DE204399T1 - Verfahren zum regenerieren eines permanganataetzbades. - Google Patents
Verfahren zum regenerieren eines permanganataetzbades.Info
- Publication number
- DE204399T1 DE204399T1 DE198686302335T DE86302335T DE204399T1 DE 204399 T1 DE204399 T1 DE 204399T1 DE 198686302335 T DE198686302335 T DE 198686302335T DE 86302335 T DE86302335 T DE 86302335T DE 204399 T1 DE204399 T1 DE 204399T1
- Authority
- DE
- Germany
- Prior art keywords
- inorganic
- oxidizing agent
- regenerating
- monopersulfate
- peroxydisulfate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims abstract 11
- 230000001172 regenerating effect Effects 0.000 title claims abstract 3
- 239000000203 mixture Substances 0.000 claims abstract 11
- XTEGARKTQYYJKE-UHFFFAOYSA-M Chlorate Chemical compound [O-]Cl(=O)=O XTEGARKTQYYJKE-UHFFFAOYSA-M 0.000 claims abstract 10
- WQYVRQLZKVEZGA-UHFFFAOYSA-N hypochlorite Chemical compound Cl[O-] WQYVRQLZKVEZGA-UHFFFAOYSA-N 0.000 claims abstract 10
- 239000007800 oxidant agent Substances 0.000 claims abstract 10
- JRKICGRDRMAZLK-UHFFFAOYSA-L peroxydisulfate Chemical compound [O-]S(=O)(=O)OOS([O-])(=O)=O JRKICGRDRMAZLK-UHFFFAOYSA-L 0.000 claims abstract 5
- SXDBWCPKPHAZSM-UHFFFAOYSA-M bromate Inorganic materials [O-]Br(=O)=O SXDBWCPKPHAZSM-UHFFFAOYSA-M 0.000 claims abstract 2
- SXDBWCPKPHAZSM-UHFFFAOYSA-N bromic acid Chemical compound OBr(=O)=O SXDBWCPKPHAZSM-UHFFFAOYSA-N 0.000 claims abstract 2
- 150000002500 ions Chemical class 0.000 claims abstract 2
- DMYOHQBLOZMDLP-UHFFFAOYSA-N 1-[2-(2-hydroxy-3-piperidin-1-ylpropoxy)phenyl]-3-phenylpropan-1-one Chemical compound C1CCCCN1CC(O)COC1=CC=CC=C1C(=O)CCC1=CC=CC=C1 DMYOHQBLOZMDLP-UHFFFAOYSA-N 0.000 claims 1
- PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 claims 1
- 229920001079 Thiokol (polymer) Polymers 0.000 claims 1
- 238000005530 etching Methods 0.000 claims 1
- 229910052748 manganese Inorganic materials 0.000 claims 1
- 239000011572 manganese Substances 0.000 claims 1
- 229910001919 chlorite Inorganic materials 0.000 abstract 1
- 229910052619 chlorite group Inorganic materials 0.000 abstract 1
- QBWCMBCROVPCKQ-UHFFFAOYSA-N chlorous acid Chemical compound OCl=O QBWCMBCROVPCKQ-UHFFFAOYSA-N 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K13/00—Etching, surface-brightening or pickling compositions
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1617—Purification and regeneration of coating baths
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/18—Pretreatment of the material to be coated
- C23C18/20—Pretreatment of the material to be coated of organic surfaces, e.g. resins
- C23C18/22—Roughening, e.g. by etching
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/46—Regeneration of etching compositions
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0011—Working of insulating substrates or insulating layers
- H05K3/0055—After-treatment, e.g. cleaning or desmearing of holes
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- ing And Chemical Polishing (AREA)
- Weting (AREA)
- Solid-Sorbent Or Filter-Aiding Compositions (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
- Saccharide Compounds (AREA)
- Compounds Of Alkaline-Earth Elements, Aluminum Or Rare-Earth Metals (AREA)
- Processing Of Solid Wastes (AREA)
- Treatment Of Water By Oxidation Or Reduction (AREA)
- Catalysts (AREA)
Claims (1)
1. Verfahren zur Regenerierung der verbrauchten Permanganationen
in einer alkalischen permanganathaltigen Ätzzusammensetzung, bei dem man zu der Zusammensetzung ein Oxidationsmittel
aus der Gruppe, die aus einem anorganischen Bromat, Hypochlorit, Chlorat, Peroxydisulfat, Monopersulfat
und Gemischen hiervon besteht, in einer ausreichenden Menge, um im wesentlichen alles Nichtpermanganat-Mangan
in der Zusammensetzung zu Permanganat zu oxidieren, zusetzt .
2. Verfahren nach Anspruch 1, bei dem das Oxidationsmittel ein anorganisches Peroxydisulfat ist.
3. Verfahren nach Anspruch 1, bei dem das Oxidationsmittel ein anorganisches Monopersulfat ist.
4. Verfahren nach Anspruch 1, bei dem das Oxidationsmittel ein anorganisches Hypochlorit ist.
5. Verfahren nach Anspruch 1, bei dem das Oxidationsmittel ein anorganisches Chlorat ist.
6. Verfahren nach Anspruch 1, bei dem das Oxidationsmittel ein Gemisch eines anorganischen Peroxydisulfats und eines
anorganischen Hypochlorits ist.
7. Verfahren nach Anspruch 1, bei dem das Oxidationsmittel ein Gemisch eines anorganischen Peroxydisulfats und eines
anorganischen Chlorats ist.
8. Verfahren nach Anspruch 1, bei dem das Oxidationsmittel ein Gemisch eines anorganischen Monopersulfats und eines
anorganischen Hypochlorits ist.
