surgery, Inc. Methods and devices for diagnosing performance of a gastric restriction system
US8591395B2 (en) 2008-01-28 2013-11-26 Ethicon Endo-Surgery, Inc. Gastric restriction device data handling devices and methods
US8221439B2 (en) 2008-02-07 2012-07-17 Ethicon Endo-Surgery, Inc. Powering implantable restriction systems using kinetic motion
US7844342B2 (en) 2008-02-07 2010-11-30 Ethicon Endo-Surgery, Inc. Powering implantable restriction systems using light
US8114345B2 (en) 2008-02-08 2012-02-14 Ethicon Endo-Surgery, Inc. System and method of sterilizing an implantable medical device
US8057492B2 (en) 2008-02-12 2011-11-15 Ethicon Endo-Surgery, Inc. Automatically adjusting band system with MEMS pump
US8591532B2 (en) 2008-02-12 2013-11-26 Ethicon Endo-Sugery, Inc. Automatically adjusting band system
US8034065B2 (en) 2008-02-26 2011-10-11 Ethicon Endo-Surgery, Inc. Controlling pressure in adjustable restriction devices
US8233995B2 (en) 2008-03-06 2012-07-31 Ethicon Endo-Surgery, Inc. System and method of aligning an implantable antenna
US8187162B2 (en) 2008-03-06 2012-05-29 Ethicon Endo-Surgery, Inc. Reorientation port
US7819014B1 (en) * 2009-04-23 2010-10-26 Rosemount Inc. Capacitive gage pressure sensor with vacuum dielectric
US8704538B2 (en) * 2010-07-01 2014-04-22 Mks Instruments, Inc. Capacitance sensors
CN106323415B (zh) * 2016-08-18 2023-05-09 四川泛华航空仪表电器有限公司 电容式油量传感器电容值调整方法
US11940336B2 (en) * 2021-03-26 2024-03-26 Sporian Microsystems, Inc. Driven-shield capacitive pressure sensor

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3027769A (en) * 1959-03-03 1962-04-03 Grant W Coon Diaphragm type capacitance transducer
US3195028A (en) * 1961-02-13 1965-07-13 Rosemount Eng Co Ltd Capacitance pressure gage

Also Published As

Publication number Publication date
FR2091788A5 (enExample) 1972-01-14
DE2124979C2 (de) 1984-06-14
DE2124979A1 (de) 1971-12-02
US3619742A (en) 1971-11-09
GB1335128A (en) 1973-10-24
JPS5518853B1 (enExample) 1980-05-22

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