DE2050555C3 - Scheibe für eine Turbomolekularvakuumpumpe - Google Patents

Scheibe für eine Turbomolekularvakuumpumpe

Info

Publication number
DE2050555C3
DE2050555C3 DE2050555A DE2050555A DE2050555C3 DE 2050555 C3 DE2050555 C3 DE 2050555C3 DE 2050555 A DE2050555 A DE 2050555A DE 2050555 A DE2050555 A DE 2050555A DE 2050555 C3 DE2050555 C3 DE 2050555C3
Authority
DE
Germany
Prior art keywords
disk
disks
pump
disc
turbo
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE2050555A
Other languages
German (de)
English (en)
Other versions
DE2050555A1 (de
DE2050555B2 (de
Inventor
Otto Dipl.-Ing.Dr. Balzers Winkler (Liechtenstein)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers Hochvakuum 6000 Frankfurt GmbH
Original Assignee
Balzers Hochvakuum 6000 Frankfurt GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers Hochvakuum 6000 Frankfurt GmbH filed Critical Balzers Hochvakuum 6000 Frankfurt GmbH
Publication of DE2050555A1 publication Critical patent/DE2050555A1/de
Publication of DE2050555B2 publication Critical patent/DE2050555B2/de
Application granted granted Critical
Publication of DE2050555C3 publication Critical patent/DE2050555C3/de
Expired legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/02—Selection of particular materials
    • F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers
    • F04D29/544—Blade shapes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2230/00—Manufacture
    • F05D2230/50—Building or constructing in particular ways
    • F05D2230/54—Building or constructing in particular ways by sheet metal manufacturing

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
DE2050555A 1970-04-10 1970-10-15 Scheibe für eine Turbomolekularvakuumpumpe Expired DE2050555C3 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH540470A CH499019A (de) 1970-04-10 1970-04-10 Scheibe für eine Turbomolekular-Vakuumpumpe

Publications (3)

Publication Number Publication Date
DE2050555A1 DE2050555A1 (de) 1971-10-28
DE2050555B2 DE2050555B2 (de) 1973-08-09
DE2050555C3 true DE2050555C3 (de) 1974-03-14

Family

ID=4293012

Family Applications (1)

Application Number Title Priority Date Filing Date
DE2050555A Expired DE2050555C3 (de) 1970-04-10 1970-10-15 Scheibe für eine Turbomolekularvakuumpumpe

Country Status (5)

Country Link
CH (1) CH499019A (enExample)
DE (1) DE2050555C3 (enExample)
FR (1) FR2074450A5 (enExample)
GB (1) GB1275386A (enExample)
NL (1) NL141612B (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3507274A1 (de) * 1985-03-01 1986-09-04 Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh, 6334 Asslar Scheiben mit schaufeln hoher stabilitaet fuer turbomolekularpumpen
DE10052637B4 (de) * 2000-10-24 2021-03-11 Pfeiffer Vacuum Gmbh 16.02.2001 Scheiben für eine Turbomolekularpumpe
JP6241222B2 (ja) * 2013-01-22 2017-12-06 株式会社島津製作所 真空ポンプ
DE102013213256A1 (de) * 2013-07-05 2015-01-08 Oerlikon Leybold Vacuum Gmbh Statorscheibe
EP3034880B1 (de) * 2014-12-15 2019-10-16 Pfeiffer Vacuum Gmbh Rotoranordnung für eine vakuumpumpe und verfahren zur herstellung derselben

Also Published As

Publication number Publication date
DE2050555A1 (de) 1971-10-28
CH499019A (de) 1970-11-15
GB1275386A (en) 1972-05-24
NL7010096A (enExample) 1971-10-12
DE2050555B2 (de) 1973-08-09
FR2074450A5 (enExample) 1971-10-01
NL141612B (nl) 1974-03-15

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Legal Events

Date Code Title Description
C3 Grant after two publication steps (3rd publication)
E77 Valid patent as to the heymanns-index 1977
8339 Ceased/non-payment of the annual fee