1 9.1 Verfahren nach Anspruch 1, bei dem das Oxidationsmittel
1 ein Gemisch eines anorganischen Monopersulfats und eines
anorganischen Chlorats ist.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US74012985A | 1985-05-31 | 1985-05-31 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE204399T1 true DE204399T1 (de) | 1988-04-07 |
Family
ID=24975163
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE198686302335T Pending DE204399T1 (de) | 1985-05-31 | 1986-03-27 | Verfahren zum regenerieren eines permanganataetzbades. |
DE8686302335T Expired - Lifetime DE3669179D1 (de) | 1985-05-31 | 1986-03-27 | Verfahren zum regenerieren eines permanganataetzbades. |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8686302335T Expired - Lifetime DE3669179D1 (de) | 1985-05-31 | 1986-03-27 | Verfahren zum regenerieren eines permanganataetzbades. |
Country Status (14)
Country | Link |
---|---|
EP (1) | EP0204399B1 (de) |
JP (1) | JPS61279688A (de) |
KR (1) | KR900001826B1 (de) |
AT (1) | ATE50602T1 (de) |
AU (1) | AU576072B2 (de) |
BR (1) | BR8602232A (de) |
CA (1) | CA1245137A (de) |
DE (2) | DE204399T1 (de) |
DK (1) | DK255486A (de) |
ES (1) | ES8707312A1 (de) |
IL (1) | IL78266A (de) |
NO (1) | NO861300L (de) |
NZ (1) | NZ215546A (de) |
ZA (1) | ZA862435B (de) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3716013C2 (de) * | 1987-05-11 | 1993-11-18 | Schering Ag | Verfahren zur Regenerierung von Permanganat-Ätzlösungen |
US4853095A (en) * | 1988-03-09 | 1989-08-01 | Macdermid, Incorporated | Conversion of manganese dioxide to permanganate |
JPH01273231A (ja) * | 1988-04-25 | 1989-11-01 | Canon Inc | 情報記録再生用駆動装置 |
DE10025551C2 (de) * | 2000-05-19 | 2002-04-18 | Atotech Deutschland Gmbh | Kathode für die elektrochemische Regenerierung von Permanganat-Ätzlösungen, Verfahren zu deren Herstellung sowie elektrochemische Regeneriervorrichtung |
KR100777441B1 (ko) * | 2006-12-27 | 2007-11-28 | 이강복 | 과망간산 재생기 |
KR101266291B1 (ko) | 2008-12-30 | 2013-05-22 | 제일모직주식회사 | 레지스트 하층막용 조성물 및 이를 이용한 반도체 집적회로디바이스의 제조방법 |
DE102011111294B4 (de) * | 2011-08-26 | 2018-12-20 | Atotech Deutschland Gmbh | Verfahren zur Behandlung von Kunststoffsubstraten und Vorrichtung zur Regeneration einer Behandlungslösung |
CN110438506A (zh) * | 2019-07-08 | 2019-11-12 | 深圳市裕展精密科技有限公司 | 退镀液的再生制备方法 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4592852A (en) * | 1984-06-07 | 1986-06-03 | Enthone, Incorporated | Composition and process for treating plastics with alkaline permanganate solutions |
US4629636A (en) * | 1984-06-07 | 1986-12-16 | Enthone, Incorporated | Process for treating plastics with alkaline permanganate solutions |
-
1986
- 1986-03-20 NZ NZ215546A patent/NZ215546A/xx unknown
- 1986-03-21 CA CA000504750A patent/CA1245137A/en not_active Expired
- 1986-03-25 IL IL78266A patent/IL78266A/xx unknown
- 1986-03-26 AU AU55271/86A patent/AU576072B2/en not_active Ceased
- 1986-03-27 DE DE198686302335T patent/DE204399T1/de active Pending
- 1986-03-27 EP EP86302335A patent/EP0204399B1/de not_active Expired - Lifetime
- 1986-03-27 AT AT86302335T patent/ATE50602T1/de not_active IP Right Cessation
- 1986-03-27 DE DE8686302335T patent/DE3669179D1/de not_active Expired - Lifetime
- 1986-04-02 NO NO861300A patent/NO861300L/no unknown
- 1986-04-02 ZA ZA862435A patent/ZA862435B/xx unknown
- 1986-05-16 BR BR8602232A patent/BR8602232A/pt unknown
- 1986-05-20 JP JP61113846A patent/JPS61279688A/ja active Granted
- 1986-05-30 DK DK255486A patent/DK255486A/da not_active Application Discontinuation
- 1986-05-30 KR KR1019860004263A patent/KR900001826B1/ko not_active IP Right Cessation
- 1986-05-30 ES ES555512A patent/ES8707312A1/es not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS61279688A (ja) | 1986-12-10 |
IL78266A0 (en) | 1986-07-31 |
AU5527186A (en) | 1987-01-15 |
ES8707312A1 (es) | 1987-07-01 |
DE3669179D1 (de) | 1990-04-05 |
KR860009099A (ko) | 1986-12-20 |
ZA862435B (en) | 1986-11-26 |
JPS6352116B2 (de) | 1988-10-18 |
AU576072B2 (en) | 1988-08-11 |
DK255486D0 (da) | 1986-05-30 |
BR8602232A (pt) | 1987-01-13 |
KR900001826B1 (ko) | 1990-03-24 |
ES555512A0 (es) | 1987-07-01 |
IL78266A (en) | 1989-02-28 |
DK255486A (da) | 1986-12-01 |
EP0204399B1 (de) | 1990-02-28 |
NZ215546A (en) | 1988-10-28 |
CA1245137A (en) | 1988-11-22 |
ATE50602T1 (de) | 1990-03-15 |
NO861300L (no) | 1986-12-01 |
EP0204399A1 (de) | 1986-12-10 |
